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公开(公告)号:US10229923B2
公开(公告)日:2019-03-12
申请号:US15818338
申请日:2017-11-20
Applicant: Micron Technology, Inc.
Inventor: Justin B. Dorhout , Kunal R. Parekh , Martin C. Roberts , Mohd Kamran Akhtar , Chet E. Carter , David Daycock
IPC: H01L27/11551 , H01L27/11524 , H01L27/11556 , H01L27/11582 , H01L27/1157
Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.
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公开(公告)号:US20180076209A1
公开(公告)日:2018-03-15
申请号:US15818338
申请日:2017-11-20
Applicant: Micron Technology, Inc.
Inventor: Justin B. Dorhout , Kunal R. Parekh , Martin C. Roberts , Mohd Kamran Akhtar , Chet E. Carter , David Daycock
IPC: H01L27/11551 , H01L27/11524
CPC classification number: H01L27/11524 , H01L27/11551 , H01L27/11556 , H01L27/1157 , H01L27/11582
Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region are majority doped with a same dopant type. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending across a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends outwardly from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.
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公开(公告)号:US09679852B2
公开(公告)日:2017-06-13
申请号:US14321466
申请日:2014-07-01
Applicant: Micron Technology, Inc.
Inventor: Ashim Dutta , Mohd Kamran Akhtar , Shane J. Trapp
IPC: H01L23/482 , H01L23/532 , H01L23/522 , H01L21/768
CPC classification number: H01L23/53295 , H01L21/76807 , H01L21/7682 , H01L21/76829 , H01L21/76831 , H01L21/76834 , H01L23/4821 , H01L23/5222 , H01L2221/1031 , H01L2924/0002 , H01L2924/00
Abstract: Some embodiments include a construction having conductive structures spaced from one another by intervening regions. Insulative structures are within the intervening regions. The insulative structures include dielectric spacers and air gaps between the dielectric spacers. Dielectric capping material is over the air gaps. The dielectric capping material is between the dielectric spacers and not over upper surfaces of the dielectric spacers. Some embodiments include a construction having a first conductive structure with an upper surface, and having a plurality of second conductive structures electrically coupled with the upper surface of the first conductive structure and spaced from one another by intervening regions. Air gap/spacer insulative structures are within the intervening regions. The air gap/spacer insulative structures have dielectric spacers along sidewalls of the second conductive structures and air gaps between the dielectric spacers. Dielectric capping material is over the air gaps.
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公开(公告)号:US20230209822A1
公开(公告)日:2023-06-29
申请号:US18117989
申请日:2023-03-06
Applicant: Micron Technology, Inc.
Inventor: Justin B. Dorhout , Kunal R. Parekh , Martin C. Roberts , Mohd Kamran Akhtar , Chet E. Carter , David Daycock
IPC: H10B41/35 , H01L21/308 , H01L21/311 , H01L21/033 , H01L21/768 , H01L21/67 , H01L21/3215 , H10B20/00 , H10B41/20 , H10B41/23 , H10B41/27 , H10B43/27
CPC classification number: H10B41/35 , H01L21/0337 , H01L21/3086 , H01L21/3215 , H01L21/31144 , H01L21/32155 , H01L21/67063 , H01L21/76802 , H10B20/383 , H10B41/20 , H10B41/23 , H10B41/27 , H10B43/27 , H01L2221/1063 , H10B43/35
Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.
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公开(公告)号:US11594536B2
公开(公告)日:2023-02-28
申请号:US17197253
申请日:2021-03-10
Applicant: Micron Technology, Inc.
Inventor: Yong Mo Yang , Mohd Kamran Akhtar , Huyong Lee , Sangmin Hwang , Song Guo
IPC: H01L27/092 , H01L21/8238 , G11C7/06
Abstract: Some embodiments include an integrated assembly having a CMOS region with fins extending along a first direction, and with gating structures extending across the fins. A circuit arrangement is associated with the CMOS region and includes a pair of the gating structures spaced by an intervening region having a missing gating structure. The circuit arrangement has a first dimension along the first direction. A second region is proximate to the CMOS region. Conductive structures are associated with the second region. Some of the conductive structures are electrically coupled with the circuit arrangement. A second dimension is a distance across said some of the conductive structures along the first direction. The conductive structures and the circuit arrangement are aligned such that the second dimension is substantially the same as the first dimension. Some embodiments include methods of forming integrated assemblies.
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公开(公告)号:US11508742B2
公开(公告)日:2022-11-22
申请号:US16676817
申请日:2019-11-07
Applicant: Micron Technology, Inc.
Inventor: Troy R. Sorensen , Mohd Kamran Akhtar
IPC: H01L27/11548 , H01L23/528 , H01L23/522 , H01L27/11556 , H01L27/11582 , H01L27/11575 , H01L21/311 , H01L21/768
Abstract: A method of forming a semiconductor device structure comprises forming a stack structure over a substrate, the stack structure comprising tiers each independently comprising a sacrificial structure and an insulating structure and longitudinally adjacent the sacrificial structure. A masking structure is formed over a portion of the stack structure. A photoresist is formed over the masking structure and over additional portions of the stack structure not covered by the masking structure. The photoresist and the stack structure are subjected to a series of material removal processes to selectively remove portions of the photoresist and portions of the stack structure not covered by one or more of the masking structure and remaining portions of the photoresist to form a stair step structure. Semiconductor devices and additional methods of forming a semiconductor device structure are also described.
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公开(公告)号:US10998326B2
公开(公告)日:2021-05-04
申请号:US16907858
申请日:2020-06-22
Applicant: Micron Technology, Inc.
Inventor: Justin B. Dorhout , Kunal R. Parekh , Martin C. Roberts , Mohd Kamran Akhtar , Chet E. Carter , David Daycock
IPC: H01L27/11556 , H01L27/11582 , H01L21/311 , H01L21/768 , H01L27/112 , H01L21/67 , H01L21/3215 , H01L27/11524 , H01L27/11551 , H01L21/308 , H01L21/033 , H01L27/11553 , H01L27/1157
Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.
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公开(公告)号:US20200321347A1
公开(公告)日:2020-10-08
申请号:US16907858
申请日:2020-06-22
Applicant: Micron Technology, Inc.
Inventor: Justin B. Dorhout , Kunal R. Parekh , Martin C. Roberts , Mohd Kamran Akhtar , Chet E. Carter , David Daycock
IPC: H01L27/11524 , H01L27/11551 , H01L27/11556 , H01L27/11582 , H01L27/11553
Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.
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19.
公开(公告)号:US20200286898A1
公开(公告)日:2020-09-10
申请号:US16880900
申请日:2020-05-21
Applicant: Micron Technology, Inc.
Inventor: Guangjun Yang , Mohd Kamran Akhtar , Silvia Borsari , Alex J. Schrinsky
IPC: H01L27/108
Abstract: Some embodiments include a method of forming an integrated assembly. A construction is formed to include a conductive structure having a top surface, and a pair of sidewall surfaces extending downwardly from the top surface. Insulative material is over the top surface, and rails are along the sidewall surfaces. The rails include sacrificial material. The sacrificial material is removed to leave openings. Sealant material is formed to extend within the openings. The sealant material has a lower dielectric constant than the insulative material. Some embodiments include an integrated assembly having a conductive structure with a top surface and a pair of opposing sidewall surfaces extending downwardly from the top surface. Insulative material is over the top surface. Voids are along the sidewall surfaces and are capped by sealant material. The sealant material has a lower dielectric constant than the insulative material.
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公开(公告)号:US10483270B2
公开(公告)日:2019-11-19
申请号:US16270526
申请日:2019-02-07
Applicant: Micron Technology, Inc.
Inventor: Justin B. Dorhout , Kunal R. Parekh , Martin C. Roberts , Mohd Kamran Akhtar , Chet E. Carter , David Daycock
IPC: H01L27/11524 , H01L27/11556 , H01L27/11582 , H01L27/11551 , H01L27/1157 , H01L27/11553
Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.
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