Suspended membrane device
    352.
    发明授权
    Suspended membrane device 有权
    悬浮膜装置

    公开(公告)号:US09000542B2

    公开(公告)日:2015-04-07

    申请号:US13907708

    申请日:2013-05-31

    CPC classification number: B81C1/00158 B81B3/0021 B81B2203/0127

    Abstract: The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities.

    Abstract translation: 本公开涉及一种包括基板和形成在基板上的传感器的装置。 所述传感器包括由多个集成腔体形成的室,在所述衬底上方的膜,所述膜具有多个开口,每个开口位于所述空腔中的一个上方,以及多个位于所述膜和所述衬底之间的菱形锚定件 ,定位在每个空腔之间的锚固件。 每个开口的中心也是其中一个空腔的中心。

    CONTACT HAVING AN ANGLED PORTION
    356.
    发明申请
    CONTACT HAVING AN ANGLED PORTION 有权
    联系有一个安装的部分

    公开(公告)号:US20140293120A1

    公开(公告)日:2014-10-02

    申请号:US13853598

    申请日:2013-03-29

    CPC classification number: G03B3/10 G02B7/08 G02B7/09 H02K41/031 Y10T29/4913

    Abstract: Described herein are various embodiments of contacts that include different portions angled with respect to one another and methods of manufacturing devices that include such contacts. In some embodiments, a module may include a first portion of a contact that is disposed within a housing and a second portion that is disposed outside of the housing, with the second portion angled with respect to the first portion. Manufacturing such devices may include depositing a conductive material to electrically connect the contact to a contact pad of a substrate. In some embodiments, a deposition process for depositing the conductive material may have a minimum dimension, which defines a minimum dimension of a conductive material once deposited. In some such embodiments, a distance between a terminal end of the contact pin and the contact pad may be greater than the minimum dimension of the deposition process.

    Abstract translation: 这里描述的触点的各种实施例包括相对于彼此成角度的不同部分和制造包括这种触点的装置的方法。 在一些实施例中,模块可以包括设置在壳体内的接触件的第一部分和设置在壳体外部的第二部分,其中第二部分相对于第一部分成角度。 制造这样的器件可以包括沉积导电材料以将触点电连接到衬底的接触焊盘。 在一些实施例中,用于沉积导电材料的沉积工艺可以具有最小尺寸,其限定一旦沉积的导电材料的最小尺寸。 在一些这样的实施例中,接触针的末端与接触垫之间的距离可以大于沉积过程的最小尺寸。

    INTEGRATED MULTI-SENSOR MODULE
    358.
    发明申请
    INTEGRATED MULTI-SENSOR MODULE 有权
    集成多传感器模块

    公开(公告)号:US20140291677A1

    公开(公告)日:2014-10-02

    申请号:US13853732

    申请日:2013-03-29

    Abstract: A semiconductor-based multi-sensor module integrates miniature temperature, pressure, and humidity sensors onto a single substrate. Pressure and humidity sensors can be implemented as capacitive thin film sensors, while the temperature sensor is implemented as a precision miniature Wheatstone bridge. Such multi-sensor modules can be used as building blocks in application-specific integrated circuits (ASICs). Furthermore, the multi-sensor module can be built on top of existing circuitry that can be used to process signals from the sensors. An integrated multi-sensor module that uses differential sensors can measure a variety of localized ambient environmental conditions substantially simultaneously, and with a high level of precision. The multi-sensor module also features an integrated heater that can be used to calibrate or to adjust the sensors, either automatically or as needed. Such a miniature integrated multi-sensor module that features low power consumption can be used in medical monitoring and mobile computing, including smart phone applications.

    Abstract translation: 基于半导体的多传感器模块将微型温度,压力和湿度传感器集成在单个基板上。 压力和湿度传感器可以实现为电容薄膜传感器,而温度传感器实现为精密微型惠斯通电桥。 这种多传感器模块可以用作专用集成电路(ASIC)中的构建块。 此外,多传感器模块可以构建在可用于处理来自传感器的信号的现有电路之上。 使用差分传感器的集成多传感器模块可以大量同时测量各种局部环境条件,并以高精度测量。 多传感器模块还具有集成加热器,可用于自动或根据需要校准或调整传感器。 这种具有低功耗的微型集成多传感器模块可用于医疗监控和移动计算,包括智能手机应用。

    SELF-SEALING MEMBRANE FOR MEMS DEVICES
    359.
    发明申请
    SELF-SEALING MEMBRANE FOR MEMS DEVICES 有权
    用于MEMS器件的自密封膜

    公开(公告)号:US20140252507A1

    公开(公告)日:2014-09-11

    申请号:US13785938

    申请日:2013-03-05

    CPC classification number: B81C1/00293 B81B7/0041 B81C2203/0136

    Abstract: Embodiments of the present disclosure are related to MEMS devices having a suspended membrane that are secured to and spaced apart from a substrate with a sealed cavity therebetween. The membrane includes openings with sidewalls that are closed by a dielectric material. In various embodiments, the cavity between the membrane and the substrate is formed by removing a sacrificial layer through the openings. In one or more embodiments, the openings in the membrane are closed by depositing the dielectric material on the sidewalls of the openings and the upper surface of the membrane.

    Abstract translation: 本公开的实施例涉及具有悬置膜的MEMS器件,其被固定到衬底上并与衬底间隔开密封腔。 膜包括具有由介电材料封闭的侧壁的开口。 在各种实施例中,通过从开口去除牺牲层来形成膜与衬底之间的空腔。 在一个或多个实施例中,通过将介电材料沉积在开口的侧壁和膜的上表面上来封闭膜中的开口。

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