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74 条记录 (耗时 0.028 秒)

    Molecular fluorine (F2) excimer laser with reduced coherence length
    11.
    发明授权
    Molecular fluorine (F2) excimer laser with reduced coherence length 失效
    分子氟（F2）准分子激光具有减小的相干长度

    公开(公告)号：US06393040B1

    公开(公告)日：2002-05-21

    申请号：US09482698

    申请日：2000-01-13

    申请人： Sergei V. Govorkov ,  Uwe Stamm

    发明人： Sergei V. Govorkov ,  Uwe Stamm

    IPC分类号： H01S313

    CPC分类号： H01S3/225 ,  H01S3/106 ,  H01S3/1062 ,  H01S3/2258

    摘要： A molecular fluorine (F2) laser is provided wherein the gas mixture includes molecular fluorine for generating an emission spectrum including two or three closely spaced lines around 157 nm. An optical method and means are provided for selecting an emission line from among the plurality of closely spaced emission lines of the molecular fluorine laser gas volume and broadening the spectrum of said selected emission line. This approach of broadening the spectrum reduces the coherence length of the output beam. As a result, speckle may be reduced or avoided in microlithography applications.

    摘要翻译： 提供分子氟（F2）激光器，其中气体混合物包括用于产生包括在157nm附近的两个或三个紧密间隔的线的发射光谱的分子氟。 提供一种光学方法和装置，用于从分子氟激光器气体体积的多个紧密间隔的发射线中选择发射线，并且扩大所述选择的发射线的光谱。 扩展频谱的这种方法降低了输出光束的相干长度。 结果，在微光刻应用中可能会减少或避免斑点。

    Molecular fluorine laser with spectral linewidth of less than 1 pm
    12.
    发明授权
    Molecular fluorine laser with spectral linewidth of less than 1 pm 失效

    公开(公告)号：US06381256B1

    公开(公告)日：2002-04-30

    申请号：US09599130

    申请日：2000-06-22

    申请人： Uwe Stamm ,  Sergei V. Govorkov

    发明人： Uwe Stamm ,  Sergei V. Govorkov

    IPC分类号： H01S3098

    CPC分类号： H01S3/081 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/0812 ,  H01S3/106 ,  H01S3/1062 ,  H01S3/1305 ,  H01S3/137 ,  H01S3/225 ,  H01S3/2258

    摘要： A narrow band molecular fluorine laser system includes an oscillator and an amplifier, wherein the oscillator produces a 157 nm beam having a linewidth less than 1 pm and the amplifier increases the power of the beam above a predetermined amount, such as more than one or several Watts. The oscillator includes a discharge chamber filled with a laser gas including molecular fluorine and a buffer gas, electrodes within the discharge chamber connected to a discharge circuit for energizing the molecular fluorine, and a resonator including the discharge chamber for generating a laser beam having a wavelength around 157 nm. Line-narrowing optics are included intra- and/or extra-resonator for reducing the linewidth of the laser beam to less than 1 pm. The amplifier may be the same or a different discharge chamber, and optical and/or electronic delays may be used for timing pulses from the oscillator to reach the amplifier at a maximum in the discharge current of the amplifier.

    Ablated laser feature shape reproduction control
    13.
    发明授权
    Ablated laser feature shape reproduction control 失效
    消除激光特征形状再现控制

    公开(公告)号：US06172329B2

    公开(公告)日：2001-01-09

    申请号：US09198160

    申请日：1998-11-23

    申请人： Curtis L. Shoemaker ,  Daniel J. Treadwell ,  Berthold Burghardt ,  Sergei V. Govorkov

    发明人： Curtis L. Shoemaker ,  Daniel J. Treadwell ,  Berthold Burghardt ,  Sergei V. Govorkov

    IPC分类号： B23K2600

    CPC分类号： B23K26/066

    摘要： This invention concerns a process useful for increasing the accuracy of the shape of a laser ablated feature formed on a substrate, especially where the substrate is a polymeric article. The process includes irradiating the polymeric article with laser light that has passed through a retardation plate selected from stationary adjustable plates, rotating plates or spinning plates, preferable in multiples of quarter-waves or half-waves. This invention also concerns a laser apparatus useful for making ablated features in a substrate having a radiation source; a mask positioned between the radiation source and a substrate to be irradiated, and a retardation plate which is stationary and adjustable, rotating or spinning plates.

    摘要翻译： 本发明涉及一种可用于提高形成在基底上的激光烧蚀特征的形状精度的方法，特别是在基底是聚合物制品的情况下。 该方法包括用激光照射聚合物，该激光已经通过选自固定的可调节板，旋转板或纺丝板的延迟板，优选为四分之一波或半波的倍数。 本发明还涉及一种用于在具有辐射源的衬底中制造烧蚀特征的激光装置; 位于辐射源和待照射基板之间的掩模，以及静止和可调节的旋转或旋转板的延迟板。

    Quasi-CW UV laser with low peak pulse-power
    15.
    发明授权
    Quasi-CW UV laser with low peak pulse-power 有权
    具有低峰值脉冲功率的准CW UV激光器

    公开(公告)号：US07738515B2

    公开(公告)日：2010-06-15

    申请号：US12138042

    申请日：2008-06-12

    申请人： Luis A. Spinelli ,  Sergei V. Govorkov ,  R. Russel Austin

    发明人： Luis A. Spinelli ,  Sergei V. Govorkov ,  R. Russel Austin

    IPC分类号： H01S3/10

    CPC分类号： H01S3/1106 ,  G02F1/37 ,  H01S3/0057 ,  H01S3/0092 ,  Y10S372/70

    摘要： Laser apparatus is disclosed in which fundamental-wavelength optical pulses delivered from a mode-locked laser resonator at a pulse-repetition frequency (PRF) are converted to harmonic-wavelength pulses in an optical delay loop. One example is disclosed in which the harmonic-wavelength pulses are delivered directly from the delay loop. Another example is disclosed in which the harmonic-wavelength pulses are divided by the delay loop into a number of temporally spaced-apart replicas thereof, and the delay loop delivers bursts of replicas of different one of the harmonic wavelength pulses at a burst-repetition frequency equal to or a multiple of the PRF of the resonator.

    摘要翻译： 公开了一种激光装置，其中以脉冲重复频率（PRF）从锁模激光谐振器传送的基波波长光脉冲被转换成光延迟环路中的谐波波长脉冲。 公开了一个示例，其中谐波波长脉冲直接从延迟环路传送。 公开了另一个例子，其中谐波波长脉冲被延迟环分成多个时间间隔分开的副本，并且延迟环以突发重复频率递送不同一个谐波波长脉冲的复制脉冲串 等于谐振器的PRF或倍数。

    DIODE-LASER MARKER WITH ONE-AXIS SCANNING MIRROR MOUNTED ON A TRANSLATABLE CARRIAGE
    17.
    发明申请
    DIODE-LASER MARKER WITH ONE-AXIS SCANNING MIRROR MOUNTED ON A TRANSLATABLE CARRIAGE 审中-公开
    具有单向扫描镜的二极管激光标记安装在可转换的载体上

    公开(公告)号：US20100078857A1

    公开(公告)日：2010-04-01

    申请号：US12539985

    申请日：2009-08-12

    申请人： Sergei V. Govorkov ,  John H. Jerman

    发明人： Sergei V. Govorkov ,  John H. Jerman

    IPC分类号： B41J27/00 ,  B29C35/08

    CPC分类号： B41J2/471 ,  B41J3/4075 ,  G02B26/105 ,  G02B27/40

    摘要： Apparatus for marking a bitmap image on tape includes a source of a modulatable laser-beam. The beam is directed to an oscillating mirror on a carriage translatable across the width direction of the tape. The oscillating mirror directs the beam to a focusing lens mounted on the carriage. The focusing lens is arranged to focus the beam to a focal-spot on the tape. As the carriage is translated, the focal-spot is swept reciprocally in a wave-like path across the tape. Modulation of the beam is arranged such that pixels of a plurality of rows of the bitmap image are printed in one traverse of the carriage. The tape is advanced incrementally and repeated traverses of the carriage are made to complete printing of the bitmap image. Light from the laser can be delivered to the oscillating mirror via an optical fiber.

    摘要翻译： 用于在磁带上标记位图图像的设备包括可调制激光束的源。 光束被引导到可跨越带的宽度方向平移的滑架上的振动反射镜。 振动镜将光束引导到安装在滑架上的聚焦透镜。 聚焦透镜被布置成将光束聚焦到胶带上的焦斑上。 当托架被翻译时，焦斑以波浪状轨迹往复扫过磁带。 布置波束的调制使得位图图像的多行的像素被打印在滑架的一个横越中。 磁带是递增的，并且重复的滑动遍历被完成打印位图图像。 来自激光器的光可以通过光纤被传送到振动反射镜。

    Laser illuminated projection displays
    19.
    发明申请
    Laser illuminated projection displays 失效

    公开(公告)号：US20080143888A1

    公开(公告)日：2008-06-19

    申请号：US12012966

    申请日：2008-02-06

    申请人： Juan L. Chilla ,  Sergei V. Govorkov ,  Andrea Caprara ,  Murray K. Reed ,  Luis A. Spinelli

    发明人： Juan L. Chilla ,  Sergei V. Govorkov ,  Andrea Caprara ,  Murray K. Reed ,  Luis A. Spinelli

    IPC分类号： H04N5/74

    CPC分类号： H04N9/3129 ,  H04N9/3114 ,  H04N9/315

    摘要： A projection video display includes a light source including an OPS-laser delivering laser radiation in multiple transverse modes (a multiple-transverse-mode OPS-laser). The display includes a spatial light modulator for spatially modulating the radiation from the multiple-transverse-mode OPS-laser in accordance with a portion of an image to be displayed. Projection optics project the spatially modulated light on a screen on which the image is to be displayed. In one example the OPS-laser is a diode-laser array pumped OPS-laser and is one of three lasers, one delivering red light, one delivering blue light, and the other delivering green light. The lasers are time modulated such that the spatial light modulator receives light from each of the lasers separately. The OPS laser is directly time modulated by periodically turning the diode-laser array on and off.

    Master oscillator/power amplifier excimer laser system with pulse energy and pointing control
    20.
    发明授权
    Master oscillator/power amplifier excimer laser system with pulse energy and pointing control 有权
    具有脉冲能量和指向控制的主振荡器/功率放大器准分子激光系统

    公开(公告)号：US07158553B2

    公开(公告)日：2007-01-02

    申请号：US10776404

    申请日：2004-02-11

    申请人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

    发明人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

    IPC分类号： H01S3/22

    CPC分类号： H01S3/2366 ,  H01S3/10 ,  H01S3/225 ,  H01S3/2333

    摘要： Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.

    摘要翻译： 可以优化和控制气体放电激光系统的脉冲参数，用于精密应用，如微光刻。 重要的激光脉冲参数通常在脉冲脉冲串的开始时变化，并且输出光束的方向性通常在整个脉冲串中变化。 为了提高激光系统的性能，可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。 诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。 诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向，以便调整在脉冲串中的脉冲之间的波束方向上的变化。