公开(公告)号：US20120087386A1

公开(公告)日：2012-04-12

申请号：US12639339

申请日：2009-12-16

申请人： Daniel J.W. Brown ,  William N. Partlo ,  Richard L. Sandstrom

发明人： Daniel J.W. Brown ,  William N. Partlo ,  Richard L. Sandstrom

IPC分类号： H01S3/22 ,  H01S3/09

CPC分类号： G03F7/70341 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/7055

摘要： An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½X kHz on output pulses from the second seed laser.

摘要翻译： 一种装置/方法可以包括线窄的脉冲光刻激光光源，其可以包括：提供激光系统的种子脉冲，其可以包括：以X kHz的速率产生种子脉冲的第一脉冲种子激光器; 第二脉冲种子激光器以XkHz的速率产生种子脉冲; 放大系统，其可以包括：第一放大器增益系统，其可以包括第一和第二脉冲气体放电放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第一个的输出脉冲上以1/2X kHz工作 种子激光 第二放大器增益系统，其可以包括第一和第二脉冲放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第二种子激光器的输出脉冲上以1/2XkHz工作。

公开(公告)号：US08144740B1

公开(公告)日：2012-03-27

申请号：US12639339

申请日：2009-12-16

申请人： Daniel J. W. Brown ,  William N. Partlo ,  Richard L. Sandstrom

发明人： Daniel J. W. Brown ,  William N. Partlo ,  Richard L. Sandstrom

IPC分类号： H01S3/13

CPC分类号： G03F7/70341 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/7055

摘要： An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½X kHz on output pulses from the second seed laser.

摘要翻译： 一种装置/方法可以包括线窄的脉冲光刻激光光源，其可以包括：提供激光系统的种子脉冲，其可以包括：以X kHz的速率产生种子脉冲的第一脉冲种子激光器; 第二脉冲种子激光器以XkHz的速率产生种子脉冲; 放大系统，其可以包括：第一放大器增益系统，其可以包括第一和第二脉冲气体放电放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第一个的输出脉冲上以1/2X kHz工作 种子激光 第二放大器增益系统，其可以包括第一和第二脉冲放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第二种子激光器的输出脉冲上以1/2X kHz工作。

公开(公告)号：US07920616B2

公开(公告)日：2011-04-05

申请号：US11980172

申请日：2007-10-30

申请人： Daniel J. W. Brown ,  William N. Partlo ,  Richard L. Sandstrom

发明人： Daniel J. W. Brown ,  William N. Partlo ,  Richard L. Sandstrom

IPC分类号： H01S3/22

CPC分类号： H01S3/2383 ,  G03F7/70583 ,  H01S3/0057 ,  H01S3/08036 ,  H01S3/08059 ,  H01S3/10092 ,  H01S3/225 ,  H01S3/2325

摘要： A method/apparatus may comprise a laser light source which may comprise a solid state seed laser system producing a seed laser output having a nominal center wavelength at a pulse repetition rate; a first and a second gas discharge laser amplifier gain medium each operating at a pulse repetition rate less than that of the seed laser system; a beam divider providing each of the respective first and second amplifier gain mediums with seed laser output pulses; a frequency converter modifying the nominal center wavelength of the output of the seed laser to essentially the nominal center wavelength of the amplifier gain medium; a beam combiner combining the outputs of the respective amplifier gain mediums to provide a light source output having the pulse repetition rate of the seed laser; a coherence buster operating on either or both of the output of the seed laser or amplifier gain mediums.

摘要翻译： 方法/装置可以包括激光光源，其可以包括固态种子激光器系统，其产生具有脉冲重复率的标称中心波长的种子激光器输出; 第一和第二气体放电激光放大器增益介质，每个以比种子激光器系统的脉冲重复频率工作; 一个分束器，为每个相应的第一和第二放大器增益介质提供种子激光输出脉冲; 变频器将种子激光器的输出的标称中心波长修改为基本上放大器增益介质的标称中心波长; 组合各个放大器增益介质的输出以提供具有种子激光器的脉冲重复率的光源输出的光束组合器; 在种子激光器或放大器增益介质的输出中的任一个或两者上工作的相干致动器。

公开(公告)号：US20090296758A1

公开(公告)日：2009-12-03

申请号：US11982217

申请日：2007-10-31

申请人： Daniel J.W. Brown ,  William N. Partlo ,  Richard L. Sandstrom

发明人： Daniel J.W. Brown ,  William N. Partlo ,  Richard L. Sandstrom

IPC分类号： H01S3/10 ,  H01S3/13

CPC分类号： G03F7/7055 ,  H01S3/225 ,  H01S3/2308

摘要： An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the second seed laser.

摘要翻译： 一种装置/方法可以包括线窄的脉冲光刻激光光源，其可以包括：提供激光系统的种子脉冲，其可以包括：以X kHz的速率产生种子脉冲的第一脉冲种子激光器; 第二脉冲种子激光器以XkHz的速率产生种子脉冲; 放大系统，其可以包括：第一放大器增益系统，其可以包括第一和第二脉冲气体放电放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自 第一种子激光器 第二放大器增益系统，其可以包括第一和第二脉冲放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第二种子激光器的输出脉冲上以1/2 X kHz工作。

公开(公告)号：US07346093B2

公开(公告)日：2008-03-18

申请号：US10808157

申请日：2004-03-23

申请人： Richard L. Sandstrom ,  John Martin Algots ,  Joshua C. Brown ,  Raymond F. Cybulski ,  John Dunlop ,  James K. Howey ,  Richard G. Morton ,  Xiaojiang Pan ,  William N. Partlo ,  Firas F. Putris ,  Tom A. Watson ,  Thomas A. Yager

发明人： Richard L. Sandstrom ,  John Martin Algots ,  Joshua C. Brown ,  Raymond F. Cybulski ,  John Dunlop ,  James K. Howey ,  Richard G. Morton ,  Xiaojiang Pan ,  William N. Partlo ,  Firas F. Putris ,  Tom A. Watson ,  Thomas A. Yager

IPC分类号： H01S3/08 ,  H01S3/22

CPC分类号： H01S3/02 ,  G01J1/429 ,  G01J9/02 ,  G03F7/70025 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0401 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0812 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

摘要： A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount fromed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may pre-stress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.

摘要翻译： 公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其具有快速可角度定位的反射镜，其具有镜安装框架，具有与安装框架系数不同的系数的反射光学元件，至少一个弯曲安装座 从柔性的安装框架开始，挠曲臂将挠性件附接到安装框架。 该装置可以包括具有细长杆的挠曲力机构。 力机构可以预应力挠曲。 镜子可以是包括在基板上形成有金属层的基板的光栅，以及形成在反射金属层上的由二氧化硅形成的保护涂层。 光栅可以使用电磁感应元件或磁敏元件进行主动调谐。 可以通过暴露于深紫外线辐射的氢气清除系统来去除反射层中金属的氧化物。

公开(公告)号：US06330261B1

公开(公告)日：2001-12-11

申请号：US09271041

申请日：1999-03-17

申请人： Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

发明人： Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

IPC分类号： H01S300

CPC分类号： G03F7/70025 ,  C23C14/0694 ,  C23C14/16 ,  C23C14/225 ,  C23C14/24 ,  G01J9/00 ,  G02B1/105 ,  G02B5/1852 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/036 ,  H01S3/08009 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/09713 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H03K3/57 ,  H03K17/80

摘要： The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber, a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

摘要翻译： 本发明提供了一种可靠的模块化生产质量准分子激光器，其能够产生1000Hz至2000Hz范围内的10mJ激光脉冲，全宽度为一半，最大带宽为约0.6μm或更小。 可更换模块包括激光室，由三个模块组成的脉冲电源系统; 光学谐振器，包括线窄模块和输出耦合器模块; 波形计模块，电气控制模块，冷却水模块和气体控制模块。在脉冲功率单元中已经提供了重要的改进，以产生更快的上升时间和改进的脉冲能量控制。 这些改进包括增加容量的高压电源，具有用于精确调整电压的电压降低电路，改进的换向模块，其从由高压电源充电的电容器产生高电压脉冲，并用脉冲电压放大23次 具有由单个四段不锈钢棒组成的次级绕组的非常快速的电压互感器。 用于压缩头可饱和电感器的新颖设计大大减少了所需的变压器油的数量，并且几乎消除了过去漏油的可能性。

公开(公告)号：US6018537A

公开(公告)日：2000-01-25

申请号：US273446

申请日：1999-03-19

申请人： Thomas Hofmann ,  Jean-Marc Hueber ,  Palash P. Das ,  Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

发明人： Thomas Hofmann ,  Jean-Marc Hueber ,  Palash P. Das ,  Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

IPC分类号： G01J9/00 ,  G03F7/20 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/08 ,  H01S3/0971 ,  H01S3/134 ,  H01S3/223 ,  H01S3/225 ,  H01S3/10

CPC分类号： G03F7/70025 ,  G01J9/00 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/134 ,  H01S3/223 ,  H01S3/225 ,  H01S3/08009 ,  H01S3/09713 ,  H01S3/2251 ,  H01S3/2256

摘要： The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

摘要翻译： 本发明提供了可产生1000Hz至2000Hz或更大范围内的10mJ激光脉冲的可靠的模块化生产质量准分子激光器。 可更换模块包括激光室; 由三个模块组成的脉冲电源系统; 光学谐振器，包括线窄模块和输出耦合器模块; 波形计模块，电气控制模块，冷却水模块和气体控制模块。 在脉冲功率单元中已经提供了重要的改进，以产生更快的上升时间和改进的脉冲能量控制。 这些改进包括增加容量的高压电源，具有用于精确电压调整的电压降低电路，改进的换向模块，其从由高压电源充电的电容器产生高电压脉冲，并用脉冲电压放大23次 具有由单个四段不锈钢棒组成的次级绕组的非常快速的电压互感器。 用于压缩头可饱和电感器的新颖设计大大减少了所需的变压器油的数量，并且几乎消除了过去漏油的可能性。

公开(公告)号：US5949806A

公开(公告)日：1999-09-07

申请号：US100311

申请日：1998-06-19

申请人： Richard M. Ness ,  William N. Partlo ,  Richard L. Sandstrom

发明人： Richard M. Ness ,  William N. Partlo ,  Richard L. Sandstrom

IPC分类号： H03K3/53 ,  H01S3/00

CPC分类号： H03K3/53

摘要： A low level current travels from a source through the high voltage cable from the remote end to the local end of the cable in a pulse power circuit. The current is detected, and a signal is generated by a bias sensing circuit. If the low level current is not positively detected, no pulse is allowed to occur, preventing accidental damage and high voltage hazard. In some embodiments, the current is coupled to ground at the local end through an isolation inductor, commonly a secondary winding of a high voltage pulse transformer. The low level current then passes through a shunt resistor from ground to an input terminal of the source, thus completing the circuit and generating a voltage between the source input terminal and ground that confirms continuity of the circuit through the high voltage cable.

摘要翻译： 低电平电流在脉冲电源电路中从源极通过高压电缆从远端到电缆的本端行进。 检测电流，并且由偏置感测电路产生信号。 如果没有检测到低电平电流，则不允许发生脉冲，防止意外损坏和高电压危险。 在一些实施例中，电流通过隔离电感器（通常是高压脉冲变压器的次级绕组）在本地端接地。 然后，低电平电流通过分流电阻器从地源到源极的输入端子，从而完成电路并且在源极输入端子和地之间产生电压，其通过高压电缆确认电路的连续性。

公开(公告)号：USRE42588E1

公开(公告)日：2011-08-02

申请号：US11352522

申请日：2006-02-10

申请人： John P. Fallon ,  Richard L. Sandstrom ,  William N. Partlo ,  Alexander I. Ershov ,  Toshihiko Ishihara ,  John Meisner ,  Richard M. Ness ,  Paul C. Melcher ,  John A. Rule ,  Robert N. Jacques

发明人： John P. Fallon ,  Richard L. Sandstrom ,  William N. Partlo ,  Alexander I. Ershov ,  Toshihiko Ishihara ,  John Meisner ,  Richard M. Ness ,  Paul C. Melcher ,  John A. Rule ,  Robert N. Jacques

IPC分类号： H01S3/22

CPC分类号： H01S3/2333 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0943 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2366

摘要： The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Feedback timing control techniques are provided for controlling the relative timing of the discharges in the two chambers with an accuracy in the range of about 2 to 5 billionths of a second even in burst mode operation. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality.

摘要翻译： 本发明提供了一种用于模块化高重复率两放电室紫外线气体放电激光器的控制系统。 在优选实施例中，激光器是具有主振荡器的生产线机器，该主振荡器产生在第二放电室中放大的非常窄的带状晶体束。 提供了反馈定时控制技术，即使在脉冲串模式操作中，也可以精确地控制两个室中的放电的相对定时，其精确度在大约2至50亿分之一秒的范围内。 该MOPA系统能够以大大提高的光束质量将输出脉冲能量大约增加到相当的单室激光器系统的两倍。

公开(公告)号：US20110122901A1

公开(公告)日：2011-05-26

申请号：US13020330

申请日：2011-02-03

申请人： Richard L. Sandstrom ,  William N. Partlo ,  Daniel J.W. Brown

发明人： Richard L. Sandstrom ,  William N. Partlo ,  Daniel J.W. Brown

IPC分类号： H01S3/10

CPC分类号： H01S3/08009 ,  H01S3/08031 ,  H01S3/08059 ,  H01S3/097 ,  H01S3/1055

摘要： A method of line narrowing for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses includes selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on a dispersive surface of a dispersive wavelength selection optic; changing the curvature of the dispersive surface in a first manner that includes imparting a catenary curvature to the dispersive surface; and changing the curvature of the dispersive surface in a second manner that includes imparting a cylindrical curvature to the dispersive surface.

摘要翻译： 窄带DUV高功率高重复率气体放电激光器产生输出激光脉冲束脉冲的脉冲串的方法包括为至少部分地由入射角确定的每个脉冲选择至少一个中心波长， 所述激光束在所述分散波长选择光学器件的分散表面上包含相应的脉冲; 以第一种方式改变分散表面的曲率，包括向分散表面施加悬链曲率; 并且以第二种方式改变分散表面的曲率，包括向分散表面施加圆柱形曲率。