MOS2 THIN FILM AND METHOD FOR MANUFACTURING SAME
    55.
    发明申请
    MOS2 THIN FILM AND METHOD FOR MANUFACTURING SAME 有权
    MOS2薄膜及其制造方法

    公开(公告)号:US20160168694A1

    公开(公告)日:2016-06-16

    申请号:US14908863

    申请日:2013-08-13

    发明人: Yo-Sep MIN

    摘要: The present disclosure relates to a MoS2 thin film and a method for manufacturing the same. The present disclosure provides a MoS2 thin film and a method for manufacturing the same using an atomic layer deposition method. In particular, the MoS2 thin film is manufactured by an atomic layer deposition method without using a toxic gas such as H2S as a sulfur precursor. Thus, the present disclosure is eco-friendly. Furthermore, it is possible to prevent the damage and contamination of manufacturing equipment during the manufacturing process. In addition, it is possible to manufacture the MoS2 thin film by precisely controlling the thickness of the MoS2 thin film to the level of an atomic layer.

    摘要翻译: 本发明涉及一种MoS2薄膜及其制造方法。 本公开内容提供了MoS 2薄膜及其使用原子层沉积方法制造该MoS2薄膜的方法。 特别地,MoS 2薄膜是通过原子层沉积方法制造而不使用有毒气体如H 2 S作为硫前体。 因此,本公开是环保的。 此外,可以防止在制造过程中制造设备的损坏和污染。 此外,通过将MoS 2薄膜的厚度精确地控制到原子层的水平,可以制造MoS2薄膜。

    DYNAMIC SUPPORT SYSTEM FOR QUARTZ PROCESS CHAMBER
    56.
    发明申请
    DYNAMIC SUPPORT SYSTEM FOR QUARTZ PROCESS CHAMBER 审中-公开
    用于QUARTZ过程室的动态支持系统

    公开(公告)号:US20160133778A1

    公开(公告)日:2016-05-12

    申请号:US14997313

    申请日:2016-01-15

    IPC分类号: H01L31/18 F16M11/04 F16M11/18

    摘要: One embodiment of the present invention provides a support system for providing dynamic support to a deposition reactor. The system includes a coupling mechanism configured to provide coupling between the deposition reactor and the support system, an attachment mechanism configured to attach the support system to an external frame, and at least one gas bellows situated between the coupling mechanism and the attachment mechanism.

    摘要翻译: 本发明的一个实施例提供了一种用于向沉积反应器提供动态支持的支撑系统。 该系统包括配置成在沉积反应器和支撑系统之间提供耦合的联接机构,被配置成将支撑系统连接到外部框架的附接机构,以及位于联接机构和附接机构之间的至少一个气体波纹管。

    Method for double-side vacuum film formation and laminate obtainable by the method
    57.
    发明授权
    Method for double-side vacuum film formation and laminate obtainable by the method 有权
    双面真空成膜方法和通过该方法得到的层压体

    公开(公告)号:US09297066B2

    公开(公告)日:2016-03-29

    申请号:US13559041

    申请日:2012-07-26

    IPC分类号: C23C14/56 C23C14/02

    摘要: The film formation method comprises the steps of: unrolling and feeding an elongated substrate wound in a roll form from a first roll chamber in a direction from the first roll chamber toward a second roll chamber, using a first surface as a surface for film formation; degassing the fed substrate; forming a first material film on the first surface of the degassed substrate in a first film formation chamber; forming a second material film on the first material film in a second film formation chamber; taking up the substrate in a roll form in the second roll chamber, the substrate having the material films formed thereon; unrolling and feeding the taken up substrate from the first roll chamber in the direction, using a second surface opposite the first surface of the substrate as a surface for film formation; and repeating all the above treatments.

    摘要翻译: 成膜方法包括以下步骤:使用第一表面作为成膜表面,从第一辊室向第一辊室向第二辊室展开卷绕并卷绕成辊状的细长基材; 对进料基材进行脱气; 在第一成膜室中在脱气基板的第一表面上形成第一材料膜; 在第二成膜室中在第一材料膜上形成第二材料膜; 在第二辊室中以辊状卷取基板,其中形成有材料膜的基板; 使用与基板的第一表面相对的第二表面作为成膜的表面,使卷取的基板从第一辊室沿着该方向展开和进给; 并重复所有上述处理。

    Weather-resistant article, weather-resistant film and optical member
    58.
    发明授权
    Weather-resistant article, weather-resistant film and optical member 有权
    耐候性物品,耐候膜和光学构件

    公开(公告)号:US09279982B2

    公开(公告)日:2016-03-08

    申请号:US13059912

    申请日:2009-08-21

    摘要: Provided is a support exhibiting excellent weather resistance, which is usable in an outdoor location for a long duration and is a support capable of sufficiently shielding UV radiation; and further provided are a weather-resistant article, a weather-resistant film, and an optical member which exhibit sufficient weather resistance even though receiving influences by heat, light or moisture. Disclosed is a weather-resistant article of the present invention possessing a support and provided thereon, a polymer layer containing a light stabilizer and a UV radiation reflective layer containing plural materials each having a different refractive index, the UV radiation reflective layer provided on the polymer layer.

    摘要翻译: 本发明提供一种耐久性良好的支撑体,其能够长时间在室外使用,是能够充分地遮蔽紫外线的支撑体; 并且还提供即使受到热,光或湿气的影响也具有足够的耐候性的耐候性制品,耐候性膜和光学构件。 公开了一种本发明的耐候性物品,其具有支撑体,其上设有含有光稳定剂的聚合物层和含有各自具有不同折射率的多种材料的紫外线辐射反射层,设置在聚合物上的UV辐射反射层 层。