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公开(公告)号:US06943345B2
公开(公告)日:2005-09-13
申请号:US10456939
申请日:2003-06-06
Applicant: Frank T. Hartley
Inventor: Frank T. Hartley
IPC: G01N27/62 , C12M1/00 , C12M1/42 , C12N15/09 , G01N1/28 , G01N33/483 , G01N33/50 , H01J27/00 , H01J27/02 , H01J27/08 , H01J37/08 , H01J49/04 , H01J49/10 , H01J49/16 , H01J49/40
CPC classification number: H01J49/168 , G01N2223/612 , H01J3/027 , H01J3/04 , H01J27/02 , H01J27/26 , H01J37/08 , H01J49/0018 , H01J49/0427 , H01J2237/061 , H01J2237/0815 , H01J2237/317
Abstract: A soft ionization device is disclosed that comprises a series of electrodes having spacing less than the means free path of the molecules to be ionized. In some embodiments, the soft ionization device is used in various applications that require ion or electron sources such as biological or chemical reactors, ion milling, and numerous replacements for conventional hot cathode systems. In another embodiment, a valence spectrometer is disclosed that is configured to variably ionize molecules by their valiancy. In other embodiments, the ionization device is coupled to a spectrometer for the characterization of biological matter. Also disclosed is a preconditioner for preparing biological matter to be ionized.
Abstract translation: 公开了一种软电离装置,其包括具有小于待离子化分子的平均自由程的间隔的一系列电极。 在一些实施例中,软电离装置用于需要离子或电子源(例如生物或化学反应器,离子研磨)和常规热阴极系统的多种替代品的各种应用中。 在另一个实施方案中,公开了一种化学光谱仪,其被配置为通过它们的缬氨酸可变地离子化分子。 在其它实施方案中,将离子化装置耦合到用于表征生物物质的光谱仪。 还公开了用于制备待离子化的生物物质的预处理剂。
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公开(公告)号:US06940074B2
公开(公告)日:2005-09-06
申请号:US10786229
申请日:2004-02-26
Applicant: Frank T. Hartley
Inventor: Frank T. Hartley
IPC: G01N27/62 , C12M1/00 , C12M1/42 , C12N15/09 , G01N1/28 , G01N33/483 , G01N33/50 , H01J27/00 , H01J27/02 , H01J27/08 , H01J37/08 , H01J49/04 , H01J49/10 , H01J49/16 , H01J49/40
CPC classification number: H01J49/168 , G01N2223/612 , H01J3/027 , H01J3/04 , H01J27/02 , H01J27/26 , H01J37/08 , H01J49/0018 , H01J49/0427 , H01J2237/061 , H01J2237/0815 , H01J2237/317
Abstract: Devices are disclosed that incorporate an ionization device for generating ions and electrons having first and second conductive electrodes that are separated by less than the mean-free-path of molecules being ionized. Electrons generated by the ionization device may be used for applications such as light sources, electron bombardment sensors, thyratrons, vacuum tubes, plasma displays, and microwave switches, and ions generated by the ionization device may be used, inter alia, in connection with ion focused milling devices, maskless ion implantation devices, ion beam lithography devices, semiconductor mask modification devices, and semiconductor chip wiring devices. Methods of use and manufacture are also provided.
Abstract translation: 公开了包括用于产生离子的电离装置的装置,该离子和电子具有通过小于被离子化的分子的平均自由路径分开的第一和第二导电电极。 由电离装置产生的电子可用于诸如光源,电子轰击传感器,闸流管,真空管,等离子体显示器和微波开关等应用,并且离子化装置产生的离子尤其可以用于离子 聚焦铣削装置,无掩模离子注入装置,离子束光刻装置,半导体掩模修改装置和半导体芯片布线装置。 还提供了使用和制造方法。
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公开(公告)号:US06610986B2
公开(公告)日:2003-08-26
申请号:US10180448
申请日:2002-06-25
Applicant: Frank T. Hartley
Inventor: Frank T. Hartley
IPC: H01J2700
CPC classification number: H01J49/168 , G01N2223/612 , H01J3/027 , H01J3/04 , H01J27/02 , H01J27/26 , H01J37/08 , H01J49/0018 , H01J49/0427 , H01J2237/061 , H01J2237/0815 , H01J2237/317
Abstract: A soft ionization device is disclosed that comprises a series of electrodes having pacing less than the means free path of the molecules to be ionized. In some embodiments, the soft ionization device is used in various applications that require ion or electron sources such as biological or chemical reactors, ion milling, and numerous replacements for conventional hot cathode systems. In another embodiment, a valence spectrometer is disclosed that is configured to variably ionize molecules by their valiancy. In other embodiments, the ionization device is coupled to a spectrometer for the characterization of biological matter. Also disclosed is a preconditioner for preparing biological matter to be ionized.
Abstract translation: 公开了一种软电离装置,其包括具有小于待离子化分子的平均自由程的起搏的一系列电极。 在一些实施例中,软电离装置用于需要离子或电子源(例如生物或化学反应器,离子研磨)和常规热阴极系统的多种替代品的各种应用中。 在另一个实施方案中,公开了一种化学光谱仪,其被配置为通过它们的缬氨酸可变地离子化分子。 在其它实施方案中,将离子化装置耦合到用于表征生物物质的光谱仪。 还公开了用于制备待离子化的生物物质的预处理剂。
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公开(公告)号:US20020084180A1
公开(公告)日:2002-07-04
申请号:US09962525
申请日:2001-09-24
Inventor: Horst Schmidt-Boecking , Lutz Spielberger , Angela Braeuning-Demian , Maria Cristina Penache , Sven Schoessler , Till Jahnke , Oliver Hohn , Volker Mergel
IPC: B01J019/08
CPC classification number: H01J49/10 , H01J3/04 , H01J27/022 , H01J37/08
Abstract: The invention relates to a particle source, particularly an ion source for the production of excited particles in gaseous media. A dielectric, e.g., Kapton foil, is coated electrically conductively on both sides, and a voltage, preferably pulsed, is applied between the two coatings. A gas discharge is ignited in the gas through-flow by the voltage. Due to a pressure difference between the two sides of the foil, the gas expands from the high pressure side to the low pressure side, preferably in an ultrasonic expansion, whereby a directed, cold beam of excited particles or ions is produced.
Abstract translation: 本发明涉及一种颗粒源,特别是用于在气体介质中产生激发颗粒的离子源。 电介质(例如Kapton箔)在两侧电导体地涂覆,并且优选地将脉冲的电压施加在两个涂层之间。 气体通过气体通过电压点燃。 由于箔的两侧之间的压力差,气体从高压侧膨胀到低压侧,优选地在超声波膨胀中,由此产生被引导的冷激子粒子或离子束。
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公开(公告)号:US20020036461A1
公开(公告)日:2002-03-28
申请号:US09999109
申请日:2001-10-31
Applicant: Osram Sylvania Inc.
Inventor: Karl H. Schoenbach , Wojciech W. Byszewski , Frank E. Peterkin , Amin N. Dharami
IPC: H01J001/62
CPC classification number: H01J3/025 , H01J1/025 , H01J3/04 , H01J17/04 , H01J17/06 , H01J27/08 , H01J61/067 , H01J61/09 , H01J61/12 , H01J61/305 , H01J61/66 , H01J61/72 , H01J61/78 , H01S3/03 , H01S3/0382 , H01S3/0385 , H01S3/2383
Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.
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公开(公告)号:US4123686A
公开(公告)日:1978-10-31
申请号:US774655
申请日:1977-03-04
Applicant: Roderich Keller , Michael Muller
Inventor: Roderich Keller , Michael Muller
Abstract: A source for generating singly and/or multiply charged ions composed essentially of a glow cathode, an intermediate electrode and an anode electrode having a common axis of symmetry and bordering a gas discharge chamber and each presenting a passage opening coaxial with the axis of symmetry, and a system producing a magnetic field having an axial component along the axis of symmetry, with the anode electrode opening being at a location where the magnitude of the axial component of the magnetic field is substantially equal to its maximum value.
Abstract translation: 用于产生单和/或多电荷离子的源,其基本上由辉光阴极,中间电极和具有公共对称轴线的接触气体放电室的阳极组成,并且每个具有与对称轴同轴的通道开口, 以及产生沿着对称轴具有轴向分量的磁场的系统,其中阳极电极开口位于磁场的轴向分量的大小基本上等于其最大值的位置。
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公开(公告)号:US09837237B2
公开(公告)日:2017-12-05
申请号:US15608761
申请日:2017-05-30
Applicant: Massachusetts Institute of Technology
Abstract: Embodiments related to the use and production of porous carbon materials in ion emitters and other applications are described.
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公开(公告)号:US20170263408A1
公开(公告)日:2017-09-14
申请号:US15608761
申请日:2017-05-30
Applicant: Massachusetts Institute of Technology
Abstract: Embodiments related to the use and production of porous carbon materials in ion emitters and other applications are described
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公开(公告)号:US09640361B2
公开(公告)日:2017-05-02
申请号:US14830106
申请日:2015-08-19
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor: Anto Yasaka , Yasuhiko Sugiyama , Hiroshi Oba
CPC classification number: H01J27/26 , H01J1/15 , H01J1/18 , H01J3/04 , H01J27/024 , H01J37/08 , H01J2237/002 , H01J2237/06316
Abstract: A focused ion beam system includes a gas ion source and an emitter structure. The emitter structure includes a pair of conductive pins fixed to a base member, a filament connected between the pair of conductive pins, and an emitter which has a tip end with one atom or three atoms and which is connected to the filament. A supporting member is fixed to the base material, and the emitter is connected to the supporting member.
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公开(公告)号:US09502207B1
公开(公告)日:2016-11-22
申请号:US14835780
申请日:2015-08-26
Applicant: Axcelis Technologies, Inc.
Inventor: John F. Baggett , Jason R. Beringer
IPC: H01J37/20 , H01J37/317 , H01J37/08
CPC classification number: H01J37/08 , H01J3/04 , H01J2237/061 , H01J2237/31701
Abstract: An ion source filament clamp has a clamp member having first and second ends. The first end has one of a cam surface and a cam follower, and has first and second portions that are opposed to one another and separated by a slot having a lead opening defined therein to receive a lead of an ion source filament. An actuator pin extends along an actuator pin axis and has first and second sections. The first section is coupled to the first portion of the clamp member. The actuator pin extends through, and is in sliding engagement with, a thru-hole in the second portion of the clamp member. A cam member is operably coupled to the second section of the actuator pin. The cam member has a handle and the other of the cam surface and cam follower and is configured to rotate between a clamped position and an unclamped position. The cam follower slidingly contacts the cam surface. In the clamped position, the cam follower engages the cam surface in a first predetermined manner, thus selectively compressing the first and second portions of the clamp member toward one another and exerting a clamping pressure on the lead within the lead opening while inducing a spring tension between the first and second portions of the clamp member. In the unclamped position, the cam follower engages the cam surface in a second predetermined manner, wherein the spring tension extends the first and second portions of the clamp member apart from one another, therein releasing the clamping pressure on the lead within the lead opening.
Abstract translation: 离子源灯丝夹具具有一个具有第一和第二端的夹紧件。 第一端具有凸轮表面和凸轮从动件中的一个,并且具有彼此相对并且由其中限定有引线开口的槽分隔开的第一和第二部分,以接收离子源灯丝的引线。 执行器销沿致动器销轴线延伸并具有第一和第二部分。 第一部分联接到夹紧构件的第一部分。 致动器销延伸穿过并且与夹紧构件的第二部分中的通孔滑动接合。 凸轮构件可操作地联接到致动器销的第二部分。 凸轮构件具有手柄和凸轮表面和凸轮从动件中的另一个,并且构造成在夹紧位置和未夹紧位置之间旋转。 凸轮从动件滑动地接触凸轮表面。 在夹紧位置中,凸轮从动件以第一预定方式接合凸轮表面,从而选择性地将夹紧构件的第一和第二部分彼此压缩并且在引导开口内的引线上施加夹紧压力,同时引起弹簧张力 在夹紧构件的第一和第二部分之间。 在松开位置,凸轮从动件以第二预定方式接合凸轮表面,其中弹簧张力将夹紧构件的第一和第二部分彼此分开延伸,从而在引线开口内释放引线上的夹持压力。
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