公开(公告)号：US20150361997A1

公开(公告)日：2015-12-17

申请号：US14764824

申请日：2014-09-26

Applicant: INSTITUTE OF METAL RESEARCH CHINESE ACADEMY OF SCIENCES

Inventor： Xinglong YE ,  Lingzhi LIU ,  Haijun JIN

IPC: F15B15/08

CPC classification number: F15B15/08 ,  B81B3/0032 ,  B81B2201/038 ,  Y10T29/49828

Abstract: The present invention discloses a liquid-driven nano-porous actuator and the application thereof, and belongs to the field of nano material actuators. According to the present invention, by changing the content of the liquid in the nano-porous material, the interface between the surface liquid of the nano-porous material and air is exchanged between flat and curved states, so as to change the compressive stress acting on the nano-porous material from the surface tension of the liquid and change the elastic deformation of the nano-porous material, thus driving the nano-porous material to contract and expand in a reversible manner and further realizing driving performance. The actuator features simple and easy implementation and environmental-friendly effect without the need of external physical excitation signals (light, magnetic field, electricity or heat), complicated external excitation process, conversion of electric, magnetic, and light energy, chemical or electrochemical process, or toxic, harmful or corrosive chemical substances, and it is especially suitable for bio-robot, medical and aerospace fields.

Abstract translation: 本发明公开了一种液体驱动的纳米多孔致动器及其应用，属于纳米材料致动器领域。 根据本发明，通过改变纳米多孔材料中的液体的含量，纳米多孔材料的表面液体与空气之间的界面在平坦和弯曲状态之间被交换，以便改变作用的压应力 在纳米多孔材料上由液体的表面张力改变纳米多孔材料的弹性变形，从而驱动纳米多孔材料以可逆方式收缩膨胀，进一步实现驱动性能。 执行器具有简单实施和环保效果，无需外部物理激励信号（光，磁场，电或热），复杂的外部激励过程，电，磁和光能的转换，化学或电化学过程 ，或有毒，有害或腐蚀性化学物质，特别适用于生物机器人，医疗和航空航天领域。

公开(公告)号：US20150315012A1

公开(公告)日：2015-11-05

申请号：US14647529

申请日：2012-11-27

Applicant: CNR - CONSIGLIO NAZIONALE DELLE RICERCHE ,  ISTITUTO ITALIANO DI TECNOLOGIA

Inventor： Diederik Sybolt WIERSMA ,  Camilla PARMEGGIANI ,  Jean-Christophe GOMEZ-LAVOCAT ,  Kevin VYNCK

IPC: B81B3/00 ,  G02B26/00 ,  F03G6/00 ,  G02F1/1333

CPC classification number: B81B3/0029 ,  B81B2201/038 ,  F03G6/00 ,  F03G7/005 ,  G02B26/004 ,  G02F1/133362 ,  Y02E10/46 ,  Y10S901/01

Abstract: A liquid crystal elastomer actuator to move in a fluid is described herein. The actuator includes a body with dimensions between 100 nm and 800 μm having a low Reynolds number. The body includes a first and a second spatially separated volume, each comprising a liquid crystal elastomer. The first volume is doped with a first photoactive doping substance to absorb electromagnetic radiation at a first wavelength and the second volume is doped with a second photoactive doping substance to absorb electromagnetic radiation at a second wavelength. The first and second volumes change shape as a consequence of light absorption at the first or second wavelength, defining a first and a second joint. A first absorbance of the first volume at a given wavelength is different than a second absorbance of the second volume at a given wavelength, the first and second absorbance are measured in the same time interval.

Abstract translation: 这里描述了在流体中移动的液晶弹性体致动器。 致动器包括具有低雷诺数的尺寸在100nm和800μm之间的主体。 本体包括第一和第二空间分离的体积，每个体积包含液晶弹性体。 第一体积掺杂有第一光活性掺杂物质以吸收第一波长的电磁辐射，并且第二体积掺杂有第二光活性掺杂物质以吸收第二波长的电磁辐射。 第一和第二体积由于在第一或第二波长处的光吸收的结果而改变形状，限定了第一和第二接头。 在给定波长处的第一体积的第一吸光度与给定波长处的第二体积的第二吸光度不同，在相同的时间间隔中测量第一和第二吸光度。

公开(公告)号：US08842353B2

公开(公告)日：2014-09-23

申请号：US13047670

申请日：2011-03-14

Applicant: Takahisa Kato

Inventor： Takahisa Kato

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0037 ,  B81B2201/038 ,  B81B2203/0163 ,  B81B2203/053 ,  G02B26/085 ,  Y10S359/904

Abstract: A microstructure includes a substrate, a fixed supporting portion fixed to the substrate, a first movable portion, a second movable portion enhancing the rigidity of the first movable portion, and an elastic supporting portion elastically interconnecting the first movable portion and the fixed supporting portion. The second movable portion is secured to the first movable portion with a gap interposed therebetween and in such a manner as to cover the elastic supporting portion and the fixed supporting portion. The first movable portion and the second movable portion are elastically supported by the elastic supporting portion in such a manner as to be displaceable together relative to the fixed supporting portion.

Abstract translation: 微结构包括基板，固定在基板上的固定支撑部分，第一可移动部分，增强第一可动部分的刚性的第二可移动部分和弹性地互连第一可移动部分和固定支撑部分的弹性支撑部分。 第二可移动部分以间隙插入第一可移动部分，并且以覆盖弹性支撑部分和固定支撑部分的方式固定。 第一可动部和第二可动部由弹性支撑部弹性地支撑，以能够相对于固定支撑部一起移位。

公开(公告)号：US20140264676A1

公开(公告)日：2014-09-18

申请号：US13796496

申请日：2013-03-12

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： William J. Gallagher ,  Eugene J. O'Sullivan ,  Naigang Wang

IPC: H01L43/12 ,  H01L43/10

CPC classification number: B81C1/00373 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2203/0118 ,  B81C1/00142 ,  B81C1/00706 ,  B81C2201/0188 ,  H01F41/046 ,  H01L28/10 ,  H01L43/10 ,  H01L43/12 ,  H01L43/14

Abstract: A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.

Abstract translation: 公开了一种微机电装置及其制造方法。 在硅衬底上形成牺牲层。 在牺牲层的顶表面上形成金属层。 将软磁性材料无电沉积在金属层上以制造微机电装置。 除去牺牲层以产生与硅衬底分离的金属束。

公开(公告)号：US08686818B2

公开(公告)日：2014-04-01

申请号：US13060662

申请日：2010-09-17

Applicant: Bernard Dieny ,  Heélène Joisten ,  Philippe Sabon

Inventor： Bernard Dieny ,  Heélène Joisten ,  Philippe Sabon

IPC: H01F7/00 ,  H01F1/00

CPC classification number: B81C1/0019 ,  A61B1/00156 ,  B81B2201/038 ,  B81B2201/06 ,  B81C2201/038

Abstract: A microparticle includes an oblong flexible tail able to propel the microparticle in a solution along a trajectory using beats transverse to the trajectory, the tail including at least one magnetic element such that the magnetic element causes beats of the tail under the action of an external alternating magnetic field non-collinear with the trajectory and a head mechanically connected to a proximal end of the tail. The microparticle includes at least one layer of material formed from one piece and including the tail and the head, the dimensions and/or shape of the head being selected such that the beats of the proximal end of the tail are limited with respect to the beats of the distal end of the tail and such that the head does not perform a complete revolution around an axis parallel to the trajectory under the effect of the external alternating magnetic field.

Abstract translation: 微粒包括长方形柔性尾部，其能够使用横向于轨迹的搏动沿着轨迹将微粒推进到溶液中，尾部包括至少一个磁性元件，使得磁性元件在外部交替作用下引起尾巴的打击 与轨迹非共线的磁场和机械连接到尾端近端的磁头。 微粒包括至少一层材料，其由一个部件形成并包括尾部和头部，头部的尺寸和/或形状被选择为使得尾部的近端的节拍相对于节拍被限制 并且使得头部在外部交变磁场的作用下不围绕平行于轨迹的轴线执行完整的旋转。

公开(公告)号：US08552464B2

公开(公告)日：2013-10-08

申请号：US12422280

申请日：2009-04-12

Applicant: Long-Sheng Fan

Inventor： Long-Sheng Fan

IPC: H01L23/00

CPC classification number: B81C1/00246 ,  B81B2201/0292 ,  B81B2201/038 ,  B81B2203/056 ,  B81C2203/0714 ,  B81C2203/0742 ,  H01L27/0617

Abstract: The present invention addresses the aims and issues of making multi layer microstructures including “metal-shell-oxide-core” structures and “oxide-shell-metal-core” structures, and mechanically constrained structures and the constraining structures using CMOS (complimentary metal-oxide-semiconductor transistors) materials and layers processed during the standard CMOS process and later released into constrained and constraining structures by etching away those CMOS materials used as sacrificial materials. The combinations of possible constrained structures and methods of fabrication are described.

Abstract translation: 本发明解决了制造多层微观结构的目的和问题，包括“金属 - 壳 - 氧化物 - 氧化物 - 核心”结构和“氧化物 - 壳 - 金属 - 芯”结构，机械约束结构和使用CMOS（互补金属 - 氧化物半导体晶体管）在标准CMOS工艺期间处理的材料和层，然后通过蚀刻掉用作牺牲材料的那些CMOS材料而释放到约束和约束结构中。 描述了可能的约束结构和制造方法的组合。

公开(公告)号：US20130193410A1

公开(公告)日：2013-08-01

申请号：US13359647

申请日：2012-01-27

Applicant: Wenjuan Zhu

Inventor： Wenjuan Zhu

IPC: H01L29/775 ,  H01L21/335 ,  B82Y99/00 ,  B82Y40/00

CPC classification number: H01L29/78606 ,  B81B2201/038 ,  B81B2203/0127 ,  B81C1/00158 ,  B82Y30/00 ,  H01L29/1606 ,  H01L29/4908 ,  H01L29/66045 ,  H01L29/78603 ,  H01L29/78648 ,  H01L29/78684

Abstract: Semiconductor nano-devices, such as nano-probe and nano-knife devices, which are constructed using graphene films that are suspended between open cavities of a semiconductor structure. The suspended graphene films serve as electro-mechanical membranes that can be made very thin, from one or few atoms in thickness, to greatly improve the sensitivity and reliability of semiconductor nano-probe and nano-knife devices.

Abstract translation: 使用悬浮在半导体结构的开放腔之间的石墨烯膜构造的半导体纳米器件，例如纳米探针和纳米刀装置。 悬浮的石墨烯膜用作可以从一个或几个原子厚度制成非常薄的电子机械膜，以大大提高半导体纳米探针和纳米刀装置的灵敏度和可靠性。

公开(公告)号：US08437061B2

公开(公告)日：2013-05-07

申请号：US12673238

申请日：2008-08-20

Applicant: Jirou Terada ,  Shinsuke Nakazono ,  Shigeo Furukawa

Inventor： Jirou Terada ,  Shinsuke Nakazono ,  Shigeo Furukawa

IPC: G02B26/08 ,  H01L41/00

CPC classification number: G02B26/0858 ,  B81B3/0086 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/058 ,  G03B21/00 ,  H01L41/042 ,  H01L41/0953 ,  H01L41/0966 ,  H04N9/3129

Abstract: A first oscillating portion is provided with a first piezoelectric element having a first drive electrode. A second oscillating portion has a central axis different from that of the first oscillating portion and is provided with a second piezoelectric element having a second drive electrode. The first drive electrode and the second drive electrode are connected together.

Abstract translation: 第一振荡部分设置有具有第一驱动电极的第一压电元件。 第二振荡部分具有不同于第一振荡部分的中心轴线，并且设置有具有第二驱动电极的第二压电元件。 第一驱动电极和第二驱动电极连接在一起。

公开(公告)号：US20130077948A1

公开(公告)日：2013-03-28

申请号：US13247938

申请日：2011-09-28

Applicant: Roman C. Gutierrez

Inventor： Roman C. Gutierrez

IPC: G03B3/10 ,  B23K31/02 ,  H01R4/02

CPC classification number: H05K1/181 ,  B81B7/0054 ,  B81B2201/038 ,  B81B2201/047 ,  B81B2203/0163 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2207/07 ,  B81C3/008

Abstract: A silicon MEMS device can have at least one solder contact formed thereupon. The silicon MEMS device can be configured to be mounted to a circuit board via the solder contact(s). The silicon MEMS device can be configured to be electrically connected to the circuit board via the solder contact(s).

Abstract translation: 硅MEMS器件可以具有在其上形成的至少一个焊料接触。 硅MEMS器件可以被配置为经由焊料接触件安装到电路板。 硅MEMS器件可以被配置为经由焊料触点电连接到电路板。

公开(公告)号：US20120295058A1

公开(公告)日：2012-11-22

申请号：US13474532

申请日：2012-05-17

Applicant: Timothy J. Brosnihan ,  Mark B. Andersson ,  Eugene E. Fike, III ,  Joyce Wu ,  J. Lodewyk Steyn

Inventor： Timothy J. Brosnihan ,  Mark B. Andersson ,  Eugene E. Fike, III ,  Joyce Wu ,  J. Lodewyk Steyn

IPC: G02B26/02 ,  B32B3/22 ,  C23C16/56 ,  G02B5/22

CPC classification number: G02B26/02 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/047 ,  B81C1/00 ,  B81C1/00039 ,  B81C1/00261 ,  B81C2203/054 ,  G09G3/3413 ,  G09G3/3433 ,  G09G3/3466 ,  G09G2320/041 ,  G09G2360/144 ,  H01L23/544 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/73 ,  H01L24/81 ,  H01L24/83 ,  H01L24/97 ,  H01L2223/54426 ,  H01L2224/1132 ,  H01L2224/114 ,  H01L2224/11462 ,  H01L2224/131 ,  H01L2224/16238 ,  H01L2224/2612 ,  H01L2224/29011 ,  H01L2224/32238 ,  H01L2224/73201 ,  H01L2224/81121 ,  H01L2224/81192 ,  H01L2224/81815 ,  H01L2224/83007 ,  H01L2224/83121 ,  H01L2924/01029 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12043 ,  H01L2924/12044 ,  H01L2924/1461 ,  H01L2924/15788 ,  Y10T428/24157 ,  Y10T428/24744 ,  H01L2924/014 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.

Abstract translation: 显示装置包括第一基板，由耦合到第一基板的结构材料形成的多个微机电系统（MEMS）光调制器和与第一基板分离的第二基板。 多个间隔件从第一基板延伸以使第二基板保持离开多个光调制器的最小距离。 间隔物包括具有与第一基底接触的表面的第一聚合物层，包封第一聚合物层的第二聚合物层和包封第二聚合物层的结构材料层。 间隔件可以用作流体屏障并且被配置为围绕显示装置中的多于一个但是不到所有的MEMS光调制器。