公开(公告)号：US09934976B2

公开(公告)日：2018-04-03

申请号：US12317180

申请日：2008-12-18

申请人： Niloy Mukherjee ,  Matt Metz ,  Gilbert Dewey ,  Jack Kavalieros ,  Robert S Chau

发明人： Niloy Mukherjee ,  Matt Metz ,  Gilbert Dewey ,  Jack Kavalieros ,  Robert S Chau

IPC分类号： H01L21/285 ,  H01L21/768

CPC分类号： H01L21/28518 ,  H01L21/76814

摘要： Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a contact opening in an inter layer dielectric (ILD) disposed on a substrate, wherein a source/drain contact area is exposed, forming a rare earth metal layer on the source/drain contact area, forming a transition metal layer on the rare earth metal layer; and annealing the rare earth metal layer and the transition metal layer to form a metal silicide stack structure.

公开(公告)号：US08816394B2

公开(公告)日：2014-08-26

申请号：US14137804

申请日：2013-12-20

申请人： Robert S. Chau ,  Suman Datta ,  Jack Kavalieros ,  Justin K. Brask ,  Mark L. Doczy ,  Matthew Metz

发明人： Robert S. Chau ,  Suman Datta ,  Jack Kavalieros ,  Justin K. Brask ,  Mark L. Doczy ,  Matthew Metz

IPC分类号： H01L29/66

CPC分类号： H01L29/7848 ,  H01L29/0649 ,  H01L29/0847 ,  H01L29/1033 ,  H01L29/16 ,  H01L29/20 ,  H01L29/201 ,  H01L29/207 ,  H01L29/267 ,  H01L29/41783 ,  H01L29/4236 ,  H01L29/452 ,  H01L29/517 ,  H01L29/66522 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/66795 ,  H01L29/78 ,  H01L29/7827 ,  H01L29/7836 ,  H01L29/785 ,  H01L29/78603 ,  H01L29/78618 ,  H01L29/78681

摘要： A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.

摘要翻译： 描述具有窄带隙半导体源极/漏极区域的晶体管。 晶体管包括形成在形成于硅层上的栅介质层上的栅电极。 一对源极/漏极区域形成在栅电极的相对侧上，其中所述一对源极/漏极区域包括形成在栅电极的相对侧上的硅层中的窄带隙半导体膜。

公开(公告)号：US20130277683A1

公开(公告)日：2013-10-24

申请号：US13976837

申请日：2011-12-19

申请人： Han Wui Then ,  Robert Chau ,  Benjamin Chu-Kung ,  Gilbert Dewey ,  Jack Kavalieros ,  Matthew Metz ,  Niloy Mukherjee ,  Ravi Pillarisetty ,  Marko Radosavljevic

发明人： Han Wui Then ,  Robert Chau ,  Benjamin Chu-Kung ,  Gilbert Dewey ,  Jack Kavalieros ,  Matthew Metz ,  Niloy Mukherjee ,  Ravi Pillarisetty ,  Marko Radosavljevic

IPC分类号： H01L29/778 ,  H01L29/66

CPC分类号： H01L29/7787 ,  G06F1/1633 ,  G06F1/189 ,  H01L21/02381 ,  H01L21/02433 ,  H01L21/0254 ,  H01L29/045 ,  H01L29/0657 ,  H01L29/0847 ,  H01L29/1037 ,  H01L29/2003 ,  H01L29/205 ,  H01L29/402 ,  H01L29/66462 ,  H01L29/7783 ,  H01L29/7786 ,  H01L29/7789 ,  H01L29/785 ,  H03F3/195 ,  H03F3/213 ,  H03F2200/451

摘要： Transistors for high voltage and high frequency operation. A non-planar, polar crystalline semiconductor body having a top surface disposed between first and second opposite sidewalls includes a channel region with a first crystalline semiconductor layer disposed over the first and second sidewalls. The first crystalline semiconductor layer is to provide a two dimensional electron gas (2DEG) within the channel region. A gate structure is disposed over the first crystalline semiconductor layer along at least the second sidewall to modulate the 2DEG. First and second sidewalls of the non-planar polar crystalline semiconductor body may have differing polarity, with the channel proximate to a first of the sidewalls. The gate structure may be along a second of the sidewalls to gate a back barrier. The polar crystalline semiconductor body may be a group III-nitride formed on a silicon substrate with the (10 10) plane on a (110) plane of the silicon.

摘要翻译： 用于高压和高频工作的晶体管。 具有设置在第一和第二相对侧壁之间的顶表面的非平面极性结晶半导体本体包括具有设置在第一和第二侧壁上的第一晶体半导体层的沟道区。 第一晶体半导体层是在沟道区内提供二维电子气（2DEG）。 栅极结构沿至少第二侧壁设置在第一晶体半导体层上方，以调制2DEG。 非平面极性结晶半导体主体的第一和第二侧壁可具有不同的极性，其中通道靠近第一侧壁。 栅极结构可以沿着侧壁中的第二侧面以栅极背栅。 极性结晶半导体体可以是在硅衬底上形成的III族氮化物，其中（10 10）面在硅的（110）平面上。

公开(公告)号：US20130270512A1

公开(公告)日：2013-10-17

申请号：US13976411

申请日：2011-12-19

申请人： Marko Radosavljevic ,  Ravi Pillarisetty ,  Gilbert Dewey ,  Niloy Mukherjee ,  Jack Kavalieros ,  Willy Rachmady ,  Van Le ,  Benjamin Chu-Kung ,  Matthew Metz ,  Robert Chau

发明人： Marko Radosavljevic ,  Ravi Pillarisetty ,  Gilbert Dewey ,  Niloy Mukherjee ,  Jack Kavalieros ,  Willy Rachmady ,  Van Le ,  Benjamin Chu-Kung ,  Matthew Metz ,  Robert Chau

IPC分类号： H01L27/092 ,  H01L21/8238

CPC分类号： H01L21/845 ,  B82Y10/00 ,  H01L21/0228 ,  H01L21/02532 ,  H01L21/02546 ,  H01L21/30604 ,  H01L21/823807 ,  H01L21/823821 ,  H01L21/8258 ,  H01L27/092 ,  H01L27/0922 ,  H01L27/0924 ,  H01L27/1211 ,  H01L29/0673 ,  H01L29/16 ,  H01L29/20 ,  H01L29/205 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/66469 ,  H01L29/775 ,  H01L29/785 ,  H01L29/7853 ,  H01L29/78696

摘要： Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.

公开(公告)号：US08388854B2

公开(公告)日：2013-03-05

申请号：US11968091

申请日：2007-12-31

申请人： Brian Doyle ,  Been-Yih Jin ,  Jack Kavalieros ,  Robert Chau

发明人： Brian Doyle ,  Been-Yih Jin ,  Jack Kavalieros ,  Robert Chau

IPC分类号： C23F1/00

CPC分类号： H01L21/32139 ,  H01L21/0337 ,  H01L21/0338 ,  Y10T428/24612

摘要： Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a first block on a nanodot material, forming a first spacer on the first block, removing the first block to form a free standing spacer, removing exposed portions of the nanodot material and then the free standing spacer to form nanowires, forming a second block at an angle to a length of the nanowires, forming a second spacer on the second block, forming a second free standing spacer on the nanowires by removing the second block, and removing exposed portions of the nanowires and then the second free standing spacer to form an ordered array of nanodots.

摘要翻译： 描述形成微电子器件的方法和相关结构。 这些方法可以包括在纳点物质上形成第一块，在第一块上形成第一间隔物，去除第一块以形成自由间隔物，去除纳米点材料的暴露部分，然后除去自由基间隔物以形成纳米线， 在与所述纳米线的长度成一定角度地形成第二块，在所述第二块上形成第二间隔物，通过去除所述第二块在所述纳米线上形成第二自由间隔物，以及去除所述纳米线的暴露部分，然后除去所述第二自由基 形成有序阵列的纳米点。

公开(公告)号：US08368135B2

公开(公告)日：2013-02-05

申请号：US13453403

申请日：2012-04-23

申请人： Robert S. Chau ,  Suman Datta ,  Jack Kavalieros ,  Justin K. Brask ,  Mark L. Doczy ,  Matthew Metz

发明人： Robert S. Chau ,  Suman Datta ,  Jack Kavalieros ,  Justin K. Brask ,  Mark L. Doczy ,  Matthew Metz

IPC分类号： H01L27/088

CPC分类号： H01L29/7848 ,  H01L29/0649 ,  H01L29/0847 ,  H01L29/1033 ,  H01L29/16 ,  H01L29/20 ,  H01L29/201 ,  H01L29/207 ,  H01L29/267 ,  H01L29/41783 ,  H01L29/4236 ,  H01L29/452 ,  H01L29/517 ,  H01L29/66522 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/66795 ,  H01L29/78 ,  H01L29/7827 ,  H01L29/7836 ,  H01L29/785 ,  H01L29/78603 ,  H01L29/78618 ,  H01L29/78681

摘要： A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.

公开(公告)号：US08288233B2

公开(公告)日：2012-10-16

申请号：US11864726

申请日：2007-09-28

申请人： Been-Yih Jin ,  Brian Doyle ,  Jack Kavalieros ,  Suman Datta

发明人： Been-Yih Jin ,  Brian Doyle ,  Jack Kavalieros ,  Suman Datta

IPC分类号： H01L21/8244

CPC分类号： H01L29/7851 ,  H01L29/66795 ,  H01L29/7848

摘要： Methods of forming a microelectronic structure are described. Embodiments of those methods may include providing a gate electrode comprising a top surface and first and second laterally opposite sidewalls, wherein a hard mask is disposed on the top surface, a source drain region disposed on opposite sides of the gate electrode, and a spacer disposed on the first and second laterally opposed sidewalls of the gate electrode, forming a silicon germanium layer on exposed portions of the top surface and the first and second laterally opposite sidewalls of the source drain region and then oxidizing a portion of the silicon germanium layer, wherein a germanium portion of the silicon germanium layer is forced down into the source drain region to convert a silicon portion of the source drain region into a silicon germanium portion of the source drain region.

摘要翻译： 描述形成微电子结构的方法。 这些方法的实施例可以包括提供包括顶表面和第一和第二横向相对的侧壁的栅电极，其中硬掩模设置在顶表面上，源极漏极区域设置在栅电极的相对侧上， 在栅电极的第一和第二横向相对的侧壁上，在源漏区的顶表面和第一和第二横向相对的侧壁的暴露部分上形成硅锗层，然后氧化硅锗层的一部分，其中 硅锗层的锗部分被迫下降到源极漏极区域中，以将源极区域的硅部分转换成源极漏极区域的硅锗部分。

公开(公告)号：US08088665B2

公开(公告)日：2012-01-03

申请号：US12228386

申请日：2008-08-11

申请人： Willy Rachmady ,  Jason W. Klaus ,  Ravi Pillarisetty ,  Niloy Mukherjee ,  Jack Kavalieros ,  Sean King

发明人： Willy Rachmady ,  Jason W. Klaus ,  Ravi Pillarisetty ,  Niloy Mukherjee ,  Jack Kavalieros ,  Sean King

IPC分类号： H01L21/336

CPC分类号： H01L29/41775 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/0262 ,  H01L21/02636 ,  H01L21/28518 ,  H01L21/28525 ,  H01L21/28556 ,  H01L29/41783

摘要： Embodiments of the present invention describe a method of fabricating low resistance contact layers on a semiconductor device. The semiconductor device comprises a substrate having source and drain regions. The substrate is alternatingly exposed to a first precursor and a second precursor to selectively deposit an amorphous semiconductor layer onto each of the source and drain regions. A metal layer is then deposited over the amorphous semiconductor layer on each of the source and drain regions. An annealing process is then performed on the substrate to allow the metal layer to react with amorphous semiconductor layer to form a low resistance contact layer on each of the source and drain regions. The low resistance contact layer on each of the source and drain regions can be formed as either a silicide layer or germanide layer depending on the type of precursors used.

摘要翻译： 本发明的实施例描述了在半导体器件上制造低电阻接触层的方法。 半导体器件包括具有源区和漏区的衬底。 将基板交替地暴露于第一前体和第二前体，以将非晶半导体层选择性地沉积到源极和漏极区域中的每一个上。 然后在每个源极和漏极区域上的非晶半导体层上沉积金属层。 然后在衬底上进行退火处理，以允许金属层与非晶半导体层反应，以在源极和漏极区域中的每一个上形成低电阻接触层。 根据所使用的前体的类型，源极和漏极区域中的每一个上的低电阻接触层可以形成为硅化物层或锗化物层。

公开(公告)号：US20110121393A1

公开(公告)日：2011-05-26

申请号：US13021640

申请日：2011-02-04

申请人： Robert S. Chau ,  Suman Datta ,  Jack Kavalieros ,  Justin K. Brask ,  Mark L. Doczy ,  Matthew Metz

发明人： Robert S. Chau ,  Suman Datta ,  Jack Kavalieros ,  Justin K. Brask ,  Mark L. Doczy ,  Matthew Metz

IPC分类号： H01L29/78

CPC分类号： H01L29/7848 ,  H01L29/0649 ,  H01L29/0847 ,  H01L29/1033 ,  H01L29/16 ,  H01L29/20 ,  H01L29/201 ,  H01L29/207 ,  H01L29/267 ,  H01L29/41783 ,  H01L29/4236 ,  H01L29/452 ,  H01L29/517 ,  H01L29/66522 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/66795 ,  H01L29/78 ,  H01L29/7827 ,  H01L29/7836 ,  H01L29/785 ,  H01L29/78603 ,  H01L29/78618 ,  H01L29/78681

摘要： A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.

摘要翻译： 描述具有窄带隙半导体源极/漏极区域的晶体管。 晶体管包括形成在形成于硅层上的栅介质层上的栅电极。 一对源极/漏极区域形成在栅电极的相对侧上，其中所述一对源极/漏极区域包括形成在栅电极的相对侧上的硅层中的窄带隙半导体膜。

公开(公告)号：US07915167B2

公开(公告)日：2011-03-29

申请号：US11240440

申请日：2005-09-29

申请人： Marko Radosavljevic ,  Amlan Majumdar ,  Suman Datta ,  Jack Kavalieros ,  Brian S. Doyle ,  Justin K. Brask ,  Robert S. Chau

发明人： Marko Radosavljevic ,  Amlan Majumdar ,  Suman Datta ,  Jack Kavalieros ,  Brian S. Doyle ,  Justin K. Brask ,  Robert S. Chau

IPC分类号： H01L21/302

CPC分类号： H01L29/42392 ,  H01L21/28079 ,  H01L21/28194 ,  H01L29/0673 ,  H01L29/41775 ,  H01L29/495 ,  H01L29/51 ,  H01L29/517 ,  H01L29/518 ,  H01L29/66545 ,  H01L29/6656 ,  H01L29/66606 ,  H01L29/66636 ,  H01L29/66742 ,  H01L29/7834 ,  H01L29/78618 ,  H01L29/78696 ,  Y10S438/926 ,  Y10S438/957

摘要： A method for fabricating a field-effect transistor with a gate completely wrapping around a channel region is described. Ion implantation is used to make the oxide beneath the channel region of the transistor more etchable, thereby allowing the oxide to be removed below the channel region. Atomic layer deposition is used to form a gate dielectric and a metal gate entirely around the channel region once the oxide is removed below the channel region.

摘要翻译： 描述了一种制造具有完全围绕通道区域的栅极的场效应晶体管的方法。 离子注入用于使晶体管的沟道区下方的氧化物更易蚀刻，从而允许氧化物在沟道区下方被去除。 一旦氧化物在通道区域下方被去除，原子层沉积被用于在通道区域的整个周围形成栅极电介质和金属栅极。