公开(公告)号：US20240222475A1

公开(公告)日：2024-07-04

申请号：US18148617

申请日：2022-12-30

Applicant: Intel Corporation

Inventor： Punyashloka Debashis ,  Dmitri Evgenievich Nikonov ,  Ian Alexander Young ,  John J. Plombon ,  Scott B. Clendenning ,  Mahendra DC

IPC: H01L29/66 ,  H01F10/12 ,  H01F10/193 ,  H01F10/32 ,  H10N52/01

CPC classification number: H01L29/66984 ,  H01F10/12 ,  H01F10/1933 ,  H01F10/329 ,  H10N52/01

Abstract: Technologies for high-performance magnetoelectric spin-orbit (MESO) logic structures are disclosed. In the illustrative embodiment, the spin-orbit coupling layer of a MESO logic structure is a high-entropy perovskite. The use of a high-entropy perovskite provides versatility through tunability, as there is a wide range of possible combinations. Additional layers of the MESO logic structure may also be perovskites, such as the magnetoelectric layer and ferromagnetic layer. The various perovskite layers may be epitaxially compatible, allowing for growth of high-quality layers.

公开(公告)号：US20240147867A1

公开(公告)日：2024-05-02

申请号：US17978145

申请日：2022-10-31

Applicant: Intel Corporation

Inventor： Punyashloka Debashis ,  Dominique A. Adams ,  Hai Li ,  Chia-Ching Lin ,  Dmitri Evgenievich Nikonov ,  Kaan Oguz ,  John J. Plombon ,  Ian Alexander Young

IPC: H10N50/10 ,  G11C11/16 ,  H01L23/522 ,  H01L23/528 ,  H10B61/00 ,  H10N50/85

CPC classification number: H10N50/10 ,  G11C11/161 ,  H01L23/5226 ,  H01L23/5283 ,  H10B61/22 ,  H10N50/85

Abstract: Magnetoelectric magnetic tunnel junction (MEMTJ) logic devices comprise a magnetoelectric switching capacitor coupled to a pair of magnetic tunnel junctions (MTJs) by a conductive layer. The logic state of the MEMTJ is represented by the magnetization orientation of the ferromagnetic layer of the magnetoelectric capacitor, which can be switched through the application of an appropriate input voltage to the MEMTJ. The magnetization orientation of the magnetoelectric capacitor ferromagnetic layer is read out by the MTJs. The conductive layer is positioned between the capacitor and the MTJs. The MTJ ferromagnetic free layers are exchange coupled to the ferromagnetic layer of the magnetoelectric capacitor. The potential of an MTJ free layer is based on a supply voltage applied to the reference layer of the MTJ. The MTJ reference layers have a magnetization orientation that is parallel or antiparallel to the magnetization orientations of the ferromagnetic layer of the magnetoelectric capacitor.

公开(公告)号：US20240113220A1

公开(公告)日：2024-04-04

申请号：US17958094

申请日：2022-09-30

Applicant: Intel Corporation

Inventor： Arnab Sen Gupta ,  Ian Alexander Young ,  Dmitri Evgenievich Nikonov ,  Marko Radosavljevic ,  Matthew V. Metz ,  John J. Plombon ,  Raseong Kim ,  Uygar E. Avci ,  Kevin P. O'Brien ,  Scott B. Clendenning ,  Jason C. Retasket ,  Shriram Shivaraman ,  Dominique A. Adams ,  Carly Rogan ,  Punyashloka Debashis ,  Brandon Holybee ,  Rachel A. Steinhardt ,  Sudarat Lee

IPC: H01L29/78 ,  H01L21/02 ,  H01L29/20 ,  H01L29/24 ,  H01L29/51 ,  H01L29/66 ,  H01L29/76

CPC classification number: H01L29/78391 ,  H01L21/0254 ,  H01L21/02568 ,  H01L21/0262 ,  H01L29/2003 ,  H01L29/24 ,  H01L29/516 ,  H01L29/66522 ,  H01L29/6684 ,  H01L29/66969 ,  H01L29/7606

Abstract: Technologies for a transistor with a thin-film ferroelectric gate dielectric are disclosed. In the illustrative embodiment, a transistor has a thin layer of scandium aluminum nitride (ScxAl1-xN) ferroelectric gate dielectric. The channel of the transistor may be, e.g., gallium nitride or molybdenum disulfide. In one embodiment, the ferroelectric polarization changes when voltage is applied and removed from a gate electrode, facilitating switching of the transistor at a lower applied voltage. In another embodiment, the ferroelectric polarization of a gate dielectric of a transistor changes when the voltage is past a positive threshold value or a negative threshold value. Such a transistor can be used as a one-transistor memory cell.

公开(公告)号：US20240113212A1

公开(公告)日：2024-04-04

申请号：US17956296

申请日：2022-09-29

Applicant: Intel Corporation

Inventor： Ian Alexander Young ,  Dmitri Evgenievich Nikonov ,  Marko Radosavljevic ,  Matthew V. Metz ,  John J. Plombon ,  Raseong Kim ,  Kevin P. O'Brien ,  Scott B. Clendenning ,  Tristan A. Tronic ,  Dominique A. Adams ,  Carly Rogan ,  Hai Li ,  Arnab Sen Gupta ,  Gauri Auluck ,  I-Cheng Tung ,  Brandon Holybee ,  Rachel A. Steinhardt ,  Punyashloka Debashis

IPC: H01L29/775 ,  H01L21/02 ,  H01L21/465 ,  H01L29/06 ,  H01L29/24 ,  H01L29/423 ,  H01L29/49 ,  H01L29/66

CPC classification number: H01L29/775 ,  H01L21/02565 ,  H01L21/02603 ,  H01L21/465 ,  H01L29/0673 ,  H01L29/24 ,  H01L29/42392 ,  H01L29/4908 ,  H01L29/66969

Abstract: Technologies for a field effect transistor (FET) with a ferroelectric gate dielectric are disclosed. In an illustrative embodiment, a perovskite stack is grown on a buffer layer as part of manufacturing a transistor. The perovskite stack includes one or more doped semiconductor layers alternating with other lattice-matched layers, such as undoped semiconductor layers. Growing the doped semiconductor layers on lattice-matched layers can improve the quality of the doped semiconductor layers. The lattice-matched layers can be preferentially etched away, leaving the doped semiconductor layers as fins for a ribbon FET. In another embodiment, an interlayer can be deposited on top of a semiconductor layer, and a ferroelectric layer can be deposited on the interlayer. The interlayer can bridge a gap in lattice parameters between the semiconductor layer and the ferroelectric layer.

公开(公告)号：US20240097031A1

公开(公告)日：2024-03-21

申请号：US17947071

申请日：2022-09-16

Applicant: Intel Corporation

Inventor： Punyashloka Debashis ,  Rachel A. Steinhardt ,  Brandon Holybee ,  Kevin P. O'Brien ,  Dmitri Evgenievich Nikonov ,  John J. Plombon ,  Ian Alexander Young ,  Raseong Kim ,  Carly Rogan ,  Dominique A. Adams ,  Arnab Sen Gupta ,  Marko Radosavljevic ,  Scott B. Clendenning ,  Gauri Auluck ,  Hai Li ,  Matthew V. Metz ,  Tristan A. Tronic ,  I-Cheng Tung

IPC: H01L29/78 ,  H01L29/51

CPC classification number: H01L29/78391 ,  H01L29/516

Abstract: In one embodiment, a transistor device includes a gate material layer on a substrate, a ferroelectric (FE) material layer on the gate material, a semiconductor channel material layer on the FE material layer, a first source/drain material on the FE material layer and adjacent the semiconductor channel material layer, and a second source/drain material on the FE material layer and adjacent the semiconductor channel material layer and on an opposite side of the semiconductor channel material layer from the first source/drain material. A first portion of the FE material layer is directly between the gate material and the first source/drain material, and a second portion of the FE material layer is directly between the gate material and the second source/drain material.

公开(公告)号：US20230413684A1

公开(公告)日：2023-12-21

申请号：US17843976

申请日：2022-06-18

Applicant: Intel Corporation

Inventor： Punyashloka Debashis ,  Hai Li ,  Chia-Ching Lin ,  Dmitri Evgenievich Nikonov ,  Ian Alexander Young

IPC: H01L43/10 ,  H01L27/22 ,  H01L43/04 ,  H01L43/06 ,  H01L43/14

CPC classification number: H01L43/10 ,  H01L27/228 ,  H01L43/04 ,  H01L43/065 ,  H01L43/14

Abstract: Valleytronic devices comprise a channel layer having ferrovalley properties—band-spin splitting and Berry curvature dependence on the polarization of the channel layer. Certain monochalcogenides possess these ferrovalley properties. Valleytronic devices utilize ferrovalley properties to store and/or carry information. Valleytronic devices can comprise a cross geometry comprising a longitudinal portion and a transverse portion. A spin-polarized charge current injected into the longitudinal portion of the device is converted into a voltage output across the transverse portion via the inverse spin-valley Hall effect whereby charge carriers acquire an anomalous velocity in proportion to the Berry curvature and an applied in-plane electric field resulting from an applied input voltage. Due to the Berry curvature dependency on the material polarization, switching the polarity of the input voltage that switches the channel layer polarization also switches the polarity of the differential output voltage.

公开(公告)号：US20230317729A1

公开(公告)日：2023-10-05

申请号：US17710584

申请日：2022-03-31

Applicant: Intel Corporation

Inventor： Dmitri Evgenievich Nikonov ,  Chia-Ching Lin ,  Hai Li ,  Ian Alexander Young ,  Julien Sebot ,  Punyashloka Debashis

IPC: H01L27/118 ,  H01L29/78 ,  H01L29/66

CPC classification number: H01L27/11803 ,  H01L29/78391 ,  H01L29/66984

Abstract: In one embodiment, an integrated circuit apparatus includes a plurality of metallization layers, each metallization layer comprising voltage supply lines and signal lines. The apparatus also includes logic circuits formed between respective pairs of metallization layers, with each logic circuit comprising non-CMOS logic devices to perform an operation on a respective bit of an input set of bits. The non-CMOS logic devices may include one or more of ferroelectric field-effect transistor (FeFET) devices or spintronic logic devices (e.g., magnetoelectric spin orbit (MESO) devices or ferroelectric spin orbit logic (FSOL) devices), and each logic circuit may be formed on a different vertical plane within the apparatus.