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公开(公告)号:US09590115B2
公开(公告)日:2017-03-07
申请号:US14941930
申请日:2015-11-16
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Tetsuhiro Tanaka , Daisuke Matsubayashi , Kazuki Tanemura
IPC: H01L29/10 , H01L27/146 , H01L29/786 , H01L29/788 , H01L27/12 , H01L27/115
CPC classification number: H01L29/7869 , H01L27/1156 , H01L27/1207 , H01L27/1225 , H01L27/1255 , H01L27/14612 , H01L29/1083 , H01L29/78606 , H01L29/78648 , H01L29/78696 , H01L29/788 , H01L29/7881
Abstract: A semiconductor device includes a first conductor, a second conductor, a first insulator, a second insulator, a third insulator, a semiconductor, and an electron trap layer. The semiconductor includes a channel formation region. The electron trap layer overlaps with the channel formation region with the second insulator interposed therebetween. The first conductor overlaps with the channel formation region with the first insulator interposed therebetween. The second conductor overlaps with the electron trap layer with the third insulator interposed therebetween. The second conductor does not overlap with the channel formation region.
Abstract translation: 半导体器件包括第一导体,第二导体,第一绝缘体,第二绝缘体,第三绝缘体,半导体和电子陷阱层。 半导体包括沟道形成区域。 电子捕获层与通道形成区域重叠,其间插入第二绝缘体。 第一导体与沟道形成区重叠,其间插入第一绝缘体。 第二导体与电子陷阱层重叠,其间插入第三绝缘体。 第二导体不与沟道形成区重叠。
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公开(公告)号:US09494830B2
公开(公告)日:2016-11-15
申请号:US14290263
申请日:2014-05-29
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Shunpei Yamazaki , Hiroyuki Miyake , Kouhei Toyotaka , Masahiko Hayakawa , Daisuke Matsubayashi , Shinpei Matsuda
IPC: H01L27/12 , G02F1/1343 , G02F1/1362 , G02F1/1368
CPC classification number: G02F1/134309 , G02F1/133345 , G02F1/1343 , G02F1/136213 , G02F1/13624 , G02F1/1368 , G02F2001/13685 , H01L27/1225 , H01L27/127 , H01L29/78648 , H01L29/7869 , H01L29/78696
Abstract: The following semiconductor device provides high reliability and a narrower frame width. The semiconductor device includes a driver circuit and a pixel portion. The driver circuit has a first transistor including a first gate and a second gate electrically connected to each other with a semiconductor film sandwiched therebetween, and a second transistor electrically connected to the first transistor. The pixel portion includes a third transistor, a liquid crystal element, and a capacitor. The liquid crystal element includes a first transparent conductive film electrically connected to the third transistor, a second conductive film, and a liquid crystal layer. The capacitor includes the first conductive film, a third transparent conductive film, and a nitride insulating film. The nitride insulating film is positioned between the first transparent conductive film and the third transparent conductive film, and positioned between the semiconductor film and the second gate of the first transistor.
Abstract translation: 以下半导体器件提供高可靠性和较窄的帧宽度。 半导体器件包括驱动电路和像素部分。 驱动电路具有包括第一栅极和第二栅极的第一晶体管,其中夹在其间的半导体膜彼此电连接,第二晶体管与第一晶体管电连接。 像素部分包括第三晶体管,液晶元件和电容器。 液晶元件包括与第三晶体管电连接的第一透明导电膜,第二导电膜和液晶层。 电容器包括第一导电膜,第三透明导电膜和氮化物绝缘膜。 氮化物绝缘膜位于第一透明导电膜和第三透明导电膜之间,位于第一晶体管的半导体膜和第二栅极之间。
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公开(公告)号:US09287410B2
公开(公告)日:2016-03-15
申请号:US14571993
申请日:2014-12-16
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Shinya Sasagawa , Motomu Kurata , Kazuya Hanaoka , Yoshiyuki Kobayashi , Daisuke Matsubayashi
IPC: H01L27/04 , H01L29/786 , H01L29/04
CPC classification number: H01L29/78696 , H01L29/045 , H01L29/24 , H01L29/7869
Abstract: A semiconductor device with favorable electrical characteristics is provided. The semiconductor device includes an insulating layer, a semiconductor layer over the insulating layer, a source electrode layer and a drain electrode layer electrically connected to the semiconductor layer, a gate insulating film over the semiconductor layer, the source electrode layer, and the drain electrode layer, and a gate electrode layer overlapping with part of the semiconductor layer, part of the source electrode layer, and part of the drain electrode layer with the gate insulating film therebetween. A cross section of the semiconductor layer in the channel width direction is substantially triangular or substantially trapezoidal. The effective channel width is shorter than that for a rectangular cross section.
Abstract translation: 提供了具有良好电气特性的半导体器件。 半导体器件包括绝缘层,绝缘层上的半导体层,与半导体层电连接的源极电极层和漏极电极层,半导体层上的栅极绝缘膜,源极电极层和漏极电极 以及与半导体层的一部分,源极电极层的一部分以及其间具有栅极绝缘膜的漏极电极层的一部分重叠的栅极电极层。 半导体层在沟道宽度方向上的截面基本上是三角形或大致梯形。 有效通道宽度短于矩形截面的宽度。
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公开(公告)号:US09281409B2
公开(公告)日:2016-03-08
申请号:US14330444
申请日:2014-07-14
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Shunpei Yamazaki , Daisuke Matsubayashi , Yoshiyuki Kobayashi
IPC: H01L29/786 , H01L29/423 , H01L27/12
CPC classification number: H01L29/78693 , H01L27/1225 , H01L29/0684 , H01L29/42384 , H01L29/7869 , H01L29/78696
Abstract: A semiconductor device is provided with a first oxide semiconductor film over an insulating surface; a second oxide semiconductor film over the first oxide semiconductor film; a third oxide semiconductor film in contact with a top surface of the insulating surface, a side surface of the first oxide semiconductor film, and side and top surfaces of the second oxide semiconductor film; a gate insulating film over the third oxide semiconductor film; and a gate electrode in contact with the gate insulating film and faces the top and side surfaces a of the second oxide semiconductor film. A thickness of the first oxide semiconductor film is larger than a sum of a thickness of the third oxide semiconductor film and a thickness of the gate insulating film, and the difference is larger than or equal to 20 nm.
Abstract translation: 半导体器件在绝缘表面上设置有第一氧化物半导体膜; 第一氧化物半导体膜上的第二氧化物半导体膜; 与所述绝缘表面的顶表面接触的第三氧化物半导体膜,所述第一氧化物半导体膜的侧表面以及所述第二氧化物半导体膜的侧表面和顶表面; 第三氧化物半导体膜上的栅极绝缘膜; 以及与栅极绝缘膜接触并与第二氧化物半导体膜的顶表面和侧表面a相对的栅电极。 第一氧化物半导体膜的厚度大于第三氧化物半导体膜的厚度与栅极绝缘膜的厚度的和,并且该差值大于或等于20nm。
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公开(公告)号:US20150001532A1
公开(公告)日:2015-01-01
申请号:US14313008
申请日:2014-06-24
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Shunpei Yamazaki , Yoshiyuki Kobayashi , Daisuke Matsubayashi , Akihisa Shimomura , Daigo Ito
IPC: H01L29/78 , H01L29/24 , H01L29/786
CPC classification number: H01L29/7869 , H01L29/42376 , H01L29/42384 , H01L29/66969 , H01L29/78645 , H01L29/78648 , H01L29/78693 , H01L29/78696
Abstract: To provide a semiconductor device in which a large current can flow. To provide a semiconductor device which can be driven stably at a high driving voltage. The semiconductor device includes a semiconductor layer, a first electrode and a second electrode electrically connected to the semiconductor layer and apart from each other in a region overlapping with the semiconductor layer, a first gate electrode and a second gate electrode with the semiconductor layer therebetween, a first gate insulating layer between the semiconductor layer and the first gate electrode, and a second gate insulating layer between the semiconductor layer and the second gate electrode. The first gate electrode overlaps with part of the first electrode, the semiconductor layer, and part of the second electrode. The second gate electrode overlaps with the semiconductor layer and part of the first electrode, and does not overlap with the second electrode.
Abstract translation: 提供可以流过大电流的半导体器件。 提供可在高驱动电压下稳定驱动的半导体器件。 半导体器件包括半导体层,第一电极和与半导体层电连接并且在与半导体层重叠的区域中彼此分开的第二电极,第一栅电极和第二栅电极,其间具有半导体层, 在所述半导体层和所述第一栅电极之间的第一栅极绝缘层,以及在所述半导体层和所述第二栅电极之间的第二栅极绝缘层。 第一栅电极与第一电极,半导体层和第二电极的一部分重叠。 第二栅电极与半导体层和第一电极的一部分重叠,并且不与第二电极重叠。
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公开(公告)号:US20140110708A1
公开(公告)日:2014-04-24
申请号:US14062481
申请日:2013-10-24
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Junichi Koezuka , Yukinori Shima , Hajime Tokunaga , Toshinari Sasaki , Keisuke Murayama , Daisuke Matsubayashi
IPC: H01L29/786 , H01L29/66 , H01L21/02 , H01L29/51
CPC classification number: H01L29/78606 , H01L21/02109 , H01L21/02263 , H01L21/02554 , H01L21/02565 , H01L21/02631 , H01L27/1225 , H01L27/3262 , H01L29/51 , H01L29/66969 , H01L29/78648 , H01L29/7869 , H01L29/78696
Abstract: A semiconductor device includes a transistor including a gate electrode over a substrate, a gate insulating film covering the gate electrode, a multilayer film overlapping with the gate electrode with the gate insulating film provided therebetween, and a pair of electrodes in contact with the multilayer film, and an oxide insulating film covering the transistor. The multilayer film includes an oxide semiconductor film and an oxide film containing In or Ga, the oxide insulating film contains more oxygen than that in the stoichiometric composition, and in the transistor, by a bias-temperature stress test, threshold voltage does not change or the amount of the change in a positive direction or a negative direction is less than or equal to 1.0 V, preferably less than or equal to 0.5 V.
Abstract translation: 半导体器件包括晶体管,其包括在衬底上的栅电极,覆盖栅电极的栅极绝缘膜,与栅电极重叠的多层膜,其间设置有栅极绝缘膜,以及与多层膜接触的一对电极 和覆盖晶体管的氧化物绝缘膜。 多层膜包括氧化物半导体膜和含有In或Ga的氧化物膜,氧化物绝缘膜含有比化学计量组成中的氧更多的氧,并且在晶体管中,通过偏置 - 温度应力测试,阈值电压不变, 正方向或负方向的变化量小于或等于1.0V,优选小于或等于0.5V。
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公开(公告)号:US20140034954A1
公开(公告)日:2014-02-06
申请号:US13957819
申请日:2013-08-02
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Shunpei Yamazaki , Hiroyuki Miyake , Hideaki Shishido , Jun Koyama , Daisuke Matsubayashi , Keisuke Murayama
IPC: H01L27/12
CPC classification number: H01L27/1255 , G02F1/1339 , G02F1/134363 , G02F1/13454 , G02F1/13458 , G02F1/136204 , G02F1/136209 , G02F1/136213 , G02F1/136286 , G02F1/1368 , G02F2001/134372 , G02F2201/121 , G02F2201/123 , G02F2201/40 , H01L27/1225 , H01L27/124 , H01L27/3265 , H01L29/7869
Abstract: To provide a semiconductor device including a capacitor whose charge capacity is increased without reducing the aperture ratio. The semiconductor device includes a transistor including a light-transmitting semiconductor film, a capacitor where a dielectric film is provided between a pair of electrodes, an insulating film provided over the light-transmitting semiconductor film, and a light-transmitting conductive film provided over the insulating film. In the capacitor, a metal oxide film containing at least indium (In) or zinc (Zn) and formed on the same surface as the light-transmitting semiconductor film in the transistor serves as one electrode, the light-transmitting conductive film serves as the other electrode, and the insulating film provided over the light-transmitting semiconductor film serves as the dielectric film.
Abstract translation: 提供一种包括电容器的半导体器件,其电容量增加而不降低开口率。 半导体器件包括:晶体管,包括透光半导体膜,电容器,其中电介质膜设置在一对电极之间;绝缘膜设置在透光半导体膜上;以及透光导电膜, 绝缘膜。 在电容器中,与晶体管中的透光性半导体膜相同的表面上形成至少含有铟(In)或锌(Zn)的金属氧化物膜作为一个电极,透光性导电膜作为 设置在透光半导体膜上的绝缘膜用作电介质膜。
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公开(公告)号:US12154827B2
公开(公告)日:2024-11-26
申请号:US18383086
申请日:2023-10-24
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventor: Shunpei Yamazaki , Toshihiko Takeuchi , Tsutomu Murakawa , Hiroki Komagata , Daisuke Matsubayashi , Noritaka Ishihara , Yusuke Nonaka
IPC: H01L27/088 , H01L21/8234 , H01L27/06 , H01L29/786 , H10B12/00
Abstract: A semiconductor device which has favorable electrical characteristics and can be highly integrated is provided.
The semiconductor device includes a first insulator; an oxide over the first insulator; a second insulator over the oxide; a first conductor over the second insulator; a third insulator in contact with a top surface of the first insulator, a side surface of the oxide, a top surface of the oxide, a side surface of the second insulator, and a side surface of the first conductor; and a fourth insulator over the third insulator. The third insulator includes an opening exposing the first insulator, and the fourth insulator is in contact with the first insulator through the opening.-
公开(公告)号:US20230178656A1
公开(公告)日:2023-06-08
申请号:US18102808
申请日:2023-01-30
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventor: Shunpei Yamazaki , Yoshiyuki Kobayashi , Daisuke Matsubayashi , Akihisa Shimomura , Daigo Ito
IPC: H01L29/786 , H01L29/66 , H01L29/423
CPC classification number: H01L29/7869 , H01L29/42376 , H01L29/42384 , H01L29/66969 , H01L29/78645 , H01L29/78648 , H01L29/78693 , H01L29/78696
Abstract: To provide a semiconductor device in which a large current can flow. To provide a semiconductor device which can be driven stably at a high driving voltage. The semiconductor device includes a semiconductor layer, a first electrode and a second electrode electrically connected to the semiconductor layer and apart from each other in a region overlapping with the semiconductor layer, a first gate electrode and a second gate electrode with the semiconductor layer therebetween, a first gate insulating layer between the semiconductor layer and the first gate electrode, and a second gate insulating layer between the semiconductor layer and the second gate electrode. The first gate electrode overlaps with part of the first electrode, the semiconductor layer, and part of the second electrode. The second gate electrode overlaps with the semiconductor layer and part of the first electrode, and does not overlap with the second electrode.
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公开(公告)号:US10749015B2
公开(公告)日:2020-08-18
申请号:US16429176
申请日:2019-06-03
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Junichi Koezuka , Yukinori Shima , Hajime Tokunaga , Toshinari Sasaki , Keisuke Murayama , Daisuke Matsubayashi
IPC: H01L29/66 , H01L21/02 , H01L29/51 , H01L29/786 , H01L27/12
Abstract: To reduce defects in an oxide semiconductor film in a semiconductor device. To improve the electrical characteristics and the reliability of a semiconductor device including an oxide semiconductor film. In a semiconductor device including a transistor including a gate electrode formed over a substrate, a gate insulating film covering the gate electrode, a multilayer film overlapping with the gate electrode with the gate insulating film provided therebetween, and a pair of electrodes in contact with the multilayer film, a first oxide insulating film covering the transistor, and a second oxide insulating film formed over the first oxide insulating film, the multilayer film includes an oxide semiconductor film and an oxide film containing In or Ga, the first oxide insulating film is an oxide insulating film through which oxygen is permeated, and the second oxide insulating film is an oxide insulating film containing more oxygen than that in the stoichiometric composition.
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