ARTICLES AND METHODS FOR CONTROLLED BONDING OF THIN SHEETS WITH CARRIERS
    32.
    发明申请
    ARTICLES AND METHODS FOR CONTROLLED BONDING OF THIN SHEETS WITH CARRIERS 审中-公开
    用于与载体控制的薄片粘结的文章和方法

    公开(公告)号:US20170036419A1

    公开(公告)日:2017-02-09

    申请号:US15122366

    申请日:2015-01-26

    Abstract: A method of controllably bonding a thin sheet having a thin sheet bonding surface with a carrier having a carrier bonding surface, by depositing a carbonaceous surface modification layer onto at least one of the thin sheet bonding surface and the carrier bonding surface, incorporating polar groups with the surface modification layer, and then bonding the thin sheet bonding surface to the carrier bonding surface via the surface modification layer. The surface modification layer may include a bulk carbonaceous layer having a first polar group concentration and a surface layer having a second polar group concentration, wherein the second polar group concentration is higher than the first polar group concentration. The surface modification layer deposition and the treatment thereof may be performed by plasma polymerization techniques.

    Abstract translation: 一种将具有薄片接合面的薄片与具有载体接合面的载体可控地接合的方法,通过在至少一个薄片接合面和载体接合面上沉积碳质表面改性层,将极性基团与 表面改性层,然后经由表面改性层将薄片接合表面粘合到载体接合表面。 表面改性层可以包括具有第一极性基团浓度的块状碳层和具有第二极性基团浓度的表面层,其中第二极性基团浓度高于第一极性基团浓度。 表面改性层沉积及其处理可以通过等离子体聚合技术进行。

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