公开(公告)号：US07557470B2

公开(公告)日：2009-07-07

申请号：US11709596

申请日：2007-02-22

Applicant: Martin L. Culpepper ,  Dariusz Golda

Inventor： Martin L. Culpepper ,  Dariusz Golda

IPC: H02K41/00 ,  H02K33/00

CPC classification number: B81B3/0062 ,  B81B2201/038 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/058 ,  Y10T74/20348

Abstract: A MEMS actuator includes a coil stack in the form of microfabricated, electrically conductive first and second superposed layers. A magnet array is superposed in magnetic communication with the coil stack, with first and second coils being selectively, electrically actuatable to generate relative movement between the coil stack and the magnet array both in-plane and out-of-plane. In various embodiments, a plurality of the actuators are integrally coupled to a microfabricated compliant mechanism to provide a high bandwidth, six degree of freedom nanopositioner.

Abstract translation: MEMS致动器包括呈微加工，导电的第一和第二叠置层的形式的线圈堆叠。 磁体阵列叠加成与线圈堆叠磁连通，其中第一和第二线圈被选择性地电致动以在线圈堆叠和磁体阵列之间在平面内和平面外产生相对运动。 在各种实施例中，多个致动器整体地耦合到微制造的柔性机构以提供高带宽六自由度的纳米定位器。

公开(公告)号：US07520998B2

公开(公告)日：2009-04-21

申请号：US11595876

申请日：2006-11-13

Applicant: Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

Inventor： Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

IPC: C23F1/00

CPC classification number: H02K41/0354 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1436 ,  H02K2201/18

Abstract: A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

Abstract translation: 提供了一种制造微型致动器的方法，包括：介质台，其具有介质装载表面和用于驱动介质载物台的线圈，其形成在介质载台的相对表面上至介质装载表面。 该方法包括在第一基板的第一表面上形成凹槽，在第二基板的第一表面上形成线圈，将第一基板的第一表面接合到第二基板的第一表面，并且形成介质装载表面 在第二基板的与第二基板的第一表面相对的第二表面上。

公开(公告)号：US20090051243A1

公开(公告)日：2009-02-26

申请号：US11902218

申请日：2007-09-20

Applicant: Alex Horng ,  I-Yu Huang ,  Don-Liang Liu

Inventor： Alex Horng ,  I-Yu Huang ,  Don-Liang Liu

IPC: H02N1/00

CPC classification number: H01H59/0009 ,  B81B3/0075 ,  B81B2201/038 ,  H01H1/06

Abstract: The present invention relates to a micro actuator, which is located on a substrate and includes a plate and a bushing. A rear end of the plate exhibits a tapered triangular shape or an arc-like shape or has at least a bump disposed on a bottom surface of the rear end of the plate, making that a non-planar contact is present between the rear end of the plate and the substrate when both are contacted, so as to effectively reduce the friction and driving voltage and prolong the lifespan of components.

Abstract translation: 微型致动器技术领域本发明涉及一种微型致动器，其位于基板上并且包括板和衬套。 板的后端呈锥形的三角形状或弧状，或至少具有设置在板的后端的底面上的凸起，使得在平板的后端之间存在非平面接触 当两者接触时，板和基板，以有效降低摩擦和驱动电压并延长部件的寿命。

公开(公告)号：US20090001845A1

公开(公告)日：2009-01-01

申请号：US11851784

申请日：2007-09-07

Applicant: Tamio IKEHASHI

Inventor： Tamio IKEHASHI

IPC: H02N11/00 ,  H01L35/00

CPC classification number: B81B3/0021 ,  B81B2201/038 ,  H01H59/0009 ,  H02N1/008

Abstract: An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.

Abstract translation: 本发明的致动器包括移动部件和驱动电极，驱动电极由彼此电隔离的电极部分组成并驱动移动部件。 驱动电压被选择性地施加到一些电极部分，以控制作用在移动部件上的静电力。

公开(公告)号：US07452741B2

公开(公告)日：2008-11-18

申请号：US11425100

申请日：2006-06-19

Applicant: Vladimir A. Aksyuk ,  Nagesh R. Basavanhally ,  Omar D. Lopez ,  Chien-Shing Pai

Inventor： Vladimir A. Aksyuk ,  Nagesh R. Basavanhally ,  Omar D. Lopez ,  Chien-Shing Pai

IPC: H01L21/00

CPC classification number: B81C1/00476 ,  B81B2201/038 ,  B81C1/00801

Abstract: The present invention provides a process for manufacturing an apparatus. The process, in one embodiment, includes providing a micro-electro-mechanical system (MEMS) device, the micro-electro-mechanical system (MEMS) device including an actuator coupled to a movable feature, sacrificial material fixing the actuator and movable feature with respect to one another, and a layer of material located over the actuator, movable feature and sacrificial material. The process may further include removing only a portion of the layer of material to expose the sacrificial material, and subjecting the exposed sacrificial material to an etchant to release the movable feature.

Abstract translation: 本发明提供一种制造装置的方法。 在一个实施例中，该过程包括提供微机电系统（MEMS）装置，微机电系统（MEMS）装置包括耦合到可移动特征的致动器，将致动器和可移动特征固定的牺牲材料 相对于彼此，以及位于致动器上方的材料层，可移动特征和牺牲材料。 该方法还可以包括仅去除材料层的一部分以暴露牺牲材料，以及将暴露的牺牲材料经历蚀刻剂以释放可移动特征。

公开(公告)号：US20080164576A1

公开(公告)日：2008-07-10

申请号：US11958945

申请日：2007-12-18

Applicant: Giuseppe Barillaro ,  Alessandro Diligenti ,  Caterina Riva ,  Roberto Campedelli ,  Stefano Losa

Inventor： Giuseppe Barillaro ,  Alessandro Diligenti ,  Caterina Riva ,  Roberto Campedelli ,  Stefano Losa

IPC: H01L21/04 ,  H01L29/06

CPC classification number: B81C1/00539 ,  B81B2201/038 ,  B81B2201/07 ,  B81B2201/12 ,  B81B2203/0118 ,  B81B2203/019 ,  B81C1/00595 ,  B81C2201/0136 ,  B81C2203/0714 ,  H01L27/10

Abstract: A process for manufacturing an interaction system of a microelectromechanical type for a storage medium, the interaction system provided with a supporting element and an interaction element carried by the supporting element, envisages the steps of: providing a wafer of semiconductor material having a substrate with a first type of conductivity (P) and a top surface; forming a first interaction region having a second type of conductivity (N), opposite to the first type of conductivity (P), in a surface portion of the substrate in the proximity of the top surface; and carrying out an electrochemical etch of the substrate starting from the top surface, the etching being selective with respect to the second type of conductivity (N), so as to remove the surface portion of the substrate and separate the first interaction region from the substrate, thus forming the supporting element.

Abstract translation: 一种用于制造用于存储介质的微机电类型的相互作用系统的方法，具有支撑元件的相互作用系统和由支撑元件承载的相互作用元件，其设想是提供具有基板的半导体材料晶片，其具有 第一类电导率（P）和顶面; 在所述顶表面附近的所述衬底的表面部分中形成具有与所述第一类型的导电性（P）相反的第二导电类型（N）的第一相互作用区域; 并且从顶表面开始进行基板的电化学蚀刻，所述蚀刻相对于所述第二导电类型（N）是选择性的，以便移除所述基板的表面部分并将所述第一相互作用区域与所述基板分离 ，从而形成支撑元件。

公开(公告)号：US07362488B2

公开(公告)日：2008-04-22

申请号：US11717022

申请日：2007-03-13

Applicant: Susumu Yasuda ,  Hidemasa Mizutani ,  Takayuki Yagi ,  Yasuhiro Shimada ,  Futoshi Hirose ,  Takahisa Kato

Inventor： Susumu Yasuda ,  Hidemasa Mizutani ,  Takayuki Yagi ,  Yasuhiro Shimada ,  Futoshi Hirose ,  Takahisa Kato

IPC: G02B26/08 ,  G09G5/00 ,  F16M13/00 ,  B44C1/22 ,  C25F3/00 ,  H01L21/302

CPC classification number: G02B26/105 ,  B81B3/0051 ,  B81B3/0067 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C2201/0133 ,  G02B26/0841 ,  Y10S359/90 ,  Y10S359/904

Abstract: The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.

Abstract translation: 可倾斜体装置包括框架构件，可倾斜体和具有扭转纵向轴线的一对扭转弹簧。 扭转弹簧沿着与可倾斜主体相对的扭转纵向轴线布置，其相对于框架构件围绕扭转纵向轴线柔性地和可旋转地支撑可倾斜体，并且包括多个平面部分，顺应方向与每个 另外当沿着扭转纵向轴线的方向观察时。 可倾斜体的重心位于扭转弹簧的扭转纵向轴线上。

公开(公告)号：US07329959B2

公开(公告)日：2008-02-12

申请号：US11365950

申请日：2006-02-27

Applicant: Kwang Ho Kim ,  Gwi Eun Song ,  Jae Hak Jeon ,  Yoon Pyo Lee

Inventor： Kwang Ho Kim ,  Gwi Eun Song ,  Jae Hak Jeon ,  Yoon Pyo Lee

IPC: B60L1/02 ,  F01K15/00 ,  F01K17/02 ,  F02C6/00 ,  F02C6/18

CPC classification number: H02K35/02 ,  B81B3/0024 ,  B81B2201/038 ,  F01K25/08 ,  F03G7/06 ,  H02K7/1876

Abstract: There is provided a micro power generator enhanced in efficiency and power generation output, and having an increased temperature range for operation. The micro power generator comprises: a high-temperature heat source; a low-temperature heat source; an enclosed body containing a working substance therein, the enclosed body being deformable by means of a phase change of the working substance between a first shape wherein heat can be transferred from the high-temperature heat source and a second shape wherein heat can be transferred to the low-temperature heat source; a permanent magnet constituting the enclosed body, the permanent magnet being maintained in a first position when the enclosed body has the first shape and in a second position when the enclosed body has the second shape; and a wire in which an electric current is induced by a movement of the permanent magnet. Further, the present invention provides an apparatus for producing a reciprocating movement between two heat sources having a temperature difference therebetween.

Abstract translation: 提供了增强效率和发电输出的微型发电机，并且具有增加的操作温度范围。 微型发电机包括：高温热源; 低温热源; 封闭体，其中包含工作物质，所述封闭体可通过所述工作物质的相变在第一形状和第二形状之间变形，所述第一形状可以从所述高温热源传递热量， 低温热源; 构成所述封闭体的永磁体，当所述封闭体具有所述第一形状时，所述永磁体保持在第一位置，并且当所述封闭体具有所述第二形状时，所述永磁体保持在第一位置。 以及通过永磁体的移动而引起电流的电线。 此外，本发明提供一种用于在两个温度差之间的两个热源之间产生往复运动的装置。

公开(公告)号：US20070269585A1

公开(公告)日：2007-11-22

申请号：US11888879

申请日：2007-08-02

Applicant: Mohamed Benslimane ,  Peter Gravesen

Inventor： Mohamed Benslimane ,  Peter Gravesen

IPC: B05D5/12

CPC classification number: H01L41/0986 ,  B81B3/007 ,  B81B2201/038 ,  H01L41/333 ,  H01L41/45 ,  H02N1/006 ,  H04R23/00

Abstract: The invention relates to an actuating member comprising an elastomer body that is provided with one electrode each on opposite peripheries. The aim of the invention is to improve the dynamism of such an actuating member. To this end, at least one periphery is provided with at least one waved section that comprises elevations and depressions as the extremes disposed in parallel to the cross direction. Said section is covered by an electrode that completely covers at least a part of the extremes and that extends across the waved section.

Abstract translation: 本发明涉及一种致动构件，其包括弹性体，每个弹性体在相对的外周设置有一个电极。 本发明的目的是改善这种致动构件的动力。 为此，至少一个周边设置有至少一个波形部分，其包括作为平行于交叉方向设置的极值的高度和凹陷。 所述部分由完全覆盖极限的至少一部分并且横过波形部分延伸的电极覆盖。

公开(公告)号：US20070103029A1

公开(公告)日：2007-05-10

申请号：US10558469

申请日：2004-06-02

Applicant: Gary Fedder ,  Altug Oz

Inventor： Gary Fedder ,  Altug Oz

IPC: H02N10/00 ,  F01B29/10 ,  F02G1/04

CPC classification number: H02N10/00 ,  B81B3/0024 ,  B81B7/0003 ,  B81B2201/038 ,  H01H1/0094 ,  H01H2061/006 ,  Y10S977/724 ,  Y10S977/725

Abstract: The present disclosure is broadly directed to a method for designing new MEMS micro-movers, particularly suited for, but not limited to, CMOS fabrication techniques, that are capable of large lateral displacement for tuning capacitors, fabricating capacitors, self-assembly of small gaps in CMOS processes, fabricating latching structures and other applications where lateral micro-positioning on the order of up to 10 μm, or greater, is desired. Principles of self-assembly and electro-thermal actuation are used for designing micro-movers. In self-assembly, motion is induced in specific beams by designing a lateral effective residual stress gradient within the beams. The lateral residual stress gradient arises from purposefully offsetting certain layers of one material versus another material. For example, lower metal layers may be side by side with dielectric layers, both of which are positioned beneath a top metal layer of a CMOS-MEMS beam. In electro-thermal actuation, motion is induced in specific beams by designing a lateral gradient of temperature coefficient of expansion (TCE) within the beams. The lateral TCE gradient is achieved in the same manner as with self-assembly, by purposefully offsetting the lower metal layers with layers of dielectric with respect to the top metal layer of a CMOS-MEMS beam. A heater resistor, usually made from a CMOS polysilicon layer, is embedded into the beam or into an adjacent assembly to heat the beam. When heated, the TCE gradient will cause a stress gradient in the beam, resulting in the electro-thermal actuation. Because of the rules governing abstracts, this abstract should not be used to construe the claims.

Abstract translation: 本公开广泛地涉及用于设计新的MEMS微动幅器的方法，其特别适用于但不限于CMOS制造技术，其能够用于调谐电容器的大横向位移，制造电容器，小间隙的自组装 在CMOS工艺中，制造闭锁结构和其它需要侧向微定位大约为10um或更大的应用。 自组装和电热驱动的原理用于设计微动员。 在自组装中，通过在梁内设计横向有效残余应力梯度，在特定梁中引起运动。 侧向残余应力梯度是由有目的地抵消一种材料的某些层与另一种材料相抵消的。 例如，下金属层可以与电介质层并排，它们均位于CMOS-MEMS光束的顶部金属层的下方。 在电热驱动中，通过设计横梁内的温度膨胀系数（TCE）的横向梯度，在特定光束中感应运动。 横向TCE梯度以与自组装相同的方式实现，通过相对于CMOS-MEMS光束的顶部金属层有目的地抵消具有电介质层的下部金属层。 通常由CMOS多晶硅层制成的加热电阻器被嵌入光束或相邻组件中以加热光束。 加热时，TCE梯度将导致光束中的应力梯度，导致电热致动。 由于管理摘要的规则，本摘要不应用于解释索赔。