公开(公告)号：US20180215608A1

公开(公告)日：2018-08-02

申请号：US15879511

申请日：2018-01-25

Applicant: Masayuki FUJISHIMA ,  Hidetaka NOGUCHI ,  Hidenori KATO ,  Junichi AZUMI ,  Masashi SUEMATSU ,  Shuichi SUZUKI

Inventor： Masayuki FUJISHIMA ,  Hidetaka NOGUCHI ,  Hidenori KATO ,  Junichi AZUMI ,  Masashi SUEMATSU ,  Shuichi SUZUKI

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B3/0083 ,  B81B2201/045 ,  G01J3/26 ,  G02B26/0841 ,  G02B26/0858

Abstract: A MEMS device includes a plurality of ribbon elements, a securing portion, and a plurality of connecting portions. The securing portion supports the plurality of ribbon elements. The plurality of connecting portions are disposed on ends of each of the plurality of ribbon elements and connect each of the plurality of ribbon elements to the securing portion. An angle formed by a longitudinal extending line of each of the plurality of ribbon elements and each of the plurality of connecting portions is greater than 0° in a planar direction of each of the plurality of ribbon elements.

公开(公告)号：US09890037B2

公开(公告)日：2018-02-13

申请号：US15502554

申请日：2015-06-29

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi Kanamaru ,  Masahide Hayashi ,  Masashi Yura ,  Heewon Jeong

IPC: B81B7/00 ,  G01C19/574

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C99/0045 ,  G01C19/574 ,  G01P15/08 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

公开(公告)号：US09864189B2

公开(公告)日：2018-01-09

申请号：US14330452

申请日：2014-07-14

Applicant: FUJIFILM Corporation

Inventor： Takayuki Naono

IPC: G02B26/08 ,  H01L41/187 ,  B81B7/00 ,  G02B26/10 ,  B81B7/02 ,  B81B3/00 ,  H01L41/09

CPC classification number: G02B26/0858 ,  B81B3/0043 ,  B81B7/008 ,  B81B7/02 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/04 ,  G02B26/105 ,  H01L41/0933 ,  H01L41/1876

Abstract: In a mirror drive device, a first and second actuator sections are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. Division of an upper and lower electrodes of each of the first and second actuator sections is performed correspondingly to stress distribution of principal stresses in a piezoelectric body in resonant mode vibration, and a piezoelectric body portion corresponding to positions of a first and third upper electrode sections, and a piezoelectric body portion corresponding to positions of a second and fourth upper electrode sections have stresses in opposite directions to each other. Division of the lower electrodes is performed similar to the upper electrodes, and drive voltages having the same phase can be respectively applied to the upper and lower electrode sections of the piezoelectric body portions that are different due to a division arrangement.

公开(公告)号：US20170183217A1

公开(公告)日：2017-06-29

申请号：US15300212

申请日：2015-03-24

Applicant: Agiltron, Inc.

Inventor： Luzhong Yin ,  Jing Zhao ,  Guanghai Jin

IPC: B81B3/00 ,  G02B26/02 ,  H02N10/00

CPC classification number: B81B3/0037 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2203/0384 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/023 ,  G02B26/04 ,  H02N2/043 ,  H02N10/00

Abstract: The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, and an end of the second beam coupled to a motion actuator; and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

公开(公告)号：US20170168288A1

公开(公告)日：2017-06-15

申请号：US14968542

申请日：2015-12-14

Applicant: INTEL CORPORATION

Inventor： ORPHEE CUGAT ,  NICOLAS ABELE

IPC: G02B26/08 ,  H02K33/18 ,  B81B3/00

CPC classification number: G02B26/085 ,  B81B3/0021 ,  B81B2201/045 ,  B81B2203/0181 ,  G02B26/023 ,  H02K26/00 ,  H02K33/18

Abstract: The invention relates to an electromagnetically actuated microshutter comprising: a moveable plate that can rotate about an axis, connected to a stationary frame by two arms aligned on both sides of the plate to said axis, and comprising on its periphery a conductive loop and below the assembly formed by the stationary frame and the moveable plate, a group of magnets having distinct magnetic orientations, arranged in such a manner so as to create, with respect to the moveable plate, a lateral magnetic field, in the plane of the frame, oblique in relation to the axis of rotation.

公开(公告)号：US09134530B2

公开(公告)日：2015-09-15

申请号：US13800418

申请日：2013-03-13

Applicant: Pixtronix, Inc.

Inventor： Javier Villarreal ,  Timothy Brosnihan ,  Mark B. Andersson ,  Edward Buckley ,  Eugene Fike

IPC: G09G5/00 ,  H05K13/00 ,  G02B26/02 ,  B81B3/00

CPC classification number: G02B26/02 ,  B81B3/0054 ,  B81B2201/045 ,  G02B26/023 ,  G09G5/003

Abstract: This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes shutters having asymmetric light obstructing portions extending out from opposing sides of a shutter aperture along an axis of motion of the shutter. Actuators move the shutters laterally along the axis of motion to move the shutter between fully closed, partially open, and fully open states to modulate light, thereby forming an image.

Abstract translation: 本公开提供了用于调制光以在显示器上形成图像的系统，方法和装置，以及制造这种装置的方法。 显示装置包括具有不对称光阻挡部分的快门，该光束阻挡部分沿着快门的运动轴线从快门孔的相对侧延伸出来。 致动器沿着运动轴线横向移动百叶窗，以在完全关闭，部分打开和完全打开状态之间移动快门以调制光，从而形成图像。

公开(公告)号：US08432661B2

公开(公告)日：2013-04-30

申请号：US13047644

申请日：2011-03-14

Applicant: Takahisa Kato ,  Shinichiro Watanabe

Inventor： Takahisa Kato ,  Shinichiro Watanabe

IPC: H01G7/00

CPC classification number: G02B26/0841 ,  B81B7/0048 ,  B81B2201/042 ,  B81B2201/045 ,  B81C2203/0118 ,  Y10T29/49837

Abstract: A microstructural body includes a substrate such as an electrode substrate, a support portion, one post that fixes the support portion to the substrate, a frame-shaped movable portion provided around outer periphery of the support portion, and an elastic support portion that elastically connects the movable portion and the support portion. The elastic support portion supports the frame-shaped movable portion such that the movable portion is movable relative to the support portion. The elastic support portion includes torsion springs and an elastically deformable connecting portion.

Abstract translation: 微结构体包括诸如电极基板的基板，支撑部分，将支撑部分固定到基板的一个支柱，设置在支撑部分的外周周围的框架形可动部分和弹性连接的弹性支撑部分 可动部和支撑部。 弹性支撑部支撑框状可动部，使得可动部相对于支撑部移动。 弹性支撑部分包括扭转弹簧和可弹性变形的连接部分。

公开(公告)号：US20120326179A1

公开(公告)日：2012-12-27

申请号：US13526568

申请日：2012-06-19

Applicant: Takuo KAITOH ,  Takeshi KURIYAGAWA ,  Ryou SAKATA ,  Osamu KARIKOME ,  Timothy J. BROSNIHAN

Inventor： Takuo KAITOH ,  Takeshi KURIYAGAWA ,  Ryou SAKATA ,  Osamu KARIKOME ,  Timothy J. BROSNIHAN

IPC: H01L27/15 ,  H01L33/58

CPC classification number: G02B26/0841 ,  B81B7/007 ,  B81B2201/045 ,  B81C2201/0132 ,  B81C2201/016

Abstract: The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.

Abstract translation: MEMS快门包括具有开口部分的快门，连接到快门的第一弹簧，连接到第一弹簧的第一锚杆，连接到第二弹簧的第二弹簧和第二锚固件，在挡板的表面上的绝缘膜 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在垂直于基板表面的方向上，并且所述绝缘膜不存在于所述多个端子的表面上，并且所述表面 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在与所述基板的表面平行的方向上以及在面向所述基板的所述一侧的相对侧上。

公开(公告)号：US20120300283A1

公开(公告)日：2012-11-29

申请号：US13478147

申请日：2012-05-23

Applicant: Jun FUJIYOSHI ,  Yasukazu Kimura

Inventor： Jun FUJIYOSHI ,  Yasukazu Kimura

IPC: G02B26/00 ,  H01L33/58

CPC classification number: B81C1/00182 ,  B81B2201/045 ,  B81C2203/054 ,  G02B26/02

Abstract: A cut which penetrates a resin layer is formed in the resin layer such that the cut surrounds a third upper surface. A film is formed such that the film covers the whole resin layer except for a bottom surface of the resin layer inside the cut and at least a portion of the resin layer is exposed outside the cut. The resin layer which is wholly covered with the film is left inside the cut, and the whole resin layer continuously formed with a surface exposed from the film is removed outside the cut. A bump is formed by the resin layer and the film inside the cut, and a shutter and at least a portion of a drive part are formed by the film outside the cut in a state where these parts are floated from a first substrate.

Abstract translation: 在树脂层中形成穿过树脂层的切口，使得切口围绕第三上表面。 形成膜，使得膜覆盖除了切口内部的树脂层的底表面以外的整个树脂层，并且至少一部分树脂层露出切口外。 完全被膜覆盖的树脂层留在切口内，并且在切割外面除去连续形成有从膜暴露的表面的整个树脂层。 通过树脂层和切口内的膜形成凸块，并且在这些部件从第一基板浮起的状态下，通过切口外部的薄膜形成活门和驱动部分的至少一部分。

公开(公告)号：US20120208343A1

公开(公告)日：2012-08-16

申请号：US13456990

申请日：2012-04-26

Applicant: Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L21/311

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一半导体材料层的第一半导体晶片和配置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。