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    Micro-electromechanical resonance device with periodic structure
    11.
    发明授权
    Micro-electromechanical resonance device with periodic structure 有权
    具有周期性结构的微机电共振装置

    公开(公告)号：US08212324B2

    公开(公告)日：2012-07-03

    申请号：US12419125

    申请日：2009-04-06

    Applicant: Gregory Caruyer ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

    Inventor： Gregory Caruyer ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

    IPC: H01L29/84 ,  H01L21/00

    CPC classification number: H03H9/02338 ,  H03H9/02433 ,  H03H9/2436 ,  H03H9/2463

    Abstract: A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.

    Abstract translation: 微机电系统谐振装置包括连接到具有输入频率的交流电源的基板和输入电极。 该装置还包括输出电极和连接到基板的至少一个锚定结构。 该装置还包括通过至少一个接头连接到锚固结构的振动结构，具有自然的声共振频率。 在输入电极的作用下，在输入电极的作用下的振动在输出电极上产生交流电流，其中输出频率等于固有频率。 振动结构和/或锚定结构包括周期性结构。 周期性结构至少包括彼此不同的第一和第二区，并且分别对应于第一和第二声学传播特性。

    MICRO-ELECTROMECHANICAL RESONANCE DEVICE WITH PERIODIC STRUCTURE
    13.
    发明申请
    MICRO-ELECTROMECHANICAL RESONANCE DEVICE WITH PERIODIC STRUCTURE 有权
    具有周期结构的微机电谐振器件

    公开(公告)号：US20090289314A1

    公开(公告)日：2009-11-26

    申请号：US12419125

    申请日：2009-04-06

    Applicant: Gregory CARUYER ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

    Inventor： Gregory CARUYER ,  Karim Segueni ,  Pascal Ancey ,  Bertrand Dubus

    IPC: H01L29/84 ,  H01L21/30

    CPC classification number: H03H9/02338 ,  H03H9/02433 ,  H03H9/2436 ,  H03H9/2463

    Abstract: A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.

    Abstract translation: 微机电系统谐振装置包括连接到具有输入频率的交流电源的基板和输入电极。 该装置还包括输出电极和连接到基板的至少一个锚定结构。 该装置还包括通过至少一个接头连接到锚固结构的振动结构，具有自然的声共振频率。 在输入电极的作用下，在输入电极的作用下的振动在输出电极上产生交流电流，其中输出频率等于固有频率。 振动结构和/或锚定结构包括周期性结构。 周期性结构至少包括彼此不同的第一和第二区，并且分别对应于第一和第二声学传播特性。

    Switchable inductance
    15.
    发明授权
    Switchable inductance 有权
    可切换电感

    公开(公告)号：US07259649B2

    公开(公告)日：2007-08-21

    申请号：US10903896

    申请日：2004-07-30

    Applicant: Pascal Ancey ,  Daniel Saias

    Inventor： Pascal Ancey ,  Daniel Saias

    IPC: H01F5/00

    CPC classification number: H01F17/0006 ,  H01F21/12 ,  H01F2021/125 ,  H01H61/04 ,  H01H2061/006 ,  H01L23/5227 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: A switchable inductance that can be formed in an integrated circuit, including a spiral interrupted between two first points connected to two terminals via two metallizations running one above the other, one of the two metallizations being deformable; a hollowing between the two metallizations; and a switching device capable of deforming the deformable metallization to separate or to put in contact said two metallizations.

    Abstract translation: 可以形成在集成电路中的可切换电感，包括通过两个金属化连接到两个端子的两个第一点之间中断的螺旋，一个在另一个之上运行，两个金属化之一可变形; 两个金属化之间的空心; 以及能够使可变形金属化变形以分离或接触所述两个金属化的开关装置。

    Electromechanical resonator and method for fabricating such a resonator
    16.
    发明授权
    Electromechanical resonator and method for fabricating such a resonator 有权
    机电谐振器及其制造方法

    公开(公告)号：US07196451B2

    公开(公告)日：2007-03-27

    申请号：US10895616

    申请日：2004-07-21

    Applicant: Stephane Monfray ,  Pascal Ancey ,  Thomas Skotnicki ,  Karim Segueni

    Inventor： Stephane Monfray ,  Pascal Ancey ,  Thomas Skotnicki ,  Karim Segueni

    IPC: H02N1/00

    CPC classification number: H03H9/2405 ,  H03H2009/02511

    Abstract: An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).

    Abstract translation: 机电谐振器包括设置有由绝缘区限定的有源区（ZA）的单晶硅衬底（S），由绝缘区上的至少一个自由端锚定的振动束（10），并且包括单晶硅衬底 硅振动中心部分（12）和布置在梁的上方并且承载在活动区上的控制电极（E）。 光束的中心部分（12）与有源区（ZA）和控制电极（E）分离。

    Electronic component having a resonator and fabrication process
    17.
    发明授权
    Electronic component having a resonator and fabrication process 有权
    具有谐振器和制造工艺的电子部件

    公开(公告)号：US07180224B2

    公开(公告)日：2007-02-20

    申请号：US10815472

    申请日：2004-04-01

    Applicant: Guillaume Bouche ,  Nick Smears ,  Pascal Ancey ,  Gregory Caruyer

    Inventor： Guillaume Bouche ,  Nick Smears ,  Pascal Ancey ,  Gregory Caruyer

    IPC: H01L41/08

    CPC classification number: H03H9/586 ,  H03H2003/0428 ,  H03H2003/0435 ,  H03H2003/0471

    Abstract: An electronic component (1) includes a substrate (2) and at least two piezoelectric resonators (3, 4) each having an active element (6, 9), a lower electrode (5, 8) and an upper electrode (7, 10). The lower electrode (5) of the first resonator (3) is made of a material that is different from that of the lower electrode (8) of the second resonator (4) such that the resonators exhibit different resonance frequencies.

    Abstract translation: 电子部件（1）包括基板（2）和至少两个各自具有有源元件（6,9），下电极（5,8）和上电极（7,10）的压电谐振器（3,4） ）。 第一谐振器（3）的下电极（5）由不同于第二谐振器（4）的下电极（8）的材料制成，使得谐振器表现出不同的谐振频率。

    MOS transistor with a deformable gate
    19.
    发明申请
    MOS transistor with a deformable gate 有权
    具有可变形栅极的MOS晶体管

    公开(公告)号：US20060054984A1

    公开(公告)日：2006-03-16

    申请号：US11227624

    申请日：2005-09-15

    Applicant: Pascal Ancey ,  Nicolas Abele ,  Fabrice Casset

    Inventor： Pascal Ancey ,  Nicolas Abele ,  Fabrice Casset

    IPC: H01L29/84

    CPC classification number: G01P15/124 ,  B81B3/0035 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2203/0109 ,  G01L1/005 ,  G01L9/0098 ,  H03B5/12 ,  H03B5/1237 ,  H03B5/30

    Abstract: A MOS transistor with a deformable gate formed in a semiconductor substrate, including source and drain areas separated by a channel area extending in a first direction from the source to the drain and in a second direction perpendicular to the first one, a conductive gate beam placed at least above the channel area extending in the second direction between bearing points placed on the substrate on each side of the channel area, and such that the surface of the channel area is hollow and has a shape similar to that of the gate beam when said beam is in maximum deflection towards the channel area.

    Abstract translation: 一种MOS晶体管，其具有形成在半导体衬底中的可变形栅极，包括源极和漏极区域，所述源极区域和漏极区域由沿着从源极到漏极的第一方向延伸的沟道区域和与第一方向垂直的第二方向分开， 至少在所述通道区域上方，在所述通道区域的每一侧上放置在所述基板上的支承点之间沿所述第二方向延伸，并且使得所述通道区域的表面是中空的，并且具有与所述栅极梁的形状类似的形状 光束朝向通道区域的最大偏转。

    Support and decoupling structure for an acoustic resonator, acoustic resonator and corresponding integrated circuit
    20.
    发明申请
    Support and decoupling structure for an acoustic resonator, acoustic resonator and corresponding integrated circuit 审中-公开
    声谐振器，声谐振器和相应的集成电路的支持和去耦结构

    公开(公告)号：US20050023931A1

    公开(公告)日：2005-02-03

    申请号：US10868383

    申请日：2004-06-15

    Applicant: Guillaume Bouche ,  Gregory Caruyer ,  Pascal Ancey

    Inventor： Guillaume Bouche ,  Gregory Caruyer ,  Pascal Ancey

    IPC: H01L23/14 ,  H01L27/20 ,  H01L41/04 ,  H03H9/05 ,  H03H9/17 ,  H03H9/58

    CPC classification number: H03H9/175

    Abstract: An acoustic resonator assembly includes a layer of high-acoustic-impedance material and a layer of low-acoustic-impedance material made of a low-electrical-permittivity material. This assembly may support the resonator over an interconnect layer or act as a decoupling assembly between two active elements of the resonator. The assembly may alternatively include three low-acoustic impedance layers. Alternatively, the assembly may include three acoustic impedance layers wherein two of the layers are low acoustic impedance layers and the third layer has a higher acoustic impedance than the first two or alternatively is a high-acoustic impedance layer.

    Abstract translation: 声谐振器组件包括高声阻抗材料层和由低电容率材料制成的低声阻抗材料层。 该组件可以在互连层上支撑谐振器或者用作谐振器的两个有源元件之间的去耦组件。 组件可以替代地包括三个低声阻抗层。 或者，组件可以包括三个声阻抗层，其中两个层是低声阻抗层，并且第三层具有比前两个更高的声阻抗，或者备选地是高声阻抗层。

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