Electrical component and method of manufacturing the same
    134.
    发明授权
    Electrical component and method of manufacturing the same 有权
    电气元件及其制造方法

    公开(公告)号:US08921997B2

    公开(公告)日:2014-12-30

    申请号:US13215457

    申请日:2011-08-23

    摘要: According to one embodiment, an electrical component comprises a substrate, an element, a first layer, and a second layer. The element is formed on the substrate. The first layer forms a cavity accommodating the element on the substrate and includes through holes. The second layer is formed on the first layer and seals the through holes. The first layer includes the first film formed on the lower side and the second film which is formed on the first film and has a lower coefficient of thermal expansion than the first film.

    摘要翻译: 根据一个实施例,电气部件包括衬底,元件,第一层和第二层。 元件形成在基板上。 第一层形成容纳元件的空腔,并且包括通孔。 第二层形成在第一层上并密封通孔。 第一层包括在下侧形成的第一膜和形成在第一膜上的第二膜,并且具有比第一膜更低的热膨胀系数。