Charged Particle Beam Apparatus
    21.
    发明申请

    公开(公告)号:US20250079112A1

    公开(公告)日:2025-03-06

    申请号:US18285457

    申请日:2021-04-15

    Abstract: Provided is a charged particle beam apparatus capable of realizing a highly reliable insulating structure. This charged particle beam apparatus emits a charged particle beam from a charged particle beam emission device onto a sample, detects charged particles generated from the sample, and creates a sample image or processes the sample. The charged particle beam emission device is provided with a charged particle source and a shield arranged in an interior of a metal housing that is filled with an insulating gas, and an acceleration electrode arranged below the charged particle source, power being supplied to the acceleration electrode via the shield.

    Charged particle beam generator and charged particle beam apparatus

    公开(公告)号:US11139139B2

    公开(公告)日:2021-10-05

    申请号:US17252124

    申请日:2018-06-28

    Abstract: Provided are a charged particle beam generator and a charged particle beam device that can improve insulation reliability as a result of reducing the high electric field generated around a connection section for a conductor. The charged particle beam generator 100 has: a plug 151 that guides high voltage from outside to a charged particle source that is in a vacuum; and a socket 251 having the charged particle source attached thereto. An electric field reduction ring 161 that electrically connects to one of a plurality of conductors that guide high voltage is embedded inside the tip of the plug 151. The plurality of conductors that guide the high voltage are arranged so as to penetrate the electric field reduction ring 161.

    Charged Particle Beam Generator and Charged Particle Beam Apparatus

    公开(公告)号:US20210257178A1

    公开(公告)日:2021-08-19

    申请号:US17252124

    申请日:2018-06-28

    Abstract: Provided are a charged particle beam generator and a charged particle beam device that can improve insulation reliability as a result of reducing the high electric field generated around a connection section for a conductor. The charged particle beam generator 100 has: a plug 151 that guides high voltage from outside to a charged particle source that is in a vacuum; and a socket 251 having the charged particle source attached thereto. An electric field reduction ring 161 that electrically connects to one of a plurality of conductors that guide high voltage is embedded inside the tip of the plug 151. The plurality of conductors that guide the high voltage are arranged so as to penetrate the electric field reduction ring 161.

    Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereof
    27.
    发明授权
    Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereof 有权
    带电粒子多光束光刻系统,调制装置及其制造方法

    公开(公告)号:US08987677B2

    公开(公告)日:2015-03-24

    申请号:US12911861

    申请日:2010-10-26

    Abstract: The invention relates to a modulation device for use in a charged particle multi-beamlet lithography system. The device includes a body comprising an interconnect structure provided with a plurality of modulators and interconnects at different levels within the interconnect structure for enabling connection of the modulators to one or more pattern data receiving elements. A modulator includes a first electrode, a second electrode, and an aperture extending through the body. The electrodes are located on opposing sides of the aperture for generating an electric field across the aperture. At least one of the first electrode and the second electrode includes a first conductive element formed at a first level of the interconnect structure and a second conductive element formed at a second level of the interconnect structure. The first and second conductive elements are electrically connected with each other.

    Abstract translation: 本发明涉及一种用于带电粒子多子束光刻系统的调制装置。 该装置包括主体,其包括在互连结构内的不同级别设置有多个调制器和互连的互连结构,用于使调制器能够连接到一个或多个图案数据接收元件。 调制器包括第一电极,第二电极和延伸穿过本体的孔。 电极位于孔的相对侧上,以产生穿过孔的电场。 第一电极和第二电极中的至少一个包括形成在互连结构的第一电平处的第一导电元件和形成在互连结构的第二电平处的第二导电元件。 第一和第二导电元件彼此电连接。

    Scanning electron microscope
    29.
    发明授权
    Scanning electron microscope 失效
    扫描电子显微镜

    公开(公告)号:US5874735A

    公开(公告)日:1999-02-23

    申请号:US840170

    申请日:1997-04-14

    CPC classification number: H01J37/28 H01J2237/0216 H01J2237/1504

    Abstract: A scanning electron microscope having a unit for reducing image obstacle in an scanning electron microscope which is capable of inexpensively and readily reducing image obstacle caused by any external disturbance such as alternative magnetic field and mechanical vibration in relation to the location of installation of the microscope. In order to reduce the image obstacle, the electron beam deflectors or image shift coils for forming visual image by scanning the surface of sample by using collimated electron beam, is applied superimposing with alternative current for forming alternative magnetic field of the identical frequency, identical intensity, and inverted phase of vibration to the external disturbance to cancel out the fluctuation caused by the external disturbance in the sample surface at the focal plane of the electron beam.

    Abstract translation: 一种扫描电子显微镜,其具有用于减少扫描电子显微镜中的图像障碍的单元,其能够廉价且容易地减少由与显微镜的安装位置相关的诸如替代磁场和机械振动之类的任何外部干扰引起的图像障碍。 为了减少图像障碍物,通过使用准直电子束扫描样品表面形成视觉图像的电子束偏转器或图像移动线圈被施加与替代电流叠加以形成具有相同频率,相同强度的替代磁场 ,并将振动的相位反转到外部干扰,以抵消由电子束焦平面处的样品表面的外部干扰引起的波动。

    Cooling structure for cathode in electron beam generator
    30.
    发明授权
    Cooling structure for cathode in electron beam generator 失效
    电子束发生器阴极冷却结构

    公开(公告)号:US5095241A

    公开(公告)日:1992-03-10

    申请号:US579790

    申请日:1990-09-10

    CPC classification number: H01J37/07

    Abstract: In the electron beam generator cooling is provided by the electrical conductors of the incandescent cathode and control electrode which are configured as heat bridges and connected to cooling plates in the interior of the high-voltage insulator which in turn are connected in a heat-conducting manner to a pot-shaped cooling body. The cooling body, configured as part of a capsule for accommodating circuitry for the control of the electron beam generator, is surrounded by a heat exchanger which is connected to a cooling circuit and is at ground potential, and is insulated from the cooling body by a wall of the high-voltage insulator.

    Abstract translation: 在电子束发生器中,由白炽阴极和控制电极的电导体提供冷却,其被构造为热桥并连接到高压绝缘体的内部的冷却板,而高压绝缘子又以导热方式连接 到锅形冷却体。 配置为用于容纳用于控制电子束发生器的电路的胶囊的一部分的冷却体被连接到冷却回路并处于地电位的热交换器包围,并且与冷却体通过一个 高压绝缘子的墙壁。

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