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公开(公告)号:US4668646A
公开(公告)日:1987-05-26
申请号:US900512
申请日:1986-08-26
申请人: Minato Ando , Masaaki Ito , Fumio Mizuno
发明人: Minato Ando , Masaaki Ito , Fumio Mizuno
IPC分类号: C04B35/111 , H01B3/12 , H01P7/10 , C04B35/10 , C04B35/46
CPC分类号: C04B35/111
摘要: An alumina ceramic composition to provide a low dielectric loss in the high frequency region upon sintering, which consists essentially of: 100 parts by weight of a base composition containing therein Al.sub.2 O.sub.3, CaO and TiO.sub.2 within their respective compositional range; and 0.03 to 3 parts by weight of La.sub.2 O.sub.3. The base composition is within a range A-B-C-D-E-A in the ternary diagram (Figure) in molar fraction:______________________________________ Al.sub.2 O.sub.3 CaO TiO.sub.2 ______________________________________ A 99.0 0.5 0.5 B 94.5 3.7 1.8 C 90.0 7.0 3.0 D 90.0 2.0 8.0 E 94.5 1.3 4.2 ______________________________________
摘要翻译: 一种氧化铝陶瓷组合物,其在烧结时在高频区域提供低介电损耗,其基本上由以下组成:100重量份在其各自的组成范围内含有Al 2 O 3,CaO和TiO 2的基础组合物; 和0.03〜3重量份的La 2 O 3。 基础组成在摩尔分数三元图(图)中的A-B-C-D-E-A范围内:-Al 2 O 3 CaO TiO 2 -A 99.0 0.5 0.5 -B 94.5 3.7 1.8 -C 90.0 7.0 3.0 -D 90.0 2.0 8.0 -E 94.5 1.3 4.2 -
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公开(公告)号:US4585745A
公开(公告)日:1986-04-29
申请号:US681947
申请日:1984-12-14
申请人: Tutomu Tunooka , Fumio Mizuno
发明人: Tutomu Tunooka , Fumio Mizuno
IPC分类号: H01B3/12 , C04B35/495 , H01P7/10 , C04B35/00
CPC分类号: C04B35/495
摘要: A dielectric ceramic composition, which has a high dielectric constant, low loss and stable temperature characteristics suited for the microwave frequency range, is obtained by the present invention. The dielectric ceramic composition according to the present invention is expressed as (Ba.sub.x Sr.sub.1-x)(Ni.sub.1/3 Nb.sub.2/3)O.sub.3 and with a mole fraction range of 0.ltoreq.x
摘要翻译: 通过本发明获得具有适合于微波频率范围的高介电常数,低损耗和稳定的温度特性的介电陶瓷组合物。 根据本发明的电介质陶瓷组合物表示为(BaxSr1-x)(Ni1 / 3Nb2 / 3)O3,摩尔分数范围为0
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公开(公告)号:US4118794A
公开(公告)日:1978-10-03
申请号:US851691
申请日:1977-11-15
申请人: Fumio Mizuno , Masamichi Ishihara
发明人: Fumio Mizuno , Masamichi Ishihara
IPC分类号: G11C11/404 , G11C11/4097 , H01L27/105 , H01L27/108 , G11C11/24
CPC分类号: H01L27/10805 , G11C11/404 , G11C11/4097 , H01L27/105
摘要: A memory cell of a dynamic storage device is composed of a MOSFET and a capacitor. On a single semiconductor substrate, a plurality of such memory cells are regularly arranged so as to form a plurality of columns, with the result that they constitute a memory cell array or a memory cell mat. The capacitor for the memory cell is made up of a semiconductor region of the type which possesses a conductivity opposite to that of the semiconductor substrate, and a conductor film which is formed of polycrystalline silicon or the like on the semiconductor region through a comparatively thin insulating film. The areas of the capacitors in the memory cell column situated at an end portion of the memory cell mat are made larger than those of the capacitors of the memory cells at an inner or central portion of the memory cell mat. The memory cells at the end portion of the memory cell mat come to have information holding times equivalent to those of the memory cells at the central portion of the memory cell mat.
摘要翻译: 动态存储装置的存储单元由MOSFET和电容器组成。 在单个半导体衬底上,多个这样的存储单元被规则地排列以形成多个列,结果它们构成存储单元阵列或存储单元垫。 用于存储单元的电容器由具有与半导体衬底的导电性相反的导电性的半导体区域和由半导体区域上的多晶硅等形成的导体膜构成,该导体膜通过较薄的绝缘 电影。 位于存储单元垫的端部的存储单元列中的电容器的面积比在存储单元垫的内部或中央部分的存储单元的电容器的面积大。 存储单元垫的端部处的存储单元具有与存储单元垫的中央部分的存储单元相同的信息保持时间。
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公开(公告)号:US08217466B2
公开(公告)日:2012-07-10
申请号:US11990491
申请日:2006-08-01
申请人: Kanji Otsuka , Fumio Mizuno , Munekazu Takano , Tamotsu Usami
发明人: Kanji Otsuka , Fumio Mizuno , Munekazu Takano , Tamotsu Usami
IPC分类号: H01L21/70
CPC分类号: H01L27/1211 , H01L21/823493 , H01L27/0705 , H01L29/66795 , H01L29/785
摘要: Disclosed is a semiconductor device wherein the switching speed of a transistor is increased. Specifically disclosed is a semiconductor device comprising a semiconductor layer formed on a part of an insulating layer, a first transistor formed on a lateral face of the semiconductor layer and having a first gate insulating film, a first gate electrode and two first impurity layers forming a source and a drain, and a second transistor formed on another lateral face of the semiconductor layer and having a second gate insulating film, a second gate electrode and two second impurity layers forming a source and a drain.
摘要翻译: 公开了一种半导体器件,其中晶体管的开关速度增加。 具体公开了一种半导体器件,包括形成在绝缘层的一部分上的半导体层,形成在半导体层的侧面上的第一晶体管,并具有第一栅极绝缘膜,第一栅电极和两个第一杂质层, 源极和漏极,以及形成在所述半导体层的另一个侧面上并具有第二栅极绝缘膜,第二栅极电极和形成源极和漏极的两个第二杂质层的第二晶体管。
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45.
公开(公告)号:US07804111B2
公开(公告)日:2010-09-28
申请号:US12083573
申请日:2006-10-10
申请人: Kanji Otsuka , Munekazu Takano , Fumio Mizuno , Saburo Yokokura , Tsuneo Ito , Yuko Tanba , Yutaka Akiyama
发明人: Kanji Otsuka , Munekazu Takano , Fumio Mizuno , Saburo Yokokura , Tsuneo Ito , Yuko Tanba , Yutaka Akiyama
IPC分类号: H01L29/94
CPC分类号: H03K5/156 , H01L23/642 , H01L23/66 , H01L24/48 , H01L24/49 , H01L2224/48091 , H01L2224/48247 , H01L2224/49171 , H01L2224/73265 , H01L2924/00014 , H01L2924/01004 , H01L2924/19041 , H01L2924/19051 , H01L2924/30107 , H01L2924/3011 , H03K2005/00026 , H03K2217/0018 , H04L25/085 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要: The object of the invention is to provide a semiconductor device including signal-transmission interconnections preferable for transmitting high frequency signal and capability to adjust characteristics of the above signal-transmission interconnections. A semiconductor device according to the present invention consists of a signal-transmission interconnection 20 for transmission of signals, a MOS capacitance element 10 having a gate electrode connected to the signal-transmission interconnection 20, a first voltage-applying interconnection 30 connected to a source and a drain of the MOS capacitance element 10 and applying a voltage to the source and the drain of the MOS capacitance element 10, a second voltage-applying interconnection 40 connected to a well of the MOS capacitance element 10, and applying a voltage to the well of said first MOS capacitance element 10. Jitters occurring in the signal-transmission interconnection 20 can be adjusted by adjusting each of voltages of the first voltage-applying interconnection 30 and the second voltage-applying interconnection 40.
摘要翻译: 本发明的目的是提供一种半导体器件,其包括优选用于传输高频信号的信号传输互连和调整上述信号传输互连特性的能力。 根据本发明的半导体器件包括用于传输信号的信号传输互连20,具有连接到信号传输互连20的栅电极的MOS电容元件10,连接到源的第一施加电压互连30 和MOS电容元件10的漏极,并向MOS电容元件10的源极和漏极施加电压,连接到MOS电容元件10的阱的第二施加电压互连40,并向 可以通过调节第一施加电压互连30和第二施加电压互连40的每个电压来调节发生在信号传输互连20中的抖动。
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公开(公告)号:US20090096029A1
公开(公告)日:2009-04-16
申请号:US11990491
申请日:2006-08-01
申请人: Kanji Otsuka , Fumio Mizuno , Munekazu Takano , Tamotsu Usami
发明人: Kanji Otsuka , Fumio Mizuno , Munekazu Takano , Tamotsu Usami
IPC分类号: H01L27/088 , H01L21/336
CPC分类号: H01L27/1211 , H01L21/823493 , H01L27/0705 , H01L29/66795 , H01L29/785
摘要: Disclosed is a semiconductor device wherein the switching speed of a transistor is increased. Specifically disclosed is a semiconductor device comprising a semiconductor layer formed on a part of an insulating layer, a first transistor formed on a lateral face of the semiconductor layer and having a first gate insulating film, a first gate electrode and two first impurity layers forming a source and a drain, and a second transistor formed on another lateral face of the semiconductor layer and having a second gate insulating film, a second gate electrode and two second impurity layers forming a source and a drain.
摘要翻译: 公开了一种半导体器件,其中晶体管的开关速度增加。 具体公开了一种半导体器件,包括形成在绝缘层的一部分上的半导体层,形成在半导体层的侧面上的第一晶体管,并具有第一栅极绝缘膜,第一栅电极和两个第一杂质层, 源极和漏极,以及形成在所述半导体层的另一个侧面上并具有第二栅极绝缘膜,第二栅极电极和形成源极和漏极的两个第二杂质层的第二晶体管。
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公开(公告)号:US20070290697A1
公开(公告)日:2007-12-20
申请号:US11798395
申请日:2007-05-14
申请人: Fumihiro Sasajima , Osamu Komuro , Fumio Mizuno
发明人: Fumihiro Sasajima , Osamu Komuro , Fumio Mizuno
IPC分类号: G01N23/00
CPC分类号: G03F7/70608 , G01N23/225 , G06T7/0004 , H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/24592 , H01J2237/2487
摘要: The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the photoresist are detected. The microstructured patterns are evaluated by calculating, and displaying on the screen, the dislocation vector that represents the relationship in position between the detected patterns on the surface and at the bottom of the photoresist. Furthermore, dislocation vectors between the microstructured patterns at multiple positions in a single-chip or single-shot area or on one wafer are likewise calculated, then the sizes and distribution status of the dislocation vectors at each such position are categorized as characteristic quantities, and the corresponding tendencies are analyzed. Thus, stepper or wafer abnormality is detected.
摘要翻译: 相对于由步进器暴露的微结构化图案检测掩模版的边缘,并且检测光致抗蚀剂表面和底部处的微结构图案的形状。 通过在屏幕上计算和显示代表光刻胶表面和底部上检测到的图案之间的位置关系的位错矢量来评估微结构化图案。 此外,同样计算单芯片或单次照射区域或一个晶片上的多个位置处的微结构化图案之间的位错矢量,则将每个这样的位置处的位错矢量的尺寸和分布状态分类为特征量,并且 分析相应的趋势。 因此,检测到步进器或晶片异常。
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公开(公告)号:US07109485B2
公开(公告)日:2006-09-19
申请号:US11108731
申请日:2005-04-19
申请人: Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人: Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC分类号: H01J37/21
CPC分类号: G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译: 本发明的目的是获得一种聚焦于样品的所有部分的图像,并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的,本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置,用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器, 发射的带电粒子束,以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置,所述信号在从带电粒子检测器输出的信号中。
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公开(公告)号:US06936819B2
公开(公告)日:2005-08-30
申请号:US10857956
申请日:2004-06-02
申请人: Fumihiro Sasajima , Osamu Komuro , Fumio Mizuno
发明人: Fumihiro Sasajima , Osamu Komuro , Fumio Mizuno
IPC分类号: H01L21/027 , B32B3/00 , G01B11/00 , G01N23/225 , G01Q30/02 , G01Q30/04 , G03F7/20 , H01L21/66 , G01N23/00
CPC分类号: G03F7/70608 , G01N23/225 , G06T7/0004 , H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/24592 , H01J2237/2487
摘要: The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the photoresist are detected. The microstructured patterns are evaluated by calculating, and displaying on the screen, the dislocation vector that represents the relationship in position between the detected patterns on the surface and at the bottom of the photoresist. Furthermore, dislocation vectors between the microstructured patterns at multiple positions in a single-chip or single-shot area or on one wafer are likewise calculated, then the sizes and distribution status of the dislocation vectors at each such position are categorized as characteristic quantities, and the corresponding tendencies are analyzed. Thus, stepper or wafer abnormality is detected.
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公开(公告)号:US06936818B2
公开(公告)日:2005-08-30
申请号:US10681116
申请日:2003-10-09
申请人: Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人: Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
CPC分类号: G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译: 本发明的目的是获得一种聚焦于样品的所有部分的图像,并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的,本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置,用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器, 发射的带电粒子束,以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置,所述信号在从带电粒子检测器输出的信号中。
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