公开(公告)号：US20140273361A1

公开(公告)日：2014-09-18

申请号：US13829078

申请日：2013-03-14

Applicant: Wisconsin Alumni Research Foundation

Inventor： Michael S. Arnold ,  Padma Gopalan ,  Nathaniel S. Safron ,  Myungwoong Kim ,  Jonathan Woosun Choi

IPC: H01L21/04 ,  H01L21/027 ,  C01B31/04 ,  H01L21/02

CPC classification number: H01L21/042 ,  B82Y10/00 ,  B82Y40/00 ,  C01B32/194 ,  C01B2204/065 ,  H01L21/3065 ,  H01L21/3086 ,  H01L21/31058 ,  H01L21/31116 ,  H01L21/31138 ,  H01L29/0673 ,  H01L29/1606 ,  H01L29/66015 ,  H01L29/66439 ,  H01L29/778

Abstract: Methods of fabricating patterned substrates, including patterned graphene substrates, using etch masks formed from self-assembled block copolymer films are provided. Some embodiments of the methods are based on block copolymer (BCP) lithography in combination with graphoepitaxy. Some embodiments of the methods are based on BCP lithography techniques that utilize hybrid organic/inorganic etch masks derived from BCP templates. Also provided are field effect transistors incorporating graphene nanoribbon arrays as the conducting channel and methods for fabricating such transistors.

Abstract translation: 提供了使用由自组装嵌段共聚物膜形成的蚀刻掩模来制造包括图案化石墨烯衬底的图案化衬底的方法。 该方法的一些实施方案基于嵌段共聚物（BCP）平版印刷术与组合蛋白质外延法。 该方法的一些实施方案基于利用衍生自BCP模板的混合有机/无机蚀刻掩模的BCP光刻技术。 还提供了结合了石墨烯纳米线阵列作为导电沟道的场效应晶体管以及用于制造这种晶体管的方法。

公开(公告)号：US20220306475A1

公开(公告)日：2022-09-29

申请号：US17209944

申请日：2021-03-23

Applicant: Wisconsin Alumni Research Foundation

Inventor： Michael Scott Arnold ,  Robert Michael Jacobberger ,  Padma Gopalan ,  Jonathan H. Dwyer

IPC: C01B32/194 ,  C09D133/12

Abstract: Methods of transferring nanostructures from a first substrate to another substrate using a copolymer polymerized from one or more non-crosslinking monomers and one or more comonomers bearing crosslinkable groups as a transfer medium are provided. Relative to a poly(methyl methacrylate) homopolymer, the crosslinkable copolymers bond more strongly to the first substrate and, as a result, are able to transfer even very narrow nanostructures between substrates with high transfer yields.

公开(公告)号：US20200290949A1

公开(公告)日：2020-09-17

申请号：US16815772

申请日：2020-03-11

Applicant: Wisconsin Alumni Research Foundation

Inventor： Padma Gopalan ,  Balamurugan Ayyakkalai ,  Ri Chen

IPC: C07C225/16 ,  C07C225/14 ,  C08F12/26

Abstract: Formamide group-containing monomers and polymers made by polymerizing the monomers are provided. Also provided are methods of polymerizing the monomers and methods of synthesizing functionalized polymers by pre- and/or post-polymerization functionalization. The monomers are non-toxic and can generate highly reactive isocyanate and isonitrile precursors in a one-pot synthesis that enables the incorporation of complex functionalities into the side-chain of the polymers that are synthesized from the monomers.

公开(公告)号：US09673399B2

公开(公告)日：2017-06-06

申请号：US15196325

申请日：2016-06-29

Applicant: Wisconsin Alumni Research Foundation

Inventor： Michael Scott Arnold ,  Harold T. Evensen ,  Gerald Joseph Brady ,  Padma Gopalan ,  Yongho Joo

IPC: H01L51/00 ,  C01B31/02 ,  C09D11/52 ,  C09D11/106 ,  B05D1/18 ,  H01L29/06 ,  B05D1/20 ,  C09D11/037 ,  H01L51/05

CPC classification number: H01L51/0039 ,  B05D1/18 ,  B05D1/202 ,  C01B32/16 ,  C01B32/174 ,  C01B2202/02 ,  C09D11/037 ,  C09D11/106 ,  C09D11/52 ,  H01L51/0007 ,  H01L51/0043 ,  H01L51/0048 ,  H01L51/0558 ,  H01L51/0566

Abstract: High density films of semiconducting single-walled carbon nanotubes having a high degree of nanotube alignment are provided. Also provided are methods of making the films and field effect transistors (FETs) that incorporate the films as conducting channel materials. The single-walled carbon nanotubes are deposited from a thin layer of organic solvent containing solubilized single-walled carbon nanotubes that is continuously supplied to the surface of an aqueous medium, inducing evaporative self-assembly upon contacting a solid substrate.

公开(公告)号：US20170012228A1

公开(公告)日：2017-01-12

申请号：US15118058

申请日：2015-02-11

Applicant: WISCONSIN ALUMNI RESEARCH FOUNDATION

Inventor： Michael Scott Arnold ,  Padma Gopalan ,  Gerald Joseph Brady ,  Yongho Joo ,  Harold T. Evensen

IPC: H01L51/05 ,  H01L51/00

CPC classification number: H01L51/0558 ,  C01B32/168 ,  C01B2202/02 ,  H01L51/0003 ,  H01L51/0039 ,  H01L51/0048 ,  H01L51/0049

Abstract: High density films of semiconducting single-walled carbon nanotubes having a high degree of nanotube alignment are provided. Also provided are methods of making the films and field effect transistors (FETs) that incorporate the films as conducting channel materials. The single-walled carbon nanotubes are deposited from a thin layer of organic solvent containing solubilized single-walled carbon nanotubes that is spread over the surface of an aqueous medium, inducing evaporative self-assembly upon contacting a solid substrate.

Abstract translation: 提供具有高度纳米管取向度的半导体单壁碳纳米管的高密度膜。 还提供了制造将膜和场效应晶体管（FET）合并为导电沟道材料的方法。 单壁碳纳米管是从含有溶解的单壁碳纳米管的薄层有机溶剂沉积的，该溶解的单壁碳纳米管分散在水性介质的表面上，在接触固体基质时引起蒸发自组装。

公开(公告)号：US20160368773A1

公开(公告)日：2016-12-22

申请号：US15184036

申请日：2016-06-16

Applicant: Wisconsin Alumni Research Foundation

Inventor： Michael Scott Arnold ,  Padma Gopalan ,  Nathaniel S. Safron ,  Myungwoong Kim

IPC: C01B31/04

CPC classification number: C01B32/182 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/186 ,  C01B32/194 ,  C01B2204/32 ,  Y10S977/734 ,  Y10S977/843 ,  Y10S977/932 ,  Y10T428/24802

Abstract: Methods of producing layers of patterned graphene with smooth edges are provided. The methods comprise the steps of fabricating a layer of crystalline graphene on a surface, wherein the layer of crystalline graphene has a crystallographically disordered edge, and decreasing the crystallographic disorder of the edge of the layer of crystalline graphene by heating the layer of crystalline graphene on the surface at an elevated temperature in a catalytic environment comprising carbon-containing molecules.

公开(公告)号：US20160272840A1

公开(公告)日：2016-09-22

申请号：US14658402

申请日：2015-03-16

Applicant: Wisconsin Alumni Research Foundation

Inventor： Padma Gopalan ,  William L. Murphy ,  Samantha Kelly Schmitt

IPC: C09D133/14 ,  C12N5/00 ,  C08F220/28

CPC classification number: C09D133/14 ,  C08F220/28 ,  C12N5/0068 ,  C12N2533/40 ,  C12N2537/10 ,  C08F2220/286 ,  C08F2220/325 ,  C08F226/06

Abstract: Random copolymers, crosslinked thin films of the random copolymers and cell culture substrates comprising the crosslinked thin films are provided. Also provided are methods of making and using the copolymers, thin films and substrates. The copolymers are polymerized from glycidyl methacrylate monomers and vinyl azlactone monomers. The crosslinked thin films are substrate independent, in that they need not be covalently bound to a substrate to form a stable film on the substrate surface.

Abstract translation: 提供无规共聚物，包含交联薄膜的无规共聚物和细胞培养基质的交联薄膜。 还提供了制备和使用共聚物，薄膜和基材的方法。 共聚物由甲基丙烯酸缩水甘油酯单体和乙烯基吖内酯单体聚合。 交联的薄膜是基板独立的，因为它们不需要共价结合到基板上，以在基板表面上形成稳定的膜。

公开(公告)号：US20150344648A1

公开(公告)日：2015-12-03

申请号：US14724104

申请日：2015-05-28

Applicant: Wisconsin Alumni Research Foundation

Inventor： Padma Gopalan

IPC: C08J5/18 ,  C08J5/12 ,  C08J7/18

CPC classification number: C08J5/18 ,  C08J5/12 ,  C08J7/18 ,  C08J2300/00 ,  C08J2333/14 ,  C40B40/04 ,  C40B50/18

Abstract: The present invention provides crosslinked epoxy-functional copolymer films and microarrays built from the crosslinked epoxy-functional copolymer films. Microarrays incorporating the copolymers include a substrate on which a film of the crosslinked epoxy-functional copolymer is disposed and target molecules bound to the copolymer film. The crosslinked polymer films are well-suited for use as scaffolds for target molecules in microarrays because they provide a high density of binding sites for the target molecules, are mechanically stable, and may be coated onto a wide range of substrates.

公开(公告)号：US09105480B2

公开(公告)日：2015-08-11

申请号：US13829078

申请日：2013-03-14

Applicant: Wisconsin Alumni Research Foundation

Inventor： Michael S. Arnold ,  Padma Gopalan ,  Nathaniel S. Safron ,  Myungwoong Kim ,  Jonathan Woosun Choi

IPC: C01B31/04 ,  H01L21/04 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/3105 ,  H01L21/311 ,  B82Y10/00

CPC classification number: H01L21/042 ,  B82Y10/00 ,  B82Y40/00 ,  C01B32/194 ,  C01B2204/065 ,  H01L21/3065 ,  H01L21/3086 ,  H01L21/31058 ,  H01L21/31116 ,  H01L21/31138 ,  H01L29/0673 ,  H01L29/1606 ,  H01L29/66015 ,  H01L29/66439 ,  H01L29/778

Abstract: Methods of fabricating patterned substrates, including patterned graphene substrates, using etch masks formed from self-assembled block copolymer films are provided. Some embodiments of the methods are based on block copolymer (BCP) lithography in combination with graphoepitaxy. Some embodiments of the methods are based on BCP lithography techniques that utilize hybrid organic/inorganic etch masks derived from BCP templates. Also provided are field effect transistors incorporating graphene nanoribbon arrays as the conducting channel and methods for fabricating such transistors.

Abstract translation: 提供了使用由自组装嵌段共聚物膜形成的蚀刻掩模来制造包括图案化石墨烯衬底的图案化衬底的方法。 该方法的一些实施方案基于嵌段共聚物（BCP）平版印刷术与组合蛋白质外延法。 该方法的一些实施方案基于利用衍生自BCP模板的混合有机/无机蚀刻掩模的BCP光刻技术。 还提供了结合了石墨烯纳米线阵列作为导电沟道的场效应晶体管以及用于制造这种晶体管的方法。

公开(公告)号：US08999623B2

公开(公告)日：2015-04-07

申请号：US13831193

申请日：2013-03-14

Applicant: Wisconsin Alumni Research Foundation

Inventor： Padma Gopalan ,  Daniel Patrick Sweat ,  Jonathan Woosun Choi ,  Myungwoong Kim

IPC: G03C1/00 ,  G03F7/00 ,  B32B27/30 ,  B82Y30/00 ,  C09D153/00

CPC classification number: B32B27/30 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y30/00 ,  C08F220/18 ,  C09D153/00

Abstract: Polymer films comprising crosslinked random copolymers and methods for making the films are provided. Also provided are polymer films comprising random copolymers that are covalently linked to an underlying substrate. The polymer films can be incorporated into structures in which the films are employed as surface-modifying layers for domain-forming block copolymers and the structures can be used for pattern transfer applications via block copolymer lithography. The crosslinks between the random copolymer chains in the polymer films or the links between the random copolymer chains and the substrate surface are characterized in that they can be cleaved under relatively mild conditions.

Abstract translation: 提供包含交联无规共聚物的聚合物薄膜和制备薄膜的方法。 还提供了包含共价连接到下面的基底的无规共聚物的聚合物膜。 聚合物膜可以结合到其中使用膜作为区域形成嵌段共聚物的表面改性层的结构中，并且该结构可以通过嵌段共聚物光刻用于图案转移应用。 聚合物膜中的无规共聚物链之间的交联或无规共聚物链与基材表面之间的连接的特征在于它们可以在相对温和的条件下裂解。