公开(公告)号：US20060144519A1

公开(公告)日：2006-07-06

申请号：US11370780

申请日：2006-03-08

申请人： Toshiaki Kitamura ,  Koichi Rokuyama ,  Shigeru Kasai ,  Takashi Ogino ,  Yuki Osada

发明人： Toshiaki Kitamura ,  Koichi Rokuyama ,  Shigeru Kasai ,  Takashi Ogino ,  Yuki Osada

IPC分类号： C23F1/00

CPC分类号： H01J37/32174 ,  H01J37/32082 ,  H01J37/32183 ,  H01P5/026 ,  H01P5/04

摘要： A plasma generating method generates plasma in a treating chamber by controlling a high-frequency generating unit to generate a high-frequency signal and by feeding the high-frequency signal to the treating chamber through an impedance matching device. The plasma generating method includes controlling the impedance matching device, when the plasma is generated in the treating chamber, so as to satisfy a preset matching condition, and then controlling the high-frequency generating unit to generate and feed the high-frequency signal of the power generating the plasma, to the treating chamber.

摘要翻译： 等离子体产生方法通过控制高频发生单元产生高频信号并通过阻抗匹配装置将高频信号馈送到处理室来在处理室中产生等离子体。 等离子体产生方法包括当在处理室中产生等离子体时，控制阻抗匹配装置，以便满足预设的匹配条件，然后控制高频产生单元以产生和馈送高频信号 产生等离子体的功率到处理室。

公开(公告)号：US20060137613A1

公开(公告)日：2006-06-29

申请号：US10545399

申请日：2004-02-13

申请人： Shigeru Kasai

发明人： Shigeru Kasai

IPC分类号： C23C16/00

CPC分类号： H01J37/3222 ,  H01J37/32192

摘要： A compact plasma generating apparatus providing high efficiency of plasma excitation is presented. A plasma generating apparatus (100) comprises a microwave generating apparatus (10) for generating microwaves, a coaxial waveguide (20) having a coaxial structure comprising an inner tube (20a) and an outer tube (20b), a monopole antenna (21) being attached to one end of said inner tube (20a), for directing the microwaves generated by said microwave generating apparatus (10) to the monopole antenna (21), a resonator (22) composed of dielectric material for holding the monopole antenna (21), and a chamber (23) in which a specific process gas is fed for plasma excitation. The chamber (23) has an open surface and the resonator (22) is placed on this open surface, and the process gas is excited by the microwaves radiated from the monopole antenna (21) through the resonator (22) into the interior of the chamber (23) to generate plasma.

摘要翻译： 提出了一种提供高效等离子体激发的小型等离子体发生装置。 一种等离子体产生装置（100），包括用于产生微波的微波产生装置（10），具有同轴结构的同轴波导（20），其包括内管（20b）和外管（20b），单极天线 21）连接到所述内管（20A）的一端，用于将由所述微波发生装置（10）产生的微波引导到单极天线（21），由用于保持单极子的电介质材料构成的谐振器 天线（21）和其中为等离子体激发而供给特定工艺气体的腔室（23）。 腔室（23）具有开口表面，并且谐振器（22）被放置在该开放表面上，并且处理气体被从单极天线（21）通过谐振器（22）辐射的微波激发到内部 室（23）以产生等离子体。

公开(公告)号：US20050264386A1

公开(公告)日：2005-12-01

申请号：US11137453

申请日：2005-05-26

申请人： Yoshifumi Chida ,  Kei Chiba ,  Tatsumi Ide ,  Shigeru Kasai

发明人： Yoshifumi Chida ,  Kei Chiba ,  Tatsumi Ide ,  Shigeru Kasai

IPC分类号： H01H50/56 ,  H01H50/04 ,  H01H50/26 ,  H01H50/54 ,  H01H50/64 ,  H01H67/02

CPC分类号： H01H50/546

摘要： An electromagnetic relay is provided which is small in size and is capable of controlling two circuits of an ordinarily-open contact, which has a large current-carrying capacity and high interrupting capability, and which is excellent in resistance against shock and vibration. Movable contactors are held, through bow-shaped movable contactor springs, to two -shaped holding frames each being electrically separated and being mechanically connected via a card made of a highly heat-resistant resin in a card block. Thick-plate shaped movable contacts, which are attached to the movable contactors in a fixed manner, are electrically connected or disconnected to fixed contacts in a base block, in synchronization with operations of an armature of an electro-magnet block. In order to improve a current-carrying capability and interrupting capability, there are provided two pieces of ordinarily-open contacts which are connected in series to each other, and between which an interval is doubled, in each of two circuits.

摘要翻译： 提供了一种电磁继电器，其尺寸小，并且能够控制具有大的载流能力和高中断能力的通常开路触点的两个电路，并且具有优异的抗冲击和振动性。 可移动接触器通过弓形活动接触器弹簧固定到两个形状的保持框架各自电气分离，并通过卡片块中由高耐热树脂制成的卡片机械连接。 与电磁块的电枢的操作同步地，以固定的方式附接到活动接触器的厚板形可动触头与基座中的固定触点电连接或断开。 为了提高载流能力和中断能力，在两个电路中的每一个中提供两个彼此串联连接的通常开路的触点，并且间隔被加倍。

公开(公告)号：US20050118000A1

公开(公告)日：2005-06-02

申请号：US10505168

申请日：2003-02-28

申请人： Shigeru Kasai ,  Masahide Itoh ,  Shunro Nagasawa

发明人： Shigeru Kasai ,  Masahide Itoh ,  Shunro Nagasawa

IPC分类号： B65D85/86 ,  B65G49/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/673 ,  H01L21/677 ,  H01L21/687 ,  B65G1/00

CPC分类号： H01L21/67161 ,  H01L21/67126 ,  H01L21/68707

摘要： A treatment subject receiving vessel body 72 comprises a portable vessel main body 92, a treatment subject support member 100 installed in the vessel main body and capable of supporting a plurality of treatment subjects W, a joint port 96 formed in one side surface of the vessel main body and communicating with the interior of the vessel main body, an openable/closable gate valve 94 installed in the joining port, and an exhaust port 108 made openable/closable to be capable of exhausting the vessel main body. When the gate valve and exhaust port are closed, the vessel main body is brought to the sealed state.

摘要翻译： 受治疗对象接收血管体72包括便携式容器主体92，安装在容器主体中并能够支撑多个治疗对象W的治疗对象支撑构件100，形成在容器的一个侧表面中的接合口96 主体并与容器主体的内部连通，安装在连接口中的可开闭的闸阀94和能够排出容器主体的可打开/关闭的排气口108。 当闸阀和排气口关闭时，容器主体处于密封状态。

公开(公告)号：US06759633B2

公开(公告)日：2004-07-06

申请号：US10258797

申请日：2002-10-28

申请人： Masato Kubodera ,  Masaki Sohma ,  Katsumi Sekiguchi ,  Shigeru Kasai

发明人： Masato Kubodera ,  Masaki Sohma ,  Katsumi Sekiguchi ,  Shigeru Kasai

IPC分类号： F27B514

CPC分类号： C23C16/46 ,  C23C16/4411 ,  H01L21/67109

摘要： A heat treatment system for controlling the temperature in a processing vessel. The system includes a cylindrical processing vessel; a supporting table, raised by a support from the bottom portion of the processing vessel, for mounting thereon an object to be processed; and a processing object heating part provided in the supporting table, for heating the object to be processed. In addition a thermoelectric conversion element capable of selectively heating or cooling is provided in the bottom portion of the processing vessel, a resistive heater is provided in the side wall of the processing vessel, and a temperature control part for controlling the operations of the thermoelectric conversion element and the resistive heater is provided. Thus, it is not only possible to appropriately control the temperature in the processing vessel, but it is also possible to reduce space and energy, by combining the resistive heater with a thermoelectric conversion element.

摘要翻译： 一种用于控制处理容器中的温度的热处理系统。 该系统包括圆柱形处理容器; 支撑台，由处理容器的底部的支撑件升起，用于在其上安装待加工物体; 以及设置在支撑台中的加工对象加热部，用于加热被加工物。 此外，在处理容器的底部设置能够选择性地加热或冷却的热电转换元件，在处理容器的侧壁中设置电阻加热器，以及用于控制热电转换操作的温度控制部 元件和电阻加热器。 因此，不仅可以适当地控制处理容器中的温度，而且还可以通过组合电阻加热器和热电转换元件来减小空间和能量。

公开(公告)号：US5057725A

公开(公告)日：1991-10-15

申请号：US456301

申请日：1989-12-26

申请人： Shigeru Kasai ,  Susumu Kobayashi ,  Makoto Fujishima

发明人： Shigeru Kasai ,  Susumu Kobayashi ,  Makoto Fujishima

IPC分类号： H02K29/00 ,  G11B19/20 ,  H02K7/09

CPC分类号： H02K7/09 ,  G11B19/2009 ,  Y10S310/06

摘要： A rotary electric machine comprising a stator and a rotor arranged opposedly of the stator. A magnet is provided on the stator or a frame for holding the stator at a position so as to be constantly opposed during rotation to a portion of the magnetic body of the rotor. The magnet is disposed at a position other than at a portion at which the magnetic action for rotation of the rotor occurs. The rotor is therefore constantly biased so that rotor play is minimized and non-repeatable deflections of the spindle are eliminated.

摘要翻译： 一种旋转电机，包括定子和与定子相对设置的转子。 在定子上设置有磁铁或用于将定子保持在转动到转子的磁体的一部分的状态下始终相对的位置的框架。 磁体设置在除了转子的旋转磁力发生的部分以外的位置。 因此，转子被恒定地偏置，使得转子的摆动被最小化并且不会重复主轴的偏转。

公开(公告)号：US09202731B2

公开(公告)日：2015-12-01

申请号：US13334406

申请日：2011-12-22

申请人： Shigeru Kasai ,  Ayuta Suzuki ,  Ikuo Sawada ,  Naoki Shindo ,  Masatake Yoneda ,  Kazuhiro Ooya

发明人： Shigeru Kasai ,  Ayuta Suzuki ,  Ikuo Sawada ,  Naoki Shindo ,  Masatake Yoneda ,  Kazuhiro Ooya

IPC分类号： H01L21/00 ,  H01L21/67 ,  H01L21/02

CPC分类号： H01L21/67115 ,  H01L21/02052 ,  H01L21/02057 ,  H01L21/67028 ,  H01L21/67051

摘要： Disclosed is a liquid processing apparatus that processes a substrate with a processing liquid. The processing apparatus includes: a substrate holder configured to hold the substrate; a processing liquid supply unit configured to supply the processing liquid to the substrate held by the substrate holder; a rinsing liquid supply unit configured to supply a rinsing liquid to the substrate; and a light emitting element configured to emit light of a wavelength range, which is absorbed only by the substrate, and irradiate the emitted light to the substrate.

摘要翻译： 公开了一种用处理液处理基板的液体处理装置。 所述处理装置包括：基板保持器，其构造成保持所述基板; 处理液供给部，其将处理液供给到由所述基板保持体保持的基板; 冲洗液体供给单元，其配置为向所述基板供给冲洗液; 以及发光元件，被配置为发射仅被衬底吸收的波长范围的光，并将发射的光照射到衬底。

公开(公告)号：US08299671B2

公开(公告)日：2012-10-30

申请号：US12663134

申请日：2008-05-29

申请人： Masamichi Nomura ,  Kenjiro Koizumi ,  Shigeru Kasai

发明人： Masamichi Nomura ,  Kenjiro Koizumi ,  Shigeru Kasai

IPC分类号： H02K7/09 ,  H01L21/00

CPC分类号： H01L21/68792 ,  C23C14/505 ,  H01J37/32761

摘要： A rotary floater (30) for supporting an object to be processed (W) is floated by the magnetic attraction of a floating electromagnet assembly (F), and the rotary floater (30) is rotated by the magnetic attraction of a rotary electromagnet assembly (R) while its horizontal position being controlled by the magnetic attraction of a positioning electromagnet assembly (H). The floating electromagnet assembly (F) causes the magnetic attraction to act vertically upwardly, so that the rotary floater (30) is floated and suspended without contact with the inner wall of a processing container (2).

摘要翻译： 用于支撑待加工物体（W）的旋转浮子（30）通过浮动电磁体组件（F）的磁吸引而浮起，旋转浮子（30）通过旋转电磁体组件 R），而其水平位置由定位电磁铁组件（H）的磁吸引力控制。 浮动电磁体组件（F）使得磁吸引力垂直向上作用，使得旋转浮子（30）浮动并悬挂而不与处理容器（2）的内壁接触。

公开(公告)号：US20120222816A1

公开(公告)日：2012-09-06

申请号：US13410957

申请日：2012-03-02

申请人： Taro IKEDA ,  Shigeru Kasai ,  Yuki Osada

发明人： Taro IKEDA ,  Shigeru Kasai ,  Yuki Osada

IPC分类号： H01L21/3065 ,  H01J1/02

CPC分类号： H01J37/3222 ,  C23C16/274

摘要： A surface wave plasma generating antenna serves to generate a surface wave plasma in a chamber by radiating into the chamber a microwave transmitted from a microwave output section through a coaxial waveguide including an outer conductor and an inner conductor. The surface wave plasma generating antenna is formed in a planar shape and has a plurality of slots arranged in a circumferential direction, and each joint portion between two adjacent slots in the circumferential direction is overlapped with at least one of the slots in a diametrical direction.

摘要翻译： 表面波等离子体产生天线用于通过将包括外部导体和内部导体的同轴波导从微波输出部分发射的微波辐射到室中，从而在室内产生表面波等离子体。 表面波等离子体发生天线形成为平面形状，并且具有沿圆周方向排列的多个狭槽，并且沿圆周方向的两个相邻狭槽之间的每个接合部分沿直径方向与至少一个狭槽重叠。

公开(公告)号：US08128751B2

公开(公告)日：2012-03-06

申请号：US12404878

申请日：2009-03-16

申请人： Shigeru Kasai ,  Takashi Kakegawa

发明人： Shigeru Kasai ,  Takashi Kakegawa

IPC分类号： C23C16/455 ,  C23C15/52 ,  C23F1/00 ,  H01L21/306 ,  C23C16/06 ,  C23C16/22

CPC分类号： C23C16/4557 ,  C23C16/45565 ,  C23C16/45572 ,  H01J37/3244 ,  H01L21/28556

摘要： A film-forming apparatus of the invention is a film-forming apparatus that includes: a processing container that defines a chamber, a pedestal arranged in the chamber, on which a substrate to be processed can be placed, a showerhead provided opposite to the pedestal, which has a large number of gas-discharging holes, a gas-supplying mechanism that supplies a process gas into the chamber through the showerhead, and a showerhead-temperature controlling unit that controls a temperature of the showerhead.

摘要翻译： 本发明的成膜装置是一种成膜装置，它包括：一个限定腔室的处理容器，布置在该腔室中的基座，待处理的基底可以放置在其上;一个与基座相对设置的喷头 具有大量排气孔的气体供给机构，其通过喷头将处理气体供给到室内;以及喷头温度控制单元，其控制喷头的温度。