公开(公告)号：US20100203736A1

公开(公告)日：2010-08-12

申请号：US12414742

申请日：2009-03-31

申请人： Takamasa ICHINO ,  Kenji MAEDA ,  Kenetsu YOKOGAWA

发明人： Takamasa ICHINO ,  Kenji MAEDA ,  Kenetsu YOKOGAWA

IPC分类号： H01L21/3065

CPC分类号： H01J37/32642 ,  H01J37/32091 ,  H01J37/32183

摘要： There is provided a plasma processing method which controls a bias power to be constant without affecting the bias power supplied to a wafer, even if a part of a bias power supplied to a wafer is divided and supplied to a focus ring, and does not change the etching characteristic of the entire substrate to be processed. A high-frequency bias power supplied to a focus ring is changed by controlling the impedance control circuit according to the waste quantity of the focus ring that is wasted by the plasma processing. On the other hand, the high-frequency bias power supplied to the specimen support is controlled to the given high-frequency bias power by controlling the output of the high-frequency bias power supply.

摘要翻译： 提供了一种等离子体处理方法，其将偏置功率控制为恒定，而不影响提供给晶片的偏置功率，即使提供给晶片的偏置功率的一部分被分配并提供给聚焦环，并且不改变 要处理的整个基板的蚀刻特性。 通过根据等离子体处理浪费的聚焦环的浪费量控制阻抗控制电路来改变提供给聚焦环的高频偏置功率。 另一方面，通过控制高频偏置电源的输出，提供给检体支架的高频偏置功率被控制为给定的高频偏置功率。

公开(公告)号：US20090004871A1

公开(公告)日：2009-01-01

申请号：US12199028

申请日：2008-08-27

申请人： Kenji MAEDA ,  Tomoyuki TAMURA ,  Hiroyuki KOBAYASHI ,  Kenetsu YOKOGAWA ,  Tadamitsu KANEKIYO

发明人： Kenji MAEDA ,  Tomoyuki TAMURA ,  Hiroyuki KOBAYASHI ,  Kenetsu YOKOGAWA ,  Tadamitsu KANEKIYO

IPC分类号： H01L21/3065

CPC分类号： H01L21/67069 ,  H01J37/32082 ,  H01J37/32623 ,  H01J37/32706 ,  H01L21/31116 ,  H01L21/32136

摘要： A plasma processing method using plasma includes steps of applying current to a coil and introducing gas into a processing chamber, applying a bias power that does not generate plasma, applying a source power to generate plasma so that a plasma density distribution is high above an outer circumference of a semiconductor wafer and low above a center of the semiconductor wafer, and forming a shape of a sheath layer having a positive ion space charge directly above the semiconductor wafer so as to be convex in an upper direction from the semiconductor wafer, thereby eliminating foreign particles trapped in a boundary of the sheath layer having a positive ion space charge directly above the semiconductor wafer, generating plasma for processing the semiconductor wafer under a condition different from the conditions of the previous steps.

摘要翻译： 使用等离子体的等离子体处理方法包括以下步骤：向线圈施加电流并将气体引入处理室，施加不产生等离子体的偏置功率，施加源功率以产生等离子体，使得等离子体密度分布高于外部 半导体晶片的周围，并且低于半导体晶片的中心，并且在半导体晶片的正上方形成具有正离子空间电荷的鞘层的形状，以从半导体晶片向上方凸出，从而消除 杂质颗粒捕获在具有正离子空间电荷的鞘层的边界上，直接位于半导体晶片上方，产生用于在与前述步骤的条件不同的条件下处理半导体晶片的等离子体。

公开(公告)号：US20180059599A1

公开(公告)日：2018-03-01

申请号：US15670105

申请日：2017-08-07

申请人： Shinichi KATO ,  Kenji MAEDA ,  Hirochika OHNISHI

发明人： Shinichi KATO ,  Kenji MAEDA ,  Hirochika OHNISHI

IPC分类号： G03G15/20

CPC分类号： G03G15/2028 ,  G03G15/2053

摘要： A separator includes a base and a sheet. The base includes a first face to face a medium, a second face being opposite to the first face, and a third face being an end face in a longitudinal direction of the base. The sheet is disposed on a portion of each of the first and second faces that contacts or is adjacent to a rotator. The sheet has a length in a longitudinal direction thereof substantially equal to a length of the base in the longitudinal direction thereof. The sheet includes a projecting portion outboard from the length of the sheet in the longitudinal direction thereof. A combined length of the sheet and the projecting portion in the longitudinal direction of the sheet is greater than the length of the base in the longitudinal direction thereof. The projecting portion is attached to the second and third faces of the base.

公开(公告)号：US20130200042A1

公开(公告)日：2013-08-08

申请号：US13840663

申请日：2013-03-15

申请人： Makoto SATAKE ,  Kenji MAEDA ,  Kenetsu YOKOGAWA ,  Tsutomu TETSUKA ,  Tatehito USUI ,  Ryoji NISHIO

发明人： Makoto SATAKE ,  Kenji MAEDA ,  Kenetsu YOKOGAWA ,  Tsutomu TETSUKA ,  Tatehito USUI ,  Ryoji NISHIO

IPC分类号： G11B5/84

CPC分类号： G11B5/84 ,  C23F4/00 ,  H01F10/14 ,  H01F10/16 ,  H01J37/321 ,  H01J37/32146 ,  H01J37/32449 ,  H01L43/12

摘要： In processing a magnetic film composed for example of Fe, Co or Ni formed on a substrate and a nonvolatile metal containing the same in a vacuum reactor using a plasma generating gas for generating plasma and a gas containing C and O, a power applied to an antenna for generating plasma is time-modulated, wherein the feeding of gas containing C and O to the vacuum reactor is synchronized with the time-modulated antenna power so that the supply of gas containing C and O to the vacuum reactor is suppressed when the antenna power is high and the gas containing C and O is fed to the vacuum reactor when the antenna power is low.

摘要翻译： 在使用等离子体产生气体产生等离子体的真空反应器和含有C和O的气体中处理由例如形成在基板上的Fe，Co或Ni构成的磁膜和含有该磁膜的非挥发性金属， 用于产生等离子体的天线是时间调制的，其中将包含C和O的气体馈送到真空电抗器与时间调制的天线功率同步，使得当天线向真空电抗器供应包含C和O的气体被抑制时 功率高，当天线功率低时，含有C和O的气体进入真空电抗器。

公开(公告)号：US20080233277A1

公开(公告)日：2008-09-25

申请号：US12131454

申请日：2008-06-02

申请人： Makoto KUBOTA ,  Motokazu KOBAYASHI ,  Shinji ERITATE ,  Fumio UCHIDA ,  Kenji MAEDA ,  Chiemi SHIMIZU

发明人： Makoto KUBOTA ,  Motokazu KOBAYASHI ,  Shinji ERITATE ,  Fumio UCHIDA ,  Kenji MAEDA ,  Chiemi SHIMIZU

IPC分类号： B05D5/12

CPC分类号： H01L41/1876 ,  B41J2/14233 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/318 ,  Y10T29/42 ,  Y10T428/265

摘要： There is disclosed a piezoelectric thin film having less non-uniform portion and holding satisfactory piezoelectric characteristics, a method of manufacturing the film, a piezoelectric element using the piezoelectric thin film, and an ink jet system recording head using the piezoelectric element. In the piezoelectric thin film of perovskite crystals formed on a substrate by a sol-gel process and represented by a general formula Pb(1-x)Lax(ZryTi1-y)O3 (where 0≦x

摘要翻译： 公开了一种具有较小不均匀部分并保持令人满意的压电特性的压电薄膜，该薄膜的制造方法，使用该压电薄膜的压电元件和使用该压电元件的喷墨系统记录头。 在通过溶胶 - 凝胶法在基底上形成并由通式Pb（1-x）La xS（xi）x（x））表示的钙钛矿晶体的压电薄膜 （其中0 <= x <1，0.05 <= y <= 1），膜厚度为1 / 薄膜为1000nm以上至4000nm以下，薄膜的任意部分的最大值和最小值之间的差为0.05以下。

公开(公告)号：US20130199728A1

公开(公告)日：2013-08-08

申请号：US13829676

申请日：2013-03-14

申请人： Hiroyuki KOBAYASHI ,  Kenji MAEDA ,  Kenetsu YOKOGAWA ,  Masaru IZAWA ,  Tadamitsu KANEKIYO

发明人： Hiroyuki KOBAYASHI ,  Kenji MAEDA ,  Kenetsu YOKOGAWA ,  Masaru IZAWA ,  Tadamitsu KANEKIYO

IPC分类号： H01L21/3065

CPC分类号： H01J37/32449 ,  C23C16/455 ,  C23C16/50 ,  C23C16/503 ,  C23C16/505 ,  C23C16/509 ,  H01J37/32082 ,  H01J37/3244 ,  H01L21/3065 ,  Y10T137/0402

摘要： The object of the invention is to provide a plasma processing apparatus having enhanced plasma processing uniformity. The plasma processing apparatus comprises a processing chamber 1, means 13 and 14 for supplying processing gas into the processing chamber, evacuation means 25 and 26 for decompressing the processing chamber 1, an electrode 4 on which an object 2 to be processed such as a wafer is placed, and an electromagnetic radiation power supply 5A, wherein at least two kinds of processing gases having different composition ratios of O2 or N2 are introduced into the processing chamber through different gas inlets so as to control the in-plane uniformity of the critical dimension while maintaining the in-plane uniformity of the process depth.

公开(公告)号：US20130063457A1

公开(公告)日：2013-03-14

申请号：US13229858

申请日：2011-09-12

申请人： Charlotte Wendy Michele BORGERS ,  Benjamin John BROUGHTON ,  Kenji MAEDA ,  Tatsuo WATANABE

发明人： Charlotte Wendy Michele BORGERS ,  Benjamin John BROUGHTON ,  Kenji MAEDA ,  Tatsuo WATANABE

IPC分类号： G06T1/60 ,  G09G3/36 ,  G09G5/10

CPC分类号： G09G3/3648 ,  G09G2320/0242 ,  G09G2320/028

摘要： A display device is provided which includes a liquid crystal display panel including a plurality of pixels each having one or more sub-pixels; and control electronics configured to provide, in response to image data, signal voltages to the pixels in a first mode whereby an on-axis viewer and an off-axis viewer perceive substantially a same main image, and signal voltages to the pixels in a second mode whereby the on-axis viewer perceives the main image and the off-axis viewer perceives a side image different from the main image.

摘要翻译： 提供了一种显示装置，其包括：液晶显示面板，包括具有一个或多个子像素的多个像素; 以及控制电子设备，被配置为响应于图像数据向第一模式中的像素提供信号电压，由此轴上观看者和离轴观看者感知到基本相同的主图像，并且在第二模式中向像素提供信号电压 模式，其中在轴观看者感知主图像，而离轴观看者感知到与主图像不同的侧面图像。

公开(公告)号：US20120318836A1

公开(公告)日：2012-12-20

申请号：US13525365

申请日：2012-06-18

申请人： Kenji MAEDA ,  Tomotaka TAKEUCHI

发明人： Kenji MAEDA ,  Tomotaka TAKEUCHI

IPC分类号： B60R11/02 ,  B60R7/04

CPC分类号： B64D11/00153 ,  B60R11/0235 ,  B60R2011/0028 ,  B60R2011/0085 ,  B60R2011/0092 ,  B64D11/0015 ,  Y10T307/74 ,  Y10T307/858

摘要： A rotary support apparatus is provided that includes a rotation mechanism, a support mechanism, an object detector and a controller. The rotation mechanism is configured to rotatably support a supported body between a first position and a second position. The support mechanism is configured to support the supported body with at least a two stage support force at the first position. The object detector is configured to detect a person or an object. The controller is configured to control the support mechanism so as to switch the support force based on the results detected by the object detector.

摘要翻译： 提供一种旋转支撑装置，其包括旋转机构，支撑机构，物体检测器和控制器。 旋转机构构造成在第一位置和第二位置之间可旋转地支撑被支撑体。 支撑机构构造成在第一位置处以至少两级支撑力支撑被支撑体。 对象检测器被配置为检测人或物体。 控制器被配置为控制支撑机构，以便基于由对象检测器检测到的结果来切换支撑力。

公开(公告)号：US20110267373A1

公开(公告)日：2011-11-03

申请号：US13181090

申请日：2011-07-12

申请人： Masaaki NAKAYAMA ,  Shinobu FUSA ,  Ichiro KITAO ,  Kenji MAEDA

发明人： Masaaki NAKAYAMA ,  Shinobu FUSA ,  Ichiro KITAO ,  Kenji MAEDA

IPC分类号： G09G5/00

CPC分类号： H04N5/232 ,  H04N5/23245

摘要： In an image pickup apparatus of the present invention, a CCD 11 in which a plurality of pixels are arranged in a two-dimensional array, thereof the number of effective horizontal pixels is H and the number of effective vertical pixels is V; a aspect switching operator 18 that sets one of a plurality of aspect modes including a first aspect mode and a second aspect mode; an image processor 141 that generates first image data for recording in the first aspect mode, and generates second image data for recording in the second aspect mode, wherein the first image data for recording is generated using image data that is generated with pixels being H1 horizontal pixels by V1 vertical pixels included in the pixels on the CCD 11 or image data that is obtained by subjecting said image data to predetermined processing, the second image data for recording is generated using image data that is generated with pixels being H2 horizontal pixels by V2 vertical pixels included in the pixels on the solid-state imaging device or image data that is obtained by subjecting said image data to predetermined processing, and the first image data for recording and the second image data for recording satisfy the following relationships: H2

摘要翻译： 在本发明的图像拾取装置中，其中多个像素排列成二维阵列的CCD11，有效水平像素数为H，有效垂直像素数为V; 设置包括第一方面模式和第二方面模式的多个方面模式之一的方面切换操作器18; 图像处理器141，其生成用于在第一方面模式中记录的第一图像数据，并且生成用于在第二方面模式中记录的第二图像数据，其中用于记录的第一图像数据使用以水平为H1的像素生成的图像数据生成 包含在CCD 11上的像素中的V1垂直像素的像素或通过对所述图像数据进行预定处理而获得的图像数据，使用以H 2水平像素的像素乘以V2生成的图像数据生成用于记录的第二图像数据 包括在固态成像装置中的像素中的垂直像素或通过对所述图像数据进行预定处理而获得的图像数据，并且用于记录的第一图像数据和用于记录的第二图像数据满足以下关系：H2

公开(公告)号：US20110211092A1

公开(公告)日：2011-09-01

申请号：US13103424

申请日：2011-05-09

申请人： Shigeo SAKAUE ,  Koji AMEMIYA ,  Yoshimasa OKABE ,  Hironori KATSUURA ,  Hisakazu KOBAYASHI ,  Toru TAKASHIMA ,  Kenji MAEDA

发明人： Shigeo SAKAUE ,  Koji AMEMIYA ,  Yoshimasa OKABE ,  Hironori KATSUURA ,  Hisakazu KOBAYASHI ,  Toru TAKASHIMA ,  Kenji MAEDA

IPC分类号： H04N5/76

CPC分类号： H04N5/772 ,  H04N5/23293 ,  H04N5/907 ,  H04N5/91 ,  H04N9/7921 ,  H04N9/8042 ,  H04N9/8047 ,  H04N9/8205 ,  H04N9/8227

摘要： A method of reproducing an image file from a recording medium that stores an image file of a first type and/or an image file of a second type includes reproducing the first type of image file or second type of image file, detecting whether each of a predetermined number of image files stored on the recording medium is the first type of image file or the second type of image file during the reproduction of an image file, and converting the second type of image file to the first type of image file by reading the main image data from the second type of image file, generating display-image data (image data for display use) based on the read main image data, and storing the generated display-image data in the original image file if the image file is determined to be the second type of image file based on the detection result. The first type of image file is an image file containing a header, main image data, and display-image data, and storing the display-image data in an area other than an area storing the header. The second type of image file is an image file containing a header and main image data, and storing no display-image data in an area other than an area storing the header. The image files of predetermined number being image files that can be reproduced when reproduction is done in the forward and/or reverse direction from the image file being reproduced.

摘要翻译： 从存储第一类型的图像文件和/或第二类型的图像文件的记录介质再现图像文件的方法包括再现第一类型的图像文件或第二类型的图像文件，检测每个图像文件 存储在记录介质上的预定数量的图像文件是在图像文件再现期间的第一类型的图像文件或第二类型的图像文件，并且通过读取第二类型的图像文件到第一类型的图像文件 来自第二类型的图像文件的主图像数据，基于读取的主图像数据产生显示图像数据（用于显示使用的图像数据），并且如果确定了图像文件，则将生成的显示图像数据存储在原始图像文件中 作为基于检测结果的第二类图像文件。 第一类图像文件是包含标题，主图像数据和显示图像数据的图像文件，并且将显示图像数据存储在除了存储头部的区域之外的区域中。 第二类型的图像文件是包含标题和主图像数据的图像文件，并且在除了存储头部的区域之外的区域中不存储显示图像数据。 预定数量的图像文件是当正在再现的图像文件沿正向和/或相反方向进行再现时可以再现的图像文件。