Methods of fabricating a semiconductor device
    26.
    发明授权
    Methods of fabricating a semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US08084344B2

    公开(公告)日:2011-12-27

    申请号:US12292195

    申请日:2008-11-13

    Abstract: A method of fabricating a contact plug of a semiconductor device is provided, the method includes forming a gate pattern on a substrate, forming a capping pattern to cover an upper surface and sidewalls of the gate pattern, forming an interlayer insulation layer on the substrate such that the interlayer insulation layer exposes an upper surface of the capping pattern, and removing a portion of the capping pattern and the interlayer insulation layer such that the upper surface of the capping pattern is planarized.

    Abstract translation: 提供了制造半导体器件的接触插塞的方法,该方法包括在衬底上形成栅极图案,形成覆盖图案的上表面和侧壁的封盖图案,在衬底上形成层间绝缘层,如 层间绝缘层暴露封盖图案的上表面,并且去除封盖图案和层间绝缘层的一部分,使得封盖图案的上表面被平坦化。

    Wiring structure of a semiconductor device
    27.
    发明申请
    Wiring structure of a semiconductor device 审中-公开
    半导体器件的接线结构

    公开(公告)号:US20100127398A1

    公开(公告)日:2010-05-27

    申请号:US12592042

    申请日:2009-11-18

    Abstract: In a wiring structure of a semiconductor device and a method of manufacturing the same, a wiring structure includes a contact pad, a contact plug, a spacer and an insulation interlayer pattern. The contact pad is electrically connected to a contact region of a substrate. The contact plug is provided on the contact pad and is electrically connected to the contact pad. The spacer faces an upper side surface of the contact pad and sidewalls of the contact plug. The insulation interlayer pattern has an opening, the contact plug and the spacer being provided in the opening. The spacer of the wiring structure may prevent the contact pad from being damaged by a cleaning solution while forming a contact plug to be connected to a capacitor.

    Abstract translation: 在半导体器件的布线结构及其制造方法中,布线结构包括接触焊盘,接触插塞,间隔物和绝缘夹层图案。 接触垫电连接到基板的接触区域。 接触插头设置在接触垫上并且电连接到接触垫。 隔离物面向接触垫的上侧表面和接触插塞的侧壁。 绝缘夹层图案具有开口,接触插塞和间隔件设置在开口中。 布线结构的间隔件可以防止接触垫在形成要连接到电容器的接触插塞时被清洁溶液损坏。

    Slurry compositions and CMP methods using the same
    28.
    发明授权
    Slurry compositions and CMP methods using the same 有权
    浆料组合物和使用其的CMP方法

    公开(公告)号:US07718535B2

    公开(公告)日:2010-05-18

    申请号:US11984399

    申请日:2007-11-16

    CPC classification number: H01L21/3212 C09G1/02 C09K3/1463 H01L21/7684

    Abstract: The exemplary embodiments of the present invention providing new slurry compositions suitable for use in processes involving the chemical mechanical polishing (CMP) of a polysilicon layer. The slurry compositions include one or more non-ionic polymeric surfactants that will selectively form a passivation layer on an exposed polysilicon surface in order to suppress the polysilicon removal rate relative to silicon oxide and silicon nitride and improve the planarity of the polished substrate. Exemplary surfactants include alkyl and aryl alcohols of ethylene oxide (EO) and propylene oxide (PO) block copolymers and may be present in the slurry compositions in an amount of up to about 5 wt %, although much smaller concentrations may be effective. Other slurry additives may include viscosity modifiers, pH modifiers, dispersion agents, chelating agents, and amine or imine surfactants suitable for modifying the relative removal rates of silicon nitride and silicon oxide.

    Abstract translation: 提供适用于涉及多晶硅层的化学机械抛光(CMP)的工艺的新的浆料组合物的本发明的示例性实施方案。 浆料组合物包括一种或多种非离子聚合物表面活性剂,其将在暴露的多晶硅表面上选择性地形成钝化层,以便抑制相对于氧化硅和氮化硅的多晶硅去除速率并提高抛光的基材的平面度。 示例性的表面活性剂包括环氧乙烷(EO)和环氧丙烷(PO)嵌段共聚物的烷基和芳基醇,并且可以以高达约5重量%的量存在于浆料组合物中,尽管更小的浓度可能是有效的。 其它浆料添加剂可以包括粘度调节剂,pH调节剂,分散剂,螯合剂和适于改变氮化硅和氧化硅的相对去除速率的胺或亚胺表面活性剂。

    Recovery method using extendible hashing-based cluster logs in shared-nothing spatial database cluster
    29.
    发明授权
    Recovery method using extendible hashing-based cluster logs in shared-nothing spatial database cluster 有权
    在无共享空间数据库集群中使用可扩展散列集群日志的恢复方法

    公开(公告)号:US07440977B2

    公开(公告)日:2008-10-21

    申请号:US11157885

    申请日:2005-06-20

    Abstract: The present invention provides a recovery method using extendible hashing-based cluster logs in a shared-nothing spatial database cluster, which eliminates the duplication of cluster logs required for cluster recovery in a shared-nothing database cluster, so that recovery time is decreased, thus allowing the shared-nothing spatial database cluster system to continuously provide stable service. In the recovery method, if a failure occurs in a predetermined node, a second node in a group, including the node, records cluster logs in main memory on the basis of extendible hashing. If the node that has failed recovers itself using a local log, the second node in the group transmits cluster logs in packets to a recovery node that is the failed node. If the recovery node reflects the received cluster logs and maintains consistency with other nodes in the group, the recovery node resumes normal service.

    Abstract translation: 本发明提供了一种在无共享空间数据库集群中使用可扩展散列集群日志的恢复方法,其消除了在无共享数据库集群中集群恢复所需的集群日志的重复,从而减少了恢复时间 使无共享的空间数据库集群系统不断提供稳定的服务。 在恢复方法中,如果在预定节点中发生故障,则包括该节点在内的组中的第二节点基于可扩展哈希在主存储器中记录集群日志。 如果失败的节点使用本地日志恢复自身,则该组中的第二个节点将分组中的群集日志传输到作为故障节点的恢复节点。 如果恢复节点反映接收的群集日志并维护与组中其他节点的一致性,则恢复节点恢复正常服务。

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