公开(公告)号：US20060243779A1

公开(公告)日：2006-11-02

申请号：US11386236

申请日：2006-03-21

申请人： Johannes Rau ,  Josef Distl ,  Armin Schoeppach ,  Hubert Holderer

发明人： Johannes Rau ,  Josef Distl ,  Armin Schoeppach ,  Hubert Holderer

IPC分类号： B23K31/02

CPC分类号： G03F7/70825 ,  C03C27/046 ,  C04B37/04 ,  C04B2237/12 ,  Y10T29/49144

摘要： The invention relates to processes for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and also relates to an assembly. A process includes the following steps: forming a substance mixture at a processing temperature from at least a first component, which is solid at the processing temperature, and a second component, which is liquid at the processing temperature, the first component being dispersed in the second component, introducing the substance mixture in the unset state between the optical element and the mount, and setting the substance mixture so as to form a diffusion alloy from the first and second components.

公开(公告)号：US07090362B2

公开(公告)日：2006-08-15

申请号：US10841846

申请日：2004-05-07

申请人： Hubert Holderer ,  Andreas Heisler ,  Wolfgang Singer ,  Markus Weiss ,  Andreas Seifert ,  Frank Melzer ,  Heinz Mann

发明人： Hubert Holderer ,  Andreas Heisler ,  Wolfgang Singer ,  Markus Weiss ,  Andreas Seifert ,  Frank Melzer ,  Heinz Mann

IPC分类号： G02B26/08 ,  G02B7/18

CPC分类号： G03F7/70258 ,  G02B5/09 ,  G02B7/1821 ,  G02B7/1824 ,  G02B26/0816 ,  G03F7/70075 ,  G03F7/70141 ,  G03F7/702 ,  G03F7/70275

摘要： In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.

摘要翻译： 在具有多个镜面的小平面镜中，其中镜面设置有反射面，镜面通过轴承装置联合地安装在基体内。 镜面包括通过表面，线或点接触在外周与轴承装置接触的镜体。 小平面镜的优选使用领域是用于制造半导体元件的微光刻中的投影曝光机的投影物镜。

公开(公告)号：US20060072217A1

公开(公告)日：2006-04-06

申请号：US11262360

申请日：2005-10-28

申请人： Ulrich Weber ,  Hubert Holderer ,  Dirk Rexhaeuser

发明人： Ulrich Weber ,  Hubert Holderer ,  Dirk Rexhaeuser

IPC分类号： G02B7/02

CPC分类号： G03F7/70258 ,  G02B7/003 ,  G03F7/70825

摘要： In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction

公开(公告)号：US06259571B1

公开(公告)日：2001-07-10

申请号：US09503023

申请日：2000-02-14

申请人： Hubert Holderer ,  Peter Ruemmer ,  Michael Trunz ,  Bernhard Geuppert ,  Thomas Polzer ,  Johan Dries ,  Hugo Timmers ,  Albert Post

发明人： Hubert Holderer ,  Peter Ruemmer ,  Michael Trunz ,  Bernhard Geuppert ,  Thomas Polzer ,  Johan Dries ,  Hugo Timmers ,  Albert Post

IPC分类号： G02B702

CPC分类号： G12B5/00 ,  G02B7/023 ,  G02B7/026

摘要： An adjustable assembly comprises a base (mount ring 1), an adjustable part (inner ring 3), a lever (tilting lever 5) and a drive (drive element 6). The lever (tilting lever 5) is connected to the base (mount ring 1) and to the adjustable part (inner ring 3) via two elastic solid pivoting joints (7, 8) oriented in parallel. One of the two solid pivoting joints (7) is divided into two pivoting joint parts (7a, 7b), which are arranged such that along their pivoting axis (9) they are offset sideways on either side of the second solid pivoting joint (8).

摘要翻译： 可调组件包括基座（安装环1），可调部分（内环3），杠杆（倾斜杆5）和驱动（驱动元件6））。 杠杆（倾斜杆5）通过平行定向的两个弹性固体枢转接头（7,8）连接到基座（安装环1）和可调节部分（内环3）。 两个固定枢转接头（7）中的一个被分成两个枢转接头部分（7a，7b），它们被布置为使得沿着它们的枢转轴线（9），它们在第二固体枢转接头（8）的任一侧侧向偏移 ）。

公开(公告)号：US06229657B1

公开(公告)日：2001-05-08

申请号：US09328938

申请日：1999-06-09

申请人： Hubert Holderer ,  Peter Rümmer ,  Michael Trunz

发明人： Hubert Holderer ,  Peter Rümmer ,  Michael Trunz

IPC分类号： G02B702

CPC分类号： G03F7/70058 ,  G02B7/023 ,  G03F7/70241 ,  G03F7/70825

摘要： Assembly of an optical element and a mount, in which the optical element is coupled by means of numerous lugs to a rigid intermediate ring, which itself is coupled by adjusting members or passive decouplers to the mount for connection to a housing and/or to a further mount.

摘要翻译： 光学元件和安装件的组装，其中光学元件通过许多凸耳连接到刚性中间环，该刚性中间环本身通过调节构件或被动分离器耦合到安装件，以连接到壳体和/或 进一步安装。

公开(公告)号：US20110199597A1

公开(公告)日：2011-08-18

申请号：US13096112

申请日：2011-04-28

申请人： Wolfgang Hummel ,  Jurgen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schöngart ,  Markus Neumaier ,  Bärbel Trossbach ,  Ulrich Weber ,  Michael Mühlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

发明人： Wolfgang Hummel ,  Jurgen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schöngart ,  Markus Neumaier ,  Bärbel Trossbach ,  Ulrich Weber ,  Michael Mühlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

IPC分类号： G03B27/52

CPC分类号： G03F7/70258 ,  G03F7/70825

摘要： An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.

摘要翻译： 用于微光刻的投影曝光机中的成像装置具有至少一个光学元件和至少一个具有线性驱动的操纵器，用于操纵光学元件的位置。 线性驱动器具有驱动区域和非驱动子区域，它们可以在运动轴线的方向上相对于彼此移动。 至少临时地通过具有主动轴的功能元件和通过至少大致平行于运动轴的有源方向的功能元件临时地互相连接。

公开(公告)号：US07354168B2

公开(公告)日：2008-04-08

申请号：US10848210

申请日：2004-05-18

申请人： Hubert Holderer ,  Andreas Heisler ,  Wolfgang Singer ,  Markus Weiss ,  Andreas Seifert ,  Frank Melzer ,  Heinz Mann ,  Jurgen Faltus ,  Berndt Warm ,  Stefan Dornheim

发明人： Hubert Holderer ,  Andreas Heisler ,  Wolfgang Singer ,  Markus Weiss ,  Andreas Seifert ,  Frank Melzer ,  Heinz Mann ,  Jurgen Faltus ,  Berndt Warm ,  Stefan Dornheim

IPC分类号： G02B5/09 ,  G02B7/182

CPC分类号： G03F7/70075 ,  G02B5/09 ,  G02B7/1821 ,  G02B7/1824 ,  G02B7/198 ,  G02B26/0833 ,  G03F7/70108 ,  G03F7/70141 ,  G03F7/70175 ,  G03F7/702

摘要： A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).

摘要翻译： 小面反射镜（10）设置有多个镜面（11），其中镜面（11）分别具有带有反射表面（12）的球形或圆锥形小面体（17）。 从反射面（12）避开的小面体（17）的一侧安装在轴承装置（15）中。

公开(公告)号：US20070223116A1

公开(公告)日：2007-09-27

申请号：US11804467

申请日：2007-05-18

申请人： Ulrich Weber ,  Hubert Holderer

发明人： Ulrich Weber ,  Hubert Holderer

IPC分类号： G02B9/00

CPC分类号： G03F7/70258 ,  G02B7/003 ,  G02B7/1822 ,  G03F7/70825 ,  G03F7/70833 ,  G03F7/709

摘要： In a holding and positioning apparatus for an optical element, the optical element is mounted in a mounting ring and the mounting ring is mounted via at least one manipulator unit. The manipulator unit has a linear actuating element. The manipulator unit has a manipulator head, a movable manipulator part and a manipulator foot, the manipulator head being connected to the movable manipulator part via a solid body joint. The movable manipulator part is connected to the manipulator foot via an actuator and at least one solid body joint, the linear actuating element being coupled to the manipulator foot and the actuator.

公开(公告)号：US07251086B2

公开(公告)日：2007-07-31

申请号：US11262360

申请日：2005-10-28

申请人： Ulrich Weber ,  Hubert Holderer ,  Dirk Rexhaeuser

发明人： Ulrich Weber ,  Hubert Holderer ,  Dirk Rexhaeuser

IPC分类号： G02B7/02

CPC分类号： G03F7/70258 ,  G02B7/003 ,  G03F7/70825

摘要： In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction.

摘要翻译： 在用于将光学元件定位在结构中的装置中，特别是在用于微光刻的投影物镜的物镜外壳中，光学元件通过紧固元件连接到结构。 光学元件的位置通过调整紧固件来设定。 紧固元件以这种方式布置，并且调节紧固件可以以这样的方式致动，使得光学元件可以围绕三个相互独立的轴线倾斜，并且可以在一个轴向方向上以平移方式另外移位。

公开(公告)号：US20060164619A1

公开(公告)日：2006-07-27

申请号：US11316160

申请日：2005-12-21

申请人： Stephan Back ,  Wolfgang Hummel ,  Juergen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schoengart ,  Markus Neumaier ,  Baerbel Schwaer ,  Ulrich Weber ,  Michael Muehlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

发明人： Stephan Back ,  Wolfgang Hummel ,  Juergen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schoengart ,  Markus Neumaier ,  Baerbel Schwaer ,  Ulrich Weber ,  Michael Muehlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

IPC分类号： G03B27/54

CPC分类号： G03F7/70825 ,  G03F7/70258

摘要： An imaging device in a projection exposure machine for microlithography comprises at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. Said linear drive has at least one moving element, said moving element having a shearing part and a lifting part. Said shearing part is arranged to move the optical element and said lifting part is arranged to move said shearing part. Said linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.

摘要翻译： 用于微光刻的投影曝光机中的成像装置包括至少一个光学元件和至少一个操纵器，用于操纵光学元件的位置的线性驱动器。 所述线性驱动器具有至少一个移动元件，所述移动元件具有剪切部分和提升部分。 所述剪切部分被布置成移动光学元件，并且所述提升部分被布置成移动所述剪切部分。 所述线性驱动器具有支撑元件，该支撑元件在剪切部分被提升部分移动的同时与光学元件接触并防止其移动。