公开(公告)号：US5302238A

公开(公告)日：1994-04-12

申请号：US883074

申请日：1992-05-15

Applicant: Fred L. Roe ,  Kevin Tjaden

Inventor： Fred L. Roe ,  Kevin Tjaden

IPC: H01J9/02 ,  H01L21/00

CPC classification number: H01J9/025 ,  H01J2201/30403

Abstract: An in situ plasma dry etching process for the formation of automatically sharp cold cathode emitter tips for use in field emission displays in which i) a mask layer is deposited on a substrate, ii) a photoresist layer is patterned superjacent the mask layer at the sites where the emitter tips are to be formed, iii) the mask is selectively removed by plasma etching, iv) after which the substrate is etched in the same plasma reacting chamber, thereby creating sharp electron emitter tips.

Abstract translation: 用于形成用于场发射显示器的自动尖锐冷阴极发射器尖端的原位等离子体干蚀刻工艺，其中i）掩模层沉积在衬底上，ii）将光致抗蚀剂层图案化在位于掩模层的位置 其中将形成发射极尖端，iii）通过等离子体蚀刻选择性地去除掩模，iv）然后在相同的等离子体反应室中蚀刻衬底，从而产生尖锐的电子发射器尖端。

公开(公告)号：US5019003A

公开(公告)日：1991-05-28

申请号：US414505

申请日：1989-09-29

Applicant: Marc K. Chason

Inventor： Marc K. Chason

IPC: H01J1/304 ,  H01J9/02 ,  H01J29/04 ,  H01J31/12

CPC classification number: H01J9/025 ,  H01J1/3042 ,  H01J2201/30403

Abstract: A field emitting device having a plurality of preformed emitter objects. The emitter objects include sharp geometric discontinuities, and a significant number of these geometric discontinuities are oriented in a way that supports desired field emission activity. Field emission devices built with such emitters can be utilized to provide a flat display screen.

Abstract translation: 一种场发射器件，具有多个预先形成的发射器物体。 发射器对象包括尖锐的几何不连续性，并且大量的这些几何不连续性以支持期望的场发射活动的方式定向。 用这种发射器构建的场发射装置可用于提供平面显示屏。

公开(公告)号：US08298034B2

公开(公告)日：2012-10-30

申请号：US12809687

申请日：2008-12-19

Applicant: Lap-Tak Andrew Cheng

Inventor： Lap-Tak Andrew Cheng

IPC: H01J9/12

CPC classification number: H01J1/304 ,  H01J9/025 ,  H01J2201/30403 ,  H05K3/02 ,  H05K3/4053 ,  H05K2201/09827 ,  H05K2201/09981 ,  H05K2203/0508 ,  H05K2203/0783 ,  H05K2203/308 ,  Y10T428/24339 ,  Y10T428/24802

Abstract: This invention relates to a method for the fabrication of electrical and electronic devices using a photoresist deposited in pre-existing through holes in a device structure and a thick film paste, and to the devices made by such method. The method allows thick film paste deposits in the corners of the holes. This invention also relates to devices made with thick film pastes that are patterned using a diffusion layer made from residual photoresist deposits in a hole.

Abstract translation: 本发明涉及使用沉积在器件结构中的预先存在的通孔中的光致抗蚀剂和厚膜糊来制造电气和电子器件的方法以及由这种方法制造的器件。 该方法允许厚膜浆料沉积在孔的角部。 本发明还涉及使用由在孔中残留的光致抗蚀剂沉积物制成的扩散层进行图案化的厚膜糊制成的装置。

公开(公告)号：US20100119825A1

公开(公告)日：2010-05-13

申请号：US12447836

申请日：2007-10-30

Applicant: Barry Chin Li Cheung ,  Joseph Reese Brewer ,  Nirmalendu Deo

Inventor： Barry Chin Li Cheung ,  Joseph Reese Brewer ,  Nirmalendu Deo

IPC: H01J1/16 ,  C01B35/04 ,  C23C16/06 ,  H01J1/14

CPC classification number: H01J1/304 ,  B82Y30/00 ,  B82Y40/00 ,  C01B35/04 ,  H01J9/025 ,  H01J2201/30403 ,  Y10T428/2913 ,  Y10T428/2916 ,  Y10T428/2973 ,  Y10T428/2976 ,  Y10T428/298

Abstract: The present invention comprises nano obelisks and nanostructures and methods and processes for same. The nano obelisks of the present invention are advantageous structures for use as electron source emitters. For example, the ultra sharp obelisks can be used as an emitter source to generate highly coherent and high energy electrons with high current.

Abstract translation: 本发明包括纳米方尖碑和纳米结构及其方法和方法。 本发明的纳米方尖碑是用作电子源发射体的有利结构。 例如，超尖锐方尖碑可以用作发射源，以产生具有高电流的高度相干和高能量的电子。

公开(公告)号：US20080074031A1

公开(公告)日：2008-03-27

申请号：US11903772

申请日：2007-09-24

Applicant: Shuo-Ting Yan

Inventor： Shuo-Ting Yan

IPC: H01J63/04 ,  H01J9/00

CPC classification number: H01J9/025 ,  H01J1/3044 ,  H01J31/127 ,  H01J2201/30403

Abstract: An exemplary field emission display includes a first substrate (21) and a second substrate (22) being at opposite sides of the field emission display, a metal layer (210) disposed on an inner surface of the first substrate, a transparent electrode (221) disposed on an inner surface of the second substrate and spaced apart from the metal layer, a fluorescent layer (223) disposed on the transparent electrode, and a poly-silicon layer (212) disposed on the metal layer. The poly-silicon layer defines a plurality of tips (218) pointing toward the fluorescent layer. A method for manufacturing a field emission display is also provided.

Abstract translation: 示例性场发射显示器包括位于场发射显示器的相对侧的第一衬底（21）和第二衬底（22），设置在第一衬底的内表面上的金属层（210），透明电极（221） ），设置在所述第二基板的内表面上并与所述金属层隔开，设置在所述透明电极上的荧光层（223）和设置在所述金属层上的多晶硅层（212）。 多晶硅层限定指向荧光层的多个尖端（218）。 还提供了一种用于制造场致发射显示器的方法。

公开(公告)号：US20070052339A1

公开(公告)日：2007-03-08

申请号：US11591067

申请日：2006-11-01

Applicant: David Cathey

Inventor： David Cathey

IPC: H01J9/02 ,  H01J1/02

CPC classification number: H01J1/3044 ,  H01J1/3042 ,  H01J9/025 ,  H01J2201/30403 ,  Y10S148/116 ,  Y10S148/172 ,  Y10S438/978

Abstract: Electron emitters and a method of fabricating emitters are disclosed, having a concentration gradient of impurities, such that the highest concentration of impurities is at the apex of the emitter tips and decreases toward the base of the emitter tips. The method comprises the steps of doping, patterning, etching, and oxidizing the substrate, thereby forming the emitter tips having impurity gradients.

Abstract translation: 公开了电子发射器和制造发射体的方法，其具有杂质的浓度梯度，使得最高浓度的杂质位于发射极尖端的顶点处并朝向发射极尖端的基极减小。 该方法包括掺杂，图案化，蚀刻和氧化衬底的步骤，从而形成具有杂质梯度的发射极尖端。

公开(公告)号：US07112920B2

公开(公告)日：2006-09-26

申请号：US10827813

申请日：2004-04-20

Applicant: Makoto Yamamoto ,  Keisuke Koga ,  Akinori Shiota ,  Seigo Kanemaru ,  Masayoshi Nagao

Inventor： Makoto Yamamoto ,  Keisuke Koga ,  Akinori Shiota ,  Seigo Kanemaru ,  Masayoshi Nagao

IPC: H01J63/02 ,  H01J1/304 ,  H01J1/46

CPC classification number: H01J1/3044 ,  H01J31/127 ,  H01J2201/30403

Abstract: A field emission electron source capable of achieving large current density is provided at low cost with good productivity. An insulating layer is formed on a substrate and has one or more openings; and an extraction electrode is formed on the insulating layer. In one or more of the openings, a plurality of emitters, each of which emits an electron by an electric field from the extraction electrode, are formed on the substrate.

Abstract translation: 以低成本提供能够实现大电流密度的场致发射电子源，生产率高。 绝缘层形成在基板上并具有一个或多个开口; 并且在绝缘层上形成引出电极。 在一个或多个开口中，在基板上形成多个发射体，每个发射体通过来自引出电极的电场发射电子。

公开(公告)号：US20040150322A1

公开(公告)日：2004-08-05

申请号：US10763552

申请日：2004-01-23

Applicant: Cabot Microelectronics Corporation

Inventor： Heinz H. Busta

IPC: H01J009/00 ,  H01J009/24 ,  H01J001/62

CPC classification number: H01J1/3042 ,  H01J1/3046 ,  H01J9/025 ,  H01J35/065 ,  H01J2201/30403 ,  H01J2201/30423

Abstract: A method of operating and process for fabricating an electron source. A conductive rod is covered by an insulating layer, by dipping the rod in an insulation solution, for example. The rod is then covered by a field emitter material to form a layered conductive rod. The rod may also be covered by a second insulating material. Next, the materials are removed from the end of the rod and the insulating layers are recessed with respect to the field emitter layer so that a gap is present between the field emitter layer and the rod. The layered rod may be operated as an electron source within a vacuum tube by applying a positive bias to the rod with respect to the field emitter material and applying a higher positive bias to an anode opposite the rod in the tube. Electrons will accelerate to the charged anode and generate soft X-rays.

Abstract translation: 一种用于制造电子源的操作和处理方法。 导电棒被绝缘层覆盖，例如通过将棒浸入绝缘溶液中。 然后将杆用场发射体材料覆盖以形成层状导电棒。 杆也可以被第二绝缘材料覆盖。 接下来，从杆的端部去除材料，并且绝缘层相对于场发射极层凹陷，使得在场发射极层和杆之间存在间隙。 层叠的杆可以通过相对于场致发射体材料向杆施加正偏压并且向与管中的杆相对的阳极施加更高的正偏压而在真空管内作为电子源来操作。 电子将加速到带电阳极并产生软X射线。

公开(公告)号：US20040072494A1

公开(公告)日：2004-04-15

申请号：US10681288

申请日：2003-10-09

Inventor： Masayuki Nakamoto

IPC: H01J009/24 ,  H01J001/62

CPC classification number: B82Y30/00 ,  B82Y10/00 ,  H01J1/304 ,  H01J9/025 ,  H01J2201/30403 ,  H01J2201/30469 ,  H01J2201/319 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/842 ,  Y10S977/939 ,  Y10T428/30 ,  Y10T428/31678

Abstract: A field emission type cold cathode device comprises a substrate, and a metal plating layer formed on the substrate, the metal plating layer contains at least one carbon structure selected from a group of fullerenes and carbon nanotubes, the carbon structure is stuck out from the metal plating layer and a part of the carbon structure is buried in the metal plating layer.

公开(公告)号：US06515407B1

公开(公告)日：2003-02-04

申请号：US09141697

申请日：1998-08-28

Applicant: John M. Macaulay

Inventor： John M. Macaulay

IPC: H01J102

CPC classification number: B82Y10/00 ,  H01J1/3042 ,  H01J3/022 ,  H01J9/025 ,  H01J2201/30403 ,  H01J2201/30457 ,  H01J2201/319

Abstract: A gated filament structure for a field emission display includes a plurality of filaments. Included is a substrate, an insulating layer positioned adjacent to the substrate, and a metal gate layer position adjacent to the insulating layer. The metal gate layer has a plurality of gates, the metal gate layer having an average thickness “s” and a top metal gate layer planar surface that is substantially parallel to a bottom metal gate layer planar surface. The metal gate layer includes a plurality of apertures extending through the gates. Each aperture has an average width “r” along a bottom planar surface of the aperture. Each aperture defines a midpoint plane positioned parallel to and equally distant from the top metal gate layer planar surface and the bottom metal gate layer planar surface. A plurality of filaments are individually positioned in an aperture. Each filament has a filament axis. The intersection of the filament axis and the midpoint plane defines a point “O”. Each filament includes a filament tip terminating at a point “A”. A majority of all filament tips of the display have a length “L” between each filament tip at point A and point O along the filament axis where, L≦(s+r)/2.

Abstract translation: 用于场致发射显示器的门控灯丝结构包括多个灯丝。 包括衬底，邻近衬底定位的绝缘层以及与绝缘层相邻的金属栅极层位置。 金属栅极层具有多个栅极，金属栅极层具有平均厚度“s”以及基本上平行于底部金属栅极层平面的顶部金属栅极层平坦表面。 金属栅极层包括延伸通过栅极的多个孔。 每个孔具有沿着孔的底部平坦表面的平均宽度“r”。 每个孔限定平行于并等距离顶部金属栅极层平面和底部金属栅极层平面的中点平面。 多个细丝单独地定位在孔中。 每根灯丝都有一个灯丝轴线。 灯丝轴和中点平面的交点定义点“O”。 每个细丝包括终止于“A”点的细丝末端。 显示器的所有灯丝尖端的大部分在点A处的每个灯丝尖端和灯丝轴线处的点O之间具有长度“L”