公开(公告)号：US20250079112A1

公开(公告)日：2025-03-06

申请号：US18285457

申请日：2021-04-15

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi MORITA ,  Takashi KUBO ,  Minoru SAKAMAKI ,  Shuhei ISHIKAWA ,  Shunichi WATANABE

IPC: H01J37/07 ,  H01J37/09 ,  H01J37/16 ,  H01J37/24 ,  H01J37/295

Abstract: Provided is a charged particle beam apparatus capable of realizing a highly reliable insulating structure. This charged particle beam apparatus emits a charged particle beam from a charged particle beam emission device onto a sample, detects charged particles generated from the sample, and creates a sample image or processes the sample. The charged particle beam emission device is provided with a charged particle source and a shield arranged in an interior of a metal housing that is filled with an insulating gas, and an acceleration electrode arranged below the charged particle source, power being supplied to the acceleration electrode via the shield.

公开(公告)号：US11139139B2

公开(公告)日：2021-10-05

申请号：US17252124

申请日：2018-06-28

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi Morita ,  Shinichi Kato ,  Hiroyuki Ito

IPC: H01J37/07 ,  H01J37/248

Abstract: Provided are a charged particle beam generator and a charged particle beam device that can improve insulation reliability as a result of reducing the high electric field generated around a connection section for a conductor. The charged particle beam generator 100 has: a plug 151 that guides high voltage from outside to a charged particle source that is in a vacuum; and a socket 251 having the charged particle source attached thereto. An electric field reduction ring 161 that electrically connects to one of a plurality of conductors that guide high voltage is embedded inside the tip of the plug 151. The plurality of conductors that guide the high voltage are arranged so as to penetrate the electric field reduction ring 161.

公开(公告)号：US20210257178A1

公开(公告)日：2021-08-19

申请号：US17252124

申请日：2018-06-28

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi MORITA ,  Shinichi KATO ,  Hiroyuki ITO

IPC: H01J37/07 ,  H01J37/248

Abstract: Provided are a charged particle beam generator and a charged particle beam device that can improve insulation reliability as a result of reducing the high electric field generated around a connection section for a conductor. The charged particle beam generator 100 has: a plug 151 that guides high voltage from outside to a charged particle source that is in a vacuum; and a socket 251 having the charged particle source attached thereto. An electric field reduction ring 161 that electrically connects to one of a plurality of conductors that guide high voltage is embedded inside the tip of the plug 151. The plurality of conductors that guide the high voltage are arranged so as to penetrate the electric field reduction ring 161.

公开(公告)号：US10784070B2

公开(公告)日：2020-09-22

申请号：US16165193

申请日：2018-10-19

Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH

Inventor： Thomas Kemen ,  Benjamin John Cook ,  Roman Barday

IPC: H01J37/07 ,  H01J37/317 ,  H01J37/28 ,  H01J37/244

Abstract: A charged particle beam device is described, which includes: a beam source configured to generate a charged particle beam propagating along an optical axis (A); an aperture device with a plurality of apertures configured to create a plurality of beamlets from the charged particle beam; and a field curvature corrector. The field curvature corrector includes: a first multi-aperture electrode with a first plurality of openings having diameters that vary as a function of a distance from the optical axis (A); a second multi-aperture electrode with a second plurality of openings; and an adjustment device configured to adjust at least one of a first electrical potential (U1) of the first multi-aperture electrode and a second electrical potential (U2) of the second multi-aperture electrode. Further, a field curvature corrector and methods of operating a charged particle beam device are described.

公开(公告)号：US10226540B2

公开(公告)日：2019-03-12

申请号：US15119577

申请日：2015-01-21

Applicant: Tetra Laval Holdings & Finance S.A.

Inventor： Jonas Dickner ,  Håkan Mellbin ,  Roger Lindgren ,  Mats Åkesson

IPC: G01N21/00 ,  A61N5/00 ,  A61L2/00 ,  A61L2/08 ,  B65B55/08 ,  H01J37/24 ,  B65B3/00 ,  G21K5/02 ,  H01J37/16 ,  H01J37/07

Abstract: Sterilization apparatus for sterilizing packaging containers, the sterilization apparatus comprising a first carousel for supporting a plurality of sterilization devices, the sterilization devices being adapted to sterilize an interior of the packaging containers by electron beam irradiation, and a transport system for transporting the packaging containers, the transport system comprising a second carousel coaxial with the first carousel, wherein the first carousel comprises a first rotatable shaft and the second carousel comprises a separate second rotatable shaft coaxial with the first rotatable shaft.

公开(公告)号：US09496673B2

公开(公告)日：2016-11-15

申请号：US14005469

申请日：2012-02-21

Applicant: Toshiyuki Morishita ,  Yoshinori Terui ,  Shimpei Hirokawa

Inventor： Toshiyuki Morishita ,  Yoshinori Terui ,  Shimpei Hirokawa

IPC: H01J37/065 ,  H01R43/26 ,  H01J37/06 ,  H01J37/08 ,  H01J3/02 ,  H01J37/07 ,  H01J37/067

CPC classification number: H01R43/26 ,  H01J3/02 ,  H01J37/06 ,  H01J37/065 ,  H01J37/067 ,  H01J37/07 ,  H01J37/08 ,  Y10T29/49117

Abstract: The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.

Abstract translation: 本发明是一种带电粒子枪（EG），其中负极（1）和正极（9）预先集成并组装，并且可以在负极和 正极集成在一起，其中在带电粒子枪的储存和运输期间，负极和正极通过导体（11）连接。 由此，可以防止带电粒子枪的电极头在储存和运输期间由静电引起的放电损坏。

公开(公告)号：US08987677B2

公开(公告)日：2015-03-24

申请号：US12911861

申请日：2010-10-26

Applicant: Marco Jan-Jaco Wieland ,  Ferry Michael Postma

Inventor： Marco Jan-Jaco Wieland ,  Ferry Michael Postma

IPC: G21K1/08 ,  H01J37/317 ,  H01J37/07 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/04

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/07 ,  H01J37/3174 ,  H01J2237/0262 ,  H01J2237/0435 ,  H01J2237/0437 ,  H01J2237/31774

Abstract: The invention relates to a modulation device for use in a charged particle multi-beamlet lithography system. The device includes a body comprising an interconnect structure provided with a plurality of modulators and interconnects at different levels within the interconnect structure for enabling connection of the modulators to one or more pattern data receiving elements. A modulator includes a first electrode, a second electrode, and an aperture extending through the body. The electrodes are located on opposing sides of the aperture for generating an electric field across the aperture. At least one of the first electrode and the second electrode includes a first conductive element formed at a first level of the interconnect structure and a second conductive element formed at a second level of the interconnect structure. The first and second conductive elements are electrically connected with each other.

Abstract translation: 本发明涉及一种用于带电粒子多子束光刻系统的调制装置。 该装置包括主体，其包括在互连结构内的不同级别设置有多个调制器和互连的互连结构，用于使调制器能够连接到一个或多个图案数据接收元件。 调制器包括第一电极，第二电极和延伸穿过本体的孔。 电极位于孔的相对侧上，以产生穿过孔的电场。 第一电极和第二电极中的至少一个包括形成在互连结构的第一电平处的第一导电元件和形成在互连结构的第二电平处的第二导电元件。 第一和第二导电元件彼此电连接。

公开(公告)号：US08598544B2

公开(公告)日：2013-12-03

申请号：US13293370

申请日：2011-11-10

Applicant: Teunis Van De Peut ,  Marco Jan-Jaco Wieland

Inventor： Teunis Van De Peut ,  Marco Jan-Jaco Wieland

IPC: H01J37/06 ,  H01J37/07 ,  G21K5/10

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00

Abstract: The invention relates to a method of generating a two-level pattern for lithographic processing by multiple beamlets. In the method, first a pattern in vector format is provided. The vector format pattern is then converted into a pattern in pixmap format. Finally, a two-level pattern is formed by application of error diffusion on the pixmap format pattern.

Abstract translation: 本发明涉及一种生成用于通过多个子束进行光刻处理的二级图案的方法。 在该方法中，首先提供矢量格式的图案。 然后将矢量格式图案转换成像素图格式的图案。 最后，通过在像素图格式图案上应用误差扩散形成两层图案。

公开(公告)号：US5874735A

公开(公告)日：1999-02-23

申请号：US840170

申请日：1997-04-14

Applicant: Tokusaburo Matsumoto ,  Kouzo Yano ,  Toshihiko Eida

Inventor： Tokusaburo Matsumoto ,  Kouzo Yano ,  Toshihiko Eida

IPC: H01J37/07 ,  H01J37/248 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J2237/0216 ,  H01J2237/1504

Abstract: A scanning electron microscope having a unit for reducing image obstacle in an scanning electron microscope which is capable of inexpensively and readily reducing image obstacle caused by any external disturbance such as alternative magnetic field and mechanical vibration in relation to the location of installation of the microscope. In order to reduce the image obstacle, the electron beam deflectors or image shift coils for forming visual image by scanning the surface of sample by using collimated electron beam, is applied superimposing with alternative current for forming alternative magnetic field of the identical frequency, identical intensity, and inverted phase of vibration to the external disturbance to cancel out the fluctuation caused by the external disturbance in the sample surface at the focal plane of the electron beam.

Abstract translation: 一种扫描电子显微镜，其具有用于减少扫描电子显微镜中的图像障碍的单元，其能够廉价且容易地减少由与显微镜的安装位置相关的诸如替代磁场和机械振动之类的任何外部干扰引起的图像障碍。 为了减少图像障碍物，通过使用准直电子束扫描样品表面形成视觉图像的电子束偏转器或图像移动线圈被施加与替代电流叠加以形成具有相同频率，相同强度的替代磁场 ，并将振动的相位反转到外部干扰，以抵消由电子束焦平面处的样品表面的外部干扰引起的波动。

公开(公告)号：US5095241A

公开(公告)日：1992-03-10

申请号：US579790

申请日：1990-09-10

Applicant: Dieter Fritz ,  Wolfgang Schwarz

Inventor： Dieter Fritz ,  Wolfgang Schwarz

IPC: H01J37/07

CPC classification number: H01J37/07

Abstract: In the electron beam generator cooling is provided by the electrical conductors of the incandescent cathode and control electrode which are configured as heat bridges and connected to cooling plates in the interior of the high-voltage insulator which in turn are connected in a heat-conducting manner to a pot-shaped cooling body. The cooling body, configured as part of a capsule for accommodating circuitry for the control of the electron beam generator, is surrounded by a heat exchanger which is connected to a cooling circuit and is at ground potential, and is insulated from the cooling body by a wall of the high-voltage insulator.

Abstract translation: 在电子束发生器中，由白炽阴极和控制电极的电导体提供冷却，其被构造为热桥并连接到高压绝缘体的内部的冷却板，而高压绝缘子又以导热方式连接 到锅形冷却体。 配置为用于容纳用于控制电子束发生器的电路的胶囊的一部分的冷却体被连接到冷却回路并处于地电位的热交换器包围，并且与冷却体通过一个 高压绝缘子的墙壁。