摘要:
A fluorescence observing apparatus including a light source for emitting excitation light, an excitation light irradiation section for irradiating the excitation light to a sample, and a fluorescence measurement section for measuring fluorescence emitted from the sample by the irradiation of the excitation light. In the fluorescence observing apparatus, a GaN semiconductor laser is employed as the light source.
摘要:
In a film deposition method which forms a Cu film on a Cu diffusion preventing film formed on a substrate, a contact film which is provided for adhering the Cu film to the Cu diffusion preventing film is formed on the Cu diffusion preventing film. A processing medium in which a precursor is dissolved in a medium of a supercritical state is supplied to the substrate so that the Cu film is formed on the contact film.
摘要:
Complexes are disclosed which are a combination of a polynucleotide and a biodegradable polyacetal-peptide. The disclosed complexes are useful for cell transfection.
摘要:
A portion at which a steam passage opens to a slide surface of a fixed side valve plate and a movable side valve plate of a rotary valve is reinforced with a reinforcing member having chipping resistance and abrasion resistance. Therefore, it can be prevented that an edge portion of the opening of the steam passage is chipped due to pulsation or the like of the pressure of high-temperature high-pressure steam supplied thereto and a resultant fragment damages the slide surface, or that abrasion dust generated from the slide surface damages the edge portion of the opening of the steam passage. Thus, the high-temperature high-pressure steam is prevented from short-cutting from the high-pressure side to the low-pressure side via the damage of the slide surface, and the supply timing of the high-temperature high-pressure steam is prevented from being upset, thus inhibiting the reduction in efficiency of an expander.
摘要:
In a rotating fluid machine, a high-pressure working medium introducing hole, for introducing high-temperature high-pressure steam to a slide surface, is opened to a fixed side valve plate. Therefore, when a single first high-pressure working medium passage which opens from the fixed side valve plate to the slide surface and a plurality of second high-pressure working medium passages which open from a movable side valve plate to the slide surface, sequentially communicate with each other with rotation of a rotor, the high-temperature high-pressure steam from the first high-pressure working medium passage and the high-temperature high-pressure steam from the high-pressure working medium introducing hole are uniformly introduced to the entirety of the slide surface, and a change in the surface pressure of the slide surface is suppressed to stabilize the behavior of the fixed side valve plate, thus preventing leakage of the high-temperature high-pressure steam and the occurrence of abnormal wear.
摘要:
A fixed side valve plate slides in contact with a movable side valve plate provided at a rotor of a rotary valve for supplying and discharging high-temperature high-pressure steam to and from an expansion chamber of an expander via a slide surface. The fixed side valve plate includes an expansion region having a large sliding area to which a circular steam supply passage opens, and an exhaust region having a small sliding area to which an arc-shaped steam discharge passage opens. An unsymmetrical recessed portion formed in a central portion of the slide surface and an arc-shaped notch formed at an outer peripheral portion of the expansion region, make the sliding area of the expansion region and the sliding area of the exhaust region substantially correspond to each other to make the surface pressure uniform, thereby preventing uneven abrasion of the slide surface to suppress leakage of steam.
摘要:
A shower head structure disposed in a device 2 for processing a semiconductor while supplying processing gas to a processing space S for storing a heated processed substrate W, comprising a shower head 12 having a plurality of gas injection holes 20B for supplying the processing gas and a light introducing rod 68 of a radiation thermometer 66 inserted into at least one of the gas injection holes 20B.
摘要:
The vacuum degree in a reactor is set to as low as 0.1 Torr. In this state, a butyl acetate solution in which Pb(DPM)2 is dissolved at a concentration of 0.1 mol is transported from a Pb source generator to an evaporator, while the flow rate of the butyl acetate solution is controlled to a predetermined flow rate by a massflow controller, to evaporate the Pb(DPM)2 dissolved together with the butyl acetate by the evaporator. Helium gas is added to these at a flow rate of 250 sccm, and the mixed gas is transported to a shower head. With this operation, source gases are supplied to a wafer in the reactor, while the partial pressure of each source gas is set low.
摘要:
A cell module structure comprises a bus bar plate and plural cylindrical cells. The bus bar plate including plural bus bars each having a positive bus bar terminal, a negative bus bar terminal, and a screw formed in one of the terminals, the bus bars being serially connected to each other with the positive bus bar terminal corresponding to the negative bus bar terminal; and a control substrate integrally provided to the bus bar and connected to the bus bars. The cell includes a positive cell terminal and a negative cell terminal coaxially aligned at an end thereof, and a screw formed in the terminal having the same polarity as that of the bus bar terminal which is formed with the screw to which the above screw is screwed. The screw of the cell is screwed to the screw of the bus bar, so that different terminals with no screw are brought into contact with each other, whereby the plural cells are serially connected.
摘要:
A glass ceramic having properties of low thermal expansion, high transmittance in a visible light region and low specific gravity, and a glass ceramic substrate made of the glass ceramic are provided. The glass ceramic has a crystal phase containing a &bgr;-quartz solid solution precipitated by heat treatment of a matrix glass for a glass ceramic, and the matrix glass has a glass composition comprising 55 to 70 mol % of SiO2, 13 to 23 mol % of Al2O3, 11 to 21 mol % of an alkali metal oxide, provided that the alkali metal oxide contains 10 to 20 mol % of Li2O and contains 0.1 to 3 mol % of Na2O and K2O in total, 0.1 to 4 mol % of TiO2 and 0.1 to 2 mol % of ZrO2, the total content of said components being at least 95 mol %, and further comprising 0 to less than 0.2 mol % of BaO, 0 to less than 0.1 mol % of P2O5, 0 to less than 0.3 mol % of B2O3 and 0 to leas than 0.1 mol % of SnO2.
摘要翻译:提供了具有低热膨胀性,可见光区高透射率,低比重等特性的玻璃陶瓷以及由玻璃陶瓷制成的玻璃陶瓷基板。 该玻璃陶瓷具有通过热处理用于玻璃陶瓷的基质玻璃而沉淀的β-石英固溶体的结晶相,并且基体玻璃具有玻璃组合物,该玻璃组合物含有55〜70摩尔%的SiO 2,13〜23摩尔% Al 2 O 3,11〜21摩尔%的碱金属氧化物,条件是碱金属氧化物含有10〜20摩尔%的Li 2 O,并且含有0.1〜3摩尔%的Na 2 O和K 2 O,0.1〜4摩尔%的TiO 2和0.1 至2mol%的ZrO 2,所述组分的总含量为至少95mol%,并且还包含0至小于0.2mol%的BaO,0至小于0.1mol%的P 2 O 5,0至小于0.3mol% 的B2O3和0至0.1摩尔%的SnO 2。