公开(公告)号：US07172786B2

公开(公告)日：2007-02-06

申请号：US10845956

申请日：2004-05-14

申请人： Alexander Adrian Girling Driskill-Smith ,  Hieu Lam ,  Kim Y. Lee

发明人： Alexander Adrian Girling Driskill-Smith ,  Hieu Lam ,  Kim Y. Lee

IPC分类号： B05D5/12

CPC分类号： G11B5/855 ,  C25D3/562 ,  C25D5/022 ,  G11B5/858

摘要： The present invention discloses a method for the production of sub-micron structures on magnetic materials using electron beam lithography. A subtractive process is disclosed wherein a portion of a magnetic material layer is removed from the substrate using conventional lithography, and the remaining portion of the magnetic material layer is patterned by e-beam lithography. A additive process is also disclosed wherein a thin magnetic seed layer is deposited on the substrate, a portion of which is removed by conventional lithography and replaced with a non-magnetic conducting layer. The remaining portion of magnetic seed layer is patterned by e-beam lithography and the final magnetic structure produced by electroplating.

摘要翻译： 本发明公开了一种使用电子束光刻在磁性材料上生产亚微米结构的方法。 公开了一种消减方法，其中使用常规光刻将磁性材料层的一部分从衬底上除去，并且通过电子束光刻将磁性材料层的剩余部分图案化。 还公开了一种添加方法，其中将薄的磁性种子​​层沉积在基底上，其一部分通过常规的光刻法被去除并被非磁性导电层代替。 通过电子束光刻和通过电镀产生的最终磁性结构对磁性种子层的剩余部分进行构图。

公开(公告)号：US20060171069A1

公开(公告)日：2006-08-03

申请号：US11046740

申请日：2005-01-31

申请人： Daniel Bedell ,  Hung-Chin Guthrie ,  Ming Jiang ,  Hieu Lam ,  Jyh-Shuey Lo ,  Edward Lee ,  Aron Pentek

发明人： Daniel Bedell ,  Hung-Chin Guthrie ,  Ming Jiang ,  Hieu Lam ,  Jyh-Shuey Lo ,  Edward Lee ,  Aron Pentek

IPC分类号： G11B5/147

CPC分类号： G11B5/1871 ,  G11B5/3116

摘要： A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.

摘要翻译： 公开了一种包括写头的磁盘驱动器头，该写头包括具有基座部分的P 1层，在P 1层上形成的间隙层和形成在间隙层上的P 2层。 P 1层包括具有颈部和斜面部分的肩部结构。 还公开了一种具有具有肩部形成的P 1层的写入头的磁盘驱动器，以及用于制造具有具有肩部形成的P 1层的磁性记录头的写入磁极的方法。

公开(公告)号：US20090152235A1

公开(公告)日：2009-06-18

申请号：US11956292

申请日：2007-12-13

申请人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

摘要： A method for manufacturing a magnetic write head having a stepped trailing shield. The stepped trailing shield is formed by forming a non-magnetic bump over a write pole prior to electroplating a wrap-around magnetic shield. The method allows the location of the front edge of the bump relative to the back edge of the wrap-around shield to be monitored by measuring the electrical resistance of an electrical lapping guide formed concurrently with these features. This concurrent formation of a lapping guide can be used to define the relative location of other features as well, such as the location of a back edge of a wrap-around shield relative to a flare point of a write pole.

摘要翻译： 一种用于制造具有阶梯式后挡板的磁写头的方法。 在电镀环绕磁屏蔽之前，通过在写入极上形成非磁性凸块来形成阶梯式后屏蔽。 该方法允许通过测量与这些特征同时形成的电研磨引导件的电阻来监测凸块的前边缘相对于环绕护罩的后边缘的位置。 研磨引导件的这种同时形成也可以用于限定其它特征的相对位置，例如环绕屏蔽件的后边缘相对于写入极点的扩张点的位置。

公开(公告)号：US20080113090A1

公开(公告)日：2008-05-15

申请号：US11595765

申请日：2006-11-10

申请人： Hieu Lam ,  Patrick Rush Webb ,  Yi Zheng

发明人： Hieu Lam ,  Patrick Rush Webb ,  Yi Zheng

IPC分类号： B05D5/12

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： Methods and structures for the fabrication of wrap around and trailing shield structures are disclosed. Seed layers having anti-reflective properties are utilized, eliminating the need to deposit, then remove, traditional inorganic anti-reflection coatings prior to shield plating.

摘要翻译： 公开了用于制造包裹和后挡板结构的方法和结构。 利用具有抗反射性能的种子层，消除了在屏蔽电镀之前沉积，然后去除传统的无机抗反射涂层的需要。

公开(公告)号：US20070125656A1

公开(公告)日：2007-06-07

申请号：US11292606

申请日：2005-12-01

申请人： Wai Fu ,  Hieu Lam ,  Shahram Mehdizadeh ,  Yeak-Chong Wong

发明人： Wai Fu ,  Hieu Lam ,  Shahram Mehdizadeh ,  Yeak-Chong Wong

IPC分类号： C25D21/12

CPC分类号： C25D21/12 ,  C25D17/001

摘要： Embodiments of the present invention pertain to controlling thickness of wafers during electroplating process. Information pertaining to an old current used during an electroplating process of a previous wafer is received. Information pertaining to the thickness of the previous wafer is received. A new current is automatically determined. The new current is to be used during an electroplating process for a new wafer. The new current is determined based on the information pertaining to the old current and the information pertaining to the thickness of the previous wafer.

摘要翻译： 本发明的实施例涉及在电镀过程中控制晶片的厚度。 接收关于在前一晶片的电镀过程期间使用的旧电流的信息。 接收与前一晶片的厚度有关的信息。 自动确定新的电流。 在新的晶片的电镀过程中使用新的电流。 基于与旧电流有关的信息和与先前晶片的厚度相关的信息来确定新电流。

公开(公告)号：US20070058293A1

公开(公告)日：2007-03-15

申请号：US11228783

申请日：2005-09-15

申请人： Daniel Bedell ,  Hieu Lam ,  Kim Lee ,  Jyh-Shuey Lo

发明人： Daniel Bedell ,  Hieu Lam ,  Kim Lee ,  Jyh-Shuey Lo

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.

摘要翻译： 一种磁写头及其制造方法，其具有第一极结构，其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。 写头还包括具有非常窄的宽度（轨道宽度）并且与第一极结构的窄垂直切口结构自对准的第二极结构（P 2）。 写头提供优异的磁性，包括非常窄的轨道宽度和最小的侧面写入，同时避免极点的磁饱和。

公开(公告)号：US07914657B2

公开(公告)日：2011-03-29

申请号：US11292606

申请日：2005-12-01

申请人： Wai B. Fu ,  Hieu Lam ,  Shahram Y. Mehdizadeh ,  Yeak-Chong Wong

发明人： Wai B. Fu ,  Hieu Lam ,  Shahram Y. Mehdizadeh ,  Yeak-Chong Wong

IPC分类号： C25D21/12

CPC分类号： C25D21/12 ,  C25D17/001

摘要： Embodiments of the present invention pertain to controlling thickness of wafers during electroplating process. Information pertaining to an old current used during an electroplating process of a previous wafer is received. Information pertaining to the thickness of the previous wafer is received. A new current is automatically determined. The new current is to be used during an electroplating process for a new wafer. The new current is determined based on the information pertaining to the old current and the information pertaining to the thickness of the previous wafer.

摘要翻译： 本发明的实施例涉及在电镀过程中控制晶片的厚度。 接收关于在前一晶片的电镀过程期间使用的旧电流的信息。 接收与前一晶片的厚度有关的信息。 自动确定新的电流。 在新的晶片的电镀过程中使用新的电流。 基于与旧电流有关的信息和与先前晶片的厚度相关的信息来确定新电流。

公开(公告)号：US07612964B2

公开(公告)日：2009-11-03

申请号：US11228783

申请日：2005-09-15

申请人： Daniel Wayne Bedell ,  Hieu Lam ,  Kim Y. Lee ,  Jyh-Shuey Lo

发明人： Daniel Wayne Bedell ,  Hieu Lam ,  Kim Y. Lee ,  Jyh-Shuey Lo

IPC分类号： G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.

摘要翻译： 一种磁写头及其制造方法，其具有第一极结构，其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。 写头还包括具有非常窄的宽度（轨道宽度）并且与第一极结构的窄垂直切口结构自对准的第二极结构（P2）。 写头提供优异的磁性，包括非常窄的轨道宽度和最小的侧面写入，同时避免极点的磁饱和。

公开(公告)号：US07593186B2

公开(公告)日：2009-09-22

申请号：US11046740

申请日：2005-01-31

申请人： Daniel Wayne Bedell ,  Hung-Chin Guthrie ,  Ming Jiang ,  Hieu Lam ,  Jyh-Shuey Lo ,  Edward Hin Pong Lee ,  Aron Pentek

发明人： Daniel Wayne Bedell ,  Hung-Chin Guthrie ,  Ming Jiang ,  Hieu Lam ,  Jyh-Shuey Lo ,  Edward Hin Pong Lee ,  Aron Pentek

IPC分类号： G11B5/39 ,  G11B5/147

CPC分类号： G11B5/1871 ,  G11B5/3116

摘要： A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.

摘要翻译： 公开了一种包括写头的磁盘驱动器头，该写头包括具有基座部分的P1层，在P1层上形成的间隙层和形成在间隙层上的P2层。 P1层包括具有颈部和斜面部分的肩部结构。 还公开了具有具有肩部形成的P1层的写入头的磁盘驱动器，以及用于制造具有具有肩部形成的P1层的磁性记录头的写入磁极的方法。

公开(公告)号：US20090168260A1

公开(公告)日：2009-07-02

申请号：US12005558

申请日：2007-12-26

申请人： Donald G. Allen ,  Hieu Lam ,  Terence Tin-Lok Lam ,  Steve C. Puga

发明人： Donald G. Allen ,  Hieu Lam ,  Terence Tin-Lok Lam ,  Steve C. Puga

IPC分类号： G11B5/33

CPC分类号： G11B5/3153 ,  G11B5/1278

摘要： Methods and structures for the fabrication of both thin film longitudinal and perpendicular write heads are disclosed. A unique feature of these write heads is the inclusion of layered return poles, which comprise alternating layers of 22/78 and 80/20 NiFe alloys. The alternating layers also vary in thickness, the 22/78 NiFe layers having a nominal thickness of 1500 angstroms and the 80/20 NiFe layers having a nominal thickness of about 75 angstroms. Head efficiency and signal to noise ratios are significantly improved in heads having layered return pole construction.

摘要翻译： 公开了用于制造薄膜纵向和垂直写入头的方法和结构。 这些写头的一个独特之处在于包含层叠的返回极，其包括22/78和80/20 NiFe合金的交替层。 交替层的厚度也变化，22/78 NiFe层的标称厚度为1500埃，而80/20 NiFe层的标称厚度为约75埃。 在具有分层回极结构的头部中，头部效率和信噪比显着提高。