公开(公告)号：US20180269094A1

公开(公告)日：2018-09-20

申请号：US15986710

申请日：2018-05-22

申请人： Brooks Automation, Inc.

发明人： Daniel Babbs ,  William Fosnight ,  Robert C. May ,  William Weaver

IPC分类号： H01L21/677 ,  H01L21/673 ,  H01L21/67

CPC分类号： H01L21/67766 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67213 ,  H01L21/67225 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67393 ,  H01L21/67742 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/14

摘要： A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

公开(公告)号：US20180138066A1

公开(公告)日：2018-05-17

申请号：US15849002

申请日：2017-12-20

申请人： BROOKS AUTOMATION, INC.

发明人： Robert T. CAVENEY ,  Jayaraman KRISHNASAMY ,  Ulysses GILCHRIST ,  Mitchell DREW ,  Jairo T. MOURA

IPC分类号： H01L21/677 ,  B25J18/04 ,  B25J9/04 ,  B25J11/00

CPC分类号： H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US09926919B2

公开(公告)日：2018-03-27

申请号：US15012399

申请日：2016-02-01

申请人： Brooks Automation, Inc.

发明人： Sergei Syssoev ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells ,  Michael J. Eacobacci, Jr.

IPC分类号： F04B37/08 ,  B01D8/00

CPC分类号： F04B37/08 ,  B01D8/00 ,  Y10T29/49236

摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

公开(公告)号：US09895695B2

公开(公告)日：2018-02-20

申请号：US14316414

申请日：2014-06-26

申请人： Brooks Automation, Inc.

发明人： Robert K. Neeper ,  Rhett L. Affleck ,  Roger Howard

IPC分类号： B32B38/10 ,  B01L9/00 ,  B29C63/00 ,  B67B7/00 ,  B01L99/00 ,  B32B43/00

CPC分类号： B01L9/00 ,  B01L99/00 ,  B29C63/0013 ,  B32B38/10 ,  B32B43/006 ,  B67B7/00 ,  Y10T156/1168 ,  Y10T156/1174 ,  Y10T156/19 ,  Y10T156/195 ,  Y10T156/1956 ,  Y10T156/1978 ,  Y10T156/1989

摘要： A container or array of containers that is are sealed with a peelable seal is transported via a conveyor along a processing path toward a desealing station at which an adhesive surface having a width substantially the same as or greater than the width of the seal is pressed against the upper surface of the peelable seal. A collection rod applies a downward pressure on the adhesive surface, pressing it against the seal and keeping the container or container array in position on the conveyor as the plate moves with the conveyor. As the leading edge of the seal passes the collection rod, the adhesive surface is rolled upward, away from the plane of the seal, pulling up on the leading edge of the seal to separate it from the container or container array while the container or container array is held down by the roller. The removed seal is then discarded.

公开(公告)号：US09691651B2

公开(公告)日：2017-06-27

申请号：US14089439

申请日：2013-11-25

申请人： Brooks Automation, Inc.

发明人： Matthew W. Coady

IPC分类号： H01L21/68 ,  H01L21/687

CPC分类号： H01L21/68 ,  H01L21/68707

摘要： A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.

公开(公告)号：US20170087720A1

公开(公告)日：2017-03-30

申请号：US15376119

申请日：2016-12-12

申请人： BROOKS AUTOMATION, INC.

发明人： Jayaraman KRISHNASAMY ,  Martin HOSEK

IPC分类号： B25J9/16 ,  H01L21/677 ,  H01L21/67

CPC分类号： B25J9/1664 ,  G05B19/416 ,  G05B2219/40449 ,  G05B2219/40466 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67766

摘要： A time-optimal trajectory generation method, for a robotic manipulator haying a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.

公开(公告)号：US20160240418A9

公开(公告)日：2016-08-18

申请号：US14089439

申请日：2013-11-25

申请人： Brooks Automation, Inc.

发明人： Matthew W. Coady

IPC分类号： H01L21/68 ,  H01L21/687

CPC分类号： H01L21/68 ,  H01L21/68707

摘要： A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.

公开(公告)号：US09378995B2

公开(公告)日：2016-06-28

申请号：US14508974

申请日：2014-10-07

申请人： Brooks Automation, Inc.

发明人： Anthony C. Bonora

IPC分类号： H01L21/677 ,  E06B7/32 ,  E06B3/50 ,  E06B5/00

CPC分类号： H01L21/67772 ,  E06B3/50 ,  E06B3/5009 ,  E06B5/00 ,  E06B7/32 ,  H01L21/67763 ,  H01L21/67766 ,  Y10S414/135

摘要： A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.

摘要翻译： 装载端口具有端口门和具有开口的框架，端口门通过该开口与用于保持半导体工件的容器的容器门相连接。 在一个实施例中，可移动关闭机构连接​​到端口门并且被限定为可相对于端口门和框架以受控的方式移动。 在该实施例中，固定的封闭机构设置在靠近开口的框架上。 在另一个实施例中，固定的闭合机构连接到端口门，并且可移动的闭合机构设置在靠近开口的框架上。 在两个实施例中，可动闭合机构限定为与静止闭合机构接合，使得可动闭合机构与静止闭合机构接合的运动在端口门和容器门之间施加关闭力。

公开(公告)号：US09147590B2

公开(公告)日：2015-09-29

申请号：US13768495

申请日：2013-02-15

申请人： Brooks Automation, Inc.

发明人： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC分类号： H01L21/677 ,  B25J9/04 ,  H01L21/687

CPC分类号： H01L21/67742 ,  B25J9/042 ,  B25J9/043 ,  B25J18/00 ,  H01L21/677 ,  H01L21/68707 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305

摘要： A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

摘要翻译： 一种基板输送装置，具有可操作地连接到驱动部分的驱动部分和sc ara臂，以移动sc臂。 镰刀臂有一个上臂和至少一个前臂。 前臂可移动地安装到上臂并且能够在其上保持基底。 上臂基本上是刚性的，并且可调节以改变上臂的预定尺寸。

公开(公告)号：US20150217446A1

公开(公告)日：2015-08-06

申请号：US14617052

申请日：2015-02-09

申请人： Brooks Automation, Inc.

发明人： Izya Kremerman

IPC分类号： B25J9/04 ,  B25J9/12 ,  H01L21/677

CPC分类号： B25J9/044 ,  B25J9/042 ,  B25J9/126 ,  B25J15/0246 ,  H01L21/67739 ,  H01L21/67742 ,  Y10S901/17 ,  Y10S901/23 ,  Y10T74/20317 ,  Y10T74/20323 ,  Y10T74/20341

摘要： A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distal most link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing. The assembly further having an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the distalmost links of the first limb and the second limb, each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb, whereby the distalmost links of the first limb and the second limb are independently horizontally translatable for extension and retraction.

摘要翻译： 提出了一种用于运输基板的机器人组件。 所述机器人组件具有由柱支撑的第一臂和第二臂，所述第一臂还具有第一臂，所述第一臂具有第一组旋转接头/线对，所述第一组旋转接头/线对被配置为提供所述第一臂的最远侧链节的平移和旋转 第一肢在水平面。 所述组件还具有进一步具有第二支腿的第二臂，所述第二支腿包括第二组旋转接头/连杆对，所述第二组构造成在所述水平平面中提供所述第二支腿的最远端连杆的平移和旋转。 第一肢体和第二肢体还具有具有共同的垂直旋转轴线的近端旋转关节和容纳在公共壳体中的近侧内部关节。 所述组件还具有联接到所述第一组旋转接头/连杆对的致动器组件和所述第二组旋转接头/连杆对，以实现所述第一肢体和所述第二肢体的最远端连杆的旋转和平移， 第一肢体和第二肢体与致动器组件一起限定每个肢体至少三个自由度，由此第一肢体和第二肢体的最远侧的连接件可独立地水平平移以用于伸展和缩回。