摘要:
A method for forming a dual damascene interconnect in a dielectric layer is provided. Generally, a first aperture is etched in the dielectric. A poison barrier layer is formed over part of the dielectric, which prevents resist poisoning. A patterned mask is formed over the poison barrier layer. A second aperture is etched into the dielectric layer, wherein at least part of the first aperture shares the same area as at least part of the second aperture.
摘要:
A ternary CAM system includes a main memory cell configured to store complementary data signals D/D#. A first transistor has a source coupled to receive data signal D#, and a gate coupled to receive a compare signal C. A second transistor has a source coupled to receive data signal D, and a gate coupled to receive complementary compare signal C#. A third transistor has a gate coupled to drain regions of the first and second transistors. A mask cell storing a mask value is coupled to the source of the third transistor. A pre-charged match line is coupled to the drain of the third transistor. If compare signals C/C# match data signals D/D#, then the third transistor is turned off, thereby isolating match line and mask cell. If compare signals C/C# don't match data signals D/D#, then the third transistor is turned on, thereby coupling mask cell and match line.
摘要:
Structures and methods that facilitate the formation of gate contacts for vertical transistors constructed with semiconductor pillars and spacer-like gates are disclosed. In a first embodiment, a gate contact rests on an extended gate region, a piece of a gate film, patterned at a side of a vertical transistor at the bottom of the gate. In a second embodiment, an extended gate region is patterned on top of one or more vertical transistors, resulting in a modified transistor structure. In a third embodiment, a gate contact rests on a top surface of a gate merged between two closely spaced vertical transistors. Optional methods and the resultant intermediate structures are included in the first two embodiments in order to overcome the related topography and ease the photolithography. The third embodiment includes alternatives for isolating the gate contact from the semiconductor pillars or for isolating the affected semiconductor pillars from the substrate.
摘要:
The invention involves a method of manufacturing a bonded semiconductor structure, comprising providing a support substrate which carries a transistor, and providing an interconnect region earned by the support substrate. The interconnect region includes a first multiple bypass bitline having an upper bypass interconnect and upper bypass via. The method includes providing a first conductive bonding layer carried by the interconnect region, wherein the first conductive bonding layer is connected to the upper bypass interconnect through the upper bypass via, and providing a vertical transistor carried by the first conductive bonding layer, the vertical transistor being in communication with the transistor through the interconnect region. The first multiple bypass bitline reduces the impedance experienced by the vertical transistor.
摘要:
Structures for 3D sense amplifiers for 3D memories are disclosed. A first embodiment uses one type of vertical transistors in constructing 3D sense amplifiers. A second embodiment uses both n- and p-type transistors for 3D sense amplifiers. Either or both of n- and p-type transistors are vertical transistors. The n- and p-type transistors may reside on different levels, or on the same level above a substrate if both are vertical transistors. In any embodiment, different options are available for gate contact formation. In any embodiments and options or alternatives thereof, one or more sense-enable circuits may be used. Sense amplifiers for several bit lines may be staggered on one or both sides of a memory array. Column multiplexers may be used to couple particular bit lines to data outputs. Bit-line multiplexers may be used to couple certain bit lines to shared 3D sense amplifiers.
摘要:
A clamp configured to clamp an end of a unit mask supported while a tensile force is applied to the unit mask includes a clamp main body, and a rotation contact portion rotatably supported by the clamp main body and directly contacting the end of the unit mask.
摘要:
A proton exchange polymer membrane whose surface is treated by direct fluorination using a fluorine gas, a membrane-electrode assembly, and a fuel cell comprising the same are provided. The proton exchange polymer membrane of the present invention exhibits improved proton conductivity, high dimensional stability, and decreased methanol permeability through introducing hydrophobic fluorine having high electronegativity to the surface of the polymer membrane. Therefore, the proton exchange polymer membrane with excellent electrochemical properties of the present invention can be preferably utilized as polymer electrolyte membrane for fuel cell, generating electric energy from chemical energy of fuels.
摘要:
A semiconductor structure includes an interconnect region, and a material transfer region coupled to the interconnect region through a bonding interface. The semiconductor structure includes a capping layer sidewall portion which extends annularly around the material transfer region and covers the bonding interface. The capping layer sidewall portion restricts the flow of debris from the bonding interface.
摘要:
The RFID system includes an RFID reader for sending information selected from among collision type information, idle type information, and readable type information, to all of the RFID tags depending on the number of signals in the corresponding time slot, and RFID tags for performing functions, in which, when information, indicating that a current time slot is a collision type, is fed back from the RFID reader, each of RFID tags selects one arbitrary value of either 0 or 1 and is assigned a time slot, in which a corresponding RFID tag will send a signal to the RFID reader, based on the selected value, a single tag group that caused a collision is divided into two sub-groups depending on the assigned time slots, and tags of the sub-groups send signals, including IDs thereof, to the RFID reader in different time slots for the respective sub-groups.
摘要:
A method of fabricating a semiconductor substrate includes providing a first semiconductor substrate, which includes a detaching layer spaced from an upper surface of the first semiconductor substrate; forming an ion-implanted layer proximate to an edge of the detaching layer; bonding a second semiconductor substrate to the first semiconductor substrate; forming a crack in the ion-implanted layer in response to applying stress to the ion-implanted layer; and detaching a portion of the first semiconductor substrate in response to cleaving through the crack.