公开(公告)号：US20080278268A1

公开(公告)日：2008-11-13

申请号：US11797924

申请日：2007-05-09

申请人： John S. Foster ,  Kimberly L. Turner

发明人： John S. Foster ,  Kimberly L. Turner

IPC分类号： H01H59/00 ,  H01H49/00

CPC分类号： H01H59/0009 ,  B81B2201/018 ,  B81C1/00333 ,  Y10T29/49105 ,  Y10T29/5317

摘要： Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.

摘要翻译： 用于形成静电MEMS板开关的系统和方法包括在第一衬底上形成可变形板，在第二衬底上形成电触点，并使用气密密封来连接两个衬底。 可变形板可以具有位于可变形板的振动模式的节点线处的至少一个分流杆，使得当板在该振动模式下振动时，分流棒保持相对静止。 气密密封可以是金/铟合金，通过加热镀在一层金上的铟层而形成。 可以通过形成穿过第二基板的厚度的通孔来进行对静电MEMS开关的电接入。

公开(公告)号：US5455730A

公开(公告)日：1995-10-03

申请号：US19968

申请日：1993-02-18

申请人： Moris M. Dovek ,  John S. Foster ,  Donald K. F. Lam ,  Erich Sawatzky

发明人： Moris M. Dovek ,  John S. Foster ,  Donald K. F. Lam ,  Erich Sawatzky

IPC分类号： G11B5/02 ,  G11B5/00 ,  G11B5/012 ,  G11B5/035 ,  G11B5/09 ,  G11B5/31 ,  G11B5/39 ,  G11B5/58 ,  G11B5/60 ,  G11B20/10 ,  G11B5/127 ,  G11B5/33

CPC分类号： G11B5/6005 ,  G11B20/10055 ,  G11B20/10203 ,  G11B5/012 ,  G11B5/035 ,  G11B5/09 ,  G11B5/39 ,  G11B5/3903 ,  G11B5/58 ,  G11B2005/0016

摘要： A contact magnetic recording rigid disk file utilizes a magnetoresistive (MR) sensor for reading data recorded on the disk. The disk file may be of the liquid-bearing type of contact recording with the MR sensor supported on the trailing end of a carrier which rides on the liquid bearing. The performance of the disk file is enhanced by including means for minimizing the effect of a discovered baseline read signal modulation. The modulation has been determined to be caused by variable cooling of the temperature-sensitive and temperature-elevated MR sensor by the disk, with the temperature variation being directly related to the variation in head-disk spacing caused by the waviness of the surface of the disk. A filter may be incorporated into the read signal processing circuitry of the disk file to eliminate the modulation, the MR sensor may be designed to operate at selected parameters to minimize the effect of the baseline modulation, and the portion of the carrier in contact with the disk surface may be selected to have a length less than the period of the disk waviness so that it more closely follows the disk surface topography.

摘要翻译： 接触磁记录硬盘文件利用磁阻（MR）传感器来读取记录在盘上的数据。 磁盘文件可以是液体承载型接触记录，其中MR传感器支撑在搭载在液体轴承上的载体的后端上。 通过包括用于最小化发现的基线读信号调制的影响的装置来增强磁盘文件的性能。 已经确定调制是由盘对温度敏感和温度升高的MR传感器的可变冷却造成的，其温度变化与由于表面的波纹引起的头盘间距的变化直接相关 磁盘。 滤波器可以并入盘文件的读信号处理电路中以消除调制，MR传感器可被设计成在所选参数下操作以最小化基线调制的影响，并且载体与 可以选择盘表面具有小于盘波纹的周期的长度，使得其更接近于盘表面形貌。

公开(公告)号：US5049461A

公开(公告)日：1991-09-17

申请号：US367815

申请日：1989-06-19

申请人： Patrick C. Arnett ,  Andres Bryant ,  John S. Foster ,  Jane E. Frommer ,  Jon A. C. Iwata

发明人： Patrick C. Arnett ,  Andres Bryant ,  John S. Foster ,  Jane E. Frommer ,  Jon A. C. Iwata

IPC分类号： G01Q60/00 ,  G03F1/00 ,  G03F7/20 ,  H01J37/317 ,  H01L21/027 ,  H01L21/30

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/78 ,  G03F7/2049 ,  H01J2237/31759 ,  Y10S430/143 ,  Y10S977/855

摘要： A high resolution lithographic mask having a desired pattern is generated and used to replicate the pattern onto a film in a one-step process.A film of phase-changeable material in one state is provided on a conductive substrate. By scanning tunneling microscope techniques, the state and thereby the conductivity or other property of the material in selected areas of the film is changed to a second state to provide from the film a mask having a desired pattern defined by crystalline areas. Amorphous material need not be removed from the mask.To replicate the pattern on another film, the latter is placed on another conductive substrate; the mask is positioned with its patterned side within electron tunneling distance of said other film; and the pattern is replicated in a single step by applying a voltage between the mask and other film. The voltage charge on said mask is positive and negative on said other film to cause current to flow in the crystalline areas of said mask and, by electron flow from said film to the mask, eliminate backscattering and insure high resolution.As the state changes (e.g., from crystalline to amorphous) in the pattern areas of said other film, conductivity in the crystalline areas will progressively decrease and, by causing a corresponding reduction in current flow in the crystalline areas, minimize the risk of undesired broadening of exposed areas of said other film.

公开(公告)号：US20220260480A1

公开(公告)日：2022-08-18

申请号：US17716007

申请日：2022-04-08

申请人： John S. Foster ,  Mark A. Naivar ,  Kevin E. Shields ,  Daryl W. Grummitt ,  Timothy J. Wilt ,  Yareeve Zemel ,  Lily Li

发明人： John S. Foster ,  Mark A. Naivar ,  Kevin E. Shields ,  Daryl W. Grummitt ,  Timothy J. Wilt ,  Yareeve Zemel ,  Lily Li

IPC分类号： G01N15/14 ,  B07C5/342 ,  B01L3/00

摘要： A MEMS-based particle manipulation system which uses a particle manipulation stage and optical confirmation of the manipulation. The optical confirmation may be camera-based, and may be used to assess the effectiveness or accuracy of the particle manipulation stage. In one exemplary embodiment, the particle manipulation stage is a microfabricated, fluid valve, which sorts a target particle from non-target particles in a fluid stream. The optical confirmation stage is disposed in the microfabricated fluid channels at the input and output of the microfabricated sorting valve. Deep learning techniques are brought to bear on the camera output to increase speed, accuracy and reliability.

公开(公告)号：US07713786B2

公开(公告)日：2010-05-11

申请号：US11826841

申请日：2007-07-19

申请人： John S. Foster ,  Jeffrey F. Summers

发明人： John S. Foster ,  Jeffrey F. Summers

IPC分类号： H01L21/00

CPC分类号： H01L21/67092 ,  B81C1/00285 ,  H01L21/67069 ,  Y10T29/53096

摘要： A method for activating a getter at low temperature for encapsulation in a device cavity containing a microdevice comprises etching a passivation layer off the getter material while the device wafer and lid wafer are enclosed in a bonding chamber. A plasma etching process may be used, wherein by applying a large negative voltage to the lid wafer, a plasma is formed in the low pressure environment within the bonding chamber. The plasma then etches the passivation layer from the getter material, which is directly thereafter sealed within the device cavity of the microdevice, all within the etching/bonding chamber.

摘要翻译： 用于在低温下激活吸气剂以封装在包含微型装置的装置腔中的方法包括在将装置晶片和盖晶片封装在粘合室中时将钝化层从吸气剂材料上蚀刻。 可以使用等离子体蚀刻工艺，其中通过向盖晶片施加大的负电压，在接合室内的低压环境中形成等离子体。 等离子体然后从吸气剂材料中蚀刻钝化层，吸附剂材料直接在密封在微器件的器件腔内，全部在蚀刻/粘合室内。

公开(公告)号：US07229838B2

公开(公告)日：2007-06-12

申请号：US11260367

申请日：2005-10-28

申请人： John S. Foster ,  John C. Harley ,  Steven H. Hovey ,  Richard T. Martin ,  Hung D. Nguyen ,  Paul J. Rubel

发明人： John S. Foster ,  John C. Harley ,  Steven H. Hovey ,  Richard T. Martin ,  Hung D. Nguyen ,  Paul J. Rubel

IPC分类号： G01N1/10 ,  G01N21/64

CPC分类号： B01L3/502707 ,  A61M1/3633 ,  A61M1/3678 ,  B01L3/5027 ,  B01L3/50273 ,  B01L3/502761 ,  B01L2200/0647 ,  B01L2300/0864 ,  B01L2400/0484 ,  C12M47/04 ,  G01N21/6428 ,  G01N2015/0288 ,  G01N2015/149 ,  Y10T436/11 ,  Y10T436/112499 ,  Y10T436/2575

摘要： A micromechanical particle sorting chip uses an actuator divided into two parts to direct a component of interest into one of a plurality of possible exit paths, based on detection of a fluorescent signal emanating from the component of interest. The two-part actuator may include a force-generating portion and a microactuator portion. The microactuator portion may be disposable, whereas the force-generating portion may be reuseable. By bringing the force-generating portion into proximity to the microactuator portion, the microactuator is induced to move, thereby separating the component of interest from the rest of the fluid stream. The force-generating portion and the microactuator portion may be optimized and fabricated separately, thereby leading to faster, more reliable and less expensive particle sorting.

摘要翻译： 微机械粒子分选芯片基于从感兴趣的部件发出的荧光信号的检测，使用分成两部分的致动器将感兴趣的部件引导到多个可能的出口路径中的一个。 两部分致动器可以包括力产生部分和微致动器部分。 微致动器部分可以是一次性的，而力产生部分可以是可再利用的。 通过使力产生部分靠近微致动器部分，微致动器被诱导移动，从而将感兴趣的部件与流体流的其余部分分离。 力产生部分和微致动器部分可以分开优化和制造，从而导致更快，更可靠和更便宜的颗粒分选。

公开(公告)号：US06801681B2

公开(公告)日：2004-10-05

申请号：US09765520

申请日：2001-01-17

申请人： Patrick E. Feierabend ,  John S. Foster ,  Bryant P. Hichwa ,  Richard T. Martin ,  Paul J. Rubel ,  Kimon Rybnicek ,  John W. Stocker ,  Jeffery F. Summers

发明人： Patrick E. Feierabend ,  John S. Foster ,  Bryant P. Hichwa ,  Richard T. Martin ,  Paul J. Rubel ,  Kimon Rybnicek ,  John W. Stocker ,  Jeffery F. Summers

IPC分类号： G02B626

CPC分类号： G02B6/3564 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/4226 ,  G02B26/0841 ,  G02B26/085 ,  G02B2006/12104

摘要： An optical switch is fabricated using micro-electro-mechanical system (“MEMS”) techniques. A thin mirror is fabricated in the major plane of the substrate and rotates about an axis perpendicular to the major plane to move into and out of an optical beam path. The mirror surface is open for chemical polishing and deposition, resulting in a high-quality mirror. In one embodiment, the backside of the mirror is patterned with reinforcing ribs. In another embodiment, a two-sided mirror is fabricated.

摘要翻译： 使用微机电系统（“MEMS”）技术制造光开关。 在基板的主平面上制造薄的反射镜，并且围绕垂直于主平面的轴旋转以进入和离开光束路径。 镜面打开以进行化学抛光和沉积，产生高品质的镜子。 在一个实施例中，镜子的背面被加强肋图案化。 在另一个实施例中，制造双面镜。

公开(公告)号：US06785038B2

公开(公告)日：2004-08-31

申请号：US09765522

申请日：2001-01-17

申请人： Bryant P. Hichwa ,  John S. Foster ,  Richard T. Martin ,  Paul J. Rubel ,  John W. Stocker ,  Jeffery F. Summers

发明人： Bryant P. Hichwa ,  John S. Foster ,  Richard T. Martin ,  Paul J. Rubel ,  John W. Stocker ,  Jeffery F. Summers

IPC分类号： G02B2600

CPC分类号： G02B6/3564 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/4226 ,  G02B2006/12104

摘要： An optical cross-connect is fabricated on a substrate using individual MEMs dice with mirrors that rotate into and out of an optical beam path. Each die can be aligned to a single (input-output) pair of collimators in a fiber-optic switching system. An individually accessible magnetic drive on each die provides low power consumption when re-configuring the array in addition to fast switching speeds. The state of each die can be electronically sensed to verify proper array configuration and operation of each die.

摘要翻译： 光学交叉连接使用具有旋转进入和离开光束路径的反射镜的各个MEM骰子在基板上制造。 每个管芯可以与光纤交换系统中的单个（输入 - 输出）准直器对准。 除了快速切换速度之外，每个模具上可单独访问的磁驱动器重新配置阵列时提供低功耗。 可以电子地感测每个管芯的状态，以验证每个管芯的阵列配置和操作。

公开(公告)号：US5267104A

公开(公告)日：1993-11-30

申请号：US876236

申请日：1992-04-30

申请人： Thomas R. Albrecht ,  Moris M. Dovek ,  John S. Foster ,  Andrew M. Homola ,  Timothy C. O'Sullivan

发明人： Thomas R. Albrecht ,  Moris M. Dovek ,  John S. Foster ,  Andrew M. Homola ,  Timothy C. O'Sullivan

IPC分类号： G11B5/48 ,  G11B5/60 ,  G11B21/21 ,  G11B33/14 ,  G11B17/02

CPC分类号： G11B5/6005 ,  G11B21/21 ,  G11B33/148

摘要： A data recording disk file of the liquid-bearing type has an improved head-disk interface provided in by a transducer carrier with new properties. The carrier supports a conventional head for reading and writing data to the disk. The carrier has an air-bearing surface near its front end, a ski pad near its rear end, and a plurality of ski feet or struts which support the air-bearing surface off the liquid film of the disk when the disk file is not operating. The air-bearing surface is in the form of a pair of air-bearing rails located outboard of the rear ski pad so that no air-bearing effect occurs in the rearward region of the carrier to assure the skiing action of the rear ski pad. As operational speed is approached the air-bearing lifts the struts off the disk and the rear ski pad is the sole ski foot on the liquid film. The rear ski pad has a convexly shaped leading edge which is wider than its trailing edge to minimize static friction and lubricant thinning during skiing, and the angle between the leading and trailing edges of the pad is selected to enable the pad to ski over the wide ranges of carrier-disk velocity which occur as the carrier moves from disk ID to OD.

公开(公告)号：US4418622A

公开(公告)日：1983-12-06

申请号：US394975

申请日：1982-07-02

申请人： John S. Foster ,  John A. M. Zehmer, III

发明人： John S. Foster ,  John A. M. Zehmer, III

IPC分类号： F42B1/02

CPC分类号： F42B1/02

摘要： An unlined Munroe Effect device for breaching structures in urban terrain.he device is constructed as an unlined, linear, shaped explosive charge which directs an explosive jet into the structure. The shaped charge is formed with a honeycombed substrate of metal in which the substrate interstices are filled with and the substrate is covered by an explosive material. The substrate is embedded in the explosive material. The explosive material and substrate, prior to curing of the explosive material, are formed into an unlined, semi-cylindrical shape to create the explosive jet or Munroe Effect. The device is initiated or detonated with a booster charge.

摘要翻译： 用于破坏城市地形结构的无衬线Munroe效应装置。 该装置被构造成一个无衬里的，直线形的炸药，将爆炸射流引导到结构中。 成形电荷由金属的蜂窝衬底形成，其中衬底间隙被填充并且衬底被爆炸性材料覆盖。 基材嵌入炸药中。 炸药材料和基材在固化爆炸材料之前，被形成一个无衬里的半圆柱形形状，以产生爆炸射流或“门罗效应”。 该装置由增压装置启动或引爆。