-
公开(公告)号:US11658141B2
公开(公告)日:2023-05-23
申请号:US17680477
申请日:2022-02-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jiseok Hong , Unbyoung Kang , Myungsung Kang , Taehun Kim , Sangcheon Park , Hyuekjae Lee , Jihwan Hwang
CPC classification number: H01L24/08 , H01L22/22 , H01L24/05 , H01L24/06 , H01L24/29 , H01L24/32 , H01L24/92 , H01L25/0657 , H01L25/50 , H01L23/481 , H01L2224/05124 , H01L2224/05564 , H01L2224/05647 , H01L2224/06051 , H01L2224/08145 , H01L2224/2919 , H01L2224/29028 , H01L2224/32145 , H01L2224/9211
Abstract: According to an aspect of the inventive concept, there is provided a die-to-wafer bonding structure including a die having a first test pad, a first bonding pad formed on the first test pad, and a first insulating layer, the first bonding pad penetrates the first insulating layer. The structure may further include a wafer having a second test pad, a second bonding pad formed on the second test pad, and a second insulating layer, the second bonding pad penetrates the second insulating layer. The structure may further include a polymer layer surrounding all side surfaces of the first bonding pad and all side surfaces of the second bonding pad, the polymer layer being arranged between the die and the wafer. Additionally, the wafer and the die may be bonded together.
-
公开(公告)号:US11508685B2
公开(公告)日:2022-11-22
申请号:US16992895
申请日:2020-08-13
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jihwan Suh , Un-Byoung Kang , Taehun Kim , Hyuekjae Lee , Jihwan Hwang , Sang Cheon Park
IPC: H01L23/00 , H01L25/065 , H01L25/18
Abstract: A semiconductor package includes a substrate, a first semiconductor chip disposed on the substrate, and a second semiconductor chip disposed on a top surface of the first semiconductor chip. The first semiconductor chip includes a conductive pattern disposed on the top surface of the first semiconductor chip and a first protective layer covering the top surface of the first semiconductor chip and at least partially surrounds the conductive pattern. The second semiconductor chip includes a first pad that contacts a first through electrode on a bottom surface of the second semiconductor chip. A second protective layer surrounds the first pad and covers the bottom surface of the second semiconductor chip. A third protection layer fills a first recess defined in the second protective layer to face the inside of the second protective layer. The first protective layer and the third protective layer contact each other.
-
公开(公告)号:US20220181285A1
公开(公告)日:2022-06-09
申请号:US17680477
申请日:2022-02-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jiseok Hong , Unbyoung Kang , Myungsung Kang , Taehun Kim , Sangcheon Park , Hyuekjae Lee , Jihwan Hwang
IPC: H01L23/00 , H01L21/66 , H01L25/065 , H01L25/00
Abstract: According to an aspect of the inventive concept, there is provided a die-to-wafer bonding structure including a die having a first test pad, a first bonding pad formed on the first test pad, and a first insulating layer, the first bonding pad penetrates the first insulating layer. The structure may further include a wafer having a second test pad, a second bonding pad formed on the second test pad, and a second insulating layer, the second bonding pad penetrates the second insulating layer. The structure may further include a polymer layer surrounding all side surfaces of the first bonding pad and all side surfaces of the second bonding pad, the polymer layer being arranged between the die and the wafer. Additionally, the wafer and the die may be bonded together.
-
公开(公告)号:US20220139863A1
公开(公告)日:2022-05-05
申请号:US17228111
申请日:2021-04-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Eunseok Song , Hongjoo Baek , Kyungsuk Oh , Manho Lee , Hyuekjae Lee
IPC: H01L23/00 , H01L23/528 , H01L23/48 , H01L23/31
Abstract: An integrated circuit chip includes a substrate having an active surface and a back surface opposite to the active surface; a front-end-of-line (FEOL) structure disposed on the active surface of the substrate; a first back-end-of-line (BEOL) structure disposed on the FEOL structure; an intermediate connection layer disposed under the back surface of the substrate, the intermediate connection layer including a charge storage, and metal posts disposed around the charge storage; and a re-distribution structure layer disposed under the intermediate connection layer.
-
公开(公告)号:US20210358875A1
公开(公告)日:2021-11-18
申请号:US17155657
申请日:2021-01-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyuekjae Lee , Jongho Lee , Jihoon Kim , Taehun Kim , Sangcheon Park , Jinkyeong Seol , Sanghoon Lee
IPC: H01L23/00 , H01L25/065 , H01L25/18 , H01L21/56 , H01L25/00
Abstract: A semiconductor package includes a first connection structure, a first semiconductor chip on an upper surface of the first connection structure, a first molding layer on the upper surface of the first connection structure and surrounding the first semiconductor chip, a first bond pad on the first semiconductor chip, a first bond insulation layer on the first semiconductor chip and the first molding layer and surrounding the first bond pad, a second bond pad directly contacting the first bond pad, a second bond insulation layer surrounding the second bond pad; and a second semiconductor chip on the second bond pad and the second bond insulation layer.
-
公开(公告)号:US20210104482A1
公开(公告)日:2021-04-08
申请号:US16985445
申请日:2020-08-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jiseok Hong , Unbyoung Kang , Myungsung Kang , Taehun Kim , Sangcheon Park , Hyuekjae Lee , Jihwan Hwang
IPC: H01L23/00 , H01L21/66 , H01L25/00 , H01L25/065
Abstract: According to an aspect of the inventive concept, there is provided a die-to-wafer bonding structure including a die having a first test pad, a first bonding pad formed on the first test pad, and a first insulating layer, the first bonding pad penetrates the first insulating layer. The structure may further include a wafer having a second test pad, a second bonding pad formed on the second test pad, and a second insulating layer, the second bonding pad penetrates the second insulating layer. The structure may further include a polymer layer surrounding all side surfaces of the first bonding pad and all side surfaces of the second bonding pad, the polymer layer being arranged between the die and the wafer. Additionally, the wafer and the die may be bonded together.
-
公开(公告)号:US12261164B2
公开(公告)日:2025-03-25
申请号:US18480310
申请日:2023-10-03
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sang Cheon Park , Dae-Woo Kim , Taehun Kim , Hyuekjae Lee
IPC: H01L23/495 , H01L23/31 , H01L23/48 , H01L23/498 , H01L25/18
Abstract: A semiconductor package includes a redistribution substrate, a first memory chip provided on the redistribution substrate, the first memory chip comprising a first base layer, a first circuit layer provided on a top surface of the first base layer, and a first via penetrating the first base layer and connected to the first circuit layer and the redistribution substrate, a logic chip provided on the first memory chip, and a first molding layer surrounding the first memory chip. An outer side surface of the first molding layer is coplanar with a side surface of the logic chip. At an interface of the logic chip and the first memory chip, a first chip pad provided in the first circuit layer of the first memory chip and a second chip pad of the logic chip are formed of the same material and constitute one body.
-
公开(公告)号:US11955449B2
公开(公告)日:2024-04-09
申请号:US18054530
申请日:2022-11-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jihwan Suh , Un-Byoung Kang , Taehun Kim , Hyuekjae Lee , Jihwan Hwang , Sang Cheon Park
IPC: H01L23/00 , H01L25/065 , H01L25/18
CPC classification number: H01L24/32 , H01L24/03 , H01L24/08 , H01L24/27 , H01L25/0657 , H01L25/18 , H01L2224/0346 , H01L2224/08146 , H01L2224/32059 , H01L2224/3207 , H01L2224/32145 , H01L2224/33181 , H01L2225/06541 , H01L2225/06565 , H01L2225/06586
Abstract: A semiconductor package includes a substrate, a first semiconductor chip disposed on the substrate, and a second semiconductor chip disposed on a top surface of the first semiconductor chip. The first semiconductor chip includes a conductive pattern disposed on the top surface of the first semiconductor chip and a first protective layer covering the top surface of the first semiconductor chip and at least partially surrounds the conductive pattern. The second semiconductor chip includes a first pad that contacts a first through electrode on a bottom surface of the second semiconductor chip. A second protective layer surrounds the first pad and covers the bottom surface of the second semiconductor chip. A third protection layer fills a first recess defined in the second protective layer to face the inside of the second protective layer. The first protective layer and the third protective layer contact each other.
-
公开(公告)号:US20240096831A1
公开(公告)日:2024-03-21
申请号:US18455943
申请日:2023-08-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Enbin Jo , Hyungchul Shin , Wonil Lee , Hyuekjae Lee , Gwangjae Jeon
IPC: H01L23/00 , H01L25/065
CPC classification number: H01L24/08 , H01L25/0657 , H01L24/16 , H01L2224/0801 , H01L2224/08058 , H01L2224/08146 , H01L2224/16227 , H01L2225/06541 , H01L2924/37
Abstract: A semiconductor package includes: a first semiconductor chip including a first pad on a first substrate, and a first insulating layer at least partially surrounding the first pad; and a second semiconductor chip including a second pad below a second substrate and contacting the first pad, and a second insulating layer at least partially surrounding the second pad and contacting the first insulating layer. The first pad includes a first surface contacting the second pad and a second surface opposite the first surface, and an inclined side surface between the first surface and the second surface. The inclined side surface includes a first side surface and a second side surface, facing each other and inclined at a first obtuse angle and a second obtuse angle with respect to the second surface, respectively. Each of the first and second obtuse angles is about 100° to about 130°.
-
公开(公告)号:US20240071995A1
公开(公告)日:2024-02-29
申请号:US18212461
申请日:2023-06-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Raeyoung Kang , Minki Kim , Hyuekjae Lee
IPC: H01L25/065 , H01L23/00 , H01L23/498 , H01L23/522 , H01L23/538
CPC classification number: H01L25/0652 , H01L23/49827 , H01L23/5226 , H01L23/5384 , H01L24/05 , H01L24/08 , H01L24/09 , H01L24/16 , H01L24/20 , H01L24/24 , H01L24/73 , H01L2224/05147 , H01L2224/08113 , H01L2224/08148 , H01L2224/0903 , H01L2224/09051 , H01L2224/16227 , H01L2224/16238 , H01L2224/215 , H01L2224/24147 , H01L2224/24227 , H01L2224/73209 , H01L2924/1431 , H01L2924/1436 , H01L2924/1437 , H01L2924/1441
Abstract: A semiconductor package includes a first semiconductor chip including a first semiconductor layer, a first through-electrode passing through the first semiconductor layer in a vertical direction, and a first bonding pad connected to the first through-electrode, and a second semiconductor chip including a second semiconductor layer on the first semiconductor chip, a wiring structure between the second semiconductor layer and the first semiconductor chip, a wiring pad connected to the wiring structure below the wiring structure, and a second bonding pad connected to the wiring pad below the wiring pad and in contact with the first bonding pad, wherein the second bonding pad includes a protrusion protruding toward the wiring pad.
-
-
-
-
-
-
-
-
-