摘要:
A first thermal treatment, which is performed at a temperature within 650-750° C. for 30-240 minutes, and thereafter a second thermal treatment, which is performed at a temperature within 900-1100° C. for 30-120 minutes, are performed as the initial thermal treatments on a semiconductor wafer composed of silicon. Further, before forming a gate insulating film, the temperature is increased to 1000° C. at a temperature increasing rate of 8° C./min in a nitrogen ambient, and a thermal treatment is performed at a temperature of 1000° C. for 30 minutes as a third thermal treatment.
摘要:
In order to improve the lighting efficiency without incurring the upsizing of the system, a rise in price or the like, a lighting system for surface inspection to be suitably used in pattern inspection or the like of printed boards is provided wherein: a pair of light-emitting members are provided for lighting a given surface region of a subject for inspection obliquely from an upper forward side and an upper rearward side; and a second light-emitting member capable of lighting from just above through a half mirror is added to the pair of light-emitting members to enhance the lighting luminous intensity, each of the pair of light-emitting members including a plurality of LEDs arranged lengthwise and crosswise, and cylindrical lenses disposed correspondingly to respective columns of the LEDs.
摘要:
The unit for inspecting a surface is to detect a flaw on a specular surface of an object to be inspected with accuracy. The unit is so arranged that light 1a is irradiated from a point light source or close to a point light source 4, the light 1a is refracted by a Fresnel lens 5 so as to converge in a condition of being close to parallel, the refracted light 1a is reflected by a half mirror 6, the light 1a is irradiated on generally whole area of the specular surface 2 to be inspected and the reflected light 1a is introduced into an image capturing means 10 provided at a position where the light 1a converges.
摘要:
The present invention provides an inspection illuminator capable of reliably detecting defects on the inspection face of articles to be inspected, while making the brightness of light uniform. In this inspection illuminator, a plurality of illuminant rows are provided, in each of which a multiplicity of illuminants 4 are circularly aligned so as to encircle an opening 1K formed approximately in the center; a plurality of annular transparent bodies 6 for dispersing light from the illuminants of the illuminant rows and guiding such light toward the central axis side of the opening 1K are layered in front of such illuminant rows in a state of being optically shielded with shielding means 7; and the light emitting faces 6A of the transparent bodies 6 are formed into an incline plane such that the upper part thereof is closer to the central axis.
摘要:
The semiconductor of the present invention comprises at least an oxide film and a metal thin film on the surface of the semiconductor. The metal thin film includes a metal serving as an oxidation catalyst and has a thickness in the range of 0.5-30 nm. The oxide film comprises a metal serving as an oxidation catalyst and having a thickness in the range of 1-20 nm. Thus, a high-quality oxide film can be formed on the surface of the semiconductor substrate with high controllability without conducting a high temperature heat treatment. The invention employs the method of manufacturing the semiconductor has a steps of forming the first oxidation film having thickness in the range of 0.1-2.5 nm on the semiconductor substrate; forming the metal thin film (for example platinum film) serving as an oxide catalyst to the thickness in the range of 0.5-30 nm on the first oxide thin film; and then forming the second oxide film by heat treating in an oxidizing atmosphere at temperatures from 25 to 600° C.
摘要:
A cyclic amine derivative represented by the following formula: ##STR1## wherein R.sup.1 represents a substituted or unsubstituted phenyl group, R.sup.2 represents a substituted of unsubstituted C.sub.1 -C.sub.8 aliphatic acyl group, a substituted or unsubstituted benzoyl group or a C.sub.1 -C.sub.4 alkoxycarbonyl group, and R.sup.3 represents a substituted 3 to 7 membered saturated cyclic amino group which may form a fused ring; or pharmaceutically acceptable salts thereof. The compounds and salts have excellent platelet aggregation inhibitory action. They are useful for the treatment and prevention of such diseases as embolism, thrombosis or arteriosclerosis and for the preparation of pharmaceutical compositions for such uses.
摘要:
There are disclosed a method and apparatus for manufacturing semiconductor devices. The surface of each semiconductor substrate is exposed to cyanide ions (CN.sup.-) in order to reduce the density of interface states at the insulating film/semiconductor interface. For this purpose, the semiconductor substrate is immersed into a cyan compound solution or is exposed to a cyan compound gas, so that cyanide ions (CN.sup.-) are bonded to dangling bonds at the surface of the semiconductor substrates. As a result, the interface states at the insulating film/semiconductor interface can be reduced.
摘要:
Elevator group supervisory control method and system for group supervisory control of a plurality of elevators serving a plurality of floors. The method and apparatus of the invention permits the inputting of qualitative requests (guidance), from the user, concerning elevator operation into the group supervisory control system. Qualitative requests concerning elevator operation are set in the form of guidance (or request) targets. The thus set request, targets are converted into control targets for the elevators. Actual group supervisory control is executed using the control targets.
摘要:
In elevator equipment in which an elevator controller is connected by a common transmission line to an elevator cage and a plurality of apparatus installed at elevator stops on respective floors, signals are transmitted from the elevator controller to the elevator cage and the plurality of apparatus of elevator stops on respective floors. Information transmitted between the elevator controller and the cage as well as each apparatus at elevator stop on each floor is sorted into information which is different for each apparatus on each floor and the cage (unique information) and information which is the same for the plurality of apparatus at elevator stops on respective floors and the cage (common information), and the unique information is transmitted during a first period and the common information is transmitted during a second period, thereby reducing time required for transmission of information during one cycle.
摘要:
A fuel injection nozzle is provided with such an annular fuel passage that its fuel passage section is, at the earlier stage of fuel injection, maintained smaller than the whole sum of the sectional areas of injection orifices and adapted to increase gradually in response to the lift of a nozzle needle so that the rate of fuel injection increases gradually.