Semiconductor device equipped with thin-film circuit elements
    61.
    发明申请
    Semiconductor device equipped with thin-film circuit elements 审中-公开
    配有薄膜电路元件的半导体器件

    公开(公告)号:US20080203526A1

    公开(公告)日:2008-08-28

    申请号:US12072210

    申请日:2008-02-25

    申请人: Ichiro Mihara

    发明人: Ichiro Mihara

    IPC分类号: H01L27/06

    摘要: A plurality of wirings, column-shaped electrodes, sealing films, and soldering balls, are provided on a third upper-layer insulating film formed on a silicon substrate. A spirally configured thin-film inductive element is disposed beneath the bottom surface of a ground insulating film formed beneath the silicon substrate. The inner and outer end portions of the thin-film inductive element are respectively connected to the wirings via a vertical conductor disposed in the silicon substrate. In this case, it is not required to secure a certain area otherwise needed for the formation of the thin-film inductive element over the surface of the third upper-layer insulating film that accommodates the wirings. Hence, even when the thin-film inductive element has been provided, it is possible to evade a feasibility to incur restraint on the distribution of the wirings formed over the surface of the third upper-layer insulating film.

    摘要翻译: 多个布线,柱状电极,密封膜和焊球设置在形成于硅基板上的第三上层绝缘膜上。 螺旋构造的薄膜感应元件设置在形成在硅衬底下方的接地绝缘膜的底表面下方。 薄膜电感元件的内端部和外端部分别经由布置在硅衬底中的垂直导体连接到布线。 在这种情况下,不需要确保在容纳布线的第三上层绝缘膜的表面上形成薄膜感应元件所需的某些区域。 因此,即使设置了薄膜感应元件,也可以避免对在第三上层绝缘膜的表面上形成的布线的分布产生约束的可行性。