Semiconductor device
    24.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号:US09165922B2

    公开(公告)日:2015-10-20

    申请号:US14015986

    申请日:2013-08-30

    IPC分类号: H01L27/06 H01L27/095

    摘要: According to an embodiment, a semiconductor device includes a conductive substrate, a Schottky barrier diode, and a field-effect transistor. The Schottky barrier diode is mounted on the conductive substrate and includes an anode electrode and a cathode electrode. The anode electrode is electrically connected to the conductive substrate. The field-effect transistor is mounted on the conductive substrate and includes a source electrode, a drain electrode, and a gate electrode. The source electrode of the field-effect transistor is electrically connected to the cathode electrode of the Schottky barrier diode. The gate electrode of the field-effect transistor is electrically connected to the anode electrode of the Schottky barrier diode.

    摘要翻译: 根据实施例,半导体器件包括导电衬底,肖特基势垒二极管和场效应晶体管。 肖特基势垒二极管安装在导电基板上,并包括阳极电极和阴极电极。 阳极电极与导电性基板电连接。 场效应晶体管安装在导电基板上,包括源电极,漏电极和栅电极。 场效应晶体管的源电极电连接到肖特基势垒二极管的阴极。 场效晶体管的栅电极与肖特基势垒二极管的阳极电连接。

    Multilayer diffusion barriers for wide bandgap Schottky barrier devices
    25.
    发明授权
    Multilayer diffusion barriers for wide bandgap Schottky barrier devices 有权
    用于宽带隙肖特基势垒器件的多层扩散阻挡层

    公开(公告)号:US09142631B2

    公开(公告)日:2015-09-22

    申请号:US12725812

    申请日:2010-03-17

    摘要: Semiconductor Schottky barrier devices include a wide bandgap semiconductor layer, a Schottky barrier metal layer on the wide bandgap semiconductor layer and forming a Schottky junction, a current spreading layer on the Schottky barrier metal layer remote from the wide bandgap semiconductor layer and two or more diffusion barrier layers between the current spreading layer and the Schottky barrier metal layer. The first diffusion barrier layer reduces mixing of the current spreading layer and the second diffusion barrier layer at temperatures of the Schottky junction above about 300° C. and the second diffusion barrier layer reduces mixing of the first diffusion barrier layer and the Schottky barrier metal layer at the temperatures of the Schottky junction above about 300° C.

    摘要翻译: 半导体肖特基势垒器件包括宽带隙半导体层,宽带隙半导体层上的肖特基势垒金属层和形成肖特基结,在远离宽带隙半导体层的肖特基势垒金属层上的电流扩散层和两个或更多个扩散 电流扩散层和肖特基势垒金属层之间的阻挡层。 第一扩散阻挡层在约300℃以上的肖特基结温度下降低了电流扩散层和第二扩散阻挡层的混合,第二扩散阻挡层减少了第一扩散阻挡层和肖特基势垒金属层的混合 在高于约300℃的肖特基结的温度下

    Semiconductor device and method of manufacturing the same
    26.
    发明授权
    Semiconductor device and method of manufacturing the same 有权
    半导体装置及其制造方法

    公开(公告)号:US09130063B2

    公开(公告)日:2015-09-08

    申请号:US14496617

    申请日:2014-09-25

    摘要: A semiconductor device having a main electrode connected to a first semiconductor region and a second semiconductor layer on a semiconductor substrate so that a pn-junction diode is formed with the first semiconductor region being interposed and a Schottky barrier diode is formed with the second semiconductor layer being interposed on a surface of the semiconductor substrate, the semiconductor device includes a first electrode configured to ohmic-contact the first semiconductor region; a second electrode configured to Schottky-contact the second semiconductor layer and not having a portion directly contacting the first electrode; and a conductive reaction suppression layer to suppress a reaction between a material configuring the first electrode and a material configuring the second electrode are provided on the surface of the semiconductor substrate, and the main electrode is electrically connected to the first electrode and the second electrode.

    摘要翻译: 一种半导体器件,其具有连接到第一半导体区域的主电极和在半导体衬底上的第二半导体层,使得形成有第一半导体区域的pn结二极管并且形成肖特基势垒二极管,其中第二半导体层 被插入在所述半导体衬底的表面上,所述半导体器件包括构造为与所述第一半导体区域欧姆接触的第一电极; 第二电极,其被配置为与所述第二半导体层肖特基接触,并且不具有直接接触所述第一电极的部分; 并且在半导体衬底的表面上设置用于抑制构成第一电极的材料和构成第二电极的材料之间的反应的导电反应抑制层,并且主电极与第一电极和第二电极电连接。

    METHOD OF MANUFACTURING PRECISE SEMICONDUCTOR CONTACTS
    27.
    发明申请
    METHOD OF MANUFACTURING PRECISE SEMICONDUCTOR CONTACTS 有权
    制造精密半导体触点的方法

    公开(公告)号:US20150236017A1

    公开(公告)日:2015-08-20

    申请号:US14184976

    申请日:2014-02-20

    申请人: Cree, Inc.

    发明人: Fabian Radulescu

    摘要: A first dielectric layer including a first opening is provided on a first surface of a semiconductor layer. A second dielectric layer is provided on top of the first dielectric layer in the first opening. A first portion of the second dielectric layer is then removed, such that a second portion of the second dielectric layer remains in the first opening. The first dielectric layer is then removed, leaving only the second portion of the second dielectric layer on the surface of the semiconductor layer. An epitaxial layer or a base dielectric layer is grown on the exposed portions of the first surface of the semiconductor layer not covered by the second portion of the second dielectric layer. The second portion of the second dielectric layer is then removed to define one or more contact windows, and a contact metal is deposited in the one or more contact windows.

    摘要翻译: 包括第一开口的第一电介质层设置在半导体层的第一表面上。 在第一开口中的第一电介质层的顶部上设置第二电介质层。 然后去除第二介电层的第一部分,使得第二介电层的第二部分保留在第一开口中。 然后去除第一介电层,仅在半导体层的表面上留下第二介电层的第二部分。 在半导体层的未被第二电介质层的第二部分覆盖的第一表面的暴露部分上生长外延层或基底电介质层。 然后去除第二介电层的第二部分以限定一个或多个接触窗口,并且接触金属沉积在一个或多个接触窗口中。

    Schottky barrier device having a plurality of double-recessed trenches
    30.
    发明授权
    Schottky barrier device having a plurality of double-recessed trenches 有权
    具有多个双凹槽的肖特基势垒器件

    公开(公告)号:US08878327B2

    公开(公告)日:2014-11-04

    申请号:US13730649

    申请日:2012-12-28

    摘要: A Schottky barrier device includes a semiconductor substrate, a first contact metal layer, a second contact metal layer and an insulating layer. The semiconductor substrate has a first surface, and plural trenches are formed on the first surface. Each trench includes a first recess having a first depth and a second recess having a second depth. The second recess extends down from the first surface while the first recess extends down from the second recess. The first contact metal layer is formed on the second recess. The second contact metal layer is formed on the first surface between two adjacent trenches. The insulating layer is formed on the first recess. A first Schottky barrier formed between the first contact metal layer and the semiconductor substrate is larger than a second Schottky barrier formed between the second contact metal layer and the semiconductor substrate.

    摘要翻译: 肖特基势垒器件包括半导体衬底,第一接触金属层,第二接触金属层和绝缘层。 半导体衬底具有第一表面,并且在第一表面上形成多个沟槽。 每个沟槽包括具有第一深度的第一凹部和具有第二深度的第二凹部。 第二凹部从第一表面向下延伸,同时第一凹部从第二凹部向下延伸。 第一接触金属层形成在第二凹部上。 第二接触金属层形成在两个相邻沟槽之间的第一表面上。 绝缘层形成在第一凹部上。 形成在第一接触金属层和半导体衬底之间的第一肖特基势垒大于形成在第二接触金属层和半导体衬底之间的第二肖特基势垒。