Method and apparatus for producing chip devices, and chip device produced by means of the method
    34.
    发明授权
    Method and apparatus for producing chip devices, and chip device produced by means of the method 有权
    用于制造芯片器件的方法和设备,以及通过该方法制造的芯片器件

    公开(公告)号:US09114979B2

    公开(公告)日:2015-08-25

    申请号:US13228971

    申请日:2011-09-09

    IPC分类号: H01L21/00 B81C1/00

    CPC分类号: B81C1/00333

    摘要: A chip device is produced providing at least one wafer having a plurality of chip components. The wafer or wafers are separated into the individual chip components and/or into groups of chip components. The individual chip components and/or the groups of chip components are applied to a carrier element, in such a way that interspaces having a predetermined width are formed between the individual chip components and/or the groups of chip components. A polymer is introduced into the interspaces in order to form a composite element composed of the chip components and a polymer matrix. The composite element is separated in such a way that chip devices composed of in each case one of the chip components and at least one section of the polymer matrix are formed. The invention furthermore relates to a chip device produced by means of the method.

    摘要翻译: 制造提供具有多个芯片部件的至少一个晶片的芯片器件。 将晶片或晶片分离成各个芯片组件和/或分组成芯片组件。 单个芯片组件和/或芯片组件组被施加到载体元件,使得在各个芯片组件和/或芯片组件组之间形成具有预定宽度的间隙。 将聚合物引入到间隙中以形成由芯片部件和聚合物基体组成的复合元件。 复合元件以这样的方式分离,即在每种情况下由芯片部件和聚合物基体的至少一个部分组成的芯片器件形成。 本发明还涉及通过该方法制造的芯片器件。