Abstract:
Provided are an apparatus and method of sensing liquid leakage for a lithography apparatus, which can prevent a collector mirror from being contaminated by sensing leakage of cooling water supplied to the collector mirror of an extreme ultraviolet (EUV) light generating apparatus. The liquid leakage sensing apparatus includes a collector mirror module, a cooling unit configured to supply a cooling water to one surface of the collector mirror module, a gas supply unit configured to supply a water soluble gas to the cooling unit, and a sensing unit configured to sense the water soluble gas having leaked to the outside of the cooling unit.
Abstract:
A fuel cell separator, a fuel cell stack having the fuel cell separator, and a reactant gas control method of the fuel cell stack are provided. That is, even when the fuel cell stack operates under the low load operation condition, a reactant gas is supplied to the reactant gas passages of the fuel cell separator, and thus, the length of the passage can be shortened by 50% as compared with the prior art having only one reactant gas passage. Therefore, the reactant gas can be effectively supplied without experiencing pressure loss. Further, in the high load operation of the fuel cell stack, the reactant gas is introduced into the first reactant gas passage of the fuel cell separator and utilized in half of the whole electrode area. Subsequently, the reactant gas is introduced into the second reactant gas passage and utilized in the remaining half of the electrode area. The flow rate of the reactant gas flowing along the passage channels is increased by two times, even when the reactant gas utilizing rate is identical as compared with the reactant gas flow in the low load operation. As a result, the moisture existing in the passage channels can be more effectively discharged and the flooding phenomenon occurring in the high load operation can be prevented. By controlling the reactant gas supply in accordance with an operation condition of the fuel cell stack without experiencing pressure loss and deterioration of the utilizing rate, the flooding phenomenon and concentration polarization phenomenon that occur in the fuel cell stack can be prevented.
Abstract:
A semiconductor device is provided. The semiconductor includes a plurality of interlayer insulating layers and a plurality of gate electrodes alternately stacked in a first direction on a substrate. The plurality of interlayer insulating layers and the plurality of gate electrodes constitute a side surface extended in the first direction. A gate dielectric layer is disposed on the side surface. A channel pattern is disposed on the gate dielectric layer. The gate dielectric layer includes a protective pattern, a charge trap layer, and a tunneling layer. The protective pattern includes a portion disposed on a corresponding gate electrode of the plurality of gate electrodes. The charge trap layer is disposed on the protective pattern. The tunneling layer is disposed between the charge trap layer and the channel pattern. The protective pattern is denser than the charge trap layer.
Abstract:
An application processor includes a first scaler including a first vertical scaler and a first horizontal scaler, and a second scaler including a second vertical scaler and a second horizontal scaler, wherein the second vertical scaler is selectively shared between the first scaler and the second scaler in response to a determination of resolution for an image being processed.
Abstract:
There is provided a method of manufacturing a light emitting device which includes preparing a light emitting element emitting excitation light and a substrate on which the light emitting element is disposed. A fluoride phosphor is provided to absorb excitation light emitted from the light emitting element to emit visible light, and is represented by Chemical Formula (1). The fluoride phosphor is disposed on at least one of the light emitting element and the substrate, wherein Chemical Formula (1): AxMFy:Mn4+ (wherein 2≦x≦3 and 4≦y≦7, A is at least one element selected from the group consisting of Li, Na, K, Rb, and Cs, and M is at least one element selected from the group consisting Si, Ti, Zr, Hf, Ge, and Sn).
Abstract:
A compound medical device, which accurately estimates the disease state of a subject or determines the gestational week or health status of a subject, may include an auscultation unit, receiving bodily sound, a body temperature measurement unit, measuring the body temperature of a subject, a controller unit, connected to the auscultation unit and the body temperature measurement unit and estimating the disease state or determining the gestational week or health status of the subject based on the input received from the auscultation unit and the body temperature measurement unit, and an output unit, outputting the disease state or the gestational week or health status of the subject estimated or determined by the controller unit.
Abstract:
A digital transmission apparatus and a method thereof and a digital reception apparatus are provided. A frame body processor converts incoming data and outputs a frame body, a system information generator generates system information, which is necessary for processing the data at a reception apparatus, by using a different processing method from the frame body processing method of the frame body processor, a frame generator multiplexes data of the frame body, a header of the frame, and the system information, thereby generating a frame, and a signal processor up-coverts a signal of the frame and transmits the signal to the reception apparatus.
Abstract:
A pop-up monitor is provided. A pop-up monitor with a double rack gear includes a driving unit, a rack gear set, and a monitor frame. The driving unit includes a spur gear set having first and second spur gears, and generates first and second rotational motions with the first and second spur gears. The rack gear set includes an outer gear with a rail groove in one surface thereof along, changing the first rotational motion to a first rectilinear motion, and an inner gear with a rail rail-coupled to the rail groove changing the second rotational motion to a second rectilinear motion. The monitor frame includes a support frame supporting a monitor. The monitor frame is fixed by the inner gear which vertically ascends by the second rectilinear motion without forward and rearward movement when the support frame has vertically ascended to a position according to the first rectilinear motion.
Abstract:
An electromagnetic sensing apparatus built in a touch screen having at least one soft key is provided, in which a Printed Circuit Board (PCB) has at least one sub-area corresponding to the at least one soft key, a controller has at least one input/output channel and controls electromagnetic sensing of the electromagnetic sensing apparatus, and a loop unit extends from one of the at least one input/output channel, has at least one sub-loop arranged in the at least one sub-area on the PCB, and outputs current induced by an electromagnetic field. Each sub-loop outputs a different output value with respect to the electromagnetic field.
Abstract:
Pre-purchase and post-purchase item information provision methods and systems using an RFID technology and computer readable storage media storing programs for executing the methods are provided. A pre-purchase item information provision method for a radio frequency identification system according to the present invention includes transmitting, if a mobile reader is detected by a local server installed in a salesroom, a certificate containing information on a location of an object information service server and an authentication value to the mobile reader; transmitting, at the mobile reader, a query requesting an item ID to a tag attached to a target item; transmitting, at the tag, a item ID information generated by encrypting the item ID using the authentication value to the mobile reader; transmitting, at the mobile reader, the item ID information and the authentication value to the object information service server; and transmitting, at the object information service server, data retrieved in a database in correspondence to the item ID, the data being retrieved when the authentication value exists in the database. The item information provision method and system of the present invention can guarantee reliability of information on an item in the pre-purchase state and prevent the information from being eavesdropped in both the pre-purchase and post-purchase states. Also, the item information provision method and system can prevent the tag ID from being tracked, thereby protecting purchaser's privacy, preventing the tag from being forged, and improving computation efficiency.