公开(公告)号：US11183506B2

公开(公告)日：2021-11-23

申请号：US17005139

申请日：2020-08-27

Applicant: Silicon Storage Technology, Inc.

Inventor： Jinho Kim ,  Xian Liu ,  Feng Zhou ,  Parviz Ghazavi ,  Steven Lemke ,  Nhan Do

IPC: H01L27/11536 ,  H01L29/66 ,  H01L21/3205 ,  H01L27/11521 ,  H01L27/12 ,  H01L21/84 ,  H01L21/3213 ,  H01L29/08 ,  H01L29/423 ,  H01L21/28 ,  H01L21/027 ,  H01L21/3105 ,  H01L21/265 ,  H01L21/321

Abstract: A method of forming a semiconductor device where memory cells and some logic devices are formed on bulk silicon while other logic devices are formed on a thin silicon layer over insulation over the bulk silicon of the same substrate. The memory cell stacks, select gate poly, and source regions for the memory devices are formed in the memory area before the logic devices are formed in the logic areas. The various oxide, nitride and poly layers used to form the gate stacks in the memory area are formed in the logic areas as well. Only after the memory cell stacks and select gate poly are formed, and the memory area protected by one or more protective layers, are the oxide, nitride and poly layers used to form the memory cell stacks removed from the logic areas, and the logic devices are then formed.

公开(公告)号：US10797142B2

公开(公告)日：2020-10-06

申请号：US16208288

申请日：2018-12-03

Applicant: Silicon Storage Technology, Inc.

Inventor： Serguei Jourba ,  Catherine Decobert ,  Feng Zhou ,  Jinho Kim ,  Xian Liu ,  Nhan Do

IPC: H01L29/423 ,  H01L27/11521 ,  H01L29/08 ,  H01L29/10 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L21/027 ,  H01L21/308 ,  H01L21/3105 ,  G11C16/04 ,  G11C16/10 ,  G11C16/14 ,  G11C16/26

Abstract: A memory cell is formed on a semiconductor substrate having an upper surface with a plurality of upwardly extending fins. First and second fins extend in one direction, and a third fin extends in an orthogonal direction. Spaced apart source and drain regions are formed in each of the first and second fins, defining a channel region extending there between in each of the first and second fins. The source regions are disposed at intersections between the third fin and the first and second fins. A floating gate is disposed laterally between the first and second fins, and laterally adjacent to the third fin, and extends along first portions of the channel regions. A word line gate extends along second portions of the channel regions. A control gate is disposed over the floating gate. An erase gate is disposed over the source regions and the floating gate.

公开(公告)号：US10790292B2

公开(公告)日：2020-09-29

申请号：US16057749

申请日：2018-08-07

Applicant: Silicon Storage Technology, Inc.

Inventor： Jinho Kim ,  Xian Liu ,  Feng Zhou ,  Parviz Ghazavi ,  Steven Lemke ,  Nhan Do

IPC: H01L27/11521 ,  H01L21/027 ,  H01L27/11536 ,  H01L29/66 ,  H01L27/12 ,  H01L21/84 ,  H01L21/3205 ,  H01L21/3213 ,  H01L29/08 ,  H01L29/423 ,  H01L21/28 ,  H01L21/3105 ,  H01L21/265 ,  H01L21/321

Abstract: A method of forming a semiconductor device where memory cells and some logic devices are formed on bulk silicon while other logic devices are formed on a thin silicon layer over insulation over the bulk silicon of the same substrate. The memory cell stacks, select gate poly, and source regions for the memory devices are formed in the memory area before the logic devices are formed in the logic areas. The various oxide, nitride and poly layers used to form the gate stacks in the memory area are formed in the logic areas as well. Only after the memory cell stacks and select gate poly are formed, and the memory area protected by one or more protective layers, are the oxide, nitride and poly layers used to form the memory cell stacks removed from the logic areas, and the logic devices are then formed.

公开(公告)号：US10217850B2

公开(公告)日：2019-02-26

申请号：US15474879

申请日：2017-03-30

Applicant: Silicon Storage Technology, Inc.

Inventor： Feng Zhou ,  Xian Liu ,  Chien-Sheng Su ,  Nhan Do ,  Chunming Wang

IPC: H01L29/66 ,  H01L29/788 ,  H01L27/07 ,  H01L29/08 ,  H01L29/423 ,  H01L21/28

Abstract: A simplified method for forming pairs of non-volatile memory cells using two polysilicon depositions. A first polysilicon layer is formed on and insulated from the semiconductor substrate in a first polysilicon deposition process. A pair of spaced apart insulation blocks are formed on the first polysilicon layer. Exposed portions of the first poly silicon layer are removed while maintaining a pair of polysilicon blocks of the first polysilicon layer each disposed under one of the pair of insulation blocks. A second polysilicon layer is formed over the substrate and the pair of insulation blocks in a second polysilicon deposition process. Portions of the second polysilicon layer are removed while maintaining a first polysilicon block (disposed between the pair of insulation blocks), a second polysilicon block (disposed adjacent an outer side of one insulation block), and a third polysilicon block (disposed adjacent an outer side of the other insulation block).

公开(公告)号：US20180145253A1

公开(公告)日：2018-05-24

申请号：US15727776

申请日：2017-10-09

Applicant: Silicon Storage Technology, Inc.

Inventor： Feng Zhou ,  Xian Liu ,  Steven Lemke ,  Santosh Hariharan ,  Hieu Van Tran ,  Nhan Do

IPC: H01L45/00

CPC classification number: H01L45/1608 ,  H01L45/04 ,  H01L45/1233 ,  H01L45/1253 ,  H01L45/146 ,  H01L45/16 ,  H01L45/1675

Abstract: A method of forming a memory device includes forming a first layer of conductive material having opposing upper and lower surfaces, forming a layer of amorphous silicon on the upper surface of the first layer of conductive material, stripping away the layer of amorphous silicon, wherein some of the amorphous silicon remains in the upper surface of the first layer of conductive material, forming a layer of transition metal oxide material on the upper surface of the first layer of conductive material, and forming a second layer of conductive material on the layer of transition metal oxide material. The method smoothes the upper surface of the bottom electrode, and also provides an bottom electrode upper surface with stable material that is hard to oxidize.

公开(公告)号：US09959927B2

公开(公告)日：2018-05-01

申请号：US15404087

申请日：2017-01-11

Applicant: Silicon Storage Technology, Inc. ,  Agency For Science, Technology And Research

Inventor： Feng Zhou ,  Xian Liu ,  Nhan Do ,  Hieu Van Tran ,  Hung Quoc Nguyen ,  Mark Reiten ,  Zhixian Chen ,  Wang Xinpeng ,  Guo-Qiang Lo

IPC: G11C16/04 ,  G11C13/00 ,  H01L45/00

CPC classification number: G11C13/0007 ,  H01L45/08 ,  H01L45/1233 ,  H01L45/145 ,  H01L45/146 ,  H01L45/16

Abstract: A memory device and method comprising a metal oxide material disposed between and in electrical contact with first and second conductive electrodes, and a voltage source configured to apply a plurality of voltage pulses spaced apart in time across the first and second electrodes. For each one of the voltage pulses, an amplitude of the voltage increases during the voltage pulse.

公开(公告)号：US20180033482A1

公开(公告)日：2018-02-01

申请号：US15597709

申请日：2017-05-17

Applicant: Silicon Storage Technology, Inc. ,  Agency For Science, Technology, and Research

Inventor： Santosh Hariharan ,  Hieu Van Tran ,  Feng Zhou ,  Xian Liu ,  Steven Lemke ,  Nhan Do ,  Zhixian Chen ,  Xinpeng Wang

IPC: G11C13/00 ,  H01L27/24 ,  H01L45/00

CPC classification number: G11C13/0011 ,  G11C11/00 ,  G11C13/0007 ,  G11C13/0064 ,  G11C13/0069 ,  G11C2013/0066 ,  G11C2013/0078 ,  G11C2013/0083 ,  G11C2013/0088 ,  G11C2013/0092 ,  G11C2213/79 ,  H01L27/2436 ,  H01L27/2463 ,  H01L45/04 ,  H01L45/085 ,  H01L45/146

Abstract: A memory device includes a metal oxide material disposed between and in electrical contact with first and second conductive electrodes, and an electrical current source configured to apply one or more electrical current pulses through the metal oxide material. For each of the one or more electrical current pulses, an amplitude of the electrical current increases over time during the electrical current pulse to form a conductive filament in metal oxide material.

公开(公告)号：US20170373077A1

公开(公告)日：2017-12-28

申请号：US15701357

申请日：2017-09-11

Applicant: Silicon Storage Technology, Inc.

Inventor： Chien-Sheng Su ,  Jeng-Wei Yang ,  Feng Zhou

IPC: H01L27/11531 ,  H01L27/11524 ,  H01L27/11521 ,  H01L29/423 ,  H01L29/788 ,  H01L29/66

CPC classification number: H01L27/11531 ,  H01L27/11521 ,  H01L27/11524 ,  H01L29/42328 ,  H01L29/66484 ,  H01L29/66825 ,  H01L29/7881

Abstract: A method of forming split gate non-volatile memory cells on the same chip as logic and high voltage devices having HKMG logic gates. The method includes forming the source and drain regions, floating gates, control gates, and the poly layer for the erase gates and word line gates in the memory area of the chip. A protective insulation layer is formed over the memory area, and an HKMG layer and poly layer are formed on the chip, removed from the memory area, and patterned in the logic areas of the chip to form the logic gates having varying amounts of underlying insulation.

公开(公告)号：US20170025427A1

公开(公告)日：2017-01-26

申请号：US15180376

申请日：2016-06-13

Applicant: Silicon Storage Technology, Inc.

Inventor： Chien-Sheng Su ,  Jeng-Wei Yang ,  Feng Zhou

IPC: H01L27/115 ,  H01L29/66 ,  H01L29/423

CPC classification number: H01L27/11531 ,  H01L27/11521 ,  H01L27/11524 ,  H01L29/42328 ,  H01L29/66484 ,  H01L29/66825 ,  H01L29/7881

Abstract: A method of forming split gate non-volatile memory cells on the same chip as logic and high voltage devices having HKMG logic gates. The method includes forming the source and drain regions, floating gates, control gates, and the poly layer for the erase gates and word line gates in the memory area of the chip. A protective insulation layer is formed over the memory area, and an HKMG layer and poly layer are formed on the chip, removed from the memory area, and patterned in the logic areas of the chip to form the logic gates having varying amounts of underlying insulation.

Abstract translation: 在具有HKMG逻辑门的逻辑和高电压器件的同一芯片上形成分离栅非易失性存储单元的方法。 该方法包括在芯片的存储器区域中形成用于擦除栅极和字线栅极的源极和漏极区域，浮动栅极，控制栅极和多晶硅层。 在存储区域上形成保护绝缘层，并且在芯片上形成HKMG层和多晶硅层，从存储区域移除，并在芯片的逻辑区域中图案化以形成具有不同量的底层绝缘体的逻辑门 。

公开(公告)号：US11594453B2

公开(公告)日：2023-02-28

申请号：US17716950

申请日：2022-04-08

Applicant: Silicon Storage Technology, Inc.

Inventor： Serguei Jourba ,  Catherine Decobert ,  Feng Zhou ,  Jinho Kim ,  Xian Liu ,  Nhan Do

IPC: H01L21/77 ,  H01L27/11517 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788

Abstract: A method of forming a device on a substrate with recessed first/third areas relative to a second area by forming a fin in the second area, forming first source/drain regions (with first channel region therebetween) by first/second implantations, forming second source/drain regions in the third area (defining second channel region therebetween) by the second implantation, forming third source/drain regions in the fin (defining third channel region therebetween) by third implantation, forming a floating gate over a first portion of the first channel region by first polysilicon deposition, forming a control gate over the floating gate by second polysilicon deposition, forming an erase gate over the first source region and a device gate over the second channel region by third polysilicon deposition, and forming a word line gate over a second portion of the first channel region and a logic gate over the third channel region by metal deposition.