公开(公告)号：US11682735B2

公开(公告)日：2023-06-20

申请号：US17231120

申请日：2021-04-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seung Hun Lee ,  Dong Woo Kim ,  Dong Chan Suh ,  Sun Jung Kim

IPC: H01L29/78 ,  H01L29/06 ,  H01L29/66 ,  H01L29/51 ,  H01L29/786 ,  H01L29/423 ,  H01L21/02 ,  H01L21/8238 ,  H01L29/775 ,  B82Y10/00 ,  H01L29/08 ,  H01L27/092

CPC classification number: H01L29/78696 ,  B82Y10/00 ,  H01L21/02532 ,  H01L21/02603 ,  H01L21/823807 ,  H01L27/092 ,  H01L29/0653 ,  H01L29/0673 ,  H01L29/0847 ,  H01L29/42364 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/66545 ,  H01L29/775 ,  H01L29/068 ,  H01L29/66742 ,  H01L29/78651 ,  H01L29/78684 ,  Y10S977/762 ,  Y10S977/765 ,  Y10S977/938

Abstract: A semiconductor device includes a drain, a source, a gate electrode, and a nanowire between the source and drain. The nanowire has a first section with a first thickness and a second section with a second thickness greater than the first thickness. The second section is between the first section and at least one of the source or drain. The first nanowire includes a channel when a voltage is applied to the gate electrode.

公开(公告)号：US10319863B2

公开(公告)日：2019-06-11

申请号：US15373065

申请日：2016-12-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Hun Lee ,  Dong Woo Kim ,  Dong Chan Suh ,  Sun Jung Kim

IPC: H01L29/78 ,  H01L29/06 ,  H01L29/66 ,  H01L21/02 ,  H01L29/786 ,  H01L27/092 ,  H01L29/423 ,  H01L21/8238 ,  H01L29/775 ,  B82Y10/00 ,  H01L29/08

Abstract: A semiconductor device includes a drain, a source, a gate electrode, and a nanowire between the source and drain. The nanowire has a first section with a first thickness and a second section with a second thickness greater than the first thickness. The second section is between the first section and at least one of the source or drain. The first nanowire includes a channel when a voltage is applied to the gate electrode.

公开(公告)号：US20180025901A1

公开(公告)日：2018-01-25

申请号：US15416408

申请日：2017-01-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Keum Seok Park ,  Sun Jung Kim ,  Yi Hwan Kim ,  Pan Kwi Park ,  Dong Suk Shin ,  Hyun Kwan Yu ,  Seung Hun Lee

IPC: H01L21/02 ,  B08B7/04 ,  H01L29/66 ,  B08B7/00 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/02057 ,  B08B7/0035 ,  B08B7/04 ,  H01J37/32091 ,  H01J37/32889 ,  H01J2237/335 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/67034 ,  H01L21/67109 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67201 ,  H01L21/6831 ,  H01L21/68707 ,  H01L21/68742 ,  H01L29/165 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/66659 ,  H01L29/7848

Abstract: A precleaning apparatus includes a chamber having an internal space in which a substrate is cleaned, a substrate support disposed in the chamber and configured to support the substrate, a plasma generation unit disposed in the chamber and configured to generate plasma gas, a heating unit configured to heat the substrate on the substrate support, a cleaning gas supply unit configured to supply gas for oxide etching to the internal space of the chamber, and a hydrogen gas supply unit configured to supply hydrogen gas to the internal space of the chamber.

公开(公告)号：US09819891B2

公开(公告)日：2017-11-14

申请号：US14989220

申请日：2016-01-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Han Soo Lee ,  Hee Sung Chae ,  Kyung Min Kim ,  Dah Som Kim ,  Sun Jung Kim ,  Seung Hoon Jung

IPC: H04N5/378 ,  H03M1/00 ,  H04N5/357

CPC classification number: H04N5/378 ,  H03M1/00 ,  H03M1/123 ,  H03M1/56 ,  H04N5/357

Abstract: The image sensor includes a first analog-to-digital converter configured to convert a first analog pixel signal output from a first pixel in a row into first digital signals, a second analog-to-digital converter configured to convert a second analog pixel signal output from a second pixel in the row into second digital signals, a first output circuit configured to output a first bit value at a first position in the first digital signals in response to a first enable control signal, and a second output circuit configured to output a second bit value at a second position in the second digital signals in response to a second enable control signal, the second position in the second digital signals corresponding to the first position in the first digital signals, wherein the second enable control signal is activated with a delay from the activation of the first enable control signal.