摘要:
An etching chamber 1 incorporates a focus ring 9 so as to surround a semiconductor wafer W provided on a lower electrode 4. The plasma processor is provided with an electric potential control DC power supply 33 to control the electric potential of this focus ring 9, and so constituted that the lower electrode 4 is supplied with a DC voltage of, e.g., −400 to −600 V to control the electric potential of the focus ring 9. This constitution prevents surface arcing from developing along the surface of a substrate to be processed.
摘要:
A plasma etching method includes the step of: etching a silicon layer of a target object by using a plasma generated from a processing gas containing a fluorocarbon gas, a hydrofluorocarbon gas, a rare gas and an O2 gas and by employing a patterned resist film as a mask. The target object includes the silicon layer whose main component is silicon and the patterned resist film formed over the silicon layer.
摘要:
A portable type information processing terminal device is provided which includes a substrate carrying a substantially annular antenna coil thereon, a signal processing integrated circuit element arranged inside the antenna coil, a magnetic plate arranged under the substrate and a metal plate arranged under the magnetic plate, which are integrally formed and arranged on one or more than one metal parts including a battery pack. The metal plate is used to substantially regulate the resonance frequency of the antenna coil so that it is allowed to be arranged in a cabinet of the portable device.
摘要:
A alloy (Mg—X) of metal (X) and Mg in a liquid phase is made to react with B in a solid phase at a low temperature to manufacture a superconductor, which contains a large amount of MgB2 potential for MRI, linear motorcar, superconducting cavity, electric power transmission cable, high-magnetic field magnet for medical units, electric power storage (SMES), and the like and is formed in the shape of bulk, wire, and foil, by heat treatment performed at a low temperature for a short time and at low cost.
摘要翻译:使金属(X)的合金(Mg-X)和液相中的Mg在低温下与固相反应,制造含有大量MgB 2 O 2的超导体, 用于MRI,线性汽车,超导腔,电力传输电缆,医疗单元的高磁场磁体,电力存储(SMES)等的潜力,并且形成为体积,电线和箔的形状, 通过在低温下进行短时间和低成本的热处理。
摘要:
A tape controlling apparatus for use with a data recorder for recording and/or reproducing digital data on and/or from a tape-shaped recording medium. A target position signal for representing a target position to which the tape-shaped recording medium is traveled, a first command signal for representing a position traveling request and a second command signal for representing a write request or a read request are provided. Information of the target position of the medium is detected from the traveling position signal and stored. The difference between the present position of the medium and the stored target position is compared with a predetermined value, resulting in a control signal for driving the tape-shaped recording medium to a particular position between the present position and the target position when the difference is larger than the predetermined value. When the first command and the control signal are present, the medium is driven to the particular position between the present and target positions and then driven from the particular position to the target position.
摘要:
A connector apparatus for interconnecting at least two electronic apparatuses, such as a personal computer and a printer, interconnects input/output units of the equipment each having a light emitting element and a light receiving element. The connector apparatus enables data transmission/reception between the equipment. The connector apparatus includes at least two optical fibers and a pair of connecting units. The connecting units include a pair of connecting portions for holding both ends of the optical fibers. Each connecting portion has a magnet portion for attracting by the equipment and a limiting portion for limiting the rotational position at the time of connection to the equipment. With the ends of the optical fibers connected by the connecting portions to the electronic equipment, the ends of the optical fibers are held in the state of enabling data transmission/reception with the input/output units of the equipment.
摘要:
A method for reducing the blank spaces resulting from the storage of multiple data blocks on a storage medium. In one embodiment, data is stored on a magnetic tape. Data to be written to the tape is partitioned into user data blocks and management data blocks, the user data blocks being written on the tape sequentially in a longitudinal direction in tracks along the tape, and the management data blocks being written in tracks on the tape sequentially in a longitudinal direction that is opposite the write direction of the user data blocks. Writing the user data and management data in directions that are inversely related allows the amount of wasted storage space to be reduced.
摘要:
A lens focusing system in which predetermined signal components in a video signal are detected for focusing an image by maximizing the predetermined signal components, includes a lens for focusing an image on an image pickup device operative to convert light from the lens into electric signals; a signal processing circuit for processing the output electric signals from the image pickup device to obtain video signals; a filter which has a transfer characteristic approximating that of a lens system which is out of focus; and a subtracting circuit for eliminating video signal components which pass through the filter from the electric signals output by the image pickup device. Novel digital filters particularly adapted for use with such lens focusing systems also are provided.
摘要:
In an apparatus for recording and/or reproducing an information signal, such as, a PCM (pulse-code modulated) signal and the like, in slant tracks on a recording tape by means of rotary heads, and in which, when an index signal is recorded in, or erased from an area adjacent a part of a slant track in which the PCM signal is recorded, an index area signal which specifies the area for recording or reproducing the index signal is formed on the basis of address data in the reproduced PCM signal. Therefore, the index signal area always has a predetermined positional relation to a recording area of the PCM signal so that when the index signal is recorded in or erased from the index signal area, erasure of the adjacent PCM signal is prevented.
摘要:
Disclosed is a semiconductor device fabricating method. A substrate is provided thereon with: an inorganic insulating film; a first inorganic sacrifice film stacked on the inorganic insulating film and having components different from those of the inorganic insulating film; a second sacrifice film formed of an inorganic insulative film stacked on the first sacrifice film, wherein a pattern for forming grooves for wiring embedment is formed in the second sacrifice film; and an organic layer including a photoresist film, wherein a pattern for forming holes for wiring embedment is formed in the organic film. According to the present invention, the thickness of the organic layer is set to be greater than the sum of the thicknesses of etch target films, i.e., the insulating film, the first sacrifice film and the second sacrifice film; the etch target films are etched in a selectivity-less manner by using plasma generated from a mixed gas of CF4 gas and CHF3 gas.