公开(公告)号：US07037574B2

公开(公告)日：2006-05-02

申请号：US09864714

申请日：2001-05-23

Applicant: Ajit P. Paranjpe ,  Sanjay Gopinath ,  Thomas R. Omstead ,  Randhir S. Bubber ,  Ming Mao

Inventor： Ajit P. Paranjpe ,  Sanjay Gopinath ,  Thomas R. Omstead ,  Randhir S. Bubber ,  Ming Mao

IPC: H01L21/8242 ,  H01L21/336 ,  C30B23/00 ,  C30B25/00

CPC classification number: H01L21/0228 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y40/00 ,  C23C16/403 ,  C23C16/45527 ,  C23C16/56 ,  G11B5/3109 ,  G11B5/3163 ,  G11B5/3909 ,  G11B5/3967 ,  G11B2005/3996 ,  H01F41/307 ,  H01L21/02178 ,  H01L21/02205 ,  H01L21/0234 ,  H01L21/3162 ,  Y10T428/24843

Abstract: An atomic layer deposition (ALD) process deposits thin films for microelectronic structures, such as advanced gap and tunnel junction applications, by plasma annealing at varying film thicknesses to obtain desired intrinsic film stress and breakdown film strength. The primary advantage of the ALD process is the near 100% step coverage with properties that are uniform along sidewalls. The process provides smooth (Ra˜2 Å), pure (impurities

Abstract translation: 原子层沉积（ALD）工艺通过等离子体退火在不同的膜厚度上沉积微电子结构的薄膜，例如先进的间隙和隧道结应用，以获得所需的本征膜应力和击穿膜强度。 ALD工艺的主要优点是接近100％的阶梯覆盖，其侧壁均匀分布。 该方法提供了具有改进的击穿强度（9-10MV / cm）的平滑的（R a aα2），纯的（杂质<1 AT。％），ALO x ）具有商业上可行的吞吐量。

公开(公告)号：US07017398B2

公开(公告)日：2006-03-28

申请号：US10966619

申请日：2004-10-15

Applicant: Dennis M. Adderton ,  Stephen C. Minne

Inventor： Dennis M. Adderton ,  Stephen C. Minne

IPC: G01N13/16 ,  G01B5/28

CPC classification number: G01Q60/34 ,  G01Q10/045 ,  G01Q10/065 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/875 ,  Y10S977/881

Abstract: An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample in either ambient air or fluid includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value. The AFM includes a first feedback circuit nested within a second feedback circuit, wherein the first feedback circuit generates a cantilever control signal in response to vertical displacement of the self-actuated cantilever during a scanning operation, and the second feedback circuit is responsive to the cantilever control signal to generate a position control signal. A Z position actuator is also included within the second feedback circuit and is responsive to the position control signal to position the sample. In operation, preferably, the cantilever control signal alone is indicative of the topography of the sample surface. In a further embodiment, the first feedback circuit includes an active damping circuit for modifying the quality factor (“Q”) of the cantilever resonance to optimize the bandwidth of the cantilever response.

Abstract translation: AFM将AFM Z位置执行器和自动Z位置悬臂（可循环模式和接触模式）两者兼容，并配有适当的嵌套反馈控制电路，实现高速成像和精确的Z位置测量。 用于在环境空气或流体中分析样品表面的AFM的优选实施例包括具有与其集成的Z定位元件的自动致动悬臂和振荡器，该振荡器以大致等于 自激式悬臂的谐振频率和大致等于设定值的振荡幅度。 AFM包括嵌套在第二反馈电路内的第一反馈电路，其中第一反馈电路在扫描操作期间响应于自致动悬臂的垂直位移而产生悬臂控制信号，并且第二反馈电路响应于悬臂 控制信号以产生位置控制信号。 Z位置致动器还包括在第二反馈电路内，并且响应于位置控制信号来定位样品。 在操作中，优选地，悬臂控制信号单独指示样品表面的形貌。 在另一实施例中，第一反馈电路包括用于修改悬臂谐振的质量因子（“Q”）的主动阻尼电路，以优化悬臂响应的带宽。

公开(公告)号：US07016050B2

公开(公告)日：2006-03-21

申请号：US10426349

申请日：2003-04-30

Applicant: Colin T. Farrell ,  Der-Shen Wan

Inventor： Colin T. Farrell ,  Der-Shen Wan

IPC: G01B9/02

CPC classification number: G02B21/26 ,  G01B9/04 ,  G01B11/26 ,  G02B27/30

Abstract: The movable point source aperture used in conventional autocollimators for measuring tilt in a microscope's test sample is replaced by a fixed laser diode. The diode is turned on only for the duration of the tilt measurement, when light is delivered to the optical system of the microscope without obstruction of the normal illumination path. Similarly, the two switchable optical systems conventionally used in the metrology and tilt-measurement legs of the microscope are replaced by two permanently positioned independent imaging systems. Such optical decoupling of the two types of measurement eliminates the need for switching lens systems, which enables shorter measurement cycles, reduces mechanical vibrations, and simplifies hardware control mechanisms.

Abstract translation: 用于测量显微镜测试样品中的倾斜的常规自动准直仪中使用的可移动点光源孔被固定的激光二极管代替。 当光线被传送到显微镜的光学系统而不阻碍正常的照明路径时，二极管仅在倾斜测量的持续时间内被接通。 类似地，在显微镜的计量和倾斜测量腿中常规使用的两个可切换光学系统由两个永久定位的独立成像系统代替。 这种类型的测量的这种光学解耦消除了对切换透镜系统的需要，这使得能够更短的测量周期，减少机械振动，并且简化了硬件控制机制。

公开(公告)号：US07001785B1

公开(公告)日：2006-02-21

申请号：US11006478

申请日：2004-12-06

Applicant: Dong Chen

Inventor： Dong Chen

IPC: H01L21/66

CPC classification number: G01R27/2658

Abstract: A capacitance probe for thin dielectric film characterization provides a highly sensitive capacitance measurement method and reduces the contact area needed to obtain such a measurement. Preferably, the capacitance probe is connected to a measurement system by a transmission line and comprises a center conductive tip and RLC components between the center conductor and the ground of the transmission line. When the probe tip is in contact with a sample, an MIS or MIM structure is formed, with the RLC components and the capacitance of the MIS or MIM structure forming a resonant circuit. By sending a driving signal to the probe and measuring the reflected signal from the probe through the transmission line, the resonant characteristic of the resonant circuit can be obtained. The capacitance of the MIS or MIM structure is obtainable from the resonant characteristics and the dielectric film thickness or other dielectric properties are also extractable.

Abstract translation: 用于薄介电膜表征的电容探针提供了高灵敏度的电容测量方法，并减少了获得这种测量所需的接触面积。 优选地，电容探针通过传输线连接到测量系统，并且在中心导体和传输线的接地之间包括中心导电尖端和RLC组件。 当探针尖端与样品接触时，形成MIS或MIM结构，其中RLC组分和MIS或MIM结构的电容形成谐振电路。 通过向探头发送驱动信号并通过传输线测量来自探针的反射信号，可以获得谐振电路的谐振特性。 MIS或MIM结构的电容可以从谐振特性获得，并且介电膜厚度或其它介电性质也是可提取的。

公开(公告)号：US06983547B2

公开(公告)日：2006-01-10

申请号：US10102242

申请日：2002-03-19

Applicant: Timothy J. Fleming ,  Jeffrey J. Hohn ,  Christopher R. Holloman ,  Steven E. Wheeler ,  Charles N. Miller

Inventor： Timothy J. Fleming ,  Jeffrey J. Hohn ,  Christopher R. Holloman ,  Steven E. Wheeler ,  Charles N. Miller

IPC: B23Q3/00 ,  G01B7/30

CPC classification number: F16C11/12

Abstract: A goniometer includes a base, a compound member supported by the base, a light-directing element operably mounted on the compound member, optically connected to a coherent light source, and disposed toward an optical filter, a first actuator disposed along a first axis and operably coupled to the base for translating the light-directing element along a first arcuate path disposed in a first plane; and a second actuator disposed along a second axis and operably coupled to the compound member for translating the light-directing element along a second arcuate path disposed in a second plane, wherein the first plane is orthogonal to the second plane, and wherein the first and second axes are co-planar, for directing coherent light at an angle that is normal to the optical filter.

公开(公告)号：US06928863B2

公开(公告)日：2005-08-16

申请号：US10624246

申请日：2003-07-22

Applicant: James R. Massie

Inventor： James R. Massie

IPC: G01B11/00 ,  G01B5/28 ,  G01B21/00 ,  G01B21/30 ,  G01D5/26 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/06 ,  G01Q30/20 ,  G01Q60/00 ,  G01Q70/02 ,  G01Q90/00 ,  G01N13/16

CPC classification number: G01Q70/02 ,  G01B5/28 ,  G01D5/26 ,  G01Q10/04 ,  Y10S977/87 ,  Y10S977/872

Abstract: A metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The linkage supports a sample holder and transmits appropriate displacements generated by the actuator thereof The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the reference structure and is located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions.

Abstract translation: 计量装置包括具有可在第一和第二正交方向上可控地移动的第一致动器级的致动器和与第一致动器台相邻的第二致动器级，以在与第一和第二正交方向正交的第三方向上可控地移动。 联接器联接到第二致动器台和固定到参考结构的第二端的多杆连杆组件。 联动装置支撑样品架并传递由其致动器产生的适当的位移。第二致动器级和联接器以第三正交方向移动连杆，使得连杆与第一和第二方向上的任何第二致动器台运动基本上隔离 。 目的是固定在参考结构上，并且位于光源和位置传感器之间。 位置传感器测量第一和第二方向上的第一致动器台运动。

公开(公告)号：US06870164B1

公开(公告)日：2005-03-22

申请号：US09689476

申请日：2000-10-12

Applicant: David A. Baldwin ,  Boris Ciorneiu ,  Harold R. Kaufman

Inventor： David A. Baldwin ,  Boris Ciorneiu ,  Harold R. Kaufman

IPC: F03H1/00 ,  H01J27/00

CPC classification number: H01J27/14

Abstract: In accordance with one specific embodiment of the present invention, a Hall-current ion source is operated in a pulsed mode where the pulse duration is short compared to the time for discharge fluctuations to develop. For a reduced loss of neutral gas, the time between pulses should be less than, or about equal to, the fill time for the ionizable gas in the discharge volume of the Hall-current ion source.

Abstract translation: 根据本发明的一个具体实施例，霍尔电流离子源以脉冲模式运行，其中脉冲持续时间比放电波动发展的时间短。 为了减少中性气体的损失，脉冲之间的时间应该小于或等于霍尔电流离子源的放电容积中可电离气体的填充时间。

公开(公告)号：US06864486B2

公开(公告)日：2005-03-08

申请号：US10221545

申请日：2002-02-11

Applicant: Valery V. Alekseev ,  Vsevolod V. Zelenkov ,  Mark M. Krivoruchko ,  John E. Keem

Inventor： Valery V. Alekseev ,  Vsevolod V. Zelenkov ,  Mark M. Krivoruchko ,  John E. Keem

IPC: H05H1/54 ,  F03H1/00 ,  H01J27/02 ,  H01J27/18 ,  H05H1/92 ,  H01J17/04 ,  H01J27/00 ,  H01L21/306

CPC classification number: H01J27/143

Abstract: A closed loop exit hole is formed in a magnetically permeable end wall (2) of an enclosure (1) of a closed electron drift ion source. Parts of this end wall separated by the exit hole serve as pole pieces (7 and 8) of the magnetic system and define the first pole gap. The magnetic system includes pole pieces (9 and 10), which define the second pole gap made in the form of a closed loop exit hole and arranged along the direction of ion emission. Magnetomotive force sources (5 and 6) are located in space between two groups of magnetic terminals. The ratio of width of each pole gap and distance between pole pieces of the first (7 and 8) and second (9 and 10) magnetic gaps along the direction of ion emission is not less than 0.05.The invention allows the intensity of the generated ion beam and the energy of ions to be increased, and this is provided by the homogeneous distribution of ion current density across the ion beam section.

Abstract translation: 在闭合电子漂移离子源的封闭体（1）的导磁性端壁（2）中形成闭环出口孔。 由出口孔分隔的端壁的部分用作磁性系统的极片（7和8）并限定第一极间隙。 磁性系统包括极片（9和10），其限定以闭环出口孔形式并沿着离子发射方向布置的第二极间隙。 磁动势源（5和6）位于两组磁性端子之间的空间中。 第一（7和8）和第二（9和10）磁隙的极点之间的距离与离子发射方向之间的每个磁极间隙的宽度与极片之间的距离比不小于0.05。本发明允许产生的 离子束和离子的能量增加，这是通过离子束截面上的离子电流密度的均匀分布来提供的。

公开(公告)号：US06862921B2

公开(公告)日：2005-03-08

申请号：US09904634

申请日：2001-07-13

Applicant: Ami Chand ,  Kevin J. Kjoller ,  Kenneth L. Babcock ,  Michael K. Harris

Inventor： Ami Chand ,  Kevin J. Kjoller ,  Kenneth L. Babcock ,  Michael K. Harris

IPC: G01B11/00 ,  G01B5/28 ,  G01B21/30 ,  G01D5/26 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q30/20 ,  G01Q60/00 ,  G01Q70/02 ,  G01Q70/08 ,  G01Q70/16 ,  G01Q80/00 ,  G01Q90/00 ,  G01N13/10 ,  G12B21/21

CPC classification number: G01Q70/16 ,  G01B5/28 ,  G01D5/26 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q70/02 ,  G01Q70/08 ,  G01Q80/00

Abstract: A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.

公开(公告)号：US20050034979A1

公开(公告)日：2005-02-17

申请号：US10915745

申请日：2004-08-11

Applicant: Boris Druz ,  Viktor Kanarov ,  Hariharakeshave Hegde ,  Alan Hayes ,  Emmanuel Lakios

Inventor： Boris Druz ,  Viktor Kanarov ,  Hariharakeshave Hegde ,  Alan Hayes ,  Emmanuel Lakios

IPC: C23C14/00 ,  C23C14/04 ,  C23C14/22 ,  C23C16/00

CPC classification number: C23C14/044 ,  C23C14/221

Abstract: Method and apparatus for processing a substrate with a beam of energetic particles. The beam is directed from a source through a rectangular aperture in a shield positioned between the source and substrate to a treatment zone in a plane of substrate movement. Features on the substrate are aligned parallel to a major dimension of the rectangular aperture and the substrate is moved orthogonally to the aperture's major dimension. The beam impinges the substrate through the aperture during movement. The substrate may be periodically rotated by approximately 180° to reorient the features relative to the major dimension of the rectangular aperture. The resulting treatment profile is symmetrical about the sides of the features oriented toward the major dimension of the rectangular aperture.

Abstract translation: 用高能粒子束处理衬底的方法和装置。 光束从源极通过定位在源极和衬底之间的屏蔽件中的矩形孔引导到衬底移动平面中的处理区域。 衬底上的特征与矩形孔的主要尺寸平行排列，并且衬底与孔的主要尺寸正交地移动。 光束在运动过程中通过光圈撞击基板。 衬底可以周期性地旋转大约180°以重新定向相对于矩形孔的主要尺寸的特征。 所得到的处理轮廓关于朝向矩形孔的主要尺寸的特征的侧面对称。