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公开(公告)号：US12185636B2
公开(公告)日：2024-12-31
申请号：US17506921
申请日：2021-10-21
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Masayuki Suzuki , Shinsuke Ikeuchi , Fumiya Kurokawa , Yutaka Kishimoto
Abstract: A piezoelectric device includes a membrane portion including a single-crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The upper electrode layer is on a first surface. The lower electrode layer is on a second surface facing at least a portion of the upper electrode layer sandwiching the single-crystal piezoelectric layer. The single-crystal piezoelectric layer includes piezoelectric body cleavage directions extending along a boundary line between a cleavage plane occurring when the single-crystal piezoelectric layer is cleaved and the first surface. When viewed in a vertical direction, at least a portion of an upper electrode outer edge and at least a portion of a lower electrode outer edge are non-parallel to at least one of the piezoelectric body cleavage directions.
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公开(公告)号：US12138658B2
公开(公告)日：2024-11-12
申请号：US17894217
申请日：2022-08-24
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Fumiya Kurokawa , Yasuhiro Aida , Shinsuke Ikeuchi , Seiji Umezawa , Masayuki Suzuki
Abstract: An ultrasonic transducer includes first and second acoustic transducers and a housing with a bottomed tubular shape. The second acoustic transducer includes an annular section supporting a second membrane section and contacting an entire periphery of the second membrane section, and an acoustic matching plate facing the second membrane section and spaced apart from the second membrane section. The acoustic matching plate is connected to a surrounding wall portion defining a sealed space with the housing. An ultrasonic transmission path sandwiched between the first membrane section and the second membrane section is provided in the sealed space. A maximum inner width of the ultrasonic transmission path is smaller than a maximum inner width of the surrounding wall portion.
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公开(公告)号：US11806750B2
公开(公告)日：2023-11-07
申请号：US17161726
申请日：2021-01-29
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Yutaka Kishimoto , Shinsuke Ikeuchi , Katsumi Fujimoto , Tetsuya Kimura , Fumiya Kurokawa
CPC classification number: B06B1/0603 , H10N30/1051 , H10N30/2047 , H10N30/871 , H10N30/877
Abstract: A MEMS device includes a piezoelectric layer made of a piezoelectric single crystal, a first electrode on a first surface of the piezoelectric layer, and a first layer covering the first surface of the piezoelectric layer. At least a portion of the piezoelectric layer is included in a membrane portion. The first electrode is covered with the first layer and includes a recess. The piezoelectric layer includes a through hole that passes through the piezoelectric layer between a surface of the piezoelectric layer, which is opposite to the first direction, and the recess at a position corresponding to at least a portion of the first electrode.
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公开(公告)号：US20190172996A1
公开(公告)日：2019-06-06
申请号：US16273191
申请日：2019-02-12
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Shinsuke Ikeuchi , Yoichi Mochida , Kansho Yamamoto , Takuo Hada , Hideya Horiuchi
IPC: H01L41/257 , H01L41/107 , H01L41/047 , H01L41/083 , H01L41/29
Abstract: A piezoelectric transformer that includes a vibration portion assembly having an output electrode, an output-side intermediate electrode, an input-side intermediate electrode, and an input electrode. The vibration portion assembly includes n vibration portions. The input electrode includes one to n input electrode pieces. The output electrode includes one to n output electrode pieces. Wiring lines are arranged such that voltages of opposite phases can be respectively applied to a first input electrode piece group of the input electrode pieces corresponding to odd-numbered vibration portions, and a second input electrode piece group of the input electrode pieces corresponding to even-numbered vibration portions. The second output electrode piece and the first output-side intermediate electrode piece are superposed with each other in the thickness direction. The first output electrode piece is not superposed with either of the first and second output-side intermediate electrode pieces in the thickness direction.
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公开(公告)号：US10312428B2
公开(公告)日：2019-06-04
申请号：US15245636
申请日：2016-08-24
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Shinsuke Ikeuchi , Toshimaro Yoneda , Yoshitaka Matsuki , Naoyuki Endo
IPC: H01L41/187 , C23C14/08 , H01L41/316 , H01L41/332 , C04B35/465 , C04B35/622 , C23C14/34 , C23C14/35 , H01J37/34 , H01L41/047 , H01L41/09 , C04B35/499
Abstract: A piezoelectric thin film does not easily generate a heterogeneous phase and exhibits good piezoelectric characteristics. The piezoelectric thin film contains a composition represented by a general formula: (1-n) (K1-xNax)mNbO3-nCaTiO3, wherein m, n, and x in the general formula are within the ranges of 0.87≤m≤0.97, 0≤n≤0.065, and 0≤x≤1.
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Patent Agency Ranking
16.发明申请公开(公告)号：US20130127293A1
公开(公告)日：2013-05-23
申请号：US13748687
申请日：2013-01-24
Applicant: MURATA MANUFACTURING CO., LTD.
Inventor： Shinsuke Ikeuchi , Kansho Yamamoto
IPC: H01L41/08
CPC classification number: H01L41/0805 , C23C14/0036 , C23C14/083 , C23C14/088 , H01L41/0815 , H01L41/1873 , H01L41/22 , H01L41/316 , H01L41/319
Abstract: Provided is a method for producing a piezoelectric thin-film element including a piezoelectric thin-film layer having good surface morphology and high crystallinity. The method includes forming a lower electrode layer on a substrate; forming a piezoelectric thin-film buffer layer on the lower electrode layer at a relatively low film-formation temperature; forming a piezoelectric thin-film layer on the piezoelectric thin-film buffer layer at a film-formation temperature that is higher than the film-formation temperature for the piezoelectric thin-film buffer layer; and forming an upper electrode layer on the piezoelectric thin-film layer.
Abstract translation: 提供一种包括具有良好的表面形态和高结晶度的压电薄膜层的压电薄膜元件的制造方法。 该方法包括在基板上形成下电极层; 在较低的成膜温度下在下电极层上形成压电薄膜缓冲层; 在压电薄膜缓冲层上形成压电薄膜层，其成膜温度高于压电薄膜缓冲层的成膜温度; 以及在所述压电薄膜层上形成上电极层。
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公开(公告)号：US11844281B2
公开(公告)日：2023-12-12
申请号：US17153916
申请日：2021-01-21
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Yutaka Kishimoto , Shinsuke Ikeuchi
IPC: H01L41/053 , H10N30/30 , H10N30/85 , H10N30/87 , H10N30/20
CPC classification number: H10N30/308 , H10N30/2047 , H10N30/85 , H10N30/87
Abstract: A piezoelectric device includes a base portion and a membrane portion. The membrane portion is indirectly supported by the base portion, and is located on the upper side relative to the base portion. The membrane portion includes a plurality of layers. The membrane portion does not overlap with the base portion, and includes a single crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The membrane portion is provided with a through-groove penetrating in the up-down direction. The through-groove includes a first step portion provided in the thickest layer among the plurality of layers defining the membrane portion. The width of the through-groove is narrower on a lower side than on an upper side with the first step portion as a boundary.
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公开(公告)号：US11706988B2
公开(公告)日：2023-07-18
申请号：US16777926
申请日：2020-01-31
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Shinsuke Ikeuchi , Tetsuya Kimura , Katsumi Fujimoto , Yutaka Kishimoto , Fumiya Kurokawa
CPC classification number: H10N30/20 , H10N30/045 , H10N30/1051 , H10N30/50 , H10N30/871 , H10N30/883
Abstract: A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.
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公开(公告)号：US10915005B2
公开(公告)日：2021-02-09
申请号：US15960666
申请日：2018-04-24
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Shinsuke Ikeuchi , Katsumi Fujimoto , Masanobu Nomura , Kenji Nishiyama
Abstract: A vibrating device includes a tubular vibrating body and a lens cover coupled to a first surface of the tubular vibrating body. The tubular vibrating body includes a tubular member and piezoelectric vibrators. The lens cover includes a mode changing coupler and a light transmitting body unit disposed in front of a lens of a camera. The mode changing coupler includes a thin portion having a thickness smaller than a thickness of the tubular member.
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公开(公告)号：US10268039B2
公开(公告)日：2019-04-23
申请号：US15933501
申请日：2018-03-23
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Kenji Nishiyama , Katsumi Fujimoto , Masanobu Nomura , Shinsuke Ikeuchi
Abstract: A vibration device includes a support body that includes first and second principal surfaces and a through hole penetrating through the support body to open at the first and second principal surfaces, a first vibration element on the side of the first principal surface of the support body, and a second vibration element on the side of the second principal surface of the support body. The first vibration element includes a first vibration body that is translucent. The second vibration element includes a second vibration body and a second piezoelectric vibrator provided on the second vibration body.
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