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43 条记录 (耗时 0.032 秒)

    Control of solid state dimensional features
    21.
    发明授权
    Control of solid state dimensional features 有权
    控制固态尺寸特征

    公开(公告)号：US06464842B1

    公开(公告)日：2002-10-15

    申请号：US09599137

    申请日：2000-06-22

    申请人： Jene A. Golovchenko ,  Daniel Branton ,  Derek M. Stein ,  Ciaran J. McMullan ,  Jiali Li

    发明人： Jene A. Golovchenko ,  Daniel Branton ,  Derek M. Stein ,  Ciaran J. McMullan ,  Jiali Li

    IPC分类号： C23C1434

    CPC分类号： B81C99/0065 ,  G01N33/48721

    摘要： There is provided controlled fabrication of a solid state structural feature on a solid state structure by exposing the structure to a fabrication process environment the conditions of which are selected to produce a prespecified feature in the structure. A physical detection species is directed toward a designated structure location during process environment exposure of the structure, and the detection species is detected in a trajectory from traversal of the designated structure location, to indicate changing physical dimensions of the prespecified feature. The fabrication process environment is then controlled in response to the physical species detection to fabricate the structural feature. Also provided is a method for controlling a physical dimension of a structural feature or to form a feature by exposing the structure to a flux of ions at a selected structure temperature, the exposure conditions being controlled to cause formation of the feature or to cause at least one physical dimension of the feature to be changed, substantially by transport of material of the structure to the structural feature in response to the ion flux exposure.

    摘要翻译： 通过将结构暴露于制造工艺环境中来提供在固态结构上的固态结构特征的受控制造，其制造过程环境被选择以在结构中产生预先指定的特征。 在结构的过程环境暴露期间，物理检测物质指向指定的结构位置，并且在从指定结构位置的遍历的轨迹中检测检测物种，以指示预先指定的特征的变化的物理尺寸。 然后响应于物理物种检测来控制制造工艺环境以制造结构特征。 还提供了一种用于通过在所选择的结构温度下将结构暴露于离子通量来控制结构特征的物理尺寸或形成特征的方法，所述暴露条件被控制以引起特征的形成或至少引起 基本上通过将结构材料转移到响应于离子通量暴露的结构特征而要改变的特征的一个物理尺寸。

    Molecular characterization with molecular speed control
    22.
    发明授权
    Molecular characterization with molecular speed control 有权
    分子速度控制的分子表征

    公开(公告)号：US09274097B2

    公开(公告)日：2016-03-01

    申请号：US13040537

    申请日：2011-03-04

    申请人： Jene A. Golovchenko ,  Daniel Branton

    发明人： Jene A. Golovchenko ,  Daniel Branton

    IPC分类号： C12M1/34 ,  G01N33/487 ,  C12Q1/68 ,  B82Y15/00

    CPC分类号： G01N27/44791 ,  B82Y15/00 ,  C12Q1/6869 ,  G01N27/44743 ,  G01N33/48721 ,  Y10S977/762 ,  C12Q2565/631

    摘要： Provided is a first reservoir for containing a liquid solution including a molecule to be characterized and a second reservoir for containing a liquid solution. A solid state support includes a nanopore having a molecular inlet providing a fluidic connection to the first reservoir and a molecular outlet providing a fluidic connection to the second reservoir. An electrical connection is disposed between the first and second reservoirs to apply a molecular translocation voltage across the nanopore between the molecular inlet entrance and outlet exit. At least one electrical probe is disposed at the nanopore to apply a first voltage bias with respect to translocation voltage to slow progression of a molecule through the nanopore between the molecular inlet and outlet and to apply a second voltage bias with respect to translocation voltage to cause the molecule to proceed through the nanopore between the molecular inlet and outlet.

    摘要翻译： 提供了一种用于容纳包含要表征的分子的液体溶液的第一储存器和用于容纳液体溶液的第二储存器。 固态载体包括具有提供与第一储存器的流体连接的分子入口和提供与第二储存器的流体连接的分子出口的纳米孔。 电连接设置在第一和第二储存器之间，以在分子入口入口和出口出口之间跨纳米孔施加分子易位电压。 至少一个电探针设置在纳米孔处，以相对于易位电压施加第一电压偏压，以使分子缓慢进入分子入口和出口之间的纳米孔，并且相对于易位电压施加第二电压偏置以引起 分子通过分子入口和出口之间的纳米孔进行。

    Electron beam processing with condensed ice
    23.
    发明授权
    Electron beam processing with condensed ice 有权
    用冷凝冰进行电子束加工

    公开(公告)号：US08790863B2

    公开(公告)日：2014-07-29

    申请号：US13881504

    申请日：2011-10-26

    申请人： Daniel Branton ,  Anpan Han ,  Jene A. Golovchenko

    发明人： Daniel Branton ,  Anpan Han ,  Jene A. Golovchenko

    IPC分类号： G03F7/38 ,  B82B3/00 ,  G03F7/16

    CPC分类号： G03F7/2059 ,  B81C1/00531 ,  B81C2201/0143 ,  B81C2201/0159 ,  B82Y10/00 ,  B82Y40/00 ,  G01N23/2251 ,  H01J37/3174 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/2002 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/31796 ,  H01L21/0331 ,  H01L22/12 ,  H01L51/0014 ,  H01L51/0048

    摘要： In a method for imaging a solid state substrate, a vapor is condensed to an amorphous solid water condensate layer on a surface of a solid state substrate. Then an image of at least a portion of the substrate surface is produced by scanning an electron beam along the substrate surface through the water condensate layer. The water condensate layer integrity is maintained during electron beam scanning to prevent electron-beam contamination from reaching the substrate during electron beam scanning. Then one or more regions of the layer can be locally removed by directing an electron beam at the regions. A material layer can be deposited on top of the water condensate layer and any substrate surface exposed at the one or more regions, and the water condensate layer and regions of the material layer on top of the layer can be removed, leaving a patterned material layer on the substrate.

    摘要翻译： 在固态基板成像方法中，将蒸气冷凝成固态基板表面的无定形固体水凝结物层。 然后通过沿着衬底表面扫描电子束通过水凝结层产生衬底表面的至少一部分的图像。 在电子束扫描期间维持水凝结层的完整性，以防止电子束扫描期间电子束污染到达衬底。 然后可以通过在该区域处引导电子束来局部地去除该层的一个或多个区域。 材料层可以沉积在水冷凝物层的顶部和在一个或多个区域暴露的任何基底表面，并且水凝结物层和该层顶部上的材料层的区域可以被去除，留下图案化的材料层 在基板上。

    Electron Beam Processing With Condensed Ice
    24.
    发明申请
    Electron Beam Processing With Condensed Ice 有权
    冷凝电子束加工

    公开(公告)号：US20130288182A1

    公开(公告)日：2013-10-31

    申请号：US13881504

    申请日：2011-10-26

    申请人： Daniel Branton ,  Anpan Han ,  Jene A. Golovchenko

    发明人： Daniel Branton ,  Anpan Han ,  Jene A. Golovchenko

    IPC分类号： G03F7/20

    CPC分类号： G03F7/2059 ,  B81C1/00531 ,  B81C2201/0143 ,  B81C2201/0159 ,  B82Y10/00 ,  B82Y40/00 ,  G01N23/2251 ,  H01J37/3174 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/2002 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/31796 ,  H01L21/0331 ,  H01L22/12 ,  H01L51/0014 ,  H01L51/0048

    摘要： In a method for imaging a solid state substrate, a vapor is condensed to an amorphous solid water condensate layer on a surface of a solid state substrate. Then an image of at least a portion of the substrate surface is produced by scanning an electron beam along the substrate surface through the water condensate layer. The water condensate layer integrity is maintained during electron beam scanning to prevent electron-beam contamination from reaching the substrate during electron beam scanning. Then one or more regions of the layer can be locally removed by directing an electron beam at the regions. A material layer can be deposited on top of the water condensate layer and any substrate surface exposed at the one or more regions, and the water condensate layer and regions of the material layer on top of the layer can be removed, leaving a patterned material layer on the substrate.

    摘要翻译： 在固态基板成像方法中，将蒸气冷凝成固态基板表面的无定形固体水凝结物层。 然后通过沿着衬底表面扫描电子束通过水凝结层产生衬底表面的至少一部分的图像。 在电子束扫描期间维持水凝结层的完整性，以防止电子束扫描期间电子束污染到达衬底。 然后可以通过在该区域处引导电子束来局部地去除该层的一个或多个区域。 材料层可以沉积在水冷凝物层的顶部和在一个或多个区域暴露的任何基底表面，并且水凝结物层和该层顶部上的材料层的区域可以被去除，留下图案化的材料层 在基板上。

    Molecular Characterization with Molecular Speed Control
    25.
    发明申请
    Molecular Characterization with Molecular Speed Control 有权
    分子速度控制的分子表征

    公开(公告)号：US20110155574A1

    公开(公告)日：2011-06-30

    申请号：US13040537

    申请日：2011-03-04

    申请人： Jene A. Golovchenko ,  Daniel Branton

    发明人： Jene A. Golovchenko ,  Daniel Branton

    IPC分类号： G01N27/447 ,  G01N27/453 ,  B82Y99/00

    CPC分类号： G01N27/44791 ,  B82Y15/00 ,  C12Q1/6869 ,  G01N27/44743 ,  G01N33/48721 ,  Y10S977/762 ,  C12Q2565/631

    摘要： Provided is a first reservoir for containing a liquid solution including a molecule to be characterized and a second reservoir for containing a liquid solution. A solid state support includes a nanopore having a molecular inlet providing a fluidic connection to the first reservoir and a molecular outlet providing a fluidic connection to the second reservoir. An electrical connection is disposed between the first and second reservoirs to apply a molecular translocation voltage across the nanopore between the molecular inlet entrance and outlet exit. At least one electrical probe is disposed at the nanopore to apply a first voltage bias with respect to translocation voltage to slow progression of a molecule through the nanopore between the molecular inlet and outlet and to apply a second voltage bias with respect to translocation voltage to cause the molecule to proceed through the nanopore between the molecular inlet and outlet.

    摘要翻译： 提供了一种用于容纳包含要表征的分子的液体溶液的第一储存器和用于容纳液体溶液的第二储存器。 固态载体包括具有提供与第一储存器的流体连接的分子入口和提供与第二储存器的流体连接的分子出口的纳米孔。 电连接设置在第一和第二储存器之间，以在分子入口入口和出口出口之间跨纳米孔施加分子易位电压。 至少一个电探针设置在纳米孔处，以相对于易位电压施加第一电压偏压，以使分子缓慢进入分子入口和出口之间的纳米孔，并且相对于易位电压施加第二电压偏置以引起 分子通过分子入口和出口之间的纳米孔进行。