Microelectronic environmental sensing module

    公开(公告)号:US09618653B2

    公开(公告)日:2017-04-11

    申请号:US13853801

    申请日:2013-03-29

    CPC classification number: G01W1/02 G01F1/44 G01P5/14

    Abstract: Sensors for air flow, temperature, pressure, and humidity are integrated onto a single semiconductor die within a miniaturized Venturi chamber to provide a microelectronic semiconductor-based environmental multi-sensor module that includes an air flow meter. One or more such multi-sensor modules can be used as building blocks in dedicated application-specific integrated circuits (ASICs) for use in environmental control appliances that rely on measurements of air flow. Furthermore, the sensor module can be built on top of existing circuitry that can be used to process signals from the sensors. By integrating the Venturi chamber with accompanying environmental sensors, correction factors can be obtained and applied to compensate for temporal humidity fluctuations and spatial temperature variation using the Venturi apparatus.

    Lens mount with conductive glue pocket for grounding to a circuit board
    343.
    发明授权
    Lens mount with conductive glue pocket for grounding to a circuit board 有权
    镜头安装带导电胶袋,用于接地到电路板

    公开(公告)号:US09596748B2

    公开(公告)日:2017-03-14

    申请号:US13852373

    申请日:2013-03-28

    Abstract: A lens mount is attached to a circuit board and covers electrical components on the circuit board. An electrically insulating device is positioned between the lens mount and the circuit board. The circuit board includes a grounding pad adjacent the electrically insulating device. The lens mount includes an aperture aligned with the grounding pad and the electrically insulating device. A conductive glue is dispensed into the aperture to electrically ground the lens mount to the grounding pad. The electrically insulating device seals the conductive glue from the electrical components. A method of grounding a lens mount to a circuit board is provided.

    Abstract translation: 镜头座安装在电路板上并覆盖电路板上的电气部件。 电绝缘装置位于透镜支架和电路板之间。 电路板包括邻近电绝缘装置的接地垫。 透镜座包括与接地垫和电绝缘装置对准的孔。 将导电胶分配到孔中以将透镜安装座电接地到接地垫。 电绝缘装置将导电胶从电气部件密封。 提供了一种将透镜座连接到电路板的方法。

    Wafer handling station including cassette members with lateral wafer confining brackets and associated methods
    345.
    发明授权
    Wafer handling station including cassette members with lateral wafer confining brackets and associated methods 有权
    晶圆处理站包括具有横向晶片限制支架的盒式构件和相关方法

    公开(公告)号:US09530675B2

    公开(公告)日:2016-12-27

    申请号:US13622556

    申请日:2012-09-19

    Abstract: A wafer handling station includes a housing defining a chamber, and a wafer cassette assembly positionable in the chamber. The wafer cassette assembly includes a vertical support, and cassette members carried by the vertical support in spaced relation. Each cassette member includes a base coupled to the vertical support, wafer contact pads on an upper surface of the base and configured to support a wafer thereon, and a pair of wafer brackets carried by the base and configured to engage respective edges of the wafer to laterally confine the wafer.

    Abstract translation: 晶片处理站包括限定腔室的壳体和可定位在腔室中的晶片盒组件。 晶片盒组件包括垂直支撑件和由垂直支撑件以间隔关系承载的盒构件。 每个盒构件包括联接到垂直支撑件的基座,在基座的上表面上的晶片接触垫,并且被配置为在其上支撑晶片,以及一对晶片支架,其由基座承载并且被配置为将晶片的相应边缘接合到 横向限制晶片。

    Method for making semiconductor devices including reactant treatment of residual surface portion
    348.
    发明授权
    Method for making semiconductor devices including reactant treatment of residual surface portion 有权
    包括反应物处理残留表面部分的半导体器件的方法

    公开(公告)号:US09236243B2

    公开(公告)日:2016-01-12

    申请号:US14151188

    申请日:2014-01-09

    Inventor: ChongJieh Chew

    Abstract: A method for making semiconductor devices may include forming a phosphosilicate glass (PSG) layer on a semiconductor wafer, with the PSG layer having a phosphine residual surface portion. The method may further include exposing the phosphine residual surface portion to a reactant plasma to integrate at least some of the phosphine residual surface portion into the PSG layer. The method may additionally include forming a mask layer on the PSG layer after the exposing.

    Abstract translation: 制造半导体器件的方法可以包括在半导体晶片上形成磷硅玻璃(PSG)层,其中PSG层具有磷化氢残留表面部分。 该方法可以进一步包括将磷化氢残余表面部分暴露于反应物等离子体以将至少一些磷化氢残余表面部分整合到PSG层中。 该方法还可以包括在曝光之后在PSG层上形成掩模层。

    ELECTRONIC DEVICE WITH HEAT DISSIPATER
    349.
    发明申请
    ELECTRONIC DEVICE WITH HEAT DISSIPATER 有权
    具有散热器的电子设备

    公开(公告)号:US20150235929A1

    公开(公告)日:2015-08-20

    申请号:US14615673

    申请日:2015-02-06

    Abstract: An electronic device includes an integrated circuit chip mounted to a heat slug. The heat slug has a peripheral region having first thickness along a first direction, the peripheral region surrounding a recess region (having a second, smaller, thickness along the first direction) that defines a chip mounting surface along a second direction perpendicular to the first direction. The recess region defines side borders and a nook extends into the heat slug along the side borders. An insulating body embeds the integrated circuit one chip and heat slug. Material of the insulating body fills the nook.

    Abstract translation: 一种电子设备包括安装在散热片上的集成电路芯片。 散热片具有沿着第一方向具有第一厚度的周边区域,周边区域围绕沿着垂直于第一方向的第二方向限定芯片安装表面的凹陷区域(具有沿着第一方向的第二较小厚度) 。 凹槽区域限定侧面边界,并且角部沿着侧边缘延伸到热塞中。 绝缘体嵌入集成电路一芯片和散热片。 绝缘体的材料填充角。

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