公开(公告)号：US20090095055A1

公开(公告)日：2009-04-16

申请号：US12274908

申请日：2008-11-20

Applicant: James G. Rietzel

Inventor： James G. Rietzel

IPC: G01M3/28 ,  C23C14/34

CPC classification number: H01J37/3405 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/188 ,  H01J2237/2005

Abstract: A system for providing a seal between a rotating part and a stationary part that comprises two seals in series separated by a cavity is disclosed. The cavity may be at low pressure and failure of either seal may be detected by a change in cavity pressure. An alarm may be triggered when cavity pressure rises above a threshold, or when it remains above a threshold for more than a predetermined period of time. In a system comprising multiple cavities, a cavity may be selectively isolated to determine if a seal associated with that cavity is experiencing a leak.

Abstract translation: 公开了一种用于在旋转部件和固定部件之间提供密封件的系统，该系统包括由空腔串联分离的两个密封件。 空腔可能处于低压状态，任何密封件的故障都可能通过腔体压力的变化来检测。 当腔体压力升高到高于阈值时，或者当腔体压力保持高于阈值超过预定时间段时，可以触发警报。 在包括多个空腔的系统中，空腔可以被选择性地隔离以确定与该空腔相关联的密封件是否经历泄漏。

公开(公告)号：US07435973B2

公开(公告)日：2008-10-14

申请号：US11499776

申请日：2006-08-07

Applicant: Hans W. P. Koops ,  Peter Hoffrogge

Inventor： Hans W. P. Koops ,  Peter Hoffrogge

IPC: G21K7/00

CPC classification number: H01J37/3056 ,  H01J2237/006 ,  H01J2237/162 ,  H01J2237/166 ,  H01J2237/31732 ,  H01J2237/31744

Abstract: A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a surrounding of a location of the work piece to be processed. The radiation is preferably provided by an electron microscope. An objective lens of the electron microscope is preferably disposed between a detector of the electron microscope and the work piece. A gas supply arrangement of the material processing system comprises a valve disposed spaced apart from the processing location, a gas volume between the valve and a location of emergence of the reaction gas being small. The gas supply arrangement further comprises a temperature-adjusted, especially cooled reservoir for accommodating a starting material for the reactive gas.

Abstract translation: 提供了一种用于处理工件的材料处理系统。 材料处理通过提供反应气体和能量辐射来激活反应气体到待处理工件的位置的周围。 辐射优选由电子显微镜提供。 电子显微镜的物镜优选设置在电子显微镜的检测器和工件之间。 材料处理系统的气体供应装置包括与处理位置间隔开的阀，阀之间的气体体积和反应气体的出现位置较小。 气体供应装置还包括温度调节的特别冷却的储存器，用于容纳用于反应气体的起始材料。

公开(公告)号：US07276712B2

公开(公告)日：2007-10-02

申请号：US11173494

申请日：2005-07-01

Applicant: Joseph Ferrara

Inventor： Joseph Ferrara

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/166 ,  H01J2237/20228 ,  H01L21/26506 ,  H01L21/68764

Abstract: An ion beam implanter includes an ion beam source for generating an ion beam moving along a beam line and an implantation chamber wherein a workpiece is positioned to intersect the ion beam for ion implantation of an implantation surface of the workpiece by the ion beam. The implanter further includes a workpiece support structure coupled to the implantation chamber and supporting the workpiece within an interior region of the implantation chamber, the workpiece support structure. The workpiece support structure includes a rotation member coupled to the implantation chamber for changing an implantation angle of the workpiece with respect to a portion of the ion beam within the implantation chamber. The workpiece support structure also includes a translation member movably coupled to the rotation member and supporting the workpiece for movement along a path of travel wherein at least some components of the translation member components are disposed within a reduced pressure translation member chamber. The translation member chamber is isolated from the implantation chamber interior region by a dynamic seal. A workpiece holder support arm of the translation member extends through the dynamic seal and into the implantation chamber.

公开(公告)号：US20060060259A1

公开(公告)日：2006-03-23

申请号：US11206296

申请日：2005-08-18

Applicant: Andrew Devitt

Inventor： Andrew Devitt

IPC: B25B11/00 ,  B65B31/04 ,  B05D3/00 ,  A47J41/00

CPC classification number: H01L21/67784 ,  B05D3/0493 ,  B25B11/005 ,  F16C29/025 ,  F16C32/0618 ,  F16C33/748 ,  F16C2300/62 ,  F16J15/40 ,  F16J15/443 ,  G03F7/70716 ,  G03F7/70816 ,  G03F7/70841 ,  H01J37/20 ,  H01J2237/166 ,  H01J2237/2006 ,  H01J2237/202 ,  H01J2237/28 ,  H01J2237/31701 ,  H01J2237/3175 ,  H01L21/67126 ,  H01L21/68 ,  H01L21/68714

Abstract: A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder but not much more. The perimeter of the recessed side has an air bearing surface separated from the recess by differentially pumped groves and seal lands. The air bearing lands are urged against a reference plate guide surface and the seal lands being substantially coplanar create a resistance to flow between the groves and recess, on the other side of the base reference plate mounts the radiation source. The VCS may operate in a vacuum environment itself, or in another preferred embodiment, it provides the possibility for multiple stages moving between process or inspection steps within the same tool or process sequence.

Abstract translation: 用于处理衬底的阶段，特别适用于真空应用，具有刚好足够大以容纳基本上平坦的衬底和卡盘或保持器而不是更多的凹部。 凹入侧的周边具有空隙部分，该空气轴承表面通过差分泵送的格栅和密封接头与凹部分离。 空气轴承平台被推靠在参考板引导表面上，并且密封平台基本上共面地在基部参考板的另一侧上安装辐射源而产生在凹槽和凹槽之间的流动阻力。 VCS可以在真空环境中操作，或者在另一个优选实施例中，其提供在相同工具或处理顺序内的过程或检查步骤之间的多个阶段移动的可能性。

公开(公告)号：US06683317B1

公开(公告)日：2004-01-27

申请号：US10278998

申请日：2002-10-24

Applicant: Jonathon Yancey Simmons ,  Andrew Devaney

Inventor： Jonathon Yancey Simmons ,  Andrew Devaney

IPC: H01J3708

CPC classification number: F16L25/02 ,  H01J2237/166

Abstract: An electrically insulating vacuum coupling for use in an ion implanter for connecting any two parts of the vacuum chamber housing together while maintaining the electrical potentials of the two parts. The coupling comprises an inner sleeve of ceramic material (e.g. Al2O3) and an outer sleeve of a polymer/litharge mixture. The polymer may be a urethane polymer. Litharge is included in the material of the outer sleeve to absorb x-rays produced within the vacuum chamber. The coupling is particularly useful for coupling an ion source to the main housing of the vacuum chamber

Abstract translation: 一种用于离子注入机的电绝缘真空联接器，用于将真空室壳体的任何两个部分连接在一起，同时保持两部分的电位。 联接器包括陶瓷材料（例如Al 2 O 3）的内套筒和聚合物/锂聚合物的外套筒。 聚合物可以是聚氨酯聚合物。 Litharge包含在外套筒的材料中以吸收在真空室内产生的x射线。 耦合对于将离子源耦合到真空室的主壳体特别有用

公开(公告)号：US20020187271A1

公开(公告)日：2002-12-12

申请号：US10180436

申请日：2002-06-25

Inventor： Richard Ernest Demaray ,  Manuel J. Herrera ,  David F. Eline ,  Chandra Deshpandey

IPC: B05D001/36

CPC classification number: H01J37/32458 ,  C23C14/3407 ,  C23C14/564 ,  H01J37/34 ,  H01J2237/166 ,  Y10T428/24355 ,  Y10T428/31511 ,  Y10T428/31515 ,  Y10T428/31522

Abstract: In accordance with the present invention, an insulating sealing structure useful in physical vapor deposition apparatus is provided. The insulating sealing structure is capable of functioning under high vacuum and high temperature conditions. The apparatus is a three dimensional structure having a specifically defined range of electrical, chemical, mechanical and thermal properties enabling the structure to function adequately as an insulator which does not break down at voltages ranging between about 1,500 V and about 3,000 V, which provides a seal against a vacuum of at least about 10null6 Torr, and which can function at a continuous operating temperature of about 300null F. (148.9null C.) or greater. The insulating sealing structure may be fabricated solely from particular polymeric materials or may comprise a center reinforcing member having at least one layer applied to its exterior surface, where the at least one surface layer provides at least a portion of the insulating properties and provides the surface finish necessary to make an adequate seal with a mating surface. A first preferred embodiment comprises an aluminum center reinforcing member having at least one layer of a polymeric insulator applied to provide an insulating, sealing surface. A second preferred embodiment comprises an anodized aluminum center reinforcing member having an inorganic insulator such as silicon oxide, silicon nitride, or aluminum nitride applied to provide the insulating, sealing surface. A third preferred embodiment comprises a graphite, silica or glass fiber-reinforced member having at least one layer of a polymeric insulator applied thereover, to provide an insulating sealing surface. A fourth preferred embodiment comprises a silicon nitride or graphic fiber-reinforced member having an inorganic, non-metallic insulating sealing surface thereover.

Abstract translation: 根据本发明，提供了一种用于物理气相沉积设备的绝缘密封结构。 绝缘密封结构能够在高真空和高温条件下起作用。 该装置是具有特定范围的电气，化学，机械和热特性的三维结构，使得结构能够充分发挥作用，其绝缘体不会在约1500V至约3000V之间的电压下分解，这提供 密封至少约10 -6乇的真空，并且可以在约300°F（148.9℃）或更高的连续工作温度下起作用。 绝缘密封结构可以仅由特定聚合物材料制造，或者可以包括具有施加到其外表面的至少一层的中心加强构件，其中至少一个表面层提供绝缘性能的至少一部分并提供表面 完成必要的配合表面的充分密封。 第一优选实施例包括铝中心加强构件，其具有至少一层用于提供绝缘的密封表面的聚合物绝缘体层。 第二优选实施例包括阳极氧化铝中心加强件，其具有诸如氧化硅，氮化硅或氮化铝的无机绝缘体，以提供绝缘的密封表面。 第三优选实施例包括石墨，二氧化硅或玻璃纤维增​​强构件，其具有施加在其上的至少一层聚合物绝缘体，以提供绝缘密封表面。 第四优选实施例包括在其上具有无机，非金属绝缘密封表面的氮化硅或图形纤维增强构件。

公开(公告)号：US20010045705A1

公开(公告)日：2001-11-29

申请号：US09919840

申请日：2001-08-02

Inventor： Akio Hashimoto

IPC: F16J015/32

CPC classification number: H01J37/32431 ,  F16J15/006 ,  F16J15/3212 ,  F16J15/3236 ,  H01J2237/166 ,  H01L21/67126 ,  Y10S277/913 ,  Y10S277/918 ,  Y10S277/927

Abstract: A sealing mechanism comprises a support member forming part of the semiconductor producing apparatus which has a vacuum chamber, a rotation shaft rotatably received in the support member, and at least three seal rings axially spaced apart from each other between the support member and the rotation shaft to form a first fluid chamber close to the atmosphere and a second fluid chamber close to the vacuum chamber. The first fluid chamber is vacuumized to have a first pressure, and the second fluid chamber is also vacuumized to have a second pressure which is lower than the first pressure. The first and second fluid chambers work together to enhance the sealing performance of the sealing mechanism.

公开(公告)号：US06274875B1

公开(公告)日：2001-08-14

申请号：US09293941

申请日：1999-04-19

Applicant: Theodore H. Smick ,  Marvin Farley ,  Takao Sakase ,  Geoffrey Ryding

Inventor： Theodore H. Smick ,  Marvin Farley ,  Takao Sakase ,  Geoffrey Ryding

IPC: H01J3720

CPC classification number: H01J37/16 ,  F16C33/74 ,  F16J15/40 ,  H01J2237/166 ,  H01J2237/2006 ,  Y10S277/913

Abstract: A fluid bearing vacuum seal assembly comprises an annular stator with first and second opposed surfaces, at least part of the first surface defining a first bearing surface. The stator also defines an aperture having a wall extending between the first and second surfaces. The assembly also comprises a rotor with first and second opposed surfaces, the second surface defining in part a second bearing surface which is supported relative to the first bearing surface in use so that the rotor is rotatable relative to the stator. A cylindrical wall projects axially from the second surface of the rotor through the aperture in the stator. An annular flange projects radially outwardly from the cylindrical wall adjacent to the second surface of the stator. At least one annular differential pumping channel is defined in each of the first and second surfaces of the stator and the wall which connects the first and second surfaces. This configuration allows the differential pumping channels to be spaced apart to a greater extent, improving the performance of the vacuum seal and allowing a better vacuum to be achieved.

Abstract translation: 流体轴承真空密封组件包括具有第一和第二相对表面的环形定子，所述第一表面的至少一部分限定第一支承表面。 定子还限定了具有在第一和第二表面之间延伸的壁的孔。 组件还包括具有第一和第二相对表面的转子，第二表面部分地限定第二支承表面，该第二支承表面在使用中相对于第一支承表面支撑，使得转子可相对于定子旋转。 圆柱形壁从转子的第二表面通过定子中的孔轴向突出。 环形凸缘从与定子的第二表面相邻的圆柱形壁径向向外突出。 至少一个环形差动泵送通道限定在定子和连接第一和第二表面的壁的第一和第二表面中的每一个中。 这种构造允许差分泵送通道在更大程度上间隔开，从而改善了真空密封件的性能并且实现了更好的真空。

公开(公告)号：US5921559A

公开(公告)日：1999-07-13

申请号：US829455

申请日：1997-03-28

Applicant: Masami Aihara

Inventor： Masami Aihara

IPC: B01J3/03 ,  C23C14/24 ,  C23C14/56 ,  C23C16/44 ,  F16J15/08 ,  H01L21/203 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065

CPC classification number: C23C16/4409 ,  F16J15/0806 ,  H01J2237/166 ,  H01J2237/32 ,  Y10S277/941

Abstract: A sealing structure for an airtight chamber includes a first division member and a second division member being repeatedly joined and disjoined. The first and second chamber members are joined together to define the chamber between them and disjoined to allow access to the chamber. The structure also includes a sealing member pressed between the first and second division members to keep the chamber airtight against a pressure difference between the exterior and the interior of the chamber while the first and second division members are joined. The first and second division members are made of a material with hardness lower than that of the sealing member and are formed with a groove. The structure also includes seat members being embedded in the grooves and pressed against the sealing member while the first and second division members are joined. The seat member is made of a material harder than the division member and welded in said groove only along its contacting surfaces with the groove.

Abstract translation: 用于气密室的密封结构包括重复地接合和分离的第一分隔构件和第二分隔构件。 第一和第二室构件连接在一起以在它们之间限定室，并且被分开以允许进入室。 该结构还包括被压在第一和第二分隔构件之间的密封构件，以在第一和第二分隔构件接合的同时使腔室气密地抵抗腔室的外部和内部之间的压力差。 第一和第二分割构件由硬度低于密封构件的材料制成，并形成有凹槽。 该结构还包括嵌入槽中的座构件，并且在第一和第二分隔构件接合时被压靠在密封构件上。 座构件由比分割构件更硬的材料制成，并且仅沿着与槽的接触表面焊接在所述槽中。

公开(公告)号：US11651931B2

公开(公告)日：2023-05-16

申请号：US17195509

申请日：2021-03-08

Applicant: Varian Medical Systems, Inc.

Inventor： Amir Shojaei ,  Philip Adamson ,  Flavio Poehlmann-Martins

IPC: H01J37/08 ,  H01J37/16

CPC classification number: H01J37/08 ,  H01J37/16 ,  H01J2237/022 ,  H01J2237/166 ,  H01J2237/186 ,  H01J2237/1825

Abstract: An apparatus includes an ion chamber and a valve assembly. The ion chamber may include a housing enclosing a gas and one or more electrodes. The valve assembly is coupled to the ion chamber allowing control of replacement of the gas within the housing.