METHOD FOR FORMING CHIP PACKAGE
    12.
    发明申请
    METHOD FOR FORMING CHIP PACKAGE 有权
    形成芯片包装的方法

    公开(公告)号:US20120184070A1

    公开(公告)日:2012-07-19

    申请号:US13352234

    申请日:2012-01-17

    IPC分类号: H01L21/78

    摘要: An embodiment of the invention provides a method for forming a chip package which includes: providing a substrate having a first surface and a second surface, wherein at least two conducting pads are disposed on the first surface of the substrate; partially removing the substrate from the second surface of the substrate to form at least two holes extending towards the first surface, wherein the holes correspondingly and respectively align with one of the conducting pads; after the holes are formed, partially removing the substrate from the second substrate to form at least a recess extending towards the first surface, wherein the recess overlaps with the holes; forming an insulating layer on a sidewall and a bottom of the trench and on sidewalls of the holes; and forming a conducting layer on the insulating layer, wherein the conducting layer electrically contacts with one of the conducting pads.

    摘要翻译: 本发明的一个实施例提供了一种用于形成芯片封装的方法,其包括:提供具有第一表面和第二表面的衬底,其中至少两个导电焊盘设置在衬底的第一表面上; 从衬底的第二表面部分地去除衬底以形成朝向第一表面延伸的至少两个孔,其中,孔对应并分别对准导电焊盘中的一个; 在形成所述孔之后,从所述第二基板部分地移除所述基板以形成朝向所述第一表面延伸的至少一个凹部,其中所述凹部与所述孔重叠; 在沟槽的侧壁和底部以及孔的侧壁上形成绝缘层; 以及在所述绝缘层上形成导电层,其中所述导电层与所述导电焊盘之一电接触。