公开(公告)号：US5780351A

公开(公告)日：1998-07-14

申请号：US844108

申请日：1997-04-28

申请人： Koji Arita ,  Eiji Fujii ,  Yasuhiro Shimada ,  Yasuhiro Uemoto ,  Toru Nasu ,  Akihiro Matsuda ,  Yoshihisa Nagano ,  Atsuo Inoue ,  Taketoshi Matsuura ,  Tatsuo Otsuki

发明人： Koji Arita ,  Eiji Fujii ,  Yasuhiro Shimada ,  Yasuhiro Uemoto ,  Toru Nasu ,  Akihiro Matsuda ,  Yoshihisa Nagano ,  Atsuo Inoue ,  Taketoshi Matsuura ,  Tatsuo Otsuki

IPC分类号： H01L21/02 ,  H01L21/8242 ,  H01L21/8246 ,  H01L27/115 ,  H01L21/20 ,  H01L21/00

CPC分类号： H01L27/11502 ,  H01L27/10852 ,  H01L27/11585 ,  H01L27/1159 ,  H01L28/40 ,  H01L28/55 ,  H01L28/60 ,  H01L28/75 ,  Y10S438/958

摘要： A semi conductor device forming a capacitor through an interlayer insulating layer on a semiconductor substrate on which an integrated circuit is formed. This semiconductor device has an interlayer insulating layer with moisture content of 0.5 g/cm.sup.3 or less, which covers the capacitor in one aspect, and has a passivation layer with hydrogen content of 10.sup.21 atoms/cm.sup.3 or less, which covers the interconnections of the capacitor in other aspect. By thus constituting, deterioration of the capacitor dielectric can be prevented which brings about the electrical reliability of the ferroelectric layer or high dielectric layer.

摘要翻译： 一种半导体器件，其在形成集成电路的半导体衬底上通过层间绝缘层形成电容器。 该半导体装置具有含水量为0.5g / cm 3以下的层间绝缘层，其在一个方面覆盖电容器，并且具有氢含量为1021原子/ cm3以下的钝化层，其覆盖电容器的互连 在其他方面。 通过这样构成，可以防止导致铁电层或高介电层的电可靠性的电容器电介质的劣化。

公开(公告)号：US5661319A

公开(公告)日：1997-08-26

申请号：US681093

申请日：1996-07-22

申请人： Eiji Fujii ,  Yasuhiro Shimada ,  Yasuhiro Uemoto ,  Tooru Nasu ,  Akihiro Matsuda ,  Tatsuo Ootsuki

发明人： Eiji Fujii ,  Yasuhiro Shimada ,  Yasuhiro Uemoto ,  Tooru Nasu ,  Akihiro Matsuda ,  Tatsuo Ootsuki

IPC分类号： H01L21/02 ,  H01L21/8242 ,  H01L27/108 ,  H01L27/12 ,  H01L29/786 ,  H01L29/92 ,  H01L29/94 ,  H01G7/06

CPC分类号： H01L29/94 ,  H01L27/10808 ,  H01L27/10852 ,  H01L27/1203 ,  H01L28/55 ,  H01L29/78654 ,  H01L28/75

摘要： This is a semiconductor device having an integrated circuit and a capacitor formed on a semiconductor substrate. The capacitor comprises a bottom electrode serving also as a part of a diffusion layer of the integrated circuit, a dielectric film being formed on the bottom electrode, and a top electrode of a conductive film being formed on the dielectric film. In particular, it is preferred to form the dielectric film in two layers of dielectric film, and compose the dielectric film contacting with the bottom electrode of a dielectric material in a composition possessing an excess of a metal element than the stoichiometric composition.

摘要翻译： 这是具有形成在半导体衬底上的集成电路和电容器的半导体器件。 电容器包括还用作集成电路的扩散层的一部分的底部电极，形成在底部电极上的电介质膜和形成在电介质膜上的导电膜的顶部电极。 特别地，优选将电介质膜形成为两层电介质膜，并且构成与具有比化学计量组成更多的金属元素的组成的与电介质材料的底电极接触的电介质膜。

公开(公告)号：US5599424A

公开(公告)日：1997-02-04

申请号：US571732

申请日：1995-12-13

申请人： Shoji Matsumoto ,  Yoshihisa Nagano ,  Yasuhiro Shimada ,  Yasufumi Izutsu

发明人： Shoji Matsumoto ,  Yoshihisa Nagano ,  Yasuhiro Shimada ,  Yasufumi Izutsu

IPC分类号： H01L21/302 ,  H01L21/02 ,  H01L21/3065 ,  H01L21/822 ,  H01L21/8242 ,  H01L21/8246 ,  H01L27/04 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L21/00

CPC分类号： H01L28/40

摘要： On a silicon substrate, a silicon oxide layer, a first platinum layer, a dielectric film and a second platinum layer are formed, and then the second platinum layer and the dielectric film are dry etched, via a resist layer, in a 1-5 Pa low pressure region with a mixed gas of HBr and 0.sub.2 as the etching gas. As soon as the first platinum layer is exposed, the unetched portion of dielectric film is etched off in a 5-50 Pa high pressure region, and then the first platinum layer is dry etched again in the low pressure region to form a capacitor consisting of a top electrode, a capacitance insulation layer and a bottom electrode in a semiconductor integrated circuit chip. Using this manufacturing method prevents the deterioration in definition caused by the use of a thick resist and the operation failure of circuit elements such as transistors due to over etching on the insulation layer.

摘要翻译： 在硅衬底上形成氧化硅层，第一铂层，电介质膜和第二铂层，然后通过抗蚀剂层在1-5中干法蚀刻第二铂层和电介质膜 Pa低压区域，混合气体为HBr和O2作为蚀刻气体。 一旦露出第一铂层，在5-50Pa高压区域中蚀刻介电膜的未蚀刻部分，然后在低压区域再次干法蚀刻第一铂层，形成由 半导体集成电路芯片中的顶部电极，电容绝缘层和底部电极。 使用该制造方法可以防止由于在绝缘层上的过度蚀刻而使用厚的抗蚀剂引起的定义的劣化以及诸如晶体管的电路元件的操作故障。

公开(公告)号：US5546375A

公开(公告)日：1996-08-13

申请号：US555503

申请日：1995-11-08

申请人： Yasuhiro Shimada ,  Yoshimasa Okamura ,  Osamu Takamatsu ,  Masaru Nakayama ,  Yoshihiro Yanagisawa

发明人： Yasuhiro Shimada ,  Yoshimasa Okamura ,  Osamu Takamatsu ,  Masaru Nakayama ,  Yoshihiro Yanagisawa

IPC分类号： G01Q10/00 ,  G01Q60/16 ,  G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/10 ,  G01Q60/38 ,  G01Q70/06 ,  G01Q70/14 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  H01J9/02 ,  H01J37/28

CPC分类号： G01Q20/04 ,  B82Y35/00 ,  G01Q60/16 ,  G11B9/1409 ,  G11B9/1418 ,  B82Y10/00 ,  G01Q80/00 ,  Y10S977/861 ,  Y10S977/875 ,  Y10S977/888

摘要： After a recessed portion 2 is formed in a first substrate made of single crystal silicon by crystal axis anisotropic etching, a peeling layer and a material of a fine tip which may be a noble metal or a noble metal alloy are formed. A second substrate is joined to the fine tip, and peeling is performed on the peeling layer, whereby the fine tip is formed on the second substrate.

摘要翻译： 在通过晶轴各向异性蚀刻在由单晶硅制成的第一衬底中形成凹陷部分2之后，形成剥离层和可以是贵金属或贵金属合金的细尖端材料。 将第二基板接合到细尖端，并且在剥离层上进行剥离，由此在第二基板上形成细末端。

公开(公告)号：US5460929A

公开(公告)日：1995-10-24

申请号：US45776

申请日：1993-04-14

申请人： Satoshi Nagaoka ,  Kazuyoshi Yamakawa ,  Mitsuru Yamamoto ,  Makoto Suzuki ,  Yasuhiro Shimada ,  Katsuro Nagaoka ,  Hideo Ikeda ,  Takefumi Hara ,  Sadanobu Shuto

发明人： Satoshi Nagaoka ,  Kazuyoshi Yamakawa ,  Mitsuru Yamamoto ,  Makoto Suzuki ,  Yasuhiro Shimada ,  Katsuro Nagaoka ,  Hideo Ikeda ,  Takefumi Hara ,  Sadanobu Shuto

IPC分类号： G03C1/14 ,  G03C7/30 ,  G03C7/305 ,  G03C7/38 ,  G03C1/46

CPC分类号： G03C7/30511 ,  G03C1/14 ,  G03C7/3041 ,  G03C7/3825

摘要： There is disclosed a silver halide color photographic material having a red-sensitive silver halide emulsion layer, a green-sensitive silver halide emulsion layer, a blue-sensitive silver halide emulsion layer, which comprises a cyan dye-forming coupler represented by formula (Ia) and (a) a sensitizing dye containing a sulfonamide group, (b) negative-type internal latent image-type silver halide grains chemically sensitized to a defined depth from the surface, (c) grains each having a defined spectral sensitivity distribution and a DIR-hydroquinone, (d) a monodisperse silver halide emulsion, (e) non-photosensitive silver halide emulsion wherein the inside or the surface of grains is fogged, (f) a colloidal silver, or (g) a DIR-hydroquinone: ##STR1## wherein Za represents --NH-- or --CH(R.sub.3)--, Zb and Zc each represent --C(R.sub.4).dbd. or --N.dbd., R.sub.1, R.sub.2, and R.sub.3 each represent an electron-attracting group wherein the Hammett substituent constant .sigma..sub.p value is 0.20 or more, provided that the sum of the .sigma..sub.p value of R.sub.1 and the .sigma..sub.p value of R.sub.2 is 0.65 or more, R.sub.4 represents a hydrogen atom or a substituent, if there are two groups R.sub.4 in the formula, they may be the same or different, and X represents a hydrogen atom or a group capable of being released upon a coupling reaction with the oxidized product of an aromatic primary amine color-developing agent, provided that R.sub.1, R.sub.2, R.sub.3, R.sub.4, or X may be a divalent group to form a homopolymer or a copolymer by bonding with a dimer or higher polymer or polymer chain.

摘要翻译： 公开了具有感红卤化银乳剂层，感绿卤化银乳剂层，感蓝卤化银乳剂层的卤化银彩色照相材料，其包含由式（Ia）表示的形成青色染料的成色剂 ）和（a）含有磺酰胺基团的增感染料，（b）从表面定义的深度化学敏化的负型内部潜像型卤化银颗粒，（c）各自具有确定的光谱灵敏度分布的颗粒和 DIR-氢醌，（d）单分散卤化银乳剂，（e）非光敏卤化银乳剂，其中颗粒的内部或表面起雾，（f）胶体银，或（g）DIR-氢醌:NH - 或-CH（R3） - ，Zb和Zc各自表示-C（R4）=或-N =，R1，R2和R3各自表示吸电子基团，其中哈米特取代基常数σp值为0.20以上 ，条件是R1的sigma p值和sigm的总和 R2的ap值为0.65以上，R4表示氢原子或取代基，如果式中有两个基团R 4，它们可以相同或不同，X表示氢原子或能够被释放的基团 与芳族伯胺显色剂的氧化产物的偶联反应，条件是R1，R2，R3，R4或X可以是二价基团，以通过与二聚体或更高级聚合物的键合形成均聚物或共聚物，或 聚合物链。

公开(公告)号：US5384236A

公开(公告)日：1995-01-24

申请号：US257189

申请日：1994-06-08

申请人： Koushin Matsuoka ,  Yasuhiro Shimada ,  Hiroyuki Yoneyama

发明人： Koushin Matsuoka ,  Yasuhiro Shimada ,  Hiroyuki Yoneyama

IPC分类号： C07D487/04 ,  G03C7/38

CPC分类号： C07D487/04 ,  G03C7/383

摘要： A silver halide color photographic material comprising a support having provided thereon at least one layer containing at least one cyan coupler represented by formula (I) ##STR1## wherein R.sub.1 and R.sub.2 each represent a substituent except methyl group;R.sub.3, R.sub.4, R.sub.5 and R.sub.6 each represent a hydrogen atom or a substituent;Z represents a non-metallic atom or a non-metallic atomic group necessary for forming a ring and the non-metallic atomic group of Z may optionally be substituted by substituent(s); andX represents a hydrogen atom, or a group of splitting off from the formula by coupling reaction with an oxidation product of an aromatic primary amine color developing agent.

摘要翻译： 一种卤化银彩色照相材料，其包含在其上设置有至少一层含有式（I）表示的至少一种青色成色剂的载体的载体，其中R1和R2各自表示除甲基以外的取代基; R3，R4，R5和R6各自表示氢原子或取代基; Z表示形成环所需的非金属原子或非金属原子团，Z的非金属原子团可以任选被取代基取代; X表示氢原子，或者是通过与芳香族伯胺显色剂的氧化产物偶联反应而与式分解的基团。

公开(公告)号：US5366856A

公开(公告)日：1994-11-22

申请号：US64586

申请日：1993-05-21

申请人： Yasuhiro Shimada ,  Hiroyuki Yoneyama

发明人： Yasuhiro Shimada ,  Hiroyuki Yoneyama

IPC分类号： G03C7/38 ,  C07D487/04 ,  G03C7/305 ,  G03C7/32

CPC分类号： C07D487/04 ,  G03C7/30529 ,  G03C7/30552 ,  G03C7/3212 ,  G03C7/3825 ,  G03C7/383 ,  G03C7/3835

摘要： A silver halide color photosensitive materials wherein a coupler represented by the formula indicated below is included in at least one layer on a support. In the formula, for example, Za represents --NH--, Zb represents --C(R.sub.4).dbd. and Zc represents --N.dbd.. R.sub.1, R.sub.2 and R.sub.3 each represents an electron withdrawing group of which the Hammett substituent group constant .sigma..sub.p value is 0.20 or above. However, the sum of the .sigma..sub.p values of R.sub.1 and R.sub.2 is 0.65 or above. R.sub.4, R.sub.a, R.sub.b, R.sub.c, R.sub.d and R.sub.e each represents a hydrogen atom or a substituent group. However, for example at least one of R.sub.a, R.sub.b, R.sub.c, R.sub.d and R.sub.e represents an electron withdrawing group, and the sum of the Hammett substituent group constant .sigma..sub.p values of each of R.sub.a, R.sub.b, R.sub.c, R.sub.d and R.sub.e is 0.5 or above. ##STR1##

摘要翻译： 一种卤化银色感光材料，其中由下列所示的式子表示的成色剂包含在载体上的至少一层中。 在该式中，例如，Za表示-NH-，Zb表示-C（R4）=，Zc表示-N =。 R 1，R 2和R 3各自表示吸电子基团，其中哈米特取代基基团常数σp值为0.20以上。 然而，R1和R2的σp值之和为0.65以上。 R4，Ra，Rb，Rc，Rd和Re各自表示氢原子或取代基。 然而，例如，Ra，Rb，Rc，Rd和Re中的至少一个表示吸电子基团，Ra，Rb，Rc，Rd和Re各自的哈米特取代基定数σp值之和为0.5或 以上。

公开(公告)号：US5362882A

公开(公告)日：1994-11-08

申请号：US894573

申请日：1992-06-05

申请人： Makoto Suzuki ,  Yasuhiro Shimada ,  Koushin Matsuoka ,  Shigeru Yamazaki ,  Katsuyoshi Yamakawa ,  Kozo Sato

发明人： Makoto Suzuki ,  Yasuhiro Shimada ,  Koushin Matsuoka ,  Shigeru Yamazaki ,  Katsuyoshi Yamakawa ,  Kozo Sato

IPC分类号： C07D487/04 ,  C09B55/00 ,  G03C7/38 ,  C07D487/14 ,  G03C7/36

CPC分类号： C07D487/04 ,  C09B55/009 ,  G03C7/383

摘要： A novel pyrrolotriazole derivative is disclosed, represented by any one of formulae (I), (II), (III), (IV), or (V): ##STR1## A heat transfer dye providing material is also disclosed, comprising a support having thereon a dye providing layer containing a heat migrating dye, said dye providing layer containing at least one pyrrolotriazole azomethine dye represented by any one of formulae (I), (II), (III), or (IV).

摘要翻译： 公开了由式（I），（II），（III），（IV）或（V）中的任一个表示的新颖的吡咯并三唑衍生物：其中（IMA） （V）还公开了一种传热染料提供材料，其包括其上具有含有热迁移染料的染料提供层的载体，所述染料提供层含有至少一种吡咯并三唑甲脒染料 由式（I），（II），（III）或（IV）中的任一个表示。

公开(公告)号：US5134273A

公开(公告)日：1992-07-28

申请号：US583940

申请日：1990-09-18

申请人： Koichi Wani ,  Mutsumi Mimasu ,  Tadaaki Miki ,  Yasuhiro Shimada

发明人： Koichi Wani ,  Mutsumi Mimasu ,  Tadaaki Miki ,  Yasuhiro Shimada

IPC分类号： H01S3/097 ,  B23K26/42 ,  H01S3/131 ,  H01S3/134

CPC分类号： H01S3/134 ,  B23K26/702 ,  H01S3/131

摘要： A pulsed light source comprising a laser for emitting light in pulse form in response to an electric power from a power supply which is changeable in accordance with a control signal from an external circuit and a photodetector responsive to the light from the laser so as to produce an electric signal corresponding to the intensity of the reception light. The output signal of the photodetector is supplied to a comparator so as to compare the electric signal therefrom with a reference signal to output a signal proportional to the difference between the electric signal and the reference signal. In response to the output signal of the comparator, a control circuit produces the control signal to be supplied to the power supply by adding the output signal of the comparator to a predetermined signal to control the electric power outputted from the power supply to the laser.

摘要翻译： 一种脉冲光源，包括用于响应来自电源的电力发射脉冲形式的激光，所述电源可根据来自外部电路的控制信号而变化，以及响应于来自激光的光的光检测器，以产生 对应于接收光的强度的电信号。 光电检测器的输出信号被提供给比较器，以将其电信号与参考信号进行比较，以输出与电信号和参考信号之差成比例的信号。 响应于比较器的输出信号，控制电路通过将比较器的输出信号与预定信号相加来产生提供给电源的控制信号，以控制从激光器的电源输出的电力。

公开(公告)号：US5050174A

公开(公告)日：1991-09-17

申请号：US480152

申请日：1990-02-14

申请人： Koichi Wani ,  Yasuhiro Shimada ,  Hidehito Kawahara ,  Mutsumi Mimasu ,  Tadaaki Miki

发明人： Koichi Wani ,  Yasuhiro Shimada ,  Hidehito Kawahara ,  Mutsumi Mimasu ,  Tadaaki Miki

IPC分类号： G03F7/20 ,  H01S3/081 ,  H01S3/106 ,  H01S3/10

CPC分类号： G03F7/70858 ,  H01S3/0811 ,  H01S3/106

摘要： A laser device includes an optical resonator comprising a laser medium and two totally reflecting mirrors disposed on respective sides of the laser medium. The laser device also has a wavelength selection element disposed between one of the totally reflecting mirrors and the laser medium. A partially reflecting mirror is disposed between the wavelength selection element and the laser medium. Any distortion and deterioration of the wavelength selection device are greatly reduced.