摘要:
In a semiconductor device module of this invention, on a metal base is formed a metal layer, on which an insulating substrate is formed. On the insulating substrate is formed conducting film patterns, to which a power device and a control device for controlling the power device are electrically connected. The metal layer exists only between the insulating substrate and the base under the power device, whereas a space is provided between the insulating substrate and the base under the control device, and is filled with air.
摘要:
An insulating substrate has a U-shaped conductive layer which produces a magnetic field when a current flows therethrough as indicated by arrows. The substrate also includes a conductive layer on which a power semiconductor element is mounted through its main electrode. A current detector such as Hall effect elements is located inside the U-shaped conductive layer. When a load current flows through the semiconductor element, it flows through the conductive layer to produce the magnetic field since the other main electrode of the semiconductor element is electrically connected to one end of the conductive member through a metal wire. Accordingly, the load current flowing through the semiconductor element will be effectively detected by the current detector without connecting a resistor or current transformer to external terminals of a power semiconductor device, thereby providing a composite semiconductor device with a compact structure used for inverters for driving three-phase motors, etc.
摘要:
An IGBT comprises trenches arranged in strips, first emitter diffusion layers formed so as to extend in a direction intersecting the trenches, and contact regions formed to have a rectangular shape. The portions of the contact regions on the first emitter diffusion layers have a smaller width than the other portions, the width extending in the direction intersecting the trenches. This configuration allows for an increase in the emitter ballast resistance of the emitter diffusion layers, resulting in enhanced resistance to electrical breakdown due to short circuit.
摘要:
The present invention is a power device includes, a first conductive type semiconductor substrate, a second conductive type base region formed on a surface of the semiconductor substrate, a second conductive type collector region formed on a rear surface of the semiconductor substrate, a first conductive type emitter region formed on a surface of the base region, a trench gate formed via a gate insulating film in a first trench groove formed in the base region so as to penetrate the emitter region, a dent formed in the base region in proximity to the emitter region, a second conductive type contact layer formed on an inner wall of the dent, having a higher dopant density than that of the base region, a dummy trench formed via a dummy trench insulating film in a second trench groove formed at a bottom of the dent, and an emitter electrode electrically connected to the emitter region, the contact layer and the dummy trench, wherein the trench gate and the dummy trench reach the semiconductor substrate.
摘要:
A method for manufacturing a semiconductor device according to the present invention has a step of forming a plurality of MOSFETs each having a channel of a first conductivity type in a stripe on the first major surface of a wafer; a step of implanting an impurity of a first conductivity type into the second major surface of the wafer, and performing a laser annealing treatment in a stripe leaving equidistant gaps, to form a buffer layer that has been activated in a stripe; a step of implanting an impurity of a second conductivity type into the second major surface of the substrate after forming the buffer layer, and performing a laser annealing treatment on the entire surface of the second major surface, to form a collector layer, and to activate the buffer layer; and a step of forming an emitter electrode on the first major surface, and forming a collector electrode on the second major surface.
摘要:
A method of manufacturing a low power dissipation semiconductor power device is provided which is easy to perform and suitable for mass production. When a first and second conductivity-type regions are formed on a semiconductor substrate which is selectively irradiated by impurity ions, an excellent super junction is formed by controlling the ion acceleration energy and the width of each irradiated region so that the first and second conductivity-type regions may have a uniform impurity distribution and a uniform width along the direction of irradiation. Another method of manufacturing a low power dissipation semiconductor power device having an excellent super junction is provided which selectively irradiates a collimated neutron beam onto a P+ silicon ingot and forms an N+ region that has a uniform impurity distribution and a uniform width along the direction of irradiation in the P+ silicon ingot.
摘要:
An IGBT comprises trenches arranged in strips, first emitter diffusion layers formed so as to extend in a direction intersecting the trenches, and contact regions formed to have a rectangular shape. The portions of the contact regions on the first emitter diffusion layers have a smaller width than the other portions, the width extending in the direction intersecting the trenches. This configuration allows for an increase in the emitter ballast resistance of the emitter diffusion layers, resulting in enhanced resistance to electrical breakdown due to short circuit.
摘要:
A semiconductor device with high turn off capability includes a plurality of stripe trench lines which are provided in each of adjacent cell regions of a semiconductor layer in parallel and extended from one cell region toward the other cell region, a gate insulating film formed in each of the trench lines, and a gate electrode embedded in each of the trench lines with the gate insulating film interposed therebetween. In this semiconductor device, in each of the cell regions, part of adjacent ends of the plurality of trench lines on a side of the other cell region are connected to each other by connecting portions, and portions between the remaining adjacent ends are open. Moreover, at least one of the connecting portions of one cell region faces one of the open portions of the other cell region.
摘要:
In a semiconductor device module of this invention, on a metal base is formed a metal layer, on which an insulating substrate is formed. On the insulating substrate is formed conducting film patterns, to which a power device and a control device for controlling the power device are electrically connected. The metal layer exists only between the insulating substrate and the base under the power device, whereas a space is provided between the insulating substrate and the base under the control device, and is filled with air.
摘要:
One of the aspects of the present invention is to provide a semiconductor device, which includes a case, and an insulating substrate provided within the case. It also includes a plurality of semiconductor chips mounted on the insulating substrate, each of which has a first chip electrode for receiving a control signal, and a flexible board supported by the case, which includes a body portion and a plurality of lead portions extending from the body portion. Each of the first chip electrodes is electrically connected with the respective one of the lead portions.