公开(公告)号：US3873869A

公开(公告)日：1975-03-25

申请号：US31591772

申请日：1972-12-18

Applicant: GEN ELECTRIC

Inventor： COPPOLA PATRICK P

IPC: H01J3/24 ,  H01J29/02 ,  H01J1/48

CPC classification number: H01J3/24 ,  H01J29/02

Abstract: Electrodes for establishing an electrostatic field to influence focus and deflection of an electron beam in a light valve have their surfaces which are exposed to the beam coated with chemically active, electrically conductive, sorbent materials in order to immediately sorb vapors which condense thereon. The electrodes are thus maintained uniformly conductive, precluding spurious charge buildup and facilitating precise control of the beam.

Abstract translation: 用于建立静电场以影响光阀中的电子束的聚焦和偏转的电极具有暴露于涂覆有化学活性的导电吸附材料的光束的表面，以便立即吸收在其上冷凝的蒸气。 因此，电极保持均匀的导电性，防止杂散电荷积聚并促进光束的精确控制。

公开(公告)号：US11037753B2

公开(公告)日：2021-06-15

申请号：US16450242

申请日：2019-06-24

Applicant: KLA-Tencor Corporation

Inventor： Christopher Sears

IPC: H01J37/143 ,  H01J3/24 ,  H01J3/02 ,  H01J37/28

Abstract: A magnetically microfocused electron emission source apparatus is disclosed. The apparatus may include a magnetic emitter unit, wherein the magnetic emitter unit comprises an emitter. Further, the magnetic emitter unit may include one or more magnetic portions formed from one or more magnetic materials, wherein the one or more magnetic portions of the magnetic emitter unit are configured to generate a magnetic field proximate to a tip of the emitter of the magnetic emitter unit for enhancing focusing of the emitted electrons from the electron emitter.

公开(公告)号：US20160163500A1

公开(公告)日：2016-06-09

申请号：US14964221

申请日：2015-12-09

Applicant: Hermes Microvision Inc.

Inventor： Shuai Li

IPC: H01J37/143 ,  H01J3/02 ,  H01J37/28 ,  H01J3/24

CPC classification number: H01J37/143 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/09 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/063 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/0653 ,  H01J2237/083 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/2806 ,  H01J2237/2817

Abstract: This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

Abstract translation: 本发明提供一种带电粒子源，其包括发射极和产生磁场分布的装置。 磁场分布在发射器尖端处的磁场分布最小，约为零或优选为零，并且沿着光轴立即最远离尖端。 在优选实施例中，磁场分布由提供在尖端处的反对称磁场的双磁性透镜提供，使得尖端处的磁场为零。

公开(公告)号：US08921802B2

公开(公告)日：2014-12-30

申请号：US13385618

申请日：2012-02-27

Applicant: Nicholas R. White

Inventor： Nicholas R. White

IPC: H01J3/20 ,  H01J37/14 ,  H01J3/22 ,  H01J3/24 ,  H01J37/05 ,  H01J37/317 ,  H01J49/06 ,  H01J49/20

CPC classification number: H01J3/22 ,  H01J3/24 ,  H01J37/05 ,  H01J37/14 ,  H01J37/3171 ,  H01J49/06 ,  H01J49/20 ,  H01J2237/055 ,  H01J2237/057

Abstract: The present invention is an apparatus and multi-unit assembly which is able to achieve two different and highly desirable functions: A focusing of a charged particle beam; and a mass separation of desired ion species from unwanted ion species in traveling ion beams. The apparatus is a simply organized and easily manufactured article; is relatively light-weight and less expensive to make; and is easier to install, align, and operate than conventionally available devices.

Abstract translation: 本发明是一种能够实现两种不同和非常理想的功能的装置和多单元组件：带电粒子束的聚焦; 并且将所需离子物质与不需要的离子物质在行进离子束中的质量分离。 该装置是简单有组织且容易制造的物品; 相对较轻，制造成本较低; 并且比常规可用设备更容易安装，对准和操作。

公开(公告)号：US6040808A

公开(公告)日：2000-03-21

申请号：US955507

申请日：1997-10-22

Applicant: Andrew Knox ,  John Beeteson

Inventor： Andrew Knox ,  John Beeteson

IPC: H01J31/12 ,  B41J2/447 ,  G09G1/20 ,  G09G3/22 ,  H01J3/02 ,  H01J3/24 ,  H01J9/02 ,  H01J29/46 ,  H01J29/68 ,  H01J29/70

CPC classification number: G09G3/22 ,  B41J2/4476 ,  G09G1/20 ,  H01J29/46 ,  H01J29/68 ,  H01J3/02 ,  H01J3/24 ,  H01J2329/00

Abstract: An electron source having a cathode and a permanent magnet having perforated channels extending between opposite poles of the magnet. Each channel forms electrons received from the cathode into an electron beam for guidance towards a target. The electron source has applications in a wide range of technologies, including display technology and printer technology.

Abstract translation: 具有阴极和永磁体的电子源具有在磁体的相对极之间延伸的穿孔通道。 每个通道形成从阴极接收的电子到电子束以用于朝向目标的引导。 电子源具有广泛的技术应用，包括显示技术和打印机技术。

公开(公告)号：US6002988A

公开(公告)日：1999-12-14

申请号：US1328

申请日：1997-12-30

Applicant: David Riley Whaley ,  Carter Michael Armstrong

Inventor： David Riley Whaley ,  Carter Michael Armstrong

IPC: H01F7/02 ,  H01J3/24 ,  H01J23/087 ,  H01J37/14 ,  H05H7/04 ,  H05H9/02 ,  H01J23/08

CPC classification number: H01J3/24 ,  H01J37/14 ,  H05H7/04

Abstract: In accordance with the present invention, there is provided a method of profiling a total vector potential field of a periodic permanent magnetic field structure, wherein desired elements of the total vector potential field are known. The magnetic field structure comprises a plurality of magnets having individual vector potential fields which collectively form the total vector potential field. The method provides for using an electromagnetic solver to generate data files representative of each individual magnet's contribution to the total vector potential field. Such data files are generated by assuming a magnetization value of one unit for a selected magnet, setting magnetization values of zero for all other magnets, setting the electromagnetic solver to use high resolution proximate the selected magnet and to use low resolution elsewhere, using the electromagnetic solver to compute the individual vector potential fields for all space for which the total vector potential field is to be profiled, and repeating such steps for each magnet of the plurality of magnets to generate the data files. The method further provides for using the data files to determine magnetization values for each magnet necessary to provide the desired elements of the total vector potential field, and using the determined magnetization values to superimpose the individual vector potential fields to determine the total vector potential field.

Abstract translation: 根据本发明，提供了一种对周期性永久磁场结构的总矢量势场进行轮廓分析的方法，其中已知总矢量势场的期望要素。 磁场结构包括具有共同形成总矢量势场的单个矢量势场的多个磁体。 该方法提供使用电磁解算器来生成代表每个磁体对总向量势场的贡献的数据文件。 这样的数据文件是通过为所选择的磁体假设一个单位的磁化值，为所有其它磁体设定磁化值0来设置的，将电磁解算器设置为使用选定磁体附近的高分辨率，并在其他地方使用低分辨率，使用电磁 求解器来计算要对其进行轮廓的总向量势场的所有空间的各向量势场，并且对于多个磁体中的每个磁体重复这样的步骤以生成数据文件。 该方法进一步提供使用数据文件来确定提供总向量势场的期望元素所必需的每个磁体的磁化值，并且使用确定的磁化值来叠加各个矢量势场以确定总向量势场。

公开(公告)号：US5523748A

公开(公告)日：1996-06-04

申请号：US127347

申请日：1993-09-28

Applicant: Takeshi Kuwajima

Inventor： Takeshi Kuwajima

IPC: H04L12/18 ,  H04L29/06 ,  H04L29/08 ,  G05B23/02 ,  H01J3/24

CPC classification number: H04L12/1868 ,  H04L29/06 ,  H04L69/324

Abstract: A communication control method in which a communication control unit A.sub.2 in an exclusive communication mode with a communication control unit A.sub.1 receives a requesting frame of an exclusive communication mode or broadcast communication frames from another communication control unit B. Unit B sends a communication frame for announcing an exclusive communication mode after receiving a NAK response from unit A.sub.2, sends message frames after the elapse of a predetermined time T.sub.1, and then sends a frame releasing the exclusive communication mode between Unit B and Unit A.sub.2 after sending the message frames. After receiving the announcing frame from unit B, unit A.sub.2 communicates with unit A.sub.1 to release the exclusive mode between them within the time T.sub.1, enters an exclusive mode with unit B, and then receives communication frames from unit B until it receives the frame of releasing the exclusive mode with unit B. When simultaneous broadcasting frames from unit B are detected, communication control unit A.sub.1, which is in the exclusive communication mode and transmitting message frames to unit A.sub.2, transmits a communication frame for temporarily releasing the exclusive communication mode to unit A.sub.2. The exclusive communication mode between units A.sub.1 and A.sub.2 is revived after unit A.sub.2 receives the casting frames from unit B.

Abstract translation: 一种通信控制方法，其中与通信控制单元A1以专用通信模式的通信控制单元A2从另一通信控制单元B接收专用通信模式的请求帧或广播通信帧。单元B发送通知帧 在从单元A2接收到NAK响应之后的专用通信模式，在经过预定时间T1之后发送消息帧，然后在发送消息帧之后发送在单元B和单元A2之间释放专用通信模式的帧。 从单元B接收到通知帧后，单元A2与单元A1通信，在时间T1内释放它们之间的排他模式，与单元B进入独占模式，然后从单元B接收通信帧，直到接收到释放帧 具有单元B的独占模式。当检测到来自单元B的同时广播帧时，处于专用通信模式的通信控制单元A1向单元A2发送消息帧，将用于临时释放专用通信模式的通信帧发送到单元 A2。 单元A1和A2之间的独占通信模式在单元A2从单元B接收到铸造帧之后恢复。

公开(公告)号：US4429229A

公开(公告)日：1984-01-31

申请号：US296550

申请日：1981-08-26

Applicant: Robert L. Gluckstern

Inventor： Robert L. Gluckstern

IPC: G21K1/093 ,  G21K1/08 ,  H01F1/00 ,  H01J3/24

CPC classification number: G21K1/093

Abstract: A method for producing various configurations of permanent magnet quadrupoles so that there is no coupling in the two transverse directions when focusing a charged particle beam is provided. Each configuration comprises a plurality of rotatable quadrupole disks, and means for rotating the quadrupole disks with respect to each other in a predetermined relationship.

Abstract translation: 提供永久磁铁四极杆的各种结构的方法，使得在聚焦带电粒子束时不会在两个横向方向上没有耦合。 每个配置包括多个可旋转四极盘，以及用于以预定关系相对于彼此旋转四极盘的装置。

公开(公告)号：US08334517B2

公开(公告)日：2012-12-18

申请号：US13012759

申请日：2011-01-24

Applicant: Ko-Chuan Jen ,  Zhimin Wan

Inventor： Ko-Chuan Jen ,  Zhimin Wan

IPC: H01J3/24 ,  G21K5/04

CPC classification number: H01J37/3171 ,  H01J37/141 ,  H01J2237/24542

Abstract: Apparatus and method for adjusting an ion beam between a mass analyzer and a substrate holder. Herein, one or more bended, such as arch-shaped, curved or zigzag shaped, bar magnets are configured to apply one or more magnetic fields to adjust the shape or cross section of an ion beam passing through a space partially surrounded by the one or more bended bar magnets. At least one of the gap width between neighbor bended bar magnets, the curvature of each bended bar magnet and the current flowing through each bended bar magnet may be fixed or adjusted dependently or independently. Therefore, the Lorentz force applied on the ion beam along different directions may be changed in a desired manner, and then the ion beam may be flexibly elongated, compressed or shaped to meet the process requirement.

Abstract translation: 用于调整质量分析器和衬底保持器之间的离子束的装置和方法。 这里，一个或多个弯曲的，例如拱形，弯曲或锯齿形的棒状磁体被构造成施加一个或多个磁场以调节通过部分地围绕一个或多个磁体的空间的离子束的形状或横截面， 更弯曲的酒吧磁铁。 相邻的弯曲棒状磁体之间的间隙宽度中的至少一个，每个弯曲棒状磁体的曲率和流过每个弯曲磁体的磁体的电流可以相关地或独立地被固定或调节。 因此，沿着不同方向施加在离子束上的洛伦兹力可以以期望的方式改变，然后离子束可以灵活地伸长，压缩或成形以满足工艺要求。

公开(公告)号：US06944185B2

公开(公告)日：2005-09-13

申请号：US09883009

申请日：2001-06-15

Applicant: Ema Patki ,  Daniel C. W. Wong

Inventor： Ema Patki ,  Daniel C. W. Wong

IPC: H04N21/2381 ,  H04N21/434 ,  H04N21/4363 ,  H04N21/438 ,  H04N21/63 ,  H04N21/6437 ,  H01J3/24

CPC classification number: H04N21/63 ,  H04N21/2381 ,  H04N21/434 ,  H04N21/4363 ,  H04N21/4381 ,  H04N21/6437

Abstract: A scheme is provided that permits the use of a selectable depacketization module to depacketize data streams. An RTP session manager is responsible for receiving RTP packets from a network and parsing/processing them. A depacketizer module is located using the type of data received on the stream. Thus a specific depacketizer is located at runtime depending on the coding decoding scheme (“codec”) used to compress the incoming data stream. A naming convention is followed in order for a specific depacketizer to be located. The depacketizer receives data that has already been parsed and is in a readable form. The depacketizer outputs this data using a well defined interface. This interface has been designed such that it is generic across a number of codecs. The interface passes all relevant information to the decoder where the actual depacketized data stream will be decompressed. The session manager need not know of any codec details since the depacketizer handles all codec specific issues. A default format is described for data that is output by a depacketizer. There is provision for a depacketizer to output data in this pre-defined format. However, there is also a provision for a depacketizer to output data itself in a pre-defined format. This data is provided to a handler that is aware of this format, so that the integration of depacketizers is seamless. Thus, a depacketizer can be made available as long as it implements certain defined interfaces.

Abstract translation: 提供了一种允许使用可选择拆包模块来拆包数据流的方案。 RTP会话管理器负责从网络接收RTP分组并解析/处理它们。 使用在流上接收的数据类型来定位解包器模块。 因此，根据用于压缩输入数据流的编码解码方案（“编解码器”），特定解包器位于运行时。 遵循命名约定，以便定位特定的拆分器。 解包器接收已经被解析并且是可读形式的数据。 拆包器使用明确的界面输出此数据。 该接口的设计使得它在多个编解码器之间是通用的。 该接口将所有相关信息传递到解码器，在该解码器处将解压缩实际的分组数据流。 会话管理器不需要知道任何编解码器详细信息，因为拆包器处理所有编解码器特定的问题。 描述了由拆包器输出的数据的默认格式。 提供了一个解包器以这种预定格式输出数据。 然而，还有一个用于解包器以预定格式输出数据本身的规定。 这个数据被提供给一个知道这种格式的处理程序，这样，拆包器的集成是无缝的。 因此，只要实现某些定义的接口，就可以使分解器可用。