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222 条记录 (耗时 0.027 秒)

    Capacitive transducer and methods of manufacturing and operating the same
    52.
    发明授权
    Capacitive transducer and methods of manufacturing and operating the same 有权
    电容传感器及其制造和操作方法

    公开(公告)号：US08963261B2

    公开(公告)日：2015-02-24

    申请号：US13591845

    申请日：2012-08-22

    申请人： Che-heung Kim

    发明人： Che-heung Kim

    IPC分类号： H01L21/02 ,  B81B3/00

    CPC分类号： B81B3/0021 ,  B81B2201/038 ,  B81B2203/0127 ,  B81B2203/053

    摘要： Provided are a capacitive transducer, and methods of manufacturing and operating the same. The capacitive transducer includes: a monolithic substrate comprising a first doping region, a second doping region that is opposite in conductivity to the first doping region, and a vibrating portion; and an empty space that is disposed between the first doping region and the vibrating portion. The vibrating portion includes a plurality of through-holes, and a material film for sealing the plurality of through-holes is disposed on the vibrating portion.

    摘要翻译： 提供一种电容式换能器及其制造和操作方法。 电容换能器包括：单片基板，包括第一掺杂区域，与第一掺杂区域的导电性相反的第二掺杂区域和振动部分; 以及设置在第一掺杂区域和振动部分之间的空白空间。 振动部分包括多个通孔，并且在振动部分上设置用于密封多个通孔的材料膜。

    Nano-devices formed with suspended graphene membrane
    55.
    发明授权
    Nano-devices formed with suspended graphene membrane 失效
    用悬浮石墨烯膜形成的纳米器件

    公开(公告)号：US08564027B2

    公开(公告)日：2013-10-22

    申请号：US13359647

    申请日：2012-01-27

    申请人： Wenjuan Zhu

    发明人： Wenjuan Zhu

    IPC分类号： H01L29/84

    CPC分类号： H01L29/78606 ,  B81B2201/038 ,  B81B2203/0127 ,  B81C1/00158 ,  B82Y30/00 ,  H01L29/1606 ,  H01L29/4908 ,  H01L29/66045 ,  H01L29/78603 ,  H01L29/78648 ,  H01L29/78684

    摘要： Semiconductor nano-devices, such as nano-probe and nano-knife devices, which are constructed using graphene films that are suspended between open cavities of a semiconductor structure. The suspended graphene films serve as electro-mechanical membranes that can be made very thin, from one or few atoms in thickness, to greatly improve the sensitivity and reliability of semiconductor nano-probe and nano-knife devices.

    摘要翻译： 使用悬浮在半导体结构的开放腔之间的石墨烯膜构造的半导体纳米器件，例如纳米探针和纳米刀装置。 悬浮的石墨烯膜用作可以从一个或几个原子厚度制成非常薄的电子机械膜，以大大提高半导体纳米探针和纳米刀装置的灵敏度和可靠性。

    FABRICATING MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE
    56.
    发明申请
    FABRICATING MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE 有权
    制造包括合成膜的MEMS复合传感器

    公开(公告)号：US20120270352A1

    公开(公告)日：2012-10-25

    申请号：US13089532

    申请日：2011-04-19

    申请人： James D. Huffman ,  Maria J. Lehmann

    发明人： James D. Huffman ,  Maria J. Lehmann

    IPC分类号： H01L21/02

    CPC分类号： B81C1/00182 ,  B81B2201/038 ,  B81B2203/053 ,  G01H11/06 ,  H02N1/002 ,  H04R1/222 ,  H04R17/02 ,  H04R31/00 ,  H04R2201/003

    摘要： A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.

    摘要翻译： 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸 在空腔的至少一部分上方。

    FORMING CURVED FEATURES USING A SHADOW MASK
    57.
    发明申请
    FORMING CURVED FEATURES USING A SHADOW MASK 有权
    使用阴影面膜形成曲线特征

    公开(公告)号：US20120252221A1

    公开(公告)日：2012-10-04

    申请号：US13077531

    申请日：2011-03-31

    申请人： Gregory De Brabander ,  Mark Nepomnishy

    发明人： Gregory De Brabander ,  Mark Nepomnishy

    IPC分类号： H01L21/3065

    CPC分类号： B81C1/00103 ,  B81B2201/0257 ,  B81B2201/038 ,  B81B2203/0127 ,  B81B2203/0353 ,  B81B2203/0376

    摘要： Processes for making a profile-transferring substrate surface and membranes having curved features are disclosed. A profile-transferring substrate surface having a curved feature is created by isotropic plasma etching through a shadow mask. The shadow mask has a through hole which has a lower portion adjacent to the bottom surface of the shadow mask and an upper portion that is above and narrower than the lower portion. The isotropic plasma etching through the shadow mask can create a curved dent in a planar substrate in a central portion of an area enclosed by the bottom opening. After the shadow mask is removed. A uniform layer of material deposited over the exposed surface of the substrate will include a curved feature at the location of the curved dent in the substrate surface.

    摘要翻译： 公开了用于制造轮廓转印衬底表面的工艺和具有弯曲特征的膜。 通过荫罩的各向同性等离子体蚀刻产生具有弯曲特征的轮廓转印衬底表面。 荫罩具有通孔，该通孔具有与荫罩的底面相邻的下部，上部比下部窄。 通过荫罩的各向同性等离子体蚀刻可以在由底部开口包围的区域的中心部分中的平面基板中产生弯曲的凹陷。 阴影面具被删除后。 沉积在基板的暴露表面上的均匀的材料层将在基板表面中的弯曲凹陷的位置处包括弯曲特征。

    ELECTROSTATIC ACTUATOR OF A MOBILE STRUCTURE WITH IMPROVED RELAXATION OF TRAPPED CHARGES
    58.
    发明申请
    ELECTROSTATIC ACTUATOR OF A MOBILE STRUCTURE WITH IMPROVED RELAXATION OF TRAPPED CHARGES 有权
    具有改善放宽收费的移动结构的静电致动器

    公开(公告)号：US20120223614A1

    公开(公告)日：2012-09-06

    申请号：US13406026

    申请日：2012-02-27

    申请人： Antoine NOWODZINSKI

    发明人： Antoine NOWODZINSKI

    IPC分类号： H02N1/00

    CPC分类号： H02N1/006 ,  B81B3/0086 ,  B81B2201/038

    摘要： The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing the first actuating bump. An electrostatic actuating circuit moves the actuating bumps with respect to one another between a first position and another position. The actuating circuit comprises a device for applying a higher potential on the second actuating bump than on the first actuating bump. A film of electrically insulating material performs electric insulation between the first and second bumps. The electrically insulating material film comprises an interface with a positive ion source and is permeable to said positive ions.

    摘要翻译： 该装置包括由具有第一接触表面的导电材料制成的第一致动凸块。 由导电材料制成的第二致动凸块面向第一致动凸块。 静电致动电路在第一位置和另一位置之间相对于彼此移动致动凸块。 致动电路包括用于在第二致动凸块上施加比在第一致动凸块上更高电位的装置。 电绝缘材料的膜在第一和第二凸块之间执行电绝缘。 电绝缘材料膜包括具有正离子源的界面，并且可渗透所述正离子。

    MOTION CONVERSION SYSTEM
    59.
    发明申请
    MOTION CONVERSION SYSTEM 有权
    运动转换系统

    公开(公告)号：US20120216637A1

    公开(公告)日：2012-08-30

    申请号：US13466386

    申请日：2012-05-08

    申请人： Richard Lee Knipe

    发明人： Richard Lee Knipe

    IPC分类号： F16H21/00

    CPC分类号： B81B5/00 ,  B81B3/0032 ,  B81B2201/038 ,  B81B2203/051 ,  B81B2203/058 ,  F16H21/16 ,  F16H21/44 ,  F16H21/50 ,  Y10T74/18056 ,  Y10T74/18568 ,  Y10T74/1892

    摘要： A motion conversion system is described. The motion conversion system comprises a first torsional member operative for rotating in a first direction. A second torsional member is offset a distance from the first torsional member, wherein the second torsional member is operative for rotating in a direction opposite from the first direction. And, a lateral member has a lower surface connected to the first and second torsional members. Wherein, translational movement of the lateral member results from rotational movement of the first and second torsional members.

    摘要翻译： 描述运动转换系统。 运动转换系统包括可操作用于沿第一方向旋转的第一扭转构件。 第二扭转构件偏离与第一扭转构件的距离，其中第二扭转构件可操作用于沿与第一方向相反的方向旋转。 并且，横向构件具有连接到第一和第二扭转构件的下表面。 其中，横向构件的平移运动是由第一和第二扭转构件的旋转运动引起的。

    LOW DISTORTION PACKAGE FOR A MEMS DEVICE INCLUDING MEMORY
    60.
    发明申请
    LOW DISTORTION PACKAGE FOR A MEMS DEVICE INCLUDING MEMORY 审中-公开
    用于包含存储器的MEMS器件的低失真封装

    公开(公告)号：US20100315938A1

    公开(公告)日：2010-12-16

    申请号：US12192006

    申请日：2008-08-14

    申请人： Peter David Ascanio ,  Tom P. Frangesh

    发明人： Peter David Ascanio ,  Tom P. Frangesh

    IPC分类号： G11B9/00 ,  H01L23/48 ,  B23P17/04

    CPC分类号： G11B9/1436 ,  B81B7/0051 ,  B81B2201/038 ,  B81B2201/07 ,  B81B2201/11 ,  H01L2924/0002 ,  H02K5/04 ,  H02K99/20 ,  Y10T29/49 ,  H01L2924/00

    摘要： A package to receive a memory device including an electromagnetic motor comprises a body having a top surface and a bottom surface. Conductive leads extend through the body so that the conductive leads are at least partially exposed within the package. A base is connectable with the bottom surface of the body, and a lid is connectable with the top surface of the body. The base and the lid have substantially matched thermal expansion characteristics and provide magnetic flux return paths for the electromagnetic motor.

    摘要翻译： 用于接收包括电磁电动机的存储装置的包装件包括具有顶表面和底表面的主体。 导电引线延伸穿过主体，使得导电引线至少部分地暴露在封装内。 基座可与主体的底面连接，盖可与主体的上表面连接。 基座和盖具有基本上匹配的热膨胀特性，并为电磁马达提供磁通返回路径。