Method for controlling a refractive index of a dry plating film and method for making a dry plating built-up film
    12.
    发明授权
    Method for controlling a refractive index of a dry plating film and method for making a dry plating built-up film 失效
    用于控制干电镀膜的折射率的方法和用于制造干电镀叠层膜的方法

    公开(公告)号:US06921465B2

    公开(公告)日:2005-07-26

    申请号:US10647251

    申请日:2003-08-26

    摘要: A method for making a dry plating built-up film comprises providing silicon carbide as a starting source and subjecting to dry plating while changing a concentration of a reactive gas continuously or intermittently to deposit and form, on a substrate, a thin film having different refractive indices along its thickness. A method for making a sputter built-up film is also described, which comprising providing silicon carbide as a target and subjecting to sputtering while changing making electric power against the target continuously or intermittently to deposit and form a thin film having different refractive indices along its thickness.

    摘要翻译: 制备干电镀叠层膜的方法包括提供碳化硅作为起始源并进行干电镀,同时连续或间歇地改变反应气体的浓度以沉积并在衬底上形成具有不同折射率的薄膜 沿其厚度的指数。 还描述了一种用于制造溅射组合膜的方法,其包括提供碳化硅作为靶,并且在连续或间歇地向靶提供电力的同时进行溅射,以沉积并形成沿着其的折射率不同的薄膜 厚度。

    ITO thin film, method of producing the same, transparent conductive film, and touch panel
    13.
    发明申请
    ITO thin film, method of producing the same, transparent conductive film, and touch panel 审中-公开
    ITO薄膜,其制造方法,透明导电膜和触摸面板

    公开(公告)号:US20060003188A1

    公开(公告)日:2006-01-05

    申请号:US11184811

    申请日:2005-07-20

    IPC分类号: H01L21/44 B32B19/00

    摘要: A crystalline ITO transparent conductive thin film is formed by heating a substrate at low temperature during the sputtering film formation. The crystalline ITO transparent conductive thin film is formed by using an ITO target comprising In2O3 and SnO2 where a weight percentage of SnO2 is 6% or less based on the total weight of In2O3 and SnO2 in the ITO target, and heating the substrate at 90 to 170° C. during the sputtering film formation. The crystalline ITO film with high strength and mechanical durability can be formed by heating at low temperature, which meets heat resistance of the substrate, without requiring annealing after the film formation. There are provided a transparent conductive film comprising a polymer film 4 and an ITO transparent conductive film 5 formed thereon, and a touch panel comprising the transparent conductive film.

    摘要翻译: 通过在溅射成膜期间在低温下加热基板来形成结晶ITO透明导电薄膜。 结晶ITO透明导电薄膜通过使用包含In 2 N 3 O 3和SnO 2 2的ITO靶形成,其中SnO 2的重量百分比 基于ITO靶中的In 2 N 3 O 3和SnO 2 N 2的总重量,SUB> 2 <6%或更小 在溅射成膜期间在90〜170℃下加热基板。 具有高强度和机械耐久性的结晶ITO膜可以通过在低温下加热而形成,其满足基板的耐热性,而不需要在成膜后退火。 提供了包含聚合物膜4和形成在其上的ITO透明导电膜5的透明导电膜,以及包括透明导电膜的触摸面板。

    Transparent conductive film and touch panel
    15.
    发明授权
    Transparent conductive film and touch panel 失效
    透明导电膜和触摸屏

    公开(公告)号:US06896981B2

    公开(公告)日:2005-05-24

    申请号:US10194963

    申请日:2002-07-15

    IPC分类号: B32B9/00 B32B15/04 C03C27/08

    摘要: A transparent conductive film has a polymer film 4 and a transparent conductive layer 5 formed on the polymer film 4. The transparent conductive layer includes indium oxide, a zinc oxide system and a tin oxide system. A covering layer 9, made of material different from that of the transparent conductive layer 5, is formed on the transparent conductive layer 5. A touch panel is provided with the transparent conductive film as its upper electrode 6A or lower electrode. The surface of the transparent conductive layer is covered with the covering layer, so that physical or chemical stresses generated during the input to the touch panel do not affect transparent conductive layer directly, thus preventing damages and delamination of the transparent conductive layer. Furthermore, the covering layer formed on the transparent conductive layer improves the strength of the transparent conductive film, thereby enhancing a resistance to wear.

    摘要翻译: 透明导电膜具有在聚合物膜4上形成的聚合物膜4和透明导电层5。 透明导电层包括氧化铟,氧化锌系和氧化锡系。 在透明导电层5上形成由不同于透明导电层5的材料制成的覆盖层9。 触摸面板设置有透明导电膜作为其上电极6A或下电极。 透明导电层的表面被覆盖层覆盖,使得在输入到触摸面板期间产生的物理或化学应力不直接影响透明导电层,从而防止透明导电层的损坏和分层。 此外,形成在透明导电层上的覆盖层提高了透明导电膜的强度,从而提高了耐磨性。

    Method for controlling a refractive index of a dry plating film and method for making a dry plating built-up film
    16.
    发明授权
    Method for controlling a refractive index of a dry plating film and method for making a dry plating built-up film 失效
    用于控制干电镀膜的折射率的方法和用于制造干电镀叠层膜的方法

    公开(公告)号:US06666958B1

    公开(公告)日:2003-12-23

    申请号:US09407703

    申请日:1999-09-28

    IPC分类号: C23C1406

    摘要: A method for making a dry plating built-up film comprises providing silicon carbide as a starting source and subjecting to dry plating while changing a concentration of a reactive gas continuously or intermittently to deposit and form, on a substrate, a thin film having different refractive indices along its thickness. A method for making a sputter built-up film is also described, which comprising providing silicon carbide as a target and subjecting to sputtering while changing making electric power against the target continuously or intermittently to deposit and form a thin film having different refractive indices along its thickness.

    摘要翻译: 制备干电镀叠层膜的方法包括提供碳化硅作为起始源并进行干电镀,同时连续或间歇地改变反应气体的浓度以沉积并在衬底上形成具有不同折射率的薄膜 沿其厚度的指数。 还描述了一种用于制造溅射组合膜的方法,其包括提供碳化硅作为靶,并且在连续或间歇地向靶提供电力的同时进行溅射,以沉积并形成沿着其的折射率不同的薄膜 厚度。

    Apparatus and process for film deposition
    17.
    发明授权
    Apparatus and process for film deposition 失效
    用于膜沉积的装置和方法

    公开(公告)号:US06875478B2

    公开(公告)日:2005-04-05

    申请号:US10066380

    申请日:2002-02-05

    CPC分类号: C23C14/562

    摘要: A film deposition apparatus equipped with a vacuum chamber, comprising a pair of rollers for vertically traveling a continuous sheet as a substrate, and a pair of sputtering cathodes for continuously depositing the film on the surfaces of the sheet in the vacuum chamber. The cathodes are vertically arranged and horizontally faced each other. The sheet is traveled between a pair of the cathodes. The apparatus and the film deposition process using it make it possible to deposit a film even on surfaces of a flexible sheet without causing problems such as defective film deposition or abnormal discharge, while ensuring stable, continuous, long-term operation.

    摘要翻译: 一种装有真空室的成膜装置,包括用于垂直行进连续片材作为基底的一对辊子和用于在真空室中在片材表面上连续沉积薄膜的一对溅射阴极。 阴极垂直布置并水平面对。 片材在一对阴极之间行进。 使用它的装置和成膜方法使得可以在柔性片的表面上沉积膜,而不会导致诸如膜沉积错误或异常放电的问题,同时确保稳定,连续的长期操作。

    Antireflection film, electromagnetic wave shielding light transmitting window material, gas discharge type light emitting panel, flat display panel, show window material and solar cell module
    19.
    发明申请
    Antireflection film, electromagnetic wave shielding light transmitting window material, gas discharge type light emitting panel, flat display panel, show window material and solar cell module 审中-公开
    防反射膜,电磁波屏蔽透光窗材料,气体放电型发光面板,平板显示屏,展示窗材料和太阳能电池组件

    公开(公告)号:US20060269731A1

    公开(公告)日:2006-11-30

    申请号:US11449811

    申请日:2006-06-09

    IPC分类号: B32B7/02

    摘要: An antireflection film is formed by laminating a hard coat layer 2, a high refractive index layer 3, and a low refractive index layer 4 in that order on a transparent base film 1. Alternatively, an antireflection film is formed by laminating an electrically conductive high refractive index hard coat layer and a low refractive index layer in that order on a transparent base film. The low refractive index layer 4 is composed of a coating film cured by ultraviolet irradiation in an atmosphere having an oxygen concentration of 0 to 10,000 ppm, the coating film containing hollow silica fine particles, a polyfunctional (meth)acrylic compound, and a photopolymerization initiator.

    摘要翻译: 通过在透明基膜1上依次层叠硬涂层2,高折射率层3和低折射率层4而形成防反射膜。或者,通过层叠导电性高 折射率硬涂层和低折射率层。 低折射率层4由在氧浓度为0〜10,000ppm的气氛中通过紫外线照射而固化的涂膜,含有中空二氧化硅微粒的涂膜,多官能(甲基)丙烯酸类化合物和光聚合引发剂 。