公开(公告)号：US09019771B2

公开(公告)日：2015-04-28

申请号：US13661723

申请日：2012-10-26

申请人： Hsiang-Lan Lung ,  Yen-Hao Shih ,  Erh-Kun Lai ,  Ming-Hsiu Lee

发明人： Hsiang-Lan Lung ,  Yen-Hao Shih ,  Erh-Kun Lai ,  Ming-Hsiu Lee

IPC分类号： G11C16/06 ,  G11C16/04 ,  G11C16/10

CPC分类号： G11C16/0475 ,  G11C16/10

摘要： A memory cell array of dielectric charge trapping memory cells and method for performing program, read and erase operations on the memory cell array that includes bits stored at charge trapping sites in adjacent memory cells. A bit of information is stored at a first charge trapping site in a first memory cell and a second charge trapping site in a second adjacent memory cell. Storing charge at two trapping sites in adjacent memory cells increases data retention rates of the array of memory cells as each charge trapping site can be read to represent the data that is stored at the data site. Each corresponding charge trapping site can be read independently and in parallel so that the results can be compared to determine the data value that is stored at the data site in an array of dielectric charge trapping memory cells.

摘要翻译： 介质电荷俘获存储器单元的存储单元阵列和用于对存储在相邻存储器单元中的电荷俘获位置处存储的位的存储单元阵列执行编程，读取和擦除操作的方法。 一些信息存储在第一存储单元中的第一电荷捕获位点和第二相邻存储单元中的第二电荷捕获位点。 在相邻存储器单元中的两个捕获位置处存储电荷增加了存储器单元阵列的数据保留率，因为可以读取每个电荷捕获位点以表示存储在数据站点的数据。 可以独立地并行地读取每个对应的电荷俘获位点，以便比较结果以确定存储在介电电荷俘获存储器单元阵列中的数据位置处的数据值。

公开(公告)号：US08426294B2

公开(公告)日：2013-04-23

申请号：US13476964

申请日：2012-05-21

申请人： Hsiang-Lan Lung ,  Yen-Hao Shih ,  Erh-Kun Lai ,  Ming-Hsiu Lee ,  Hang-Ting Lue

发明人： Hsiang-Lan Lung ,  Yen-Hao Shih ,  Erh-Kun Lai ,  Ming-Hsiu Lee ,  Hang-Ting Lue

IPC分类号： H01L29/76

CPC分类号： G11C16/0458 ,  H01L27/0688 ,  H01L27/10 ,  H01L27/11578 ,  H01L27/11582

摘要： A 3D memory device includes an array of semiconductor body pillars and bit line pillars, dielectric charge trapping structures, and a plurality of levels of word line structures arranged orthogonally to the array of semiconductor body pillars and bit line pillars. The semiconductor body pillars have corresponding bit line pillars on opposing first and second sides, providing source and drain terminals. The semiconductor body pillars have first and second channel surfaces on opposing third and fourth sides. Dielectric charge trapping structures overlie the first and second channel surfaces, providing data storage sites on two sides of each semiconductor body pillar in each level of the 3D array. The device can be operated as a 3D AND-decoded flash memory.

摘要翻译： 3D存储器件包括半导体主体柱和位线柱的阵列，介电电荷俘获结构以及与半导体主体柱和位线柱阵列垂直布置的多个字线结构。 半导体主体柱在相对的第一和第二侧上具有对应的位线柱，提供源极和漏极端子。 半导体主体支柱在相对的第三和第四侧上具有第一和第二通道表面。 电介质电荷捕获结构覆盖在第一和第二通道表面上，在3D阵列的每个级别中的每个半导体主体支柱的两侧提供数据存储位置。 该设备可以作为3D和解码的闪存操作。

公开(公告)号：US20100117048A1

公开(公告)日：2010-05-13

申请号：US12267453

申请日：2008-11-07

申请人： Hsiang-Lan Lung ,  Erh-Kun Lai ,  Yen-Hao Shih ,  Yi-Chou Chen ,  Shih-Hung Chen

发明人： Hsiang-Lan Lung ,  Erh-Kun Lai ,  Yen-Hao Shih ,  Yi-Chou Chen ,  Shih-Hung Chen

IPC分类号： H01L45/00 ,  H01L29/04 ,  H01L21/329

CPC分类号： H01L29/8616 ,  G11C13/0004 ,  G11C2213/72 ,  H01L27/1021 ,  H01L27/2409 ,  H01L27/2463 ,  H01L27/2472 ,  H01L29/04 ,  H01L29/165 ,  H01L29/861 ,  H01L45/04 ,  H01L45/06 ,  H01L45/085 ,  H01L45/1233 ,  H01L45/142 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/1675 ,  H01L45/1683

摘要： A memory device includes a driver comprising a pn-junction in the form of a multilayer stack including a first doped semiconductor region having a first conductivity type, and a second doped semiconductor region having a second conductivity type opposite the first conductivity type, the first and second doped semiconductors defining a pn-junction therebetween, in which the first doped semiconductor region is formed in a single-crystalline semiconductor, and the second doped semiconductor region includes a polycrystalline semiconductor. Also, a method for making a memory device includes forming a first doped semiconductor region of a first conductivity type in a single-crystal semiconductor, such as on a semiconductor wafer; and forming a second doped polycrystalline semiconductor region of a second conductivity type opposite the first conductivity type, defining a pn-junction between the first and second regions.

摘要翻译： 存储器件包括驱动器，其包括多层堆叠形式的pn结，其包括具有第一导电类型的第一掺杂半导体区域和具有与第一导电类型相反的第二导电类型的第二掺杂半导体区域，第一和 第二掺杂半导体，其中限定其间的pn结，其中所述第一掺杂半导体区形成在单晶半导体中，并且所述第二掺杂半导体区包括多晶半导体。 此外，制造存储器件的方法包括在半导体晶片上形成单晶半导体中的第一导电类型的第一掺杂半导体区域; 以及形成与所述第一导电类型相反的第二导电类型的第二掺杂多晶半导体区域，限定所述第一和第二区域之间的pn结。

公开(公告)号：US07582526B2

公开(公告)日：2009-09-01

申请号：US11445870

申请日：2006-06-02

申请人： Yen-Hao Shih ,  Erh-Kun Lai

发明人： Yen-Hao Shih ,  Erh-Kun Lai

IPC分类号： H01L21/336

CPC分类号： H01L27/105 ,  H01L27/11546 ,  H01L27/11568 ,  H01L29/78

摘要： A method for manufacturing a plurality of memory devices and a plurality of high voltage devices on a substrate are provided. The substrate has a memory region and a high voltage region. The method comprises steps of forming a first dielectric layer on the substrate and then performing a thermal process so as to enlarge the thickness of the first dielectric layer in the high voltage region. A buried diffusion region is formed in the substrate in the memory region and a charge trapping layer and a blocking dielectric layer are formed over the substrate in the memory region. A patterned conductive layer is formed over the substrate so as to form gates the memory region and the high voltage region respectively and then a source/drain region is formed adjacent to the gates in the high voltage region in the substrate.

摘要翻译： 提供了一种用于在基板上制造多个存储器件和多个高电压器件的方法。 衬底具有存储区和高电压区。 该方法包括以下步骤：在衬底上形成第一电介质层，然后进行热处理，以扩大高电压区域中的第一电介质层的厚度。 在存储区中的衬底中形成掩埋扩散区，并且在存储区中的衬底上形成电荷俘获层和阻挡电介质层。 在衬底上形成图案化的导电层，以分别形成存储区域和高电压区域的栅极，然后在衬底中的高电压区域中邻近栅极形成源极/漏极区域。

公开(公告)号：US20090108331A1

公开(公告)日：2009-04-30

申请号：US11979101

申请日：2007-10-31

申请人： Erh-Kun Lai ,  Yen-Hao Shih ,  Ling-Wu Yang ,  Chun-Min Cheng

发明人： Erh-Kun Lai ,  Yen-Hao Shih ,  Ling-Wu Yang ,  Chun-Min Cheng

IPC分类号： H01L29/792 ,  H01L21/336

CPC分类号： H01L21/28282 ,  H01L27/11568 ,  H01L29/66545 ,  H01L29/66583 ,  H01L29/7923

摘要： A memory having isolated dual memory cells is provided. A first isolation wall and a second isolation wall are separately disposed between a source and a drain on a substrate. An isolation bottom layer and a polysilicon layer are orderly disposed on the substrate between the first and the second isolation walls. A first charge storage structure and a first gate are orderly disposed on the substrate between the first isolation wall and the source. A second charge storage structure and a second gate are orderly disposed on the substrate between the second isolation wall and the drain. A word line disposed on the polysilicon layer, the first gate, the second gate, the first isolation wall and the second isolation wall is electrically connected to the first gate, the second gate and the polysilicon layer.

摘要翻译： 提供具有隔离双存储单元的存储器。 第一隔离壁和第二隔离壁分别设置在基板上的源极和漏极之间。 隔离底层和多晶硅层有序地设置在第一和第二隔离壁之间的衬底上。 第一电荷存储结构和第一栅极有序地设置在第一隔离壁和源极之间的衬底上。 第二电荷存储结构和第二栅极有序地设置在第二隔离壁和漏极之间的衬底上。 布置在多晶硅层上的字线，第一栅极，第二栅极，第一隔离壁和第二隔离壁电连接到第一栅极，第二栅极和多晶硅层。

公开(公告)号：US20070090442A1

公开(公告)日：2007-04-26

申请号：US11209437

申请日：2005-08-23

申请人： Yen-Hao Shih ,  Chia-Hua Ho ,  Hang-Ting Lue ,  Erh-Kun Lai ,  Kuang Hsieh

发明人： Yen-Hao Shih ,  Chia-Hua Ho ,  Hang-Ting Lue ,  Erh-Kun Lai ,  Kuang Hsieh

IPC分类号： H01L29/76

CPC分类号： H01L27/115 ,  G11C16/0483 ,  H01L27/11521

摘要： A NAND-type flash memory device includes asymmetric floating gates overlying respective wordlines. A given floating gate is sufficiently coupled to its respective wordline such that a large gate (i.e., wordline) bias voltage will couple the floating gate with a voltage which can invert the channel under the floating gate. The inversion channel under the floating gate can thus serve as the source/drain. As a result, the memory device does not need a shallow junction, or an assist-gate. In addition, the memory device exhibits relatively low floating gate-to-floating gate (FG-FG) interference.

摘要翻译： NAND型闪存器件包括覆盖相应字线的非对称浮动栅极。 给定的浮动栅极被充分地耦合到其相应的字线，使得大的栅极（即，字线）偏置电压将使浮动栅极与可以反转浮动栅极下方的沟道的电压耦合。 因此，浮置栅极下的反相通道可以作为源极/漏极。 结果，存储器件不需要浅结或辅助栅。 此外，存储器件具有相对较低的浮置栅极至浮置栅极（FG-FG）干扰。

公开(公告)号：US20060134866A1

公开(公告)日：2006-06-22

申请号：US11018507

申请日：2004-12-20

申请人： Erh-Kun Lai ,  Hang-Ting Lue ,  Yen-Hao Shih ,  Chia-Hua Ho

发明人： Erh-Kun Lai ,  Hang-Ting Lue ,  Yen-Hao Shih ,  Chia-Hua Ho

IPC分类号： H01L21/336 ,  H01L21/3205

CPC分类号： H01L27/11568 ,  H01L27/115 ,  H01L29/42348 ,  H01L29/66833 ,  H01L29/7923

摘要： A non-volatile memory is provided. The memory comprises a substrate, a dielectric layer, a conductive layer, an isolation layer, a buried bit line, a tunneling dielectric layer, a charge trapping layer, a barrier dielectric layer and a word line. Wherein, the dielectric layer is disposed on the substrate. The conductive layer is disposed on the dielectric layer. The isolation layer is disposed on the substrate and adjacent to the dielectric layer and the conductive layer. The buried bit line is disposed in the substrate and underneath the isolation layer. The tunneling dielectric layer is disposed on both the substrate and the sidewalls of the conductive layer and the isolation layer. The charge trapping layer is disposed on the tunneling dielectric layer and the barrier dielectric layer is disposed on the charge trapping layer. The word line is disposed on the substrate, crisscrossing with the buried bit line.

摘要翻译： 提供非易失性存储器。 存储器包括衬底，电介质层，导电层，隔离层，掩埋位线，隧道电介质层，电荷俘获层，势垒介电层和字线。 其中介电层设置在基板上。 导电层设置在电介质层上。 隔离层设置在基板上并且邻近电介质层和导电层。 掩埋位线设置在衬底中并在隔离层下方。 隧道电介质层设置在导电层和隔离层的基板和侧壁上。 电荷捕获层设置在隧道介电层上，势垒介电层设置在电荷俘获层上。 字线设置在基板上，与埋入位线交叉。

公开(公告)号：US08907316B2

公开(公告)日：2014-12-09

申请号：US12267453

申请日：2008-11-07

申请人： Hsiang-Lan Lung ,  Erh-Kun Lai ,  Yen-Hao Shih ,  Yi-Chou Chen ,  Shih-Hung Chen

发明人： Hsiang-Lan Lung ,  Erh-Kun Lai ,  Yen-Hao Shih ,  Yi-Chou Chen ,  Shih-Hung Chen

IPC分类号： H01L47/00 ,  H01L45/00 ,  H01L27/102 ,  H01L27/24 ,  H01L29/861 ,  H01L29/165 ,  H01L29/04 ,  G11C13/00

CPC分类号： H01L29/8616 ,  G11C13/0004 ,  G11C2213/72 ,  H01L27/1021 ,  H01L27/2409 ,  H01L27/2463 ,  H01L27/2472 ,  H01L29/04 ,  H01L29/165 ,  H01L29/861 ,  H01L45/04 ,  H01L45/06 ,  H01L45/085 ,  H01L45/1233 ,  H01L45/142 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/1675 ,  H01L45/1683

摘要： A memory device includes a driver comprising a pn-junction in the form of a multilayer stack including a first doped semiconductor region having a first conductivity type, and a second doped semiconductor region having a second conductivity type opposite the first conductivity type, the first and second doped semiconductors defining a pn-junction therebetween, in which the first doped semiconductor region is formed in a single-crystalline semiconductor, and the second doped semiconductor region includes a polycrystalline semiconductor. Also, a method for making a memory device includes forming a first doped semiconductor region of a first conductivity type in a single-crystal semiconductor, such as on a semiconductor wafer; and forming a second doped polycrystalline semiconductor region of a second conductivity type opposite the first conductivity type, defining a pn-junction between the first and second regions.

摘要翻译： 存储器件包括驱动器，其包括多层堆叠形式的pn结，其包括具有第一导电类型的第一掺杂半导体区域和具有与第一导电类型相反的第二导电类型的第二掺杂半导体区域，第一和 第二掺杂半导体，其中限定其间的pn结，其中所述第一掺杂半导体区形成在单晶半导体中，并且所述第二掺杂半导体区包括多晶半导体。 此外，制造存储器件的方法包括在半导体晶片上形成单晶半导体中的第一导电类型的第一掺杂半导体区域; 以及形成与所述第一导电类型相反的第二导电类型的第二掺杂多晶半导体区域，限定所述第一和第二区域之间的pn结。

公开(公告)号：US08664689B2

公开(公告)日：2014-03-04

申请号：US12267492

申请日：2008-11-07

申请人： Hsiang-Lan Lung ,  Erh-Kun Lai ,  Yen-Hao Shih ,  Yi-Chou Chen ,  Shih-Hung Chen

发明人： Hsiang-Lan Lung ,  Erh-Kun Lai ,  Yen-Hao Shih ,  Yi-Chou Chen ,  Shih-Hung Chen

IPC分类号： H01L29/861 ,  H01L29/88

CPC分类号： H01L45/1233 ,  H01L27/1021 ,  H01L27/2409 ,  H01L27/2463 ,  H01L27/2472 ,  H01L29/861 ,  H01L45/04 ,  H01L45/06 ,  H01L45/085 ,  H01L45/142 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/1675 ,  H01L45/1683

摘要： A memory device includes a driver comprising a pn-junction in the form of a multilayer stack including a first doped semiconductor region having a first conductivity type, and a second doped semiconductor plug having a second conductivity type opposite the first conductivity type, the first and second doped semiconductors defining a pn junction therebetween, in which the first doped semiconductor region is formed in a single-crystalline semiconductor, and the second doped semiconductor region includes a polycrystalline semiconductor. Also, a method for making a memory device includes forming a first doped semiconductor region of a first conductivity type in a single-crystal semiconductor, such as on a semiconductor wafer; and forming a second doped polycrystalline semiconductor region of a second conductivity type opposite the first conductivity type, defining a pn junction between the first and second regions.

摘要翻译： 存储器件包括驱动器，其包括多层堆叠形式的pn结，其包括具有第一导电类型的第一掺杂半导体区域和具有与第一导电类型相反的第二导电类型的第二掺杂半导体插头，第一和第 第二掺杂半导体，其中限定其间的pn结，其中所述第一掺杂半导体区域形成在单晶半导体中，并且所述第二掺杂半导体区域包括多晶半导体。 此外，制造存储器件的方法包括在半导体晶片上形成单晶半导体中的第一导电类型的第一掺杂半导体区域; 以及形成与第一导电类型相反的第二导电类型的第二掺杂多晶半导体区域，限定第一和第二区域之间的pn结。

公开(公告)号：US08581327B2

公开(公告)日：2013-11-12

申请号：US12974093

申请日：2010-12-21

申请人： Erh-Kun Lai ,  Yen-Hao Shih ,  Ling-Wu Yang ,  Chun-Min Cheng

发明人： Erh-Kun Lai ,  Yen-Hao Shih ,  Ling-Wu Yang ,  Chun-Min Cheng

IPC分类号： H01L29/792

CPC分类号： H01L21/28282 ,  H01L27/11568 ,  H01L29/66545 ,  H01L29/66583 ,  H01L29/7923

摘要： A memory having isolated dual memory cells is provided. A first isolation wall and a second isolation wall are separately disposed between a source and a drain on a substrate. An isolation bottom layer and a polysilicon layer are orderly disposed on the substrate between the first and the second isolation walls. A first charge storage structure and a first gate are orderly disposed on the substrate between the first isolation wall and the source. A second charge storage structure and a second gate are orderly disposed on the substrate between the second isolation wall and the drain. A word line disposed on the polysilicon layer, the first gate, the second gate, the first isolation wall and the second isolation wall is electrically connected to the first gate, the second gate and the polysilicon layer.