Hydroreactive energetic device and method
    33.
    发明授权
    Hydroreactive energetic device and method 失效
    水力活性能装置及方法

    公开(公告)号:US08387535B1

    公开(公告)日:2013-03-05

    申请号:US12802457

    申请日:2010-05-14

    CPC classification number: F42B12/201 F42B1/00 F42B19/00 F42C19/0846

    Abstract: An explosive event may be produced by mixing reactive material and water to form a mixture. The reactive material may be mixed with a substantially stoichiometric amount of water needed for complete reaction of the water with the reactive material. After forming the mixture, the mixture may be detonated with opposing shock waves. Shock fronts of the opposing shock waves may coincide to form a mach front or mach stem, which may enhance the explosive effect.

    Abstract translation: 可以通过将反应性材料和水混合以形成混合物来产生爆炸性事件。 反应性材料可以与水与反应性材料的完全反应所需的基本上化学计量的水混合。 在形成混合物之后,混合物可以用相对的冲击波引爆。 相反的冲击波的冲击面可能会重合,形成马赫(前锋)或马赫(Mach)杆,这可能会增强爆炸效应。

    VORTEX CHAMBER LIDS FOR ATOMIC LAYER DEPOSITION
    40.
    发明申请
    VORTEX CHAMBER LIDS FOR ATOMIC LAYER DEPOSITION 审中-公开
    用于原子层沉积的VORTEX CHAMBER LIDS

    公开(公告)号:US20080102208A1

    公开(公告)日:2008-05-01

    申请号:US11923583

    申请日:2007-10-24

    Abstract: Embodiments of the invention relate to apparatuses and methods for depositing materials on substrates during atomic layer deposition processes. In one embodiment, a chamber for processing substrates is provided which includes a chamber lid assembly containing a centrally positioned gas dispersing channel, wherein a converging portion of the gas dispersing channel tapers towards a central axis of the gas dispersing channel and a diverging portion of the gas dispersing channel tapers away from the central axis. The chamber lid assembly further contains a tapered bottom surface extending from the diverging portion of the gas dispersing channel to a peripheral portion of the chamber lid assembly, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate and two conduits are coupled to gas inlets within the converging portion of the gas dispersing channel and positioned to provide a circular gas flow through the gas dispersing channel.

    Abstract translation: 本发明的实施例涉及在原子层沉积工艺期间在衬底上沉积材料的装置和方法。 在一个实施例中,提供了一种用于处理衬底的室,其包括容纳中心定位的气体分散通道的室盖组件,其中气体分散通道的会聚部分朝向气体分散通道的中心轴逐渐变细, 气体分散通道远离中心轴逐渐变细。 室盖组件还包括从气体分散通道的发散部分延伸到室盖组件的周边部分的锥形底表面,其中锥形底表面的形状和尺寸基本上覆盖衬底,并且两个管道耦合到 在气体分散通道的会聚部分内的气体入口并且定位成提供通过气体分散通道的圆形气体流。

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